ERD Memory Discussion Victor Zhirnov July 10, 2011 San Francisco, CA Outline u u u ERD Memory Tables/Text Updates Memory Select Device Section Storage Class Memory Section 2 ERD Memory Tables 2011 Memory Transition Table IN/OUT (Table ERD5) Emerging Ferroelectric Memory IN Redox memory IN Mott Memory IN FeFET Memory OUT Electronic effects memory OUT Nanothermal memory OUT Nanoionic memory OUT Spin Torque Transfer MRAM OUT Reason for IN/OUT Replaces former FeFET category and the ferroelectric polarization/electronc effects memory categories Comment Replaces former nanothermal and Ionic memory categories Separated from the electronic effects memory Merged with FeFET and the ferroelectric polarization/electronc effects memory Replaced by EFM and Mott Merged with Ionic Memory to form Redox Memory Category Merged with Nanothermal Memory to form Redox Memory Category Became a prototypical technology Spin Torque Tranfer MRAM is already included in PIDS chapter since 2009 (Tables PIDS5 and PIDS 5A) 4 2011 ERD Memory Table Emerging Ferroelectric memory Storage Mechanism Nanomechanical Redox Memory Memory Remnant polarization on Electrostaticallya ferroelectric gate controlled mechanical dielectric switch Mott Macromolecular Molecular Memory Memory Memories Ion transport and Multiple Multiple Multiple mechanisms mechanisms mechanisms redox reaction Cell Elements Device Types 1T or 1T1R 1T1R or 1D1R 1T1R or 1D1R 1) nanobridge 1) cation migration 2) telescoping CNT 2) anion migration FET with FE gate insulator FTJ 1T1R or 1D1R Mott transition 1T1R or 1D1R 1T1R or 1D1R M-I-M (nc)-I-M Bi-stable switch 3) Nanoparticle 5 Emerging Ferroelectric Memory u Combines two subcategories: v v u Should not be confused with conventional ferroelectric memory or FeRAM v v u Ferroelectric FET Ferroelectric tunnel junction Based on FE capacitor Is currently in PIDS Temporary working name: v v Emerging Ferroelectric Memory Suggestions are welcome 6 Emerging Ferroelectric Memory u Text update: completed u Table ERD5 update: Work in progress u References update: Work in progress 7 Nanomechanical Memory u Text update: completed v De-emphasized CNT-based nanomechanical memory (earlier Nantero concept) u Table ERD5 update: Work in progress u References update: Work in progress 8 RedOx Memory u Replaces former nanothermal and Ionic memory categories u New text based on the materials from Barsa Workshop (white papers and presentations) u Numbers in Table ERD5 updated u References update: Work in progress 9 Macromolecular Memory u Text update: Work in progress u Table ERD5 update: Work in progress u References update: Work in progress 10 Molecular Memory u Text update: Work in progress u Table ERD5 update: Work in progress u References update: Work in progress 11 Input Received Alex Bratkovski (HP) Table ERD5/Redox Memory Curt Richter (NIST) Table ERD5/Redox Memory Eric Pop (U Illinois) Table ERD4/PCM An Chen (GLOBALFOUNDRIES) Table ERD5/Mott Memory Rainer Waser (U Aachen) Text / References Hiro Akinaga (AIST) Text / References 12 Memory Select Device Wei Lu (U Michigan) An Chen (GLOBALFND) Dirk Wouters (IMEC) Kwok Ng (SRC) Victor Zhirnov (SRC) Memory Select Device TWG: Wei Lu (U Michigan) An Chen (GLOBALFND) Dirk Wouters (IMEC) Kwok Ng (SRC) Victor Zhirnov (SRC) The fundamental study team Rainer Waser (U Aachen) Thomas Vogelsang (RAMBUS) Zoran Krivokapic(GLOBALFND) Al Fazio (Intel) Kyu Min (Intel) U-In Chung (Samsung) Matthew Marinella (Sandia Labs) 14 Memory Select Device: Intro •A memory cell in array can be viewed as being composed of two fundamental components: the ‘Storage node’, and the ‘Select device’ to minimize sneak current through unselected cells. •Both components impact scaling limits for memory. •Several advanced concepts of resistance-based memories offer storage node scaling down below 10 nm, and the memory density will be limited by the select device. •The select device thus represents a serious bottleneck for memory scaling to 10 nm and beyond. 