LAMBDA SX C-Series 600 Hz High-Power 308 nm Excimer Laser Features • PowerLok burst operation mode for energy stabilization • TimeLok trigger-to-pulse stabilization and time-jitter reduction • Single laser pulse-detection software • Hand-held terminal with advanced laser-control software • Purged external resonator design for long-life laser optics and optimum beam-pointing stability • Advanced internal gas purification system for extended operation of both laser gas and tube windows • Maintenance-free solid-state switch • Optional e-Diagnostics performance and process control • RS-232 interface Mechanical Specifications Front View Side View LAMBDA SX C-Series Side View Hand-Held Terminal Connection: 5m cable Display: LCD touch screen 6.5" Weight: 1300 grams (without cable) Size: (D x H) 290 x 125 mm2 (9.8 x 4.9 in.2) External Transformer Available for LAMBDA SX for line voltages other than 400 VAC Superior Reliability & Performance Front View LAMBDA SX™ C-Series 600 Hz High-Power 308 nm Excimer Laser System Specifications LAMBDA SX 540C Wavelength (nm) Stabilized Energy Range (mJ) Max. Stabilized Average Power (W) Max. Repetition Rate (Hz) Energy Stability (rms) Pulse Duration (FWHM, typ.)(ns) Beam Dimensions (V x H, FWHM, typ.)(mm)1 Divergence (V x H, FWHM, typ.)(mrad) Dynamic Gas Lifetime (at max. stabilized energy)(mio. pulses) Electrical (kVA) Water Cooling Weight (without transformer) Cabinet Size (L x W x H) 1 2 Description 308 700 to 900 540 600 <_2% 29 35 x 13 <_4.5 x 1.5 >50 34 3-phase, 400 VAC, 50 or 60 Hz, 190 to 480 VAC2 up to 70 l/min. T = 12 to 15°C 1480 kg (3263 lbs.) 2500 x 850 x 1925 mm (98.5 x 33.3 x 76 in.) At 1.0 m from beam exit. LAMBDA SX can be delivered with an external transformer for line voltages other than 400 VAC. Please specify required line voltage and frequency (50 or 60 Hz) upon order. LAMBDA SX C-Series are XeCl (308 nm) industrial excimer lasers providing highly stabilized UV power to the production floor. This laser platform features a number of innovative technologies for unsurpassed performance and reliability: PowerLok The proprietary PowerLok™ technology brings every pulse of a burst train to the desired energy level. It employs a self-learning algorithm, utilizing a look-up table to smoothen cycling bursts. TimeLok The proprietary TimeLok™ technology stabilizes the trigger-to-pulse delay of allsolid-state HV switch-driven excimer lasers and minimizes the time jitter. It also employs a self-learning algorithm, utilizing a look-up table for delay stabilization in any operation mode. Onboard Diagnostics and Logging The last 10,000 values of HV, energy and sigma are stored in a ring buffer and are continuously updated from pulse to pulse. Detailed logging of laser operations is possible. Coherent follows a policy of continuous product improvement. Specifications are subject to change without notice. Coherent’s scientific and industrial lasers are certified to comply with the Federal Regulations (21 CFR Subchapter J) as administered by the Center for Devices and Radiological Health on all systems ordered for shipment after August 2, 1976. Coherent offers a limited warranty for all LAMBDA SX C-Series lasers. For full details of this warranty coverage, please refer to the Service section at www.Coherent.com or contact your local Sales or Service Representative. www.Coherent.com Printed in the U.S.A. MC-012-07-1M0108Rev.A Copyright © 2008 Coherent, Inc. Coherent, Inc. 5100 Patrick Henry Drive Santa Clara, CA 95054 phone (800) 527-3786 (408) 764-4983 fax (800) 362-1170 (408) 988-6838 e-mail tech.sales@Coherent.com Benelux +31 (30) 280 6060 China +86 (10) 6280 0209 France +33 (0)1 6985 5145 Germany +49 (6071) 9680 Italy +39 (02) 34 530 214 Japan +81 (3) 5635 8700 Korea +82 (2) 460 7900 UK +44 (1353) 658 833 VISIBLE AND INVISIBLE LASER RADIATION. AVOID EYE OR SKIN EXPOSURE TO DIRECT OR SCATTERED RADIATION. CLASS IV LASER RADIATION PRODUCT PER EN60825-1 (1994) MAX. OUTPUT POWER: 900W MAX. OUTPUT ENERGY: 1.5J/pulse PULSE DURATION: 10 to 50 ns WAVELENGTH: 157 to 800 nm ISO 9001:2000 Registered