1666 IEEE JOURNAL OF SOLID-STATE CIRCUITS, VOL. 43, NO. 7, JULY 2008 A Local Passive Time Interpolation Concept for Variation-Tolerant High-Resolution Time-to-Digital Conversion Stephan Henzler, Member, IEEE, Siegmar Koeppe, Dominik Lorenz, Winfried Kamp, Ronald Kuenemund, and Doris Schmitt-Landsiedel, Member, IEEE Abstract—Time-to-digital converters (TDCs) are promising building blocks for the digitalization of mixed-signal functionality in ultra-deep-submicron CMOS technologies. A short survey on state-of-the-art TDCs is given. A high-resolution TDC with low latency and low dead-time is proposed, where a coarse time quantization derived from a differential inverter delay-line is locally interpolated with passive voltage dividers. This high-resolution TDC is monotonic by construction which makes the concept very robust against process variations. The feasibility is demonstrated by a 90 nm demonstrator which uses a 4x interpolation and provides a time domain resolution of 4.7 ps. An integral nonlinearity of 1.2 LSB and a differential nonlinearity of 0.6 LSB are achieved. The resolution restrictions imposed by an uncertainty of the stop signal and local variations are derived theoretically. Index Terms—Digital calibration, digital PLL, high-resolution time interval measurement, passive time interpolation, pulse shrinking, time-to-digital converter (TDC), Vernier TDC. I. INTRODUCTION H IGH-RESOLUTION time-to-digital- converters (TDCs) become increasingly popular for time-of-flight measurements, full speed testing, e.g., jitter measurement, clock data recovery, measurement and instrumentation, and digital phase-locked loops (PLLs) [1]. This arises from the scaling difficulties of mixed-signal circuits in the deep-submicron regime: While voltage levels decrease continuously noise does not scale, so the signal-to-noise ratio (SNR) degrades. The ratio, decreases analog device performance, e.g., the considerably below the 100 nm technology node. Moreover, the application of well known circuit techniques like cascodes is limited for supply voltages of 1.0 V and below. Since most applications have stringent performance requirements in terms of signal-to-noise and distortion ratio, i.e., resolution, the design of mixed-signal building blocks becomes more and more difficult and power intensive. Regarding area, the analog scaling factor considerably lags behind the digital one so the relative portion of analog and mixed-signal blocks increases even if functionality is continuously shifted towards the digital domain. Manuscript received November 21, 2007; revised February 24, 2008. This work was supported in part by the German Federal Ministry of Education and Research (BMBF) under the SIGMA65 project, Grant 01M3080. S. Henzler, S. Koeppe, W. Kamp, and R. Kuenemund are with the Advanced Systems and Circuits Department, Infineon Technologies AG, 81726 Munich, Germany (e-mail: Stephan.Henzler@infineon.com). D. Lorenz and D. Schmitt-Landsiedel are with the Institute for Technical Electronics, Technische Universitaet Muenchen, 80290 Muenchen, Germany. Digital Object Identifier 10.1109/JSSC.2008.922712 On the other hand, digital CMOS circuits take best advantage of technology scaling in terms of area, gate delay, and to some extent power consumption. As technology development is mainly driven by digital requirements this is not surprising, but means that in the deep-submicron regime the scaling of time resolution is superior to voltage resolution [2]. This implies the superior scaling properties of TDCs. In the past most signal processing tasks have been digitized and implemented inside a mixed-signal shell, e.g., consisting of data converters. Currently there is an upcoming trend to digitize parts or even complete mixed-signal blocks. The all-digital PLL [2] for instance is a precursor for this final rush for digitalization. Minimizing the analog portion in such systems means not only better scaling properties but enables completely new options like the reconfiguration of filters or the presetting, storage, and recovery of internal states. In this context TDCs are considered to be important building blocks. Below the 100 nm node the delay scaling decelerates, especially in low-power technologies where leakage currents play an important role. However, the area and delay scaling of digital building blocks are still the drivers for scaling. So mixed-signal systems based on TDCs will benefit most from technology scaling. In this paper, we will discuss a new concept for high-resolution TDCs. The coarse time quantization of an inverter delayline is subdivided by a local passive interpolation (LPI) technique. This enables not only sub-gate-delay resolution but also minimizes the latency and the dead-time of the converter. The delay-line inside the converter is intrinsically monotonic, so the TDC appears to be very robust against process variations. The remainder of this paper is organized as follows. First, an overview on existing TDCs is given in Section II. In Section III the principle of the local passive interpolation time-to-digital converter (LPI-TDC) is explained. Section IV discusses implementation details and Section V describes measurement results for a 90 nm demonstrator. Finally, Section VI discusses the resolution limitations of the converter. II. A SHORT SURVEY ON TIME-TO-DIGITAL CONVERTERS A. Principle of Operation The basic task of a TDC is to quantize