15 Suggested select device categories Select devices Transistor Switchbased selector Diode Planar p-n junction Vertical Schottky junction Heterojunction Mott transition switch Threshold switch Resistive switch Mixed ionic electronic conduction (MIEC) Complementary resistive switch structure Planar FET select device (8-9)F2 L. Li, K. Lu, B. Rajendran, T. D. Happ, H-L. Lung, C. Lam, and M. Chan, “Driving Device Comparison for PhaseChange Memory”, IEEE Trans. Electron. Dev. 58 (2011) 664-671 17 Vertical Select Devices Vertical diode Vertical FET L. Li, K. Lu, B. Rajendran, T. D. Happ, H-L. Lung, C. Lam, and M. Chan, “Driving Device Comparison for PhaseChange Memory”, IEEE Trans. Electron. Dev. 58 (2011) 664-671 18 Vertical Select Devices Vertical diode 4F2 Vertical FET 5.3F2 19 Vertical Transistor Select Devices Experimental demonstrations of vertical transistors in memory arrays. Technology Memory Type Infineon (2004)1 Samsung (2010)2 170 nm 80 nm DRAM DRAM Array size 1 Mb 50 Mb Hynix&Innovative Silicon (2010)3 Numonix (2009)4 54 nm Z-RAM - 45 nm PCM 1Gb 5.5F2 BJT NTHY&ITRI (2010)4 A*STAR (2008)5 ** 180 nm ReRAM - 4F2* BJT 25 nm (NW dia) - - - NWGA A FET * Cell size Transist Ion Von Ion/Iof or f 2 8F DG FET 50mA 1.8V 1010 4F2 GAA 30mA 1.2V 1011 FET DG FET 0.5V 300m 2V A 100m 1.2V A 25mA 1.2V 107 projected cell size potential as a select device (not demonstrated) **has 20 Two-terminal selector devices u External 2-terminal structure with non-linear characteristics n n u e.g. switching diode-type behavior for unipolar memory cells for bipolar cells, selectors with two-way switching behavior are needed, e.g. Zener diode, avalanche diode etc. Storage element with inherent rectifying/isolation properties I ION1 ON2 ION OFF OFF unipolar ON1 V bipolar 21 Benchmark Select Device Parameters Parameter Value Driver Compatibility with logic; low-power operation ON Voltage, Vr ~1 V ON current, Ir ~10-6 A ON/OFF ratio* >106 Sufficiently low ‘sneak’ currents ** Operating 85°C The top end spec for servers. temperature 50°C NAND spec (the very embodiment of non- volatile Sensing of memory state (fast read) memory for the current state-of-the-art), *ON/OFF current ratio at ~(1V) supply alternative schemes of array biasing could result in relaxed requirements on the select device ON/OFF ratio [5] **Proposed 22 Diode-type Select Devices u u u u u u pn-diode, Schottky diode Heterojunction diode Unipolar cell BARITT diode Zener diode Reverse breakdown Schottky diode Bipolar cell 23 Diode-type Select Devices Selector type pn-diode Schottky diode Heterojunction diode Material System Von1 Poly-Si (E) 1 n-ZnO (E) 1 Ge NW (E) 1 a-Si (I) 1 p-Si (E) 1 Pt/TiO2 1 n-ZnO/p-Si 3 CuO/InZnO 1 Ion1 Von2 Unipolar cell 20 mA 4 2 2×10 A/cm Ion2 ON/OFF F REF - 105 0.3 mm van Duuren 2007 45 mA 500 A/cm2 1 mA 500 A/cm2 100 nA 1000 A/cm2 10 mA 1000 A/cm2 6 mA 10 A/cm2 - - 105 3 mm Huby 2008 - - 102 0.5 mm Wong 2008 - - 106 100 nm Lu 2010 - - 103 1 mm Lee 2010 - - 109 245 mm Hwang 2010 25 mA 250 A/cm2 2.5 mA 1000 A/cm2 - - 103 100mm Choi 2010 - - 103 0.5 mm Park 2009 2 mm Toda 2009 Kozicky 2010 Bipolar cell Zener diode Reverse breakdown Schottky diode (E) Cu/n-Si 1 10 mA -3 10 mA 103 24 Switch-type select devices u u u Innovative device concepts that exhibit resistive switching behavior. In some of these concepts the device structure/physics of operation is similar to the structure of the storage node. A modified memory element could act as select device! v v a ‘nonvolatile’ switch is required for the storage node, while for select device depending on the approaches non-volatility may not be necessary and can sometimes be detrimental. Knowledge gained from studying new memory phenomena can be used for select device! 