Surface Plasmon Coupling Efficiency from Nanoslit Apertures to Metal-Insulator-Metal Waveguides Haifeng Hu 1,2, Xie Zeng2, Lina Wang1, Yun Xu1*, Guofeng Song1, Qiaoqiang Gan2†, 1. Institute of Semiconductors, Chinese Academy of Science, Beijing, China, 100083 2. Department of Electrical Engineering, The State University of New York at Buffalo, Buffalo, NY 14260 Supporting Material Coupled mode method (CMM) formalism for the analysis of the slit-MIM network In this section, we derive the CMM formalism [S1] to solve the scattering problem shown in Fig.1(a). To simplify the analytical model, we assume that the metal is a perfect electric conductor (PEC). The electromagnetic (EM) fields are expanded on the eigenmodes of each region as follows: In the vertical metal-insulator-metal (MIM) slot region, the EM fields can be expressed as a linear combination of various modes supported by the MIM waveguide [see Eq.(S1)]: Ex x,0 Ex,TM 0 x R Ex , x (S1a), H y x,0 H y ,TM 0 x R H y , x (S1b). To simplify the calculation, only the TM0 mode in the vertical slot is considered (i.e. the single mode assumption). Therefore the EM field can be expressed as follows: Ex x, 0 Ex ,TM 0 x RTM 0 Ex ,TM 0 x (S2a), H y x, 0 H y ,TM 0 x RTM 0 H y ,TM 0 x (S2b). In the region of the horizontal MIM waveguide, the eigenmodes can be treated as plane waves towards all directions. The total fields in the horizontal MIM structure can be described by Eq. (S3). Ex x, z dkEx ,k x ak exp ik z z bk exp ik z z 1 (S3a) H y ( x, z ) dkH y ,k x ak exp ik z z bk exp ik z z (S3b) Here k and kz=(εdω2/c2-k2)1/2 are components of the wave vector along x-direction and z-direction, respectively. By matching the boundary conditions on the two interfaces of the horizontal MIM waveguide, the scattering coefficients, RTM0, ak and bk can be obtained using Eq. (S4), where G2 is defined as the coupling term at the opening of the vertical slit, which can be calculated by Eq.(S5). RTM 0 G2 i G2 i (S4a) ak w exp ik z d sin c kw / 2 2 sin k z d GT i (S4b) bk exp ik z d w sin c kw / 2 2 sin k z d GT i (S4c) G2 wk 0 cot k2 k 2 d sin c 2 kw / 2 k2 k 2 dk (S5) By substituting ak and bk into Eq.(S3), the scattering fields in the horizontal MIM waveguide can be obtained. As will be discussed in Section 3, these scattering fields will be employed to determine the coupling efficiency of SPPs. Modal analysis on MIM waveguides It is known that MIM waveguides support two kinds of bound modes in the core layer, i.e. plasmonic modes with the exponential nature and photonic modes with the trigonometric behavior [S2-S4], which can be obtained by solving Maxwell’s equations. At the wavelength of 1μm, the dielectric constants of gold and air are εm=-46.5+3.5i and εd=1. The modal propagation constant, β, can be calculated by solving the eigenvalue equation of the MIM waveguide using Eq.(S6). tan d w 2T , T d m / m d 1 T 2 where w is the width of the MIM waveguide, d k2 d 2 1/2 (S6) and m 2 k2 m 1/2 . kω=ω/c is the wave vector in the vacuum. Moreover, the field of the plasmonic mode can be described in Eq. (S7)[S4]. H y , sp exp m x w / 2 A exp d x w / 2 B exp d x w / 2 C exp m x w / 2 2 x w / 2 w / 2 x w / 2 x w/ 2 (S7a) Ex , sp exp m x w / 2 k m A B exp d x w / 2 exp d x w / 2 k d k d C exp m x w / 2 k m x w 2 w w x 2 2 w x 2 (S7b) It should be noticed that the MIM waveguide is along the z-axis in Eq.(S7). The coefficients, A, B and C, can be obtained by matching the boundary conditions at the two interfaces of the MIM waveguide, i.e. at x=-w/2 and x=w/2. Based on Eq. (S6) and (S7), the propagation constant and the field distribution of the mode supported in the MIM waveguide can be calculated. For example, when w=300nm, only one mode can be calculated using Eq. (S6) in the MIM waveguide, whose propagation constant is β=6.7809+0.0194i. By substituting the value of β into Eq. (S7), the field of the plasmonic mode can be modeled. As shown in Fig. S1(a), one can see that the modal field (Hy) can penetrate into the metallic cladding layers. The penetration depth, δ, is defined as the depth where the field density has diminished to 1/e of the value at the surface. According to Eq. (S7), the penetration depth equal to 1/γm [see the spacing between the black and gray dashed lines in Fig.S1(a)]. When we employ the analytical formalism [i.e. Eq. (S3-S5)] to model the scattering process at the T-junction, the geometrical width of the vertical slit, w, is replaced by the effective width, weff=w+2δ to modify the PEC approximation. In this case, as shown by Fig. 1(b) in the main text, the modeled dependence of the coupling efficiency on the slit width, w, has a better fit to the finite difference time domain (FDTD) modeling results compared with the model employed in the previous pure SPP picture [S7] in visible and near infrared spectral regions. o demonstrate the modal structure of the MIM