LAMBDA SX C-Series 300 Hz
High-Power 308 nm Excimer Laser
Features
• Purged external resonator design for
long-life laser optics and optimum
beam-pointing stability
• PowerLok burst operation mode
for energy stabilization
• TimeLok trigger-to-pulse stabilization
and time-jitter reduction
• Advanced internal gas purification system
for extended operation of both laser gas
and tube windows
• Single laser pulse-detection software
• Maintenance-free solid-state switch
• Hand-held terminal with advanced
laser-control software
• Optional e-Diagnostics performance
and process control
• RS-232 interface
Mechanical Specifications
Front View
Side View
LAMBDA SX
Side View
Hand-Held Terminal
Connection: 5m cable
Display: LCD touch screen 6.5"
Weight: 1300 grams
(without cable)
Size: (D x H) 290 x 125 mm2
(9.8 x 4.9 in.2)
External
Transformer
Available for
LAMBDA SX for
line voltages other
than 400 VAC
Superior Reliability & Performance
Front View
LAMBDA SX™ C-Series 300 Hz
High-Power 308 nm Excimer Laser
System Specifications
LAMBDA SX
Wavelength (nm)
Stabilized Energy Range (mJ)
315C
800 to 1050
Max. Stabilized Average Power (W)
Max. Repetition Rate (Hz)
Energy Stability (rms)
Pulse Duration (FWHM, typ.)(ns)
Beam Dimensions (V x H, FWHM, typ.)(mm)1
Divergence (V x H, FWHM, typ.)(mrad)2
Dynamic Gas Lifetime
(at max. stabilized energy) (mio. pulses)
Electrical (kVA)
Water Cooling
Weight (without transformer)
Cabinet Size (L x W x H)
1
2
Description
315
300
<1%
29
35 x 13
<4.5 x 1.5
300C
200C
308
800 to 1000
550 to 670
100C
300
300
<2%
29
35 x 13
< 4.5 x 1.5
800 to 1000
800 to 900
90
50/100
<2%
29
35 x 13
< 4.5 x 1.5
200
300
<1%
22
35 x 12
< 4.5 x 1.5
>40
>40
>40
>20
26
26
18
18
3-phase, 400 VAC, 50 or 60 Hz, 190 to 480 VAC2
12 to 25 l/min. T = 10 to 15°C
1400 kg
1400 kg
1370 kg
1300 kg
3086 lbs.
3086 lbs.
3020 lbs.
2866 lbs.
2500 x 850 x 1925 mm (98.5 x 33.3 x 76 in.)
At 1.0 m from beam exit.
LAMBDA SX can be delivered with an external transformer for line voltages other than 400 VAC.
Please specify required line voltage and frequency (50 or 60 Hz) upon order.
LAMBDA SX C-Series are XeCl (308 nm) industrial excimer lasers providing highly
stabilized UV power to the production floor. This laser platform features a number
of innovative technologies for unsurpassed performance and reliability:
PowerLok
The proprietary PowerLok™ technology brings every pulse of a burst train to the
desired energy level. It employs a self-learning algorithm, utilizing a look-up table
to smoothen cycling bursts.
TimeLok
The proprietary TimeLok™ technology stabilizes the trigger-to-pulse delay of allsolid-state HV switch-driven excimer lasers and minimizes the time jitter. It also
employs a self-learning algorithm, utilizing a look-up table for delay stabilization in
any operation mode.
Onboard Diagnostics and Logging
The last 10,000 values of HV, energy and sigma are stored in a ring buffer and are
continuously updated from pulse to pulse. Detailed logging of laser operations is
possible.
Coherent follows a policy of continuous product improvement. Specifications are subject to change without notice.
Coherent’s scientific and industrial lasers are certified to comply with the Federal Regulations (21 CFR Subchapter J) as administered
by the Center for Devices and Radiological Health on all systems ordered for shipment after August 2, 1976.
Coherent offers a limited warranty for all LAMBDA SX C-Series lasers. For full details of this warranty coverage, please refer to the
Service section at www.Coherent.com or contact your local Sales or Service Representative.
www.Coherent.com
Printed in the U.S.A. MC-037-06-1M0108Rev.A
Copyright © 2008 Coherent, Inc.
Coherent, Inc.
5100 Patrick Henry Drive
Santa Clara, CA 95054
phone (800) 527-3786
(408) 764-4983
fax
(800) 362-1170
(408) 988-6838
e-mail tech.sales@Coherent.com
Benelux +31 (30) 280 6060
China
+86 (10) 6280 0209
France +33 (0)1 6985 5145
Germany +49 (6071) 9680
Italy
+39 (02) 34 530 214
Japan
+81 (3) 5635 8700
Korea
+82 (2) 460 7900
UK
+44 (1353) 658 833
VISIBLE AND INVISIBLE LASER RADIATION.
AVOID EYE OR SKIN EXPOSURE TO
DIRECT OR SCATTERED RADIATION.
CLASS IV LASER RADIATION PRODUCT
PER EN60825-1 (1994)
MAX. OUTPUT POWER: 450W
MAX. OUTPUT ENERGY: 1.5J/pulse
PULSE DURATION: 10 to 50 ns
WAVELENGTH: 157 to 800 nm
ISO 9001:2000 Registered