Copyright 1999 Society of Photo-Optical Instrumentation Engineers. This paper was published on the website accompanying Philips Research Password, and is made available as an electronic reprint with permission of SPIE. Single print or electronic copies for personal use only are allowed. Systematic or multiple reproduction, or distribution to multiple locations through an electronic listserver or other electronic means, or duplication of any material in this paper for a fee or for commercial purposes is prohibited. By choosing to view or print this document, you agree to all the provisions of the copyright lawprotecting it. AgInSbTe materials for high-speed phase change recording H.J. Borga,*, P.W.M. Bloma, B.A.J. Jacobsa, B. Tiekea, A.E. Wilsonb, I.P.D. Ubbensb, and G.F. Zhoua a Philips Research Laboratories, Prof. Holstlaan 4, 5656 AA Eindhoven, The Netherlands Philips Optical Disc Technology Centre, Glaslaan 1, 5616 LD Eindhoven, The Netherlands * corresponding author: phone: +31-40-2744287, fax: +31-40-2744282, e-mail: borg@natlab.research.philips.com b 1 Introduction Currently applied phase change rewritable optical discs are mainly based on two families of phase change materials, i.e. pseudo-binary alloys on the GeTe-Sb2Te3 tie-line (here referred to as GeSbTe) or quaternary AgInSbTe alloys. The choice for one of these materials is mostly governed by the specific requirements of the application. GeSbTe-materials are preferred for land-groove recording formats, have fast crystallization properties (crystallization times down to 20 ns resulting in data rates up to 35 Mbit/s) and generally exhibit an excellent direct overwrite (DOW) cyclability of more than 10 5 times [1]. AgInSbTealloys are typically used for groove-only formats, where the lower radial density must be compensated by a higher linear density to achieve the same overall data capacity on the disc. The overwrite cyclability of these materials is typically one to two orders of magnitude lower than that of GeSbTe, but still sufficient for video recording applications. Based on CD-RW experience, application of AgInSbTe for high-speed recording has been doubted in the past. However, a data rate over 22 Mbit/s has recently been reported for DVD 4.7 GB recording conditions [2]. In this work we evaluate the prospects of AgInSbTe materials for high-speed phase change recording applications, at recording wavelengths λ around 650 nm and 400 nm in combination with numerical apertures NA of 0.60 and 0.85. Jitter after 10 DOW [% of Tch] 2 AgInSbTe versus GeSbTe materials: recording density The AgInSbTe materials that are being used have compositions close to the eutectic Sb69Te31, in which some 14 of the Te is replaced by Ag and In. During re-crystallization a number of crystalline phases are formed [3], complicating AgInSbTe detailed studies on the kinetics of the re-crystallization GeSbTe process. Interestingly, transmission electron microscopy 12 studies and static tester experiments indicate that the erase process of amorphous marks proceeds via growth of the surrounding crystalline edge to the center of the mark, rather than by nucleation and subsequent growth (as in the 10 stoichiometric GeSbTe compositions). Consequently, the marks written in AgInSbTe-based media have a welldefined shape with sharp edges, leading to intrinsically lower jitter values than observed for GeSbTe-based media. 8 As jitter is the limiting factor in increasing the linear density, the AgInSbTe-materials allow a higher linear density than GeSbTe. Figure 1 shows the average multi-track jitter values as a function of bit length, under DVD recording conditions, 6 for typical AgInSbTe and Ge2Sb2Te5-media. Considering a bottom jitter value of 9% as limit, the maximum linear 0.24 0.26 0.28 0.30 0.32 0.34 0.36 density of GeSbTe amounts 0.30 μm/bit, whereas AgInSbTe Bit length [m] allows a data bit length of 0.267 μm, equal to that in DVD read-only. Combining the data bit length of 0.267 μm with Figure 1. Average jitter after 10 DOW cycles as the DVD read-only track pitch of 0.74 μm, a user capacity a function of linear density, under DVD recording of 4.7 GB has been achieved in a DVD-compatible grooveconditions (λ=658 nm, NA=0.60, EFMplus code), only format (DVD+RW 4.7 GB). for GeSbTe and AgInSbTe-based media. Contact person: Herman Borg, borg@natlab.research.philips.com Philips Research Complete erasure time [ns] 3 AgInSbTe versus GeSbTe materials: crystallization rate The maximum data rate that can be achieved in phase 100 change recording depends strongly on the crystallization rate of the amorphous phase change material. Valuable AgInSbTe information on the possible recording speed of a material GeSbTe can be obtained by studying the re-crystallization (erase) 80 process of amorphous marks in a static tester setup. During these experiments, amorphous marks are written by using high-power laser pulses, and these marks are subsequently 60 erased (re-crystallized) by applying erase pulses of varying power and pulse width. The minimum time required to completely re-crystallize an amorphous mark is the so-called 40 complete erasure time (CET). Figure 2 shows static tester results for typical AgInSbTe- and GeSbTe-based media. In this experiment the size of the amorphous marks was 20 changed by varying the write power P write in fixed steps relative to the threshold power P melt-threshold for melting the phase change material, and the complete erasure times were measured as described above. For GeSbTe-media, where re0 crystallization proceeds via nucleation and growth, the CET 1.0 1.1 1.2 1.3 1.4 1.5 1.6 appears to depend only marginally on the size of the Amorphous mark size (Pwrite/Pmelt-threshold) amorphous mark. Here, the re-crystallization rate is mainly determined by the nucleation probability per unit area. In the case of AgInSbTe, however, the CET increases rapidly with Figure 2. The effect of the amorphous mark size increasing mark size. A simple explanation for this behavior on its complete erasure time, for Ge2Sb2Te5 and is that, in the absence of nucleation within the mark, the AgInSbTe materials. Experiments were performed crystalline edge has to grow over a distance equal to the at 658 nm wavelength and a numerical aperture radius of the mark to completely erase it. of 0.60. 4 Recording speed of AgInSbTe materials at different laser spot size The observed dependence of the re-crystallization time on the size of the written amorphous mark supports the hypothesis that the maximum data rate that can be obtained with a particular AgInSbTe material depends strongly on the spot size of the focussed laser beam. To verify this, we performed a series of recording experiments at different laser wavelengths and numerical apertures. For this purpose, 4-layer recording stacks of the rapid-cooling structure type (ZnS:SiO2/AgInSbTe/ZnS:SiO2/Al-alloy) were sputter-deposited onto 1.2 mm and 0.6 mm thick polycarbonate (PC) substrates. For recording experiments at NA=0.85, the recording stack was deposited onto a 1.1 mm PC substrate in reverse order, and a 0.1 mm thick cover layer was spin-coated onto the disc [4]. The structure (materials and thickness of the layers) of the various stacks was kept the same, for a fair comparison of the recording performance at varying spot size. Also, the recording conditions were kept as comparable as possible. The linear density was scaled by the laser spot diameter d (d=1.22*λ/NA), using the density of the Digital Video Recording (DVR) system as reference [5]. The recording strategy consists of 0.5T write pulses, with a first pulse length of 1T and a cooling pulse length of 0.5T: this simple strategy gives good results under all spot size conditions. The most important recording parameters are summarized in Table 1. Table 1. Recording conditions and results CD-RW light path DVD light path DVR light path Wavelength [nm] 780 658 658 Numerical aperture 0.50 0.60 0.85 Substrate thickness [mm] 1.2 0.6 0.1 Data bit length [μm] 0.431 0.301 0.21 Max. linear velocity [m/s] 9.6 9.8 9.2 Max. user data rate [Mbit/s]2 18 26 35 1 scaled by spot size from DVR conditions 2 here reported data rates are for a (1,7) RLL code with rate 2/3 and a format efficiency of 80% Contact person: Herman Borg, borg@natlab.research.philips.com Philips Research The maximum data rate at a certain spot size was determined as the rate at which the jitter after 10 DOW cycles was equal to 10%. The exact value of this jitter level has no