Supplementary Material Plasmonic nanohelix metamaterials with tailorable giant circular dichroism J. G. Gibbsa) A. G. Mark, S. Eslami, P. Fischer Max Planck Institute for Intelligent Systems, Heisenbergstr. 3, 70569 Stuttgart, Germany Table of Contents Notes: (S1) Block copolymer micellar lithography ....................................................................................2 (S2) Helix fabrication ......................................................................................................................2 (S3) SEM images .............................................................................................................................3 (S4) Circular dichroism and optical rotary dispersion measurements ............................................3 (S5) Relationship between helix pitch and helix major radius .......................................................4 (S6) DDSCAT calculations..............................................................................................................4 (S7) SEM images of separations .....................................................................................................4 (S8) Geometrical seeding .................................................................................................................6 (S9) Individual polarization extinction coefficients ........................................................................6 (S10) ORD for spacing experiment .................................................................................................6 (S11) Author contributions ..............................................................................................................7 (S12) References ..............................................................................................................................8 Figures: (S1) ..................................................................................................................................................2 (S2) ..................................................................................................................................................2 (S3) ..................................................................................................................................................3 (S4) ..................................................................................................................................................3 (S5) ..................................................................................................................................................4 (S6) ..................................................................................................................................................4 (S7) ..................................................................................................................................................5 (S8) ..................................................................................................................................................6 (S9) ..................................................................................................................................................6 a) gibbs@is.mpg.de 1 Note S1: Block copolymer micellar lithography Hexagonally arranged and separated Au nanodot patterns on Si(100) and glass substrates were produced by block copolymer micellar nanolithography (BCML), details of which are described in detail elsewhere.1,2 The patterns consist of well-spaced (~50-100 nm separation), roughly hexagonally arranged Au nanodots of ~15 nm in diameter and ~ 6 nm in height. Ideally the nanodots should be uniformly sized and spaced in a hexagonal manner, but naturally small imperfections are inevitable. A top-view SEM of the patterned substrate is shown in Figure S1. Fig. S1: Patterned Si(100) substrate with the BCML lithography process. Scale bar 100 nm. Note S2: Helix fabrication We first start with micellar lithography-patterned Si(100) wafers or glass cover slips as shown in Figure S1. These (a) nanodots serve as the seeding points for growth. The initial seed pattern dictates helix spacing and the seed size affects the final helix wire radius, or minor radius. Next, the substrate is placed in a vacuum chamber (~10-7 mbar) and positioned in a manner so that the substrate surface normal makes a very oblique angle (~85°) with the material incidence direction shown by the lower arrow in Figure S2 (a). The large angle ensures that the growth of material will be restricted to the nanodots on the substrate surface due to the shadowing effect.3,4 As is schematically indicated in Figure S2 (a), the substrate rotates during deposition as is (b) necessary for helix formation. The rate at which the motor spins is controlled by a computer which relates the amount of material being deposited to the angular frequency of the spinning substrate; this is the key to forming the helices Fig. S2: (a) Schematic of presented in this Letter. The ratio of material thickness to the motor-controlled rotation rate dictates the morphology of the helices, i.e. helix substrate holder; (b) pitch, P, and major radius, a. This deposition technique is tilted view SEM of often called glancing angle deposition (GLAD).3-5 It should example helices. Scale be noted that the substrate must be patterned before bar 100 nm. deposition, and for materials with high adatom surface mobilities such as Au, it is necessary that the substrate temperature to be substantially lowered; in our system the substrate is contacted to a dewar of ~77 K to reduce this migration of adatoms. An example cross-sectional SEM image ~100 nm tall Cu/Ag nanohelices on the wafer is shown in Figure 2 (b). 