25 Resistive-Switch-type select devices I u Mott-transition switch v v v is based on the Mott Metal-Insulator transition a volatile resistive switch, A VO2-based Mott-transition device has been demonstrated as a selection device for NiOx RRAM element [Ref: M.J. Lee, “Two Series Oxide Resistors Applicable to High Speed and High Density Nonvolatile Memory,” Adv. Mater. 19, 3919 (2007).]. v u The feasibility of the Mott-transition switch as selection devices still needs further research. Threshold switch v v is based the threshold switching in MIM structures caused by electronic charge injection/trapping Significant resistance reduction can occur at a threshold voltage and this low-resistance state quickly recovers to the original high-resistance state when the applied voltage falls below a holding voltage. 26 Resistive-Switch-type select devices II MIEC switch observed in materials that conduct both ions and electronic charges – so called mixed ionic electronic conduction materials (MIEC). The resistive switching mechanism is similar to the ionic memories. Complementary resistive switch the memory cell is composed of two identical non-volatile ReRAM switches connected back-to-back. Example: Pt/GeSe/Cu/GeSe/Pt structure During idle conditions one of the ReRAM switch is off so sneak current is reduced. Read involves turning on both ReRAM devices and is destructive. 27 Mott-Switch as Select Device Combined device switching Threshold Switching Resistive Switching Lee 2007 - demonstrated very fast writing and erasing process, 1.5V; 10ns. - read operation at 0.6V also doesn’t seem to be degraded by switch element - on/off ratio ~ 103, Ion ~ 400 A/cm2 Threshold switch as Select Device Current Current VReset VSet Vread Voltage Schematic I-V characteristics of threshold switch Voltage Schematic I-V characteristics of combined unipolar RRAM devices with threshold switch as the select device -Similar to Mott switch, but not restricted by the transition temperature - Organic Threshold Switch as select device integrated with PCM (Kau 2009) - 9ns switching speed and 106 endurance demonstrated - Array data not available. Arrays based on MOS select devices presented MIEC-Switch as Select Device Switch device characteristics Gopalakrishnan 2010 - MIEC switching due to redistribution of Cu ions and associated hole diff. current - Current scales with BEC area. Needs very thin (~ 13nm) dielectric for high current - Combined MIEC/PCM device demonstrated with endurance of > 3x104 cycles. Complementary ReRAM cell Two identical RRAM devices connected back-to-back (1,1) C-ReRAM 0 = (0,1) C-ReRAM 1 = (1,0) (1,0) (1,0) (0,1) (1,1) Vc,set (0,1) Vc,reset Vread Waser 2010 VT,set<Vread<2VT,reset (1,0) -> (1,1), -> high read current (0,1) -> (0,1), -> low read current Complementary ReRAM cell CRRAM cell C-ReRAM based on back-toback Pt/ZrOx/HfOx/BE devices Read endurance is limited to 105 Lee 2010 Resistive-Switch-type select devices Source: Philip Wong / Stanford Select Device Material System Mott transition switch Pt/VO2/Pt Threshold switch Von1 Ion1 (Jon1) 0.4/0 (400 A/cm2) .6V Chalcogenide alloy (undisclosed) MIEC switch ~1 Complementary Pt/GeSe/Cu/GeSe/Pt resistive switch 1 ON/OFF F REF 103 Lee 2007 106 Kau 2009 40 nm Gopalakrishnan 2010 600 mA 2400 A/cm2 5 mm Waser 2010 33 Criteria for the evaluation of selection devices Parameters Explanations Blocking state resistance • Measure the resistance from the selection devices in the blocking state; it is generally a voltage-dependent value • The higher the blocking state resistance the better Conductive state resistance • Measure the resistance from the selection devices in the conductive state; it is generally a voltage-dependent value • The smaller the conductive state resistance the better Turn-on voltage • The voltage where the selection devices become sufficiently conductive Turn-on speed • How fast the selection devices turn on, which affect switching dynamics Turn-off voltage • The voltage where the selection devices become nonconductive (high resistance) Turn-off speed • How fast the selection devices turn off, which affect switching dynamics Operation polarity • Blocking/conductive states exist in both polarities (suitable for bipolar switching devices) or each in different polarity (suitable for unipolar switching devices) Scalability • How scalable is the selection devices Linearity • Linear or nonlinear I-V characteristics in blocking and conductive states Processing temperature • Low processing temperature is preferred Materials • What materials are required? How available are they? Are they compatible with the processing of the resistive switching devices? Structures • Two terminal or three terminal Fundamental Issues For scaled diode-type select devices two fundamental challenges are: Contact resistance Lateral depletion effects Very high concentration of dopants are needed to minimize both effects. high dopant concentrations result in increase reverse currents in classical diode structures and therefore in reduced ON/OFF ratio. For switch-type select devices the main challenges are: identifying the right material and the switching mechanism to achieve the required drive current density, ON/OFF ratio and reliability. 35 Selection Devices Summary Experimental two-terminal select devices have yet to meet the benchmark specifications Hence, outstanding research issues persist 2011 MSD tables and text reflects both target parameters and experimental status More detailed benchmarking and further analysis is currently underway Currently no data from functional arrays based on twoterminal select devices are available 36 Solid-State Storage Class Memory SCM Team: Barry Schechtman (INSIC) Rod Bowman (Seagate) Geoff Burr (IBM) Bob Fontana (IBM) Michele Franceschini (IBM) Rich Freitas (IBM) Kevin Gomez (Seagate) Mark Kryder (CMU) Antoine Khroueir (Seagate) Kroum Stoev (Western Digital) Winfried Wilcke (IBM) Thomas Vogelsang (RAMBUS) Matthew Marinella (Sandia Labs) Jim Hutchby (SRC) Victor Zhirnov (SRC) 38 Storage-class memory (SCM) Research and development efforts are underway worldwide on several nonvolatile memory technologies that not only complement the existing memory but also reduce the distinction between memory and storage1 Memory: fast, evanescent, random-access, expensive Storage: slow, permanent, sequential-access, inexpensive Storage-class memory (SCM): Emerging solid-state technologies with (some) attributes of both memory and storage devices May eventually replace discs and (perhaps) DRAM1 1 “Storage-class memory: The next storage system technology”, by R. F. Freitas and W. W. Wilcke, IBM J. Res. & Dev. 52 (2008) 439 Draft Section on SCM is Completed Storage-class memory (SCM) describes a device category that combines the benefits of solid-state memory, such as high performance and robustness, with the archival capabilities and low cost of conventional hard-disk magnetic storage. Such a device requires a nonvolatile memory technology that could be manufactured at a very low cost per bit. As the scalability of flash is approaching its limit, emerging technologies for non-volatile memories need to be investigated for a potential “take over” of the scaling roadmap for flash. In principle, such new SCM technology could engender two entirely new and distinct levels within the memory and storage hierarchy, located below off-chip DRAM and above mechanical storage, and differentiated from each other by access time. 40 Hard-disk Drive Conventionally, magnetic hard-disk drives are used for nonvolatile data storage. The cost of HDD storage (in $/GB) is extremely low and continues to decrease. Issues: poor random access time relatively high energy consumption, large form factor, limited reliability. 