Filter, Valve and Pipng
in semiconductor application
May 10 2011
TSMC F14 TFE3 劉易昌
Outline
Filter Introduction
 Valve Introduction
 Piping Introduction
 Q&A

Filter Introduction
What is a Filter?

A filter consists of a series
of pores (channels) of a
given size

All particles bigger than the
pore size are retained

All particles smaller than
the pore can go through
the membrane
Depth Filter Characteristics & Structure
 Relatively
thick (fractions of an inch)
 Random structure
 High particle holding capacity
 Relatively low retention efficiency
 Potential for shedding & particle
release
 Typically used as pre-filter
 High material content
 Materials: Polypropylene fiber or
fiberglass
Membrane Filter Characteristic







Relatively thin (150 microns)
Continuous polymeric sheet
Defined pore size with high retention
efficiency
High Porosity ( Track etched low porosity )
Low particle holding capacity
Typically used as final filters
Materials - PTFE, PVDF, UPE etc.
Comparison of Membrane and Depth
Filter Characteristics
Membrane
Depth
Thickness
Thinner (<150um)
Form
Continuous Polymer
Sheet
Lower
Thicker (fractions of an
inch)
Interlocked Fibers
Dirt Holding
Capacity
Retention
Higher
Efficiency
Media Migration Little
& Shedding
Material
PTFE ,UPE
PVDF etc.
Use
Final Filters
Higher
Lower
Can be high with
pulsation
Polypropylene fiber or
fiberglass
Pre Filters
Depth Filter – Graded Density




Filter is constructed by wrapping multi-layers of
fibrous non-woven media on a core
There is retention gradient along the depth of
flow direction by using different media
Larger particles retained at outer section and
smaller particle retained at inner section
Planargard : CMP1,3,5,7,9,11,13,16
Flow
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Schematic of Depth Filter
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Typical Filtration Devices: Pleated Cartridges



Filter "pack" contains membrane, plus
upstream & downstream fibrous
supports.
Supports can be a source of particles
and can prevent efficient removal of
bubbles.
Pleat pack is thermoplastically potted
to form a cartridge.
Can be made in varied lengths from 2"
to 40".
Cross
Section
of Pleats
Permeate
Flow Path
Inlet Flow Path

Filter Cartridge Holders
Inline Housing
T-Style Housing
Outlet
Inlet
Inlet
Typical
Flow Path
Typical Flow Path
Outlet
Typical Disposable Filter Assembly
outlet
Vent
Internal Filter Element
Drain
Connections : Flartek, Butt Weld, etc.
inlet
Retention Mechanisms: Sieving and Interception


In sieving (size exclusion), particles are too large to pass
though the pore structure. They are either captured on the
surface or in smaller passages inside of the structure.
For interception to occur, the particles move with the fluid
flow but touch a surface and are held there by strong
forces.
Retention Mechanisms: Adsorption
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Most particles in liquids have a negative charge and can
be captured by attraction to a positively charge spots on
the filter.
Can be a large factor in liquids with some membranes.
Retention Mechanisms: Diffusion
Actual
path
Mean
Free Path


Due to molecular motion, very fine particles move in an almost
random manner that follows a mean free path. Variations along this
path may cause the particles to come in contact with the filter
structure and be captured.
Although this is a factor in liquids, it is the largest factor for high
efficiency gas filters.
What is Pore Size Rating and Nominal
Retention?
 Pore Size Rating Definition:
the largest actual or estimated size pores or
“holes” in a filter
 Nominal Retention:
Some Fractional Retention of a particular
particle size (ex. 90%, 95%, 99%, 99.9%, etc.)
What is Pore Size Distribution?
 Pore Size Distribution Definition:
An estimate of the range and frequency of pore
sizes which make up a given filter membrane
Loose Vs Tight Distribution
Loose Distribution
Tight Distribution
• Both are 0.2 um rated
filters based on definition
of pore size rating
0.01
0.05
0.1
0.2
Pore Size (micrometers)
1.0
Effects of Particle Loading
Increase in pressure drop or reduction in retention