2 Note S3: SEM images (a) Figure S3 shows cross(b) section SEM images of the five samples of Cu (c) nanohelix arrays with various pitch; the length is (d) held constant at ~100 nm. It is clear from Figure S3 that the morphologies are (e) different for each pitch, P = 20, 40, 60, 80, and 100 nm Fig. S3 Cross-section SEM images of 5 different pitch sizes in Figures S3 (a)-(e), for Cu nanohelices. respectively. The length of the helix arrays is held constant in order to reduce effects of broadening of the wire radius, r, which is typically seen with GLAD films. Note S4: Circular dichroism and optical rotary dispersion measurements α Circular dichroism (CD) is measured both by a Jasco 800 spectrometer which is typically used for molecular spectroscopy. It operates with a photoelastic modulator which switches from LCP to RCP (~50 kHz). We also measure CD statically by directly measuring transmission of both LCP and RCP, then taking the difference between the two and dividing by the total transmission given by the following equation TRCP TLCP / TRCP TLCP . Measurements are made with an Fig. S4: Helix major Ocean Optics 2000 spectrometer; polarization states are diameter as a generated with a linear polarizer oriented at ±45° with respect to function of helix the fast axis of an achromatic (400-800 nm) quarter-wave plate. pitch for Cu helices. ORD was measured by passing linearly polarized light through the sample, then rotating another polarizer through a series of angles, and fitting the photocurrent of a photomultiplier tube (PMT) corresponding to the light intensity at a constant voltage. These data were fitted to a I cos 2 curve using Matlab to find the minima, i.e. when the polarizers are crossed, where θ is the respective angle between the two polarizers. A diagram showing how ellipticity is defined for the CD measurements with the Jasco CD spectrometer is shown in Fig. S4, where the tangent of ellipticity is the ratio of the ellipse's semi-minor axis to its semi-minor axis. 3 80 Major Diameter (nm) Note S5: Relationship between helix pitch and helix major radius As stated in the main text, for the GLAD process, there is a linear relationship between the pitch, P, and the major radius, a. The relationship is derived by taking multiple measurements from cross-section SEM images, like the ones in Figure S3, with ImageJ. Figure S5 shows the relationship of a 0.3P0 . 70 60 50 40 30 20 20 40 60 80 100 Pitch (nm) Fig. S5: Helix major diameter as a function of helix pitch for Cu helices. Note S6: DDSCAT calculations Since Maxwell’s equations for arbitrarily-shaped small particles have no general solution, numerical simulations are required to perform analysis on the absorption and scattering of light in the VIS-NIR. We implement a FORTRAN package available from B.T. Draine and P.J. Flatau called DDSCAT6 to calculate scattering and absorption of our nanohelices in the discrete-dipole approximation (DDA). It is necessary to provide appropriate locations and polarizabilites for DDA calculations. DDSCAT returns the extinction coefficient, Qext, which is appropriate to compare to our data as the total extinction is actually measured. The scattering cross section is 2 given by Qaeff in which aeff is the effective radius of the target. An example geometry used in the calculations is shown in Fig. S6. Note S7: SEM images of separations Figure S7 shows SEM top-view images of the five nanodot separations presented in the text. The series shows SEM, each image's corresponding FFT, and the measured separations for each spacing, shown on the right side of the figure. The purpose of the figure is to show that the spacing of the nanodot seed patterns correspond to an increase in helix spacing, as expected, until reaching around φ ~ 80 nm when the seeding begins to fail and helices begin forming between seeding points. The corresponding spectra and descriptions presented in the main text describes how the optical density increases for φ>80 and the reason can be seen here in this figure. The seeding is only effective for φ ~ 50-80 nm, although in this range, varying the spacing does work well, giving another way of tuning the optical activity of our nanohelix-arrays. 4 Fig. S6: Helix shape used discrete dipole approximation. nm nm nm nm nm Fig. S7 SEM top view of various separations shown with FFT of the images. The measured separations are shown on the right. 5 Note S8: Geometrical seeding 0.7 Trans. (%) The following presents geometry 53 nm considerations of the deposition 0.6 technique, which relies on geometrical shadowing. Minimum 0.5 effective separations have been calculated as h tan d , in 0.4 which h is the seed height, γ in this case is the deposition angle (usually RCP α, here not the ORD angle), and d is 0.3 LCP the diameter of the seed.7 For 400 500 600 700 800 spherical nanodots in the main text 8 with h ~6 nm, d ~14 nm, and a / nm Fig. S8: total transmission for RCP and deposition angle of 85°, the above LCP for the φ = 53nm spacing substrate 83 nm. analysis suggests showing extinction of RCP to LCP is Although helix formation according greater for left-handed helices; to these numbers should still be restricted to the seeds even for φ = 81 nm, we see the surface number density of helices is actually higher than the nanodot seed density, which is consistent with top-view SEM images in Note S7. This discrepancy is explained by variations in h, d, φ, and γ, and the material that inevitably deposits between seeds at high φ. We therefore conclude that for shadowing growth on h ~6 nm seeds, φ ~ 80 nm is an upper limit. However, h can be adjusted in BCML by varying the polymer molecular weight. Note S9: Individual polarization extinction coefficients Note S10: experiment ORD for spacing ORD measurements for each spacing presented in the main text are shown in Figure S9. ORD(deg.) Figure S8 shows the individual extinction coefficients for RCP and LCP showing the overall magnitudes of the two. 4 2 0 (nm) 53 62 69 76 81 -2 -4 300 400 500 600 / nm 700 800 Figure S9: ORD of the five separation for Cu/Ag nanohelix arrays. 6 Note S11: Author Contributions John Gibbs wrote the main text and supplementary material, and performed the majority of the experiments including helix fabrication and spectroscopy. Andrew Mark helped build the deposition system and contributed greatly to the fabrication set-up, implemented the use of DDSCAT in the lab, and assisted in writing. Sahand Eslami performed the majority of the simulation work with the DDSCAT software. Peer Fischer assisted with the writing of the main text and is the PI of the laboratory. 7 Note S12: References (1) (2) (3) (4) (5) (6) (7) (8) Spatz, J. P.; Mössmer, S.; Hartmann, C.; Möller, M.; Herzog, T.; Krieger, M.; Boyen, H.-G.; Ziemann, P.; Kabius, B. Langmuir 1999, 16, 407. Glass, R.; Möller, M.; Spatz, J. P. Nanotechnology 2003, 14, 1153. Robbie, K.; Brett, M. J. Journal of Vacuum Science & Technology a-Vacuum Surfaces and Films 1997, 15, 1460. Zhao, Y. P.; Ye, D. X.; Wang, G. C.; Lu, T. M. Nano Letters 2002, 2, 351. Hawkeye, M. M.; Brett, M. J. Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 2007, 25, 1317. Draine, B. T.; Flatau, P. J. Journal of the Optical Society of America a-Optics Image Science and Vision 1994, 11, 1491. Jensen, M. O.; Brett, M. J. Ieee Transactions on Nanotechnology 2005, 4, 269. Glass, R.; Moller, M.; Spatz, J. P. 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