significant effect on the result, because the jitter 50 steeply increases at higher recording speeds. The reported user data rate values are based on a (1,7) RLL code with rate 40 2/3, taking into account a format efficiency of 80%. Figure 3 shows the measured maximum data rate of a AgInSbTe-based recording stack as function of the inverse 30 spot diameter. The maximum data rate increases 658 nm NA=0.85 significantly at decreasing spot size, in accordance with the hypothesis. Interestingly, recording experiments with 20 658 nm GeSbTe-based media at 658 nm wavelength do not exhibit NA=0.6 an increase in data rate in going from NA=0.60 to NA=0.85, 780 nm 0 400 nm also in line with the static tester results. 10 NA=0.5 NA=0.85 It is tempting to speculate about the data rates that can be 0 achieved with these materials at 400 nm wavelength and an 0 NA of 0.85. On the basis of our experience and the above 0.0 0.2 0.4 0.6 0.8 1.0 1.2 1.4 1.6 1.8 results, the speed that can be achieved with GeSbTe-1 -1 materials is mainly determined by the possibilities to further (spot diameter) [m ] increase the nucleation probability of the amorphous Figure 3. The maximum user data rate of a material (while at the same time the archival life stability of AgInSbTe-based recording stack as function of the amorphous state must be maintained at a sufficient level) the inverse laser spot diameter d -1=NA/(1.22λ). and the timing accuracy of the write electronics. No Details on the recording conditions are listed in significant correlation between the laser spot size and data Table 1. rate has been found for GeSbTe-media, so that similar data rates are expected at red and blue wavelengths. For AgInSbTe, reduction of the spot size of the laser has an important effect on the maximum data rate. Linear extrapolation of the curve in Figure 3 to a spot diameter corresponding with λ=400 nm and NA=0.85 suggests that data rates above 50 Mbit/s can be achieved with conventional 4-layer AgInSbTe-media and a straightforward recording strategy. Optimization of the recording material composition, the stack structure, and the write strategy will further add to the data rate. The justification of these speculations is the subject of ongoing research. Nevertheless, the use of AgInSbTe-materials or alternative materials with growth-determined re-crystallization kinetics will become increasingly attractive at decreased laser spot size. Maximum user data rate [Mbit/s] 60 5 Conclusions AgInSbTe materials are currently the preferred materials for groove-only phase change recording formats, because they allow higher linear densities than stoichiometric GeSbTe-compositions. The intrinsically low jitter of AgInSbTe is attributed to the mechanism by which amorphous marks are erased, i.e. via growth of the crystalline edge towards the mark center, resulting in marks with well-defined edges. The nature of this re-crystallization process also has an effect on the time required to erase marks of different size: the re-crystallization time of amorphous marks decreases with decreasing mark size. As a result, the maximum data rate of a particular AgInSbTe recording stack increases with decreasing laser spot size. On the basis of our experiments, we expect that at 400 nm wavelength and an NA of 0.85 data rates over 50 Mbit/s will be realized with conventional 4-layer AgInSbTe recording stacks and a simple recording strategy. References [1] G.F. Zhou and B.A.J. Jacobs, “High performance media for phase change optical recording”, Proc. ISOM’98, to be published in Jpn. J. Appl. Phys. 38 (1999). [2] K. Ito et al., “The capability of AgInSbTe phase change material for high speed rewritable 4.7 GB media”, Proc. ISOM’98, to be published in Jpn. J. Appl. Phys. 38 (1999). [3] H. Iwasaki et al., “Completely erasable phase change optical disc: application of AgInSbTe mixed-phase system for rewritable CD”, Jpn. J. Appl. Phys. 32 (1993) 5241. [4] K. Yamamoto et al., “0.8 Numerical aperture two-element objective lens for the optical disc”, Jpn. J. Appl. Phys. 36 (1997) 456. [5] T. Narahara et al., “Optical disc system for Digital Video Recording”, Technical Digest of ISOM/ODS’99. Contact person: Herman Borg, borg@natlab.research.philips.com Philips Research