Smaller membrane pores are
plugged first.
Larger pores remain open
resulting in pathway for particles
to travel through
Retention decreases with heavy
loading
Decrease in retention can occur
before any noticeable pressure
drop increase
Housing Type For Cartridge Filters Chemlock
Housing
Simple Cartridge/Bowl Installation
Twist cartridge 1/4 turn
to lock
Attach bowl to head
Tighten locking ring
Micro Contamination Removal
What do we use to Remove This Undesired Matter?
 Filters
- Particle Removal
 Purifiers - Molecular Impurities
(e.g. H2O, O2, Hydrocarbon..)
Gas filters- Materials of Construction
 PTFE (Teflon)
Chemically stable to all gases
Low pressure drop
 Metal
 Stainless steel (316L Low sulfur)
Chemically stable, except in corrosives & Ozone
 Nickel
Chemically stable to most gases
Not for Ozone, CO, hydride gases (PH3, AsH3, B2H6)
 Ceramics
Chemically stable to most gases
can release organics and light metals
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Valve Introduction
What’s a valve
A valve is a device that regulates, directs or controls the flow of a fluid
(gases, liquids, fluidized solids, or slurries) by opening, closing, or
partially obstructing various passageways. Valves are technically pipe
fittings, but are usually discussed as a separate category. In an open
valve, fluid flows in a direction from higher pressure to lower pressure.
Valves may be operated manually, either by a handle, lever or pedal.
Valves may also be automatic, driven by changes in pressure,
temperature, or flow. These changes may act upon a diaphragm or a
piston which in turn activates the valve, examples of this type of valve
found commonly are safety valves fitted to hot water systems or
boilers.
More complex control systems using valves requiring automatic
control based on an external input (i.e., regulating flow through a pipe
to a changing set point) require an actuator. An actuator will stroke the
valve depending on its input and set-up, allowing the valve to be
positioned accurately, and allowing control over a variety of
requirements.
Valve type
由於閥類種類繁多無法完全列舉,一般閥類的用途如球型閥, 球閥, 栓塞閥, 蝶形
閥,閘閥,針閥等僅是流體的延續,調整或阻斷作用,而特殊閥類的用途如逆止閥,
電磁閥,排洩閥,隔離閥,空氣釋放閥等為保護設備,管路系統或操作需求。閥類的
使用主要需依流體的種類,設備及使用需求去設計安插。蒸氣,水,空氣,瓦斯,油
類等,不同的流體使用不同閥類,壓力等級和構造型式。
以下為廢水廠,電子廠,焚化爐,一般學校家庭常用閥類
球型閥(Globe Valve)可較精準調整流量依型式使用任何流體
球閥(Ball Valve) 可調整流量但不精準一般設計全開及全關上,依型式常使用
在水,空氣,瓦斯,藥劑,油類流體
栓塞閥(Plug Valve–Eccentric Plug Type) 可調整流量但不精準一般設計全開
及全關上,依型式常使用在水及污泥流體
蝶形閥(Butterfly Valve) 可調整流量但不精準,依型式常使用在水,空氣流體
閘閥(Gate Valve) 可調整流量但不精準一般設計全開及全關上, 依型式使用任
何流體
逆止閥(Check Valve)保護設備或不同流體防止逆流, 依型式使用任何流體
減壓閥(red Valve)依設備系統需求降低某部份或系統流體壓力
Valve Type and classified
Valves are quite diverse and may be classified
into a number of basic types. Valves may also
be classified by how they are actuated:
•Hydraulic
•Pneumatic
•Manual
•Solenoid
•Motor
球型閥 globe valve
球閥(Ball Valve)
栓塞閥(Plug Valve–Eccentric Plug Type)
蝶形閥(Butterfly Valve)
逆止閥(Check Valve)
A check valve, clack valve, nonreturn valve or one-way valve is a
mechanical device, a valve, which
normally allows fluid (liquid or gas)
to flow through it in only one
direction
Advantages over Ball and Gate Valves
In order to operate and seal effectively, seat
wear is inherent in most ball and gate valve
designs. When the seats eventually wear
away so does the ball or gate valve ability to
seal. Emergency sealant injection to energize
the seal most often enters the flow, potentially
damaging downstream instrumentation and or
contaminating the flow media.
In fire-safe ball and gate valves when the
primary elastomeric or plastic seals wear away
or are destroyed, metal to metal contact
between the secondary metal seal on the ball
or gate creates abrasion and costly damage to
the key sealing components.
電磁閥
•Solenoid Valve,
Pneumatic Control
Valve
A- Input side
B- Diaphragm
C- Pressure chamber
D- Pressure relief conduit
E- Solenoid
F- Output side
1.
Valve Body
2.
Inlet Port
3.
Outlet Port
4.
Coil / Solenoid
5.
Coil Windings
6.
Lead Wires
7.
Plunger
8.
Spring
9.
Orifice
The media controlled by the solenoid valve enters the valve through
the inlet port (Part 2 in the illustration above). The media must flow
through the orifice (9) before continuing into the outlet port (3). The
orifice is closed and opened by the plunger (7). The valve pictured
above is a normally-closed solenoid valve. Normally-closed valves use
a spring (8) which presses the plunger tip against the opening of the
orifice. The sealing material at the tip of the plunger keeps the media
from entering the orifice, until the plunger is lifted up by an
electromagnetic field created by the coil.
•Direct acting 2-way valves
• Two-way valves are shut-off valves with one inlet port and
one outlet port. In the de-energized condition, the core spring,
assisted by the fluid pressure, holds the valve seal on the
valve seat to shut off the flow. When energized, the core and
seal are pulled into the solenoid coil and the valve opens. The
electro-magnetic force is greater than the combined spring
force and the static and dynamic pressure forces of the
medium.
•Direct acting 3-way valves
Three-way valves have three port connections, one being the
"common" port and two valve seats. One valve seal always
remains open and the other closed in the de-energized mode.
When the coil is energized, the mode reverses. This is the
pneumatic equivalent of a single-pole single-throw electrical
switch.
•Direct acting 4-way valves
Four-way valves have four port connections and two valve
seats. When the coil is energized, one set of ports is
connected straight through to the other set of ports. In the deenergized mode, the connection is reversed.
半導體使用的一些閥件
氣動閥
電磁閥
調壓閥
手動閥
手動閥
調壓閥
Piping Introduction
What’s piping
Within industry, piping is a system of pipes used to convey fluids
(liquids and gases) from one location to another. The engineering
discipline of piping design studies the efficient transport of fluid.
Industrial process piping (and accompanying in-line components)
can be manufactured from wood, fiberglass, glass, steel, aluminum,
plastic, copper, and concrete. The in-line components, known as
fittings, valves, and other devices, typically sense and control the
pressure, flow rate and temperature of the transmitted fluid, and
usually are included in the field of Piping Design (or Piping
Engineering). Piping systems are documented in piping and
instrumentation diagrams (P&IDs). If necessary, pipes can be
cleaned by the tube cleaning process.
不銹鋼管
降伏強
2
N/mm
{Kg
2
鋼種
f/mm }
205(21)
301
以上
205(21)
301J1
以上
205(21)
302
以上
205(21)
304
以上
175(18)
304L
以上
205(21)
310S
以上
205(21)
316
以上
175(18)
316L
以上
205(21)
321
以上
175(18)
TESSP
以上
304DK
拉伸試驗
抗拉強
2
N/mm
{Kg
2
f/mm }
520(53)
以上
570(58)
以上
520(53)
以上
520(53)
以上
480(49)
以上
520(53)
以上
520(53)
以上
480(49)
以上
520(53)
以上
480(49)
以上
硬度試驗
伸長率
%
HB
HRB
HV
40以上 187以下 90以下 200以下
45以上 187以下 90以下 200以下
40以上 187以下 90以下 200以下
鋼種
401
420J1
420J2
40以上 187以下 90以下 200以下
40以上 187以下 90以下 200以下
40以上 187以下 90以下 200以下
鋼種
40以上 187以下 90以下 200以下
430
40以上 187以下 90以下 200以下
40以上 187以下 90以下 200以下
40以上 187以下 90以下 200以下
430LX
410L
降伏強
N/mm2
{Kg
2
f/mm }
205(21)
以上
225(23)
以上
225(23)
以上
降伏強
2
N/mm
{Kg
2
f/mm }
205(21)
以上
175(18)
以上
195(20)
以上
拉伸試驗
抗拉強
N/mm2
{Kg
2
f/mm }
400(45)
以上
520(53)
以上
540(55)
以上
拉伸試驗
抗拉強
2
N/mm
{Kg
2
f/mm }
450(46)
以上
360(37)
以上
360(37)
以上
硬度試驗
伸長率
%
HB
HRB
HV
20以上 201以下 93以下 210以下
18以上 223以下 97以下 234以下
18以上 223以下 99以下 247以下
硬度試驗
伸長率
%
HB
HRB
HV
22以上 183以下 88以下 200以下
22以上 183以下 88以下 200以下
22以上 183以下 88以下 200以下
彎度試驗
彎曲
角度
內側半
徑
厚度之
。
180
1.0倍
厚度之
180。
1.0倍
厚度之
180。
1.0倍
彎度試驗
彎曲
角度
內側半
徑
厚度之
。
180
1.0倍
厚度之
。
180
1.0倍
厚度之
。
180
1.0倍
Major classifications of steel
SAE
designati
on
1xxx
2xxx
3xxx
4xxx
5xxx
6xxx
7xxx
8xxx
9xxx
Type
Carbon steels
Nickel steels
Nickel-chromium steels
Molybdenum steels
Chromium steels
Chromium-vanadium steels
Tungsten steels
Nickel-chromium-vanadium steels
Silicon-manganese steels
SAE
designatio
Type
Carbon steels
10xx Plain carbon (Mn 1.00% max)
11xx Resulfurized
12xx Resulfurized and rephosphorized
15xx Plain carbon (Mn 1.00% to 1.65%)
Manganese steels
13xx Mn 1.75%
Nickel steels
23xx Ni 3.50%
25xx Ni 5.00%
Nickel-chromium steels
31xx Ni 1.25%, Cr 0.65% or 0.80%
32xx Ni 1.25%, Cr 1.07%
33xx Ni 3.50%, Cr 1.50% or 1.57%
34xx Ni 3.00%, Cr 0.77%
Molybdenum steels
Mo 0.20% or 0.25% or 0.25% Mo &
40xx 0.042 S[3]
44xx Mo 0.40% or 0.52%
Chromium-molybdenum (Chromoly) steels
Cr 0.50% or 0.80% or 0.95%, Mo
41xx 0.12% or 0.20% or 0.25% or 0.30%
SAE
Type
designatio
Nickel-chromium-molybdenum
steels
Ni 1.82%, Cr 0.50% to 0.80%,
Mo
43xx 0.25%
Ni 1.82%, Cr 0.50%, Mo 0.12% or
43BVxx Ni
0.35%,
V 0.03%
min Mo 0.20% or
1.05%,
Cr 0.45%,
47xx 0.35%
81xx Ni 0.30%, Cr 0.40%, Mo 0.12%
81Bxx Ni 0.30%, Cr 0.45%, Mo 0.12%[3]
86xx Ni 0.55%, Cr 0.50%, Mo 0.20%
87xx Ni 0.55%, Cr 0.50%, Mo 0.25%
88xx Ni 0.55%, Cr 0.50%, Mo 0.35%
93xx Ni 3.25%, Cr 1.20%, Mo 0.12%
94xx Ni 0.45%, Cr 0.40%, Mo 0.12%
97xx Ni 0.55%, Cr 0.20%, Mo 0.20%
98xx Ni 1.00%, Cr 0.80%, Mo 0.25%
Nickel-molybdenum
steels
Ni 0.85% or 1.82%, Mo
0.20% or
46xx 0.25%
48xx Ni 3.50%, Mo 0.25%
Chromium steels
50xx Cr 0.27% or 0.40% or 0.50% or 0.65%
50xxx Cr 0.50%, C 1.00% min
50Bxx Cr 0.80%
0.28% or 0.87%
0.50%[3]
or 0.92% or 1.00%
51xx or 1.05%
51xxx Cr 1.02%, C 1.00% min
51Bxx Cr 0.80%[3]
52xxx Cr 1.45%, C 1.00% min
Chromium-vanadium