41 Flash memory: Device Challenges NAND flash has recently become an alternative storage technology faster access times, smaller size and potentially lower energy consumption, as compared to HDD. The NAND-based solid state drive (SSD) market has flourished recently. There are several serious limitations of NAND flash for storage applications poor endurance (104 – 105 erase cycles), modest retention (typically 10 years on the new device, but only 1 year at the end of rated endurance lifetime), long erase time (~ms), and high operation voltage (~15V). 42 Flash SSD: Architectural Challenges Page/block-based architecture, doesn’t allow for a direct overwrite of data, requiring sophisticated garbage collection bulk erase procedures, Computation-intensive data management Takes extra memory space, Limits performance Accelerates the wearing out of memory cells. Lower power potential compromised in current SSD implementations 43 Flash Scaling Challenges Flash memory scaling doesn’t improve (and sometimes degrades) the basic performance characteristics read, write and erase latencies have been nearly constant for over a decade Extreme scaling results in the degradation of retention time and endurance, critical for storage applications! There are opportunities for prototypical and emerging memory technologies to enter the non-volatile solid state memory space. 44 Prototypical and emerging memory technologies for SCM applications As the scalability of flash is approaching its limit, emerging technologies for non-volatile memories need to be investigated for a potential “take over” of the scaling roadmap for flash. It appears that storage applications could be the primary driver for the new memory technologies, may help to overcome the fundamental shortcomings of flash technology. In principle, such new SCM technology could engender two entirely new and distinct levels within the memory and storage hierarchy, located below off-chip DRAM and above mechanical storage, which are differentiated from each other by access time. 45 I. S-type storage-class memory The first new level, identified as S-type storage-class memory (S-SCM), would serve as a high-performance solid-state drive accessed by the system I/O controller much like an HDD. S-SCM would need to provide at least the same data retention as flash, offering new direct overwrite and random access capabilities (which can lead to improved performance and simpler systems) However, it would be absolutely critical that the device cost for SSCM be no more than 1.5-2x(1-1.5x? IN THE MATURE STATE)) higher than NAND flash If the cost per bit could be driven low enough through ultrahigh memory density, ultimately such an S-SCM device could potentially replace magnetic hard-disk drives in enterprise storage server systems. 46 II. M-type storage-class memory M-SCM: should offer a read/write latency of less than 1 ms. would allow it to remain synchronous with a memory system, allowing direct connection from a memory controller and bypassing the inefficiencies of access through the I/O controller. Would be to augment a small amount of DRAM to provide the same overall system performance as a DRAM-only system, while providing Moderate retention, Lower power-per-GB and lower cost-per-GB than DRAM. Endurance is particularly critical the time available for wear-leveling, error-correction, and other similar techniques is limited > 109 cycles 47 Target device and system specifications for SCM Parameter Benchmark Target HDD* NAND flash** DRAM Read/Write latency 3-5 ms ~100ms (block erase ~1 ms) Endurance (cycles) Retention ON power (W/GB) unlimited Standby power Areal density Cost ($/GB) * enterprise <10 ns Memory-type SCM <0.3ms Storage-type SCM 1-10ms 105 unlimited >109 108 >10 years ~0.04 ~10 years ~0.01-0.04 64 ms 0.4 ~10 years Lower (per GB) than HDD ~20% ON power ~ 1011 bit/cm2 0.1 <10% ON power ~ 1010 bit/cm2 2 ~25% ON power ~ 109 bit/cm2 10 >5 days Lower (per GB) than DRAM <1% ON power >109 bit/cm2 Lower than DRAM class **single-level cell (SLC) <1% ON power >109 bit/cm2 Within (1.5-2x?) of NAND Flash 48 Prototypical and emerging memory technologies for SCM applications Necessary attributes of a memory device for the storageclass memory applications are: Scalability Multilevel Cell - MLC (MLC vs extreme scaling dilemma) 3D integration (stacking) Fabrications costs Endurance (for M-SCM) Retention (for S-SCM) The driving issue is to minimize the cost per bit 49 Potential of the current prototypical research memory candidates for SCM applications Parameter FeRAM STT-MRAM PCRAM Scalability low medium good MLC no difficult yes good excellent average 3D integration Fabrication cost Endurance A likely introduction of these new memory devices to the market is by the hybrid solid-state discs, where the new memory technology complements the traditional flash memory to boost the SSD performance. Experimental implementations of FeRAM/flash and PCRAM/flash have recently been explored. It was shown that the PCRAM/Flash hybrid improves SSD operations by decreasing the energy consumption and increasing the lifetime of flash memory. 50 Potential of the current emerging research memory candidates for SCM applications Parameter Ferroelectric Nanomechanical memory memory Redox memory Mott Memory Macromolecular memory Molecular Memory Scalability MLC 3D integration Fabrication cost Endurance 51 “Traffic Light” indicators Green: this entry has good progress; there are no or few issues. Yellow: this entry’s potential is not clear; there is a number of issues. Red: this entry’s potential is questionable; there is a list of issues. Message might be softer, a bit more proactively positive (or at least hopeful). 52 Proposal from Toshiba Table 1 (current version) Parameter Benchmark Target HDD* NAND flash** DRAM Read/Write latency 3-5 ms ~100ms (block erase ~1 ms) Endurance (cycles) Retention ON power (W/GB) unlimited >10 years ~0.04 Standby power ~20% ON power Areal density Cost ($/GB) ~ 1011 bit/cm2 0.1 * enterprise class **single-level cell (SLC) <10 ns Memory-type SCM <0.3ms Storage-type SCM 1-10ms 105 unlimited >109 108 ~10 years ~0.01-0.04 64 ms 0.4 >5 days Lower (per GB) than DRAM <1% ON power ~10 years Lower (per GB) than HDD >109 bit/cm2 Lower than DRAM >1010 bit/cm2 Within (1.5-2x?) of NAND Flash <10% ON power ~ 1010 bit/cm2 2 ~25% ON power ~ 109 bit/cm2 10 <1% ON power 54 Table 1 (proposed) Parameter Memory-type SCM Target Benchmark STT(DRAM) MRAM Read/Write latency <0.3ms Endurance (cycles) Retention ON power (W/GB) >10 Standby power Areal density <10 ns 30ns <10 ns 9 unlimited 10 15 >5 days 64 ms 20 years Lower (per 0.4 0.01 GB) than DRAM <1% ON ~25% ON <1% ON power power power 9 2 8 2 ~109 bit/cm2 ~ 10 bit/cm ~ 10 bit/cm Cost ($/GB) Lower than DRAM 10 50,000 Storage-type SCM Target Benchmark Benchmark * (NAND (HDD ) Flash) 3-5 ms 1-10ms ~100ms (block erase ~1 ms) 8 4 5 unlimited 10 10 -10 >106 ~10 years >10 years ~10 years Lower (per ~0.04 ~0.01-0.04 GB) than HDD <1% ON ~20% ON <10% ON power power power >109 bit/cm2 ~ 1011 ~ 1010 Within 2-3x of NAND Flash bit/cm2 0.1 bit/cm2 2 Other proposals How about to mention about emerging NVM technologies? Such as FusionIO, NVM express, and so on. How about to merge Table 2 and 3? Architectural Implications Advances in SCM could drive the emerging data-centric chip architectures Nanostores Nanostores architectures could be an important direction for the future of information processing. Addressed in the ERA section Computer, Jan. 2011 57 Input Received Atsuhiro Kinoshita (Toshiba) Dirk Wouters (IMEC) Rainer Waser (U Aachen) Thomas Vogelsang (RAMBUS) Matthew Marinella (Sandia Labs) Geoff Burr (IBM) Bob Fontana (IBM) Kevin Gomez (Seagate) Mark Kryder (CMU) Paul Frank (INSIC) 58