waveguide further, the geometric dispersion curves of TM0 and TM1 modes are shown in Fig. S1(b). The plasmonic modes and photonic modes are separated by the light line (see the dashed line): i.e. plasmonic modes are 1/2 1/2 in the region of k d , and photonic modes are in the region of k d . In addition, when w<450nm [see the red arrow in Fig.S1(b)], only the plasmonic mode can be supported by this MIM waveguide. Fig. S1 (a) The Hy component of the TM0 mode when w=300nm (blue line). The dashed black lines represent the metallo-dielectric interfaces. The spacing between the black and gray lines is 3 the penetration depth. (b) The geometric dispersion of propagating constants in the MIM waveguide. The blue and red lines represent the TM0 and TM1 modes, respectively. The dashed line is the light line. Orthogonality condition for absorbing waveguides According to the reciprocity theorem of Maxwell’s equations, every two modes in the absorbing waveguide should satisfy the unconjugate general form of orthogonality condition, as described in Eq.(S8) [S5]. Ez, H y, H y, Ez, dz 0 , for (S8) Here we use and to represent each two modes in the waveguide. The ‘+’ and ‘-’ are used to distinguish the forward-propagating and backward-propagating modes along the x-axis [S6]. The total EM field in the MIM waveguide can be expressed as: Ez x, z Ez, sp x, z Ez, sp x, z c E x, z sp H y x, z H y, sp x, z H y,sp x, z z, c H x, z sp y, (S9a) (S9b) The first two terms on the right hand side of Eq.(S9a) and (S9b) correspond to the filed components of the plasmonic mode supported in the MIM waveguide [i.e. TM0 mode in Fig. S1(b)] which can be obtained by Eq.(S7), and the last term describes the contribution of higher order modes. However, it should be noticed that Eq.(S7) is used to describe the vertical MIM waveguide, while Ez,sp and Hy,sp in Eq.(S9) represent the field components of plasmonic mode in the horizontal waveguide. Based on the expansion of the total filed, Ez and Hy, described in Eq. (S9), one can get Ez x, z H y, sp H y x, z Ez, sp dz ( Ez, sp H y, sp H y, sp Ez, sp )dz c sp Ez, H y, sp H y, Ez, sp dz (S10) Due to the orthogonality condition described in Eq.(S8), the last term on the right hand side of Eq.(S10) is zero. Consequently, can be expressed in a compact expression as shown in Eq.(S11). x Ez x, z H y , sp H y x, z Ez ,sp dz E z , sp H y , sp H y , sp E z , sp dz (S11) According to Eq. (S3) listed in Section 1, the total fields, Ez(x,z) and Hy(x,z), in the horizontal MIM waveguide can be obtained. Consequently, One can use Eq.(S11) (i.e. Eq. 1 in the main text) to estimate the intensity of the surface plasmon polaritons (SPP) in the MIM waveguide base on the analytical method. 4 The coupling efficiency of the T-junction with the finite-length slit In the T-junction with a finite length input slit shown in Fig. S2(a), the coupling mechanism can be explained by the combination of four basic scattering processes as illustrated in Fig.S2(b)-(d). In the vertical slot, the TM0 mode is reflected back and forth between the two ends of the slot. Similar with the transmission of asymmetric FP etalon [S7], the total coupling efficiency can be expressed by Eq.(2) in the main text, where the parameters ηin, R1, R2 and ηinf are related to the processes described in Fig. S2(b)-(d) respectively. Here we consider these four basic processes separately: (1) The transmission through the interface between the slot and the semi-infinite free space is shown in Fig.S2(b). The coupling efficiency from the normal incident plane wave impinging on the opening of the input slit to the TM0 mode is ηin=|T1|2. (2) The reflection on the interface between the slit and the semi-infinite free space is shown in Fig.S2(c), with a reflection coefficient of R1. (3) The reflection on the interface between the input slit and the horizontal MIM waveguide, R2, has been derived in Section 1 [i.e. RTM0 in Eq.(S4a)]. (4) The coupling efficiency of the T-junction with the infinitely long vertical slot, ηinf=|α+|2+|α-|2, has been calculated in Fig.1(b) analytically. Considering all these scattering coefficients, an analytical formalism can be developed, as described by Eq. (2) in the main text. Fig. S2 (a) The multi-scattering process in the T-junction with the finite length input slit. (b) The transmission process at the interface between the free-space and the input slit. (c) The reflection process at the interface between the free-space and the slit. (d) The reflection (the solid green arrow) and the transmission process (the dashed green arrows) at the interface between the slit and the horizontal MIM waveguide. Reference [S1] F. J. Garcia-Vidal, L. Martin-Moreno, T. W. Ebbesen and L. Kuipers, Light passing through subwavelength apertures, Rev. Mod. Phys. 82, 729 (2010) [S2] B.Prade, J. Y. Vinet, and A. 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