the time interval between a start and a stop signal and to provide a digital representation. The difference between a TDC and a simple counter is the high resolution in the order of a few picoseconds. Counters can quantize coarse time intervals by simply counting the number of reference clock cycles fitting into the respective time 0018-9200/$25.00 © 2008 IEEE HENZLER et al.: LOCAL PASSIVE TIME INTERPOLATION CONCEPT FOR VARIATION-TOLERANT HIGH-RESOLUTION TDC interval. However, with increasing resolution requirements the reference clock frequency becomes unreasonably high with respect to power consumption or cannot at all be generated and handled in a CMOS circuit. Time-to-digital converters are asynchronous circuits in a sense that they provide an extremely high time resolution which is not based on an external time reference. As will be shown later, some TDCs do utilize a reference frequency. This reference frequency, however, is used only for calibration or coarse time quantization, but does not determine the overall resolution. The very first TDCs were actually time-to-voltage-to-digital converters [1]. In these converters the time interval to be measured is converted into an analog voltage in a first phase, e.g., by using a charge pump. In a second step, a conventional analog-to-digital converter (ADC) translates the voltage equivalent of the time interval into the digital domain. Although very high resolution has been reported, the attractiveness of these converters decreases for technologies below the quarter micron node. This stems from the fact that the converter itself is mainly an analog circuit. The design challenges in deep-submicron technologies with strongly scaled supply voltages and relatively high threshold voltages are the same as for other mixed-signal circuits. The resolution, the scalability, the robustness and the area and power consumption are limited by the internal ADC, so the time domain yields no profit compared to the voltage domain. One popular TDC approach, especially attractive for deepsubmicron technologies, is the use of digital delay-lines (see Fig. 1) [3]. A start signal propagates along a line of digital delay elements. The output node of each delay element is connected to the data input of a flip-flop or latch. The state of the delay-line is sampled, e.g., on the rising edge of the stop signal. The position of the signal transition, e.g., one-zero transfer in the pseudo thermometer code is visible at the output nodes of the flip-flops, and is a measure for the time difference between the start and the stop signal. The advantages of this circuit are obvious: It uses only two very simple and small cells, namely digital delay elements and flip-flops. The resolution is given by the delay of a digital buffer or inverter. Hence, both the resolution and the area scale according to the digital scaling factors. As there are no current sources, power is only consumed during conversion phase. Most analog design issues which are critical in the time-to-voltage-to-digital converter are considerably relaxed for the delay-line based TDC. Currently, the maximum resolution is achieved with an inverter delay-line. The alternating signal polarity, however, has to be considered during the design of the line: For simple CMOS inverters the delays for rising and falling transitions as well as the signal slopes cannot be matched across all process corners. Tunable delay elements are not desirable as their increased circuit complexity causes a higher delay. An equal difficulty arises from the meta-stability curves for a logical high or low signal at the input of the flip-flops. To circumvent these difficulties two delay-lines or even a differential delay-line connected to totally symmetrical differential flip-flops should be used [see Fig. 1(b)]. The length of the delay-line increases linearly with the time interval to be measured. To avoid a high area and power consumption, a reference clock signal can be used for a coarse time 1667 Fig. 1. Basic structure of a digital delay-line based time-to-digital converter (TDC). Delay elements consisting of CMOS buffers (a) allow for a very regular structure but yield only half the resolution of an inverter based TDC (b). quantization and a TDC for the measurement of the residue at the beginning and the end of the interval [4]. Alternatively, the delay-line may be bent to a ring of delay elements where the rising edge of the start signal propagates cyclically. As will be discussed below, this does not only limit the number of circuit elements but also improves the linearity of the converter. B. TDC Calibration Techniques One difficulty common to all delay-line based TDCs is the dependence of the time resolution on the delay variation caused by global process variations. There are two strategies to cope with this issue. The first one illustrated in Fig. 2 again is an analog approach. The TDC is embedded into a delay-locked loop (DLL) and the delay along the complete delay-line or along an appropriate fraction is locked to the period of a reference signal [5]. The delays may be tuned via the supply voltage or current limiting header and footer devices. Again a considerable amount of analog circuitry has to be added to the system. Thereby, all the analog drawbacks are still present in the TDC design and the area scaling is degraded. The second approach is purely digital: The period of a known reