Orientation fiducial axis
[001] ± 1.0o
Secondary orientation
fiducial mark
Tertiary orientation
fiducial mark
Wafer back surface
text
FAQ boundary
Wafer periphery
Edge profile region
SEMI T7 matrix code symbol
Primary orientation fiducial mark
Note 1: Viewed from the back surface the reference point of the primary orientation fiducial mark is located on the orientation
fiducial axis (θ = 270°) at r = 224.1 ± 0.1 mm.
Note 2: The reference point of the secondary orientation fiducial mark is located on the radius 120.0° ± 0.1° clockwise from the
orientation fiducial axis (when viewed from the back surface, θ = 30°) at r = 224.1 ± 0.1 mm.
Note 3: The reference point of the tertiary orientation fiducial mark is located on the radius 119.0° ± 0.1° counterclockwise from
the orientation fiducial axis (when viewed from the back surface, θ = 151°) at r = 224.1 ± 0.1 mm.
Note 4: The reference point of the SEMI T7 matrix code symbol is located on the radius 5.0° ± 0.1° counterclockwise from the
orientation fiducial axis (when viewed from the back surface, θ = 265°) at r = 223.95 ± 0.15 mm.
Figure 6
Locations of the Three Orientation Fiducial Marks and the Two Dimensional Matrix Code Symbol of SEMI
T7 in Category 1.16.3 450 mm Diameter Wafers
This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline.
Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document
development) activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.
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Orientation fiducial axis
[011] ± 1.0°
Wafer back surface
The reference point of the
primary orientation
fiducial mark is located at
r = 224.1 ± 0.1 mm, on the
the orientation fiducial axis
The T7 code symbol reference
point is located at r = 223.95 ±
0.15 mm, on the radius 5.0° ±
0.1° CCW from the orientation
fiducial axis
FQA boundary
Primary orientation fiducial mark
Wafer periphery
Reference point
Edge profile region
Code symbol reference point
a. Locations of Primary Orientation Fiducial Mark and SEMI T7 Identification Mark on 450 mm Wafers
To wafer center
FQA boundary
0.60 ±
0.05 mm
1.20 ± 0.05 mm
Reference point
2.40 ± 0.05 mm
Edge profile region
Nominal wafer periphery
b. Primary Orientation Fiducial Mark Dimensions
Figure 7
Primary Orientation Fiducial Mark Viewed from the Back Surface
This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline.
Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document
development) activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.
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Edge profile region
Wafer periphery
Wafer back surface
Secondary orientation fiducial mark
The reference point of the
secondary orientation
fiducial mark is located at
r = 224.1 ± 0.1 mm,
on the radius located
120.0° ± 0.1° CW from
the orientation fiducial axis
FQA boundary
a. Locations of Secondary Orientation Fiducial Mark on 450 mm Wafers
To wafer center
FQA boundary
0.60 ±
0.05 mm
1.20 ± 0.05 mm
Reference point
2.40 ± 0.05 mm
Edge profile region
Nominal wafer periphery
b. Secondary Orientation Fiducial Mark Dimensions
Figure 8
Secondary Orientation Fiducial Mark Viewed from the Back Surface
This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline.
Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document
development) activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.
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Edge profile region
Wafer back surface
Wafer periphery
Tertiary orientation fiducial mark
The reference point of the
tertiary orientation
fiducial mark is located at
r = 224.1 ± 0.1 mm,
on the radius located
119.0° ± 0.1° CCW from
the orientation fiducial axis
FQA boundary
a. Locations of Tertiary Orientation Fiducial Mark on 450 mm Wafers
To wafer center
Outer periphery of FQA
0.60 ±
0.05 mm
1.00 ± 0.05 mm
Reference point
2.20 ± 0.05 mm
Edge profile region
Nominal wafer periphery
b. Tertiary Orientation Fiducial Mark Dimensions
Figure 9
Tertiary Orientation Fiducial Mark Viewed from the Back Surface
This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline.
Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document
development) activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.
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