- THE PHOTONICS COMPANY
Leading and Innovating Together
HQ in Santa Clara, CA, USA (est. 1966)
Employees 5,500
pg. 2 | Coherent Confidential. Do Not Copy, Reproduce, or Distribute. | www.coherent.com
LASER
Light Amplification by Stimulated Emission of Radiation
pg. 5 | Coherent Confidential. Do Not Copy, Reproduce, or Distribute. | www.coherent.com
EXCIMER LASER BASICS
Typical Gas Consumption


Laser tube volume 5 – 100 liter with operating pressure 300 – 600 kPa
“NewFill” e.g. 300 liter per fill
 Gas Lifetime days to months depending on application
 Gas Cleaning systems are used to extend the gas lifetime
 Gas Refreshments
 Electrostatic filtering
 Sometimes Cryogenic purification


Gas recycling is not common, although technically feasible
Why does the gas degrade?
 Efficient laser operation requires high purity gases
 Gas purity degrades by electrical discharge required for laser process
pg. 10 | Coherent Confidential. Do Not Copy, Reproduce, or Distribute. | www.coherent.com
EXCIMER GAS RECYCLING

Recycling of excimer gas can be done
…but is not common!
…remains an option depending on gas price
Neon prices
tracked by Coherent, Göttingen
Courtesy: GigaPhoton, published 2017
The ArF Laser for the next generation multiple-patterning immersion
lithography supporting green operations and leading edge processes
193nm Excimerlaser for Immersion-Lithography
Up to 92% of Neon have been re-used
pg. 11 | Coherent Confidential. Do Not Copy, Reproduce, or Distribute. | www.coherent.com
AMOLED STEP BY STEP TO ULTIMATE
Courtesy of BOE, SID 2018 Conference
pg. 15 | Coherent Confidential. Do Not Copy, Reproduce, or Distribute. | www.coherent.com
EXCIMER LASER ANNEALING FOR LTPS-TFT



High Electron Mobility  Small TFT
High current stability (VT Stability)
CMOS - Integration of Driver-Electronic
>100 cm2/Vs
LineBeam
Lens-System
poly-Silicon
< 0.5 cm2/Vs
Scan




p-Si
a-Si
Film on Glass
amorphous-Silicon


a-Si
Benefit
Highest Resolution
Low Power Consumption
TFT Stability for AMOLED
Bezel-Free Design
pg. 17 | Coherent Confidential. Do Not Copy, Reproduce, or Distribute. | www.coherent.com
effective
area
4x ppi
HOW ABOUT TV SIZE?
75"
75"
65"
G10.5 glass, 6 pc 75“ TV
75"
75"
75"
65"
1500
1st-scan
75"
1st-scan
G10.5
65" glass, 8 pc 65“
65"TV
65"
75"
3370
65"
75"
2nd-scan
65"
1700
65"
Adoption of the process for large size TV

Lower mobility with large size uniformity

Higher productivity vs mobile

Lower cost and cost of operation
2940
2940
2nd-scan
Enabling 8k LCD- and OLED-TV
Line Beam 1500 readily available with option to stretch to 1700 mm!
Annealer for G10.5 glass readily available!
pg. 20 | Coherent Confidential. Do Not Copy, Reproduce, or Distribute. | www.coherent.com
FLEXIBLE SUSTRATES FOR DISPLAY AND LIGHTING
Laser Processing enables the rapid transition from rigid
– to flexible substrates!
Lighter
Thinner
Robust
Display
Semi
LED, µLED
Flexible
Electronics
OLED
Lighting
Lighter Thinner, Robust, Flexible, Foldable Rollable
Flexible
Foldable
Rollable
pg. 21 | Coherent Confidential. Do Not Copy, Reproduce, or Distribute. | www.coherent.com
NEON GAS DEMAND!
1000
Neon Supply vs Demand

Excimer Laser Need Neon Gas!

Volume / Million Liter
800
600
Demand
WW Capacity
400
200
0
2016
2017
2018
2019
2020
2021
Demand compiled from:
 Coherent LTPS Annealer, Other
 GGCEL Laser Gas Model Micro-Lithography
 WW capacity from leading global gas supplier
pg. 23 | Coherent Confidential. Do Not Copy, Reproduce, or Distribute. | www.coherent.com
2022
2023
Growing demand by ~ 12% per year