The Physical Structure (NMOS)
Gate oxide
Al
SiO2
SiO2
S
n+
Field Oxide
Polysilicon Gate
D
n+
channel
Al
SiO2
Field Oxide
L
P Substrate
contact
Metal
(G)
(S)
n+
L
n+
(D)
W
Poly
CONCORDIA
VLSI DESIGN LAB
1
Transistor Resistance
Two Components:
Drain/ Sources Resistance:
(G)
: (S)
n+
RD(S) = Rsh x no. of squares+
contact resistance.
L
(D)
n+
W
Channel Resistance:
Depends on the region of operation:
RCH = -------------------------------1
--------------------------------- '
W
K'  -----    VGS – VT   –V DS 
L
RC H = -------------------------2
--------------------------2
W
K'  -----     V
–V 
L
CONCORDIA
VLSI DESIGN LAB
GS
RS
Rch
RD
Linear
Saturation
T
2
Transistor Geometry
CONCORDIA
VLSI DESIGN LAB
3
Transistor Geometry- Detailed
CONCORDIA
VLSI DESIGN LAB
4
NMOS Operation-Linear
2

1
IDS N = KN  VG SN – VTN VD SN – ---VD SN 
2
K =  C ox
Cox
 ox
= ------t ox
KN=K’. W/L
Process Transconductance uA/V2
for 0.35u, K’ (Kp)=196uA/ V2
Gate oxide capacitance per unit area
ox = 3.9 x o = 3.45 x 10-11 F/m
tox Oxide thickness
for 0.35  , tox=100Ao
IDS
VGS
Quick calculation of Cox:
Cox= 0.345/tox (Ao) pf/um2
 = mobility of electrons
550 cm2/V-sec for 0.35  process
CONCORDIA
VLSI DESIGN LAB
VDS
5
NMOS Operation-Linear
Effect of W/L
W/L
W
Rds
W
Effect of temperature
temp
CONCORDIA
VLSI DESIGN LAB

Rds
6
Variations in Width and Length
1. Width
Oxide encroachment
Weff= Wdrawn-2WD
polysilicon
Weff
Wdrawn
WD
WD
polysilicon
2. Length
Lateral diffusion
LD = 0.7Xj
Leff= Ldrawn-2LD
CONCORDIA
VLSI DESIGN LAB
Ldrawn
LD Leff
LD
7
Large Transistors
 Rchannel decrease with increase of W/L of the transistor
CONCORDIA
VLSI DESIGN LAB
8
Semiconductor Resistors
R= p(l /A) = (p/t). (l /w) = Rsh. (l /w)
For 0.5u process:
N+ diffusion : 70  / □
P+ diffusion : 140  /□
Polysilicon : 12  /□
Polycide:2-3  /□
1
 = ----------------------------------------------  n  q +   p  qn
p
current
M1: 0.06
M2: 0.06
M3: 0.03
P-well: 2.5K (A)w
N-well: 1K
l
t
Rsh values for 0.35u CMOS Process:
Polysilicon 10 /□
Contact resistance: PolyI to MetalI 50 
Polycide
2 /□
Via resistance: Metal I to Metal II 1.5 
Metal1
0.07 /□
Via resistance: Metal II to metal III 1.
Metal II
0.07 /□
Metal III
0.05 /□
CONCORDIA
VLSI DESIGN LAB
9
Modelling: Resistance
1. Resistance:
Rint= Rsh [l/w]
Rsh values for 0.35u CMOS Process:
Polysilicon 10 /
Polycide
2 /
Metal1
0.07 /
Metal II
0.07 /
Metal III
0.05 /
Contact resistance: PolyI to MetalI 50 
Via resistance: Metal I to Metal II 1.5 
Via resistance: Metal II to metal III 1.
CONCORDIA
VLSI DESIGN LAB
10
Semiconductor Resistors
Diffusion
n+
polysilicon
Al
Field oxide
Polysilicon Resistor
CONCORDIA
VLSI DESIGN LAB
Al
SiO2
n+
Diffusion Resistor
11
Delay Definitions
Vin
50%
t
Vout
t
pHL
t
pLH
90%
50%
10%
tf
CONCORDIA
VLSI DESIGN LAB
t
tr
12
Semiconductor Capacitors
1. Poly Capacitor:
a. Poly to substrate
b. Poly1 to Poly2
2. Diffusion Capacitor
sidewall
capacitances
depletion region
n+ (ND)
substrate (NA)
CONCORDIA
VLSI DESIGN LAB
bottomwall
capacitance
13
Dynamic Behavior of MOS Transistor
G
CGS
CGD
D
S
CGB
CSB
CDB
B
CONCORDIA
VLSI DESIGN LAB
14
Prentice Hall/Rabaey
SPICE Parameters for Parasitics
CONCORDIA
VLSI DESIGN LAB
15
Prentice Hall/Rabaey
SPICE Transistors Parameters
CONCORDIA
VLSI DESIGN LAB
16
Prentice Hall/Rabaey
Computing the Capacitances
VDD
VDD
M2
Vin
Cg4
Cdb2
Cgd12
M4
Vout
Cdb1
Cw
M1
Vout2
Cg3
M3
Interconnect
Fanout
Simplified
Model
CONCORDIA
VLSI DESIGN LAB
Vin
Vout
CL
17
Computing the Capacitances
CONCORDIA
VLSI DESIGN LAB
18
CMOS Inverter: Steady State Response
VDD
VDD
Ron
VOH = VDD
Vout
Vout
VOL = 0
Ron
Vin = V DD
CONCORDIA
VLSI DESIGN LAB
Vin = 0
19
Switching Characteristics of Inverters
Transient Response
VDD
tpHL = f(R on.CL)
= 0.69 RonCL
Vout
ln(0.5)
Vout
CL
Ron
1
VDD
0.5
0.36
Vin = V DD
CONCORDIA
VLSI DESIGN LAB
RonCL
t
20
Step Response
Fall Delay Time: TPHL
MN OFF
VDD=5V
Saturation
S
Linear
G
VDD
IDN
MP
D
Vin
Vin = 5
Vo
D
Vin
G
Vin= 4
CL
MN
S
Vin= 3
GND
VDD-VT VDD
Vo
(VDSAT)
CONCORDIA
VLSI DESIGN LAB
21
Step Response- Fall time, tf
CL
2 (n – 0.1 )
t f = --------------------------------------- ------------------------ + ln (19 – 20n )
KN VDD (1 – n ) ( 1 – n )
vo
1
0.9
tf=~
k .CL
 n.VDD
k is a constant
vin
CL
( – 2) (0.1
1 + p)
tr = -------------------------------------- ---------------------------- + ln (19 + 20p )
K PVDD ( 1 + p )
(1 + p )
k .CL
tr=~
p.VDD
CONCORDIA
VLSI DESIGN LAB
1-n
0.1
td1 td2
k is a constant
22
Step Response-tPHL
Assume normalized
voltages
vin= Vin/ VDD
vo= Vo/ VDD
n = VTN/ VDD
p = VTP/ VDD
Vo
Vx
VDD-VTN
VDD/ 2
Vin
td1
tPHL=td1+td2
CL
2n
t PHL = --------------------------------------- ---------------- + ln (3 – 4n )
K NVDD (1 – n ) ( 1 – n )
C L A' N
tP HL = --------------------KN VDD
CONCORDIA
VLSI DESIGN LAB
VDD
vo
td2
1
1-n
0.5
vin
td1
td2
23
Step Response
Rise Delay tPLH and Rise Time tr
VDD
CL
–2p
tPLH = --------------------------------------- ----------------- + ln ( 3 + 4p )
KP VDD (1 + p ) (1 + p )
MP
D
Vin
CL
( – 2)0.1
(1 + p)
tr = --------------------------------------- ---------------------------- + ln (19 + 20p )
K PVDD ( 1 + p ) (1 + p )
Vo
D
G
CL
MN
S

CONCORDIA
VLSI DESIGN LAB
G
VDD
C L A' P
tP LH = --------------------KP VDD
4C L A'P
tr = --------------------KP VDD
S
(P= - 0.2)
GND
24
Factors Influence Delay
Inverter Delay,td = (tPHL+tPLH)/2
The following factors influence the delay
of the inverter:
•
•
•
•
•
Load Capacitance
Supply Voltage
Transistor Sizes
Junction Temperature
Input Transition Time
CONCORDIA
VLSI DESIGN LAB
25
Delay as a function of VDD
28
Normalized Delay
24
20
16
12
8
4
0
1.00
2.00
3.00
4.00
5.00
VDD (V)
CONCORDIA
VLSI DESIGN LAB
26
Delay as a function of Transistor Size
 tPHL and tf decrease with the increase of W/L of the NMOS
 tPLH and tr decrease with the increase of W/L of the PMOS
CONCORDIA
VLSI DESIGN LAB
27
Temperature Effect




Temperature ranges:
commercial : 0 to700C
industrial: -40 to 850C
military: -55 to 1250C
Calculation of the junction temperature
tj= ta + ja X Pd
Effect of temperature on mobility
Delay and speed implications
CONCORDIA
VLSI DESIGN LAB
28
Effect of Input Transition Times
The delay of the inverter increases
with the increase of the input
r
Vin
transition times r and f
Vo
tPHL = (tPHL) step + (r /6).(1-2p)
tPLH = (tPLH) step + (f/6).(1+2n)
CONCORDIA
VLSI DESIGN LAB
29
Transistor Sizing
Define  = (W/L)p/(W/L)n


CONCORDIA
VLSI DESIGN LAB
For Equal Fall and Rise Delay
KN=KP
 = n/ p
For Minimum Delay
dtD/d  = 0
opt = Sqrt (n/ p)
30
Power Dissipation in CMOS
Two Components contribute to the power
dissipation:
» Static Power Dissipation
– Leakage current
– Sub-threshold current
» Dynamic Power Dissipation
– Short circuit power dissipation
– Charging and discharging power dissipation
CONCORDIA
VLSI DESIGN LAB
31
Static Power Dissipation
Leakage Current:
• P-N junction reverse biased current:
io= is(eqV/kT-1)
• Typical value 0.1nA to 0.5nA @room temp.
Vin
• Total Power dissipation:
Psl= i0.VDD
VDD
S
G
MP
B
D
Vo
D
G
B
MN
Sub-threshold Current
• Relatively high in low threshold devices
CONCORDIA
VLSI DESIGN LAB
S
GND
32
Analysis of CMOS circuit power dissipation








The power dissipation in a CMOS logic gate can be
expressed as
P = Pstatic + Pdynamic
= (VDD · Ileakage) + (p · f · Edynamic)
Where p is the switching probability or activity factor
at the output node (i.e. the average number of output
switching events per clock cycle).
The dynamic energy consumed per output switching
event is defined as
Edynamic =
i
VDDdt
DD
1 _ switching_ event
CONCORDIA
VLSI DESIGN LAB
33
Analysis of CMOS circuit power dissipation
2
2
Edynamic  CLVDD
 2CMVDD
 ESC
2
2
 CloadVDD
 [Cdbp  Cdbn  2(Cgdn  Cgdp )]VDD
 ESC
The first term —— the energy dissipation due to the
Charging/discharging of the effective load capacitance CL.
The second term —— the energy dissipation due to the input-tooutput coupling capacitance. A rising input results in a VDDVDD transition of the voltage across CM and so doubles the
charge of CM.
CL = Cload + Cdbp +Cdbn
CM = Cgdn + Cgdp
CONCORDIA
VLSI DESIGN LAB
34
The MOSFET parasitic capacitances
• distributed,

• voltage-dependent, and

• nonlinear.
 So their exact modeling is quite complex.
Even ESC can be modeled, it is also difficult to calculate the
Edynamic.

On the other hand, if the short-circuit current iSC can be Modeled,
the power-supply current iDD may be modeled with the same
method.
So there is a possibility to directly model iDD instead of iSC.
CONCORDIA
VLSI DESIGN LAB
35
Schematic of the Inverter
CONCORDIA
VLSI DESIGN LAB
36
CONCORDIA
VLSI DESIGN LAB
37
Analysis of short-circuit current
The short-circuit energy dissipation ESC is due to the railto-rail current when both the PMOS and NMOS devices
are simultaneously on.
ESC = ESC_C + ESC_n
Where
and
CONCORDIA
VLSI DESIGN LAB
ESC _ c  VDD
ESC _ d  VDD
i
dt
i
dt
n
v0  0 VDD
p
v0 VDD  0
38
Charging and discharging currents

Discharging Inverter
CONCORDIA
VLSI DESIGN LAB
Charging Inverter
39
Factors that affect the short-circuit current
For a long-channel device, assuming that the inverter is
symmetrical (n = p =  and VTn = -VTp = VT) and with zero load
capacitance, and input signal has equal rise and fall times (r = f
= ), the average short-circuit current [Veendrick, 1994] is
I mean
1 
3 

(VDD  2VT )
12 VDD
T
From the above equation, some fundamental factors that
affect short-circuit current are:
 W
(

)

t L , VDD, VT,  and T.
ox
CONCORDIA
VLSI DESIGN LAB
40
Parameters affecting short cct current
For a short-channel device,  and VT are no longer
constants, but affected by a large number of
parameters (i.e. circuit conditions, hspice
parameters and process parameters).
CL also affects short-circuit current.
Imean is a function of the following parameters (tox is processdependent):
CL, , T (or /T), VDD, Wn,p, Ln,p (or Wn,p/ Ln,p ), tox, …
The above argument is validated by the means of simulation in
the case of discharging inverter,
CONCORDIA
VLSI DESIGN LAB
41
The effect of CL on Short CCt Current
CONCORDIA
VLSI DESIGN LAB
42
Effect of tr on short cct Current
CONCORDIA
VLSI DESIGN LAB
43
Effect of Wp on Short cct Current
CONCORDIA
VLSI DESIGN LAB
44
Effect of timestep setting on simulation results
Tr (ps)
0
100
200
CONCORDIA
VLSI DESIGN LAB
Timestep (ps)
2
4
5
6
8
10
2
4
5
6
8
10
2
5
5
8
8
10
MaxStep (ps)
10
10
10
10
10
20
10
10
10
10
10
20
10
10
20
10
20
20
iMax (uA)
802.6
413.8
336.4
284.9
221
183
73.09
64.4
58.69
65.64
76.13
63.1
50.96
49.78
50.46
50.72
52.08
51.25
iaverage_inT/2 (uA)
1.258
1.264
1.24
1.234
1.245
1.231
1.202
1.213
1.21
1.208
1.207
1.217
1.311
1.295
1.313
1.311
1.311
1.311
45
Thank you !
CONCORDIA
VLSI DESIGN LAB
46