ELRC’s mission is to reduce the cost of ownership for users
of Cymer lasers through reduced parts costs, training and
maintenance tools to enable the customer control
performance and operation of customer’s excimer lasers.
ELRC Confidential
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Dedicated saving operating costs for
their photolithography lasers.
Repair, refurbish, service, and supply
maintenance tooling for Cymer lasers
series 5000, 6000, and 7000 series.
Training and tools to enable customer to
take greater control of all aspects of their
excimer lasers.
ELRC Confidential
ELRC History
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Founded: March 2005
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Location: San Diego, California
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Target market: Cymer excimer lasers
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Ownership: Private Funding
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Employees: 10 full time and 6 part time
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Properties: >6,000 square feet of space
ELRC Confidential
Employee
Role
Experience
Ken Rebitz
CEO, Founder
32 yrs. (Cymer, National, ST, AMAT, Litel)
Roger Nielson
VP, Sales and Marketing, Founder
25 yrs. (Cymer, Spectranetics, Coherent)
Dr. Jesse Buck
CTO, Founder
25 yrs. (Cymer, Molectron, Microradian, Intralase)
Curt Mixon
Engineering and Operations, Founder
31 yrs. (Cymer, Mostek, JMAR, General Atomics)
Dave Schreck
Facilities Manager
20 yrs. (Cymer, US Navy, Northrup Grumman)
Miguel Sanchez
Field Service Engineering Supervisor
10 yrs. ( Cymer, Samsung, ELRC)
Ty Krebs
Final Test Supervisor
5 yrs. (Coherent, ELRC)
Arsenio Austria
Manufacturing Supervisor
10 Years (Cymer, ELRC)
ELRC Confidential
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Photolithography Excimer Laser Full system
support
System refurbishment with OEM equivalent
warranties
Parts and service for the following Models;
◦ ELS-5000
◦ ELS-6000
◦ NL-7000*
*Non-Consumables available now, consumables late 2011.
ELRC Confidential
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Refurbish entire lasers with warranties.
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On-site training with maintenance tools
◦ 95% or more of laser maintenance can be done by
customer personnel.
 Save on expensive service contracts
 Increase uptime—no waiting for service people.
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Consignments
◦ Current consignments in Austin, Portland, Seoul,
Singapore and in Europe.
◦ Can be set up at customer location or local office.
ELRC Confidential
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Your business strategy
◦ Buy parts as needed
◦ Equivalent to OEM “by-the-pulse”.
◦ Other ideas, we are flexible.
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Train customers
◦ ELRC facility
◦ Customer fab
◦ Laser Operations, level 1 and Higher
ELRC Confidential
ELRC developed maintenance tools to diagnose
electrical, mechanical and optical performance
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Software: Works with other tools to automate the power and pressure
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(PPMD) Portable Pressure Measurement Device: Calibrates gas
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(PMCT) Power Measurement Calibration Tool: Calibrates internal
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(CBAT) Coarse Beam Alignment Tool: Visual beam alignment check.
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(QBIT) Quantitative Beam Imaging Tool: Digital image of the beam
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(PTTT) Pulse Timing Tool: Ensures accurate timing between trigger
calibration of the laser.
pressure transducers.
energy monitor.
profile and alignment—optimize laser energy output.
and laser pulse.
ELRC Confidential
ELRC software interface
Software calculates offsets
and configurable settings
then automatically updates
laser with new values.
ELRC Confidential
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Calibrates internal pressure transducers
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Software calculates and updates the
offsets and configurables.
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Accurate gas refills
Precise gas injections to optimize voltage,
bandwidth, and energy sigma.
No manual data entry-fewer mistakes.
ELRC Confidential
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Calibrates the internal energy monitor.
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Software automatically updates laser system with the calibration
data.
Meter easily fits on laser at beam dump location.
Custom Power meter with
insertable mirror attached
Installed on laser
ELRC Confidential
Visual image of the beam
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Ensure the line narrowing module, chamber, and wavelength
stabilization module are aligned.
Fits on laser at beam dump location
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Installs in seconds.
In use
ELRC Confidential
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Digital image of beam profile.
Image stored for comparison to
prior images
◦ Track performance over module life.
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Quantitative beam energy
distribution
◦ Align for maximum energy out.
June ’11 ELRC Confidential
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Software Screen view
Unit installed in Laser
July ‘10 ELRC Confidential
◦ Four labs with 7 lasers installed.
 3-5000s, 1 development, 2 test
 3-6000s, 1 development, 2 test
 1-7000 used for both development and test
◦ 500 square feet of clean assembly
◦ clean and tear down area
◦ Warehouse with large parts storage
ELRC Confidential
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5000 series
◦ >120 discharge chambers
◦ >60 optical modules, WSM and LNM
6000 series
◦ >50 Discharge Chambers
◦ > 25 Optical modules
◦ Other parts required to support the systems available.
Other parts including vacuum pumps, High Voltage
Power supplies, commutator, F2 traps, boards, water
modules etc.
ELRC Confidential
European Installations:
Germany, Israel
Asia Installations:
S. Korea, China,
Japan, Singapore,
Taiwan, Malaysia
USA Installations:
Austin, Dallas,
Colorado Springs,
Los Angles, Portland,
San Jose, Virginia
ELRC Confidential
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Direct Sales in the US
◦ Expert service engineers in Austin and Escondido.
◦ Phone support from factory and service engineers.
◦ Parts depots in Austin, Portland and Escondido.
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Representatives in overseas locations
◦ OEM trained service engineers.
◦ Inventory stocked in Europe, Seoul, Singapore,
ELRC Confidential
Europe is covered
both direct and with
representation
USA
Direct Sales
Asia representation in:
S. Korea, China,
Japan, Singapore,
Taiwan, Malaysia
Consignment Stock:
USA , S. Korea, China, Japan, Singapore, Taiwan
ELRC Confidential
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ELRC provides a low cost solution for laser operations
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Provide ALL parts necessary for your 5000, 6000 generation
Cymer lasers
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Provide the parts, services, tools and training to be your
complete source for Cymer laser support.
ELRC Confidential