Cr 0.60% or 0.80% orsteels
0.95%, V 0.10%
61xx or 0.15% min
Tungsten-chromium steels
72xx W 1.75%, Cr 0.75%
Silicon-manganese
steels
Si 1.40% or 2.00%, Mn
0.65% or
92xx 0.82% or 0.85%, Cr 0.00% or 0.65%
High-strength low-alloy steels
9xx Various SAE grades
xxBxx Boron steels
xxLxx Leaded steels
鍍鋅鋼管 - EMT
PVC管
PVC管是水電工最常用的管材,它可用於水管也可以用於電管,因厚度
不同有分給水管與排水管或電管,因為耐酸鹼所以適合作各種場所,但
是 PVC管怕熱 , 加熱之後會軟化,所以不適合在高溫場所,但也因此可
利用加熱來彎曲PVC管及擴管,縮管等,使配管更方便,再搭配預製好的
彎頭與三通等另件及專用膠水一般來說PVC管.管壁上都有標示.
電管~E水管~A or B
其製造材質相同.唯有管壁厚度的差異而已.因電(E)管為配線保護使用.
故其管壁厚度也較薄.水管又紛給水(需承受水壓故管壁厚度大於排水
用管)/排水使用.建議按實際需求使用合適管件.較為安全.
PVC 雙套管
在半導體工廠很多地方必須
使用雙套管方式施工尤其是
以運送chemical等液體管路
其最重要的目的是防止化學
品因管線破裂造成外洩及防
護人員安全為主
並在外管標示該管路明稱及
運送方向以利使用者快速辨
識該化學品種類
What’s the PTFE (Teflon)
In chemistry, polytetrafluoroethylene (PTFE) is a synthetic
fluoropolymer of tetrafluoroethylene that finds numerous
applications. PTFE is most well known by the DuPont brand
name Teflon.
PTFE is a fluorocarbon solid, as it is a high-molecular-weight
compound consisting wholly of carbon and fluorine. PTFE is
hydrophobic: neither water nor water-containing substances wet
PTFE, as fluorocarbons demonstrate mitigated London dispersion
forces due to the high electronegativity of fluorine. PTFE has one
of the lowest coefficients of friction against any solid.
PTFE is used as a non-stick coating for pans and other cookware.
It is very non-reactive, partly because of the strength of carbon–
fluorine bonds, and so it is often used in containers and pipework
for reactive and corrosive chemicals. Where used as a lubricant,
PTFE reduces friction, wear, and energy consumption of
machinery.
Material Poly Tetra Fluoro Ethylene
(PTFE)
Properties
general Upper service temperature 260 °C Mechanical Tensile strength 3500 psi
Chemical resistance excellent
Elongation 300 %
Specific gravity 2.15
Compressive strength 3500 psi
Melting point 327 °C
Flexural Modulus 90 000 psi
electrical Dielectric constant 2.1
Hardness D-60
Dielectric dissipation factor 0.0002
Enviromental Water absorption < 0.01 %
Dielectric strength > 1400 Volt / mil
Water resistance excellent
Oxygen index >95 %
Datasheet PTFE Tubing
PTFE is the most chemically resistant plastic known. Its mechanical
properties are low compared to other engineered plastics, but it can
be improved by adding fillers such as glass fiber, carbon, graphite
and similar materials.
PTFE has almost ideal dielectric properties. Its dielectric constant
(2.1) and power-loss factor (0.0002) are low and remain so over a
wide range of temperatures and frequencies. In certain applications,
such as fuel hoses, some electrical conductivity is required to
dissipate static charges. When exposed to flame, PTFE
decomposes leaving just a little residue.
PTFE is extremely inert and stable up to a temperature of 260
°C.PTFE is also virtually unaffected by oxygen, ozone and UV light.
Homework




Please briefly describe retention mechanism
of filter.
What is the definition of pore size
distribution?
Please briefly describe valve classified and
choice 3 types valve and describe its
function.
What is the PTFE tube and its character?