LPXpro Series
High-Duty-Cycle Excimer Lasers
Features
• Highest UV-pulse energies up to 1.1J
for efficient processing per pulse
• F-version multi-wavelength for 193, 248,
351 nm changeable operation
• High peak power nanosecond pulses
for precise and clean micromachining
• C-version for 308 nm operation
• LPF deep UV version for 157 and 193 nm
operation
• Flexible pulse energy and repetition
rate for efficient operation
• Internal burst generator
• Longest gas life on the market
• Hand-held terminal or RS-232 interface
• True specs: performance specified with
margin for reliable long-term operation
Mechanical Specifications
Top View
1900 mm (75.0 in.)
320 mm
(12.6 in.)
36 mm
(1.5 in.)
1804 mm (71.0 in.)
30 mm
(1.2 in.)
649 mm (25.5 in.)
800 mm (31.4 in.)
353 mm
(13.9 in.)
644 mm (25.3 in.)
Beam Exit
Side View
223.5 mm
(8.8 in.)
290.5 mm
(11.4 in.)
428.5 mm
(16.8 in.)
428.5 mm
(16.8 in.)
473.5 mm + 40 mm
(18.6 in. + 1.5 in.)
0
OFF
704 mm (27.7 in.)
Connection Side View
45 mm + 40 mm
(1.8 in. + 1.5 in.)
Superior Reliability & Performance
LPXpro™ Series
High-Duty-Cycle Excimer Lasers
System Specifications
Max. Pulse Energy (mJ)
up to 10 Hz
Max. Stabilized Pulse Energy (mJ)
at Full Repetition Rate
Max. Rep. Rate (Hz)
Max. Stabilized Avg. Power (W)
Energy Stability (at 5 Hz, 1 sigma, %)
Pulse Duration (FWHM, ns, typ.)
Beam Dimensions (V x H)
(FWHM, mm2, typ.)
Beam Divergence (V x H)
(FWHM, mrad2, typ.)
Electrical
Water Cooling
Weight
Dimensions (L x W x H)
Wavelength1
(nm)
LPXpro
210
LPXpro
220
LPXpro
240
LPXpro
305
LPFpro
205
LPFpro
220
157
193
248
308
351
157
193
248
308
351
157
193
248
308
351
248
248
248
–
450
800
500
400
–
300
700
450
200
100
–
30
70
45
20
<_1
25
12 x 24
–
300
550
300
200
–
250
400
275
130
200
–
50
80
55
26
<_1
20
8 x 24
–
160
300
–
120
–
80
160
–
55
300/4002
–
24
64
–
22
<_2
15
8 x 22
–
600
1100
700
400
–
400
800
600
300
50
–
20
40
30
15
<_1
25
12 x 30
50
400
–
–
–
–
–
–
–
–
50
2.53
15
–
–
–
<_104
–
10 x 244
40
250
–
–
–
–
–
–
–
–
200
73
40
–
–
–
<_104
–
10 x 244
248
<_1 x 3
<_1 x 3
<_1 x 3
<_1 x 3
<_2 x 64
<_2 x 64
Laser Head
Power Supply
Laser Head
Power Supply
208 or 400V, 50/60 Hz, 3-phase
<_ 7 l/min. (1.8 gal./min.), 15 to 20°C
400 kg (880 lbs.)
430 kg (946 lbs.)
50 kg (110 lbs.)
50 kg (110 lbs.)
1966 x 800 x 475 mm3 (77 x 32 x 19 in.3)
750 x 460 x 185 mm3 (30 x 18 x 7 in.3)
1
157 nm with LPFpro only; 193 nm, 248 nm, and 351 nm with LPXpro F-version only; 308 nm with LPXpro C-version only.
At 193 nm (300 Hz only).
3 Max. average power at maximum high voltage. Max. stabilized power not specified for LPFpro.
4 At 157 nm.
2
LPXpro 220 F at 248 nm
LPXpro 220 F at 193 nm and 5 Hz
Power (Rep. Rate)
High pulse energy in deep UV
Energy (HV)
500
Energy (mJ)
Power (W)
True specs: power specification
with margin 150
100
50
0
400
300
200
100
0
0
50
100
150
200
Rep. Rate (Hz)
HV (kV)
Coherent follows a policy of continuous product improvement. Specifications are subject to change without notice.
Coherent’s scientific and industrial lasers are certified to comply with the Federal Regulations (21 CFR Subchapter J) as administered
by the Center for Devices and Radiological Health on all systems ordered for shipment after August 2, 1976.
Coherent offers a limited warranty for all LPXpro Series lasers. For full details of this warranty coverage, please refer to the Service
section at www.Coherent.com or contact your local Sales or Service Representative.
www.Coherent.com
Printed in the U.S.A. MC-007-05-0M08128Rev.D
Copyright © 2012 Coherent, Inc.
Coherent, Inc.
5100 Patrick Henry Drive
Santa Clara, CA 95054
phone (800) 527-3786
(408) 764-4983
fax
(408) 764-4646
e-mail tech.sales@Coherent.com
Benelux +31 (30) 280 6060
China
+86 (10) 8215 3600
France +33 (0)1 8038 1000
Germany +49 (6071) 968 333
Italy
+39 (02) 31 03 951
Japan
+81 (3) 5635 8700
Korea
+82 (2) 460 7900
UK
+44 (1353) 658 833
VISIBLE AND INVISIBLE LASER RADIATION. AVOID
EYE OR SKIN EXPOSURE TO DIRECT OR
SCATTERED RADIATION. CLASS IV LASER
RADIATION PRODUCT. PER EN60825-1:2007
MODEL
LPXpro
LPXpro
LPXpro
LPXpro
LPFpro
LPFpro
210
220
240
305
205
220
POWER
ENERGY
DURATION
125W
125W
125W
100W
50W
100W
1.0J
0.8J
0.6J
1.8J
0.8J
0.5J
10 to 50 ns
10 to 50 ns
10 to 50 ns
10 to 50 ns
5 to 50 ns
5 to 50 ns
λ
157
157
157
157
157
157
to
to
to
to
to
to
800
800
800
800
800
800
nm
nm
nm
nm
nm
nm
ISO 9001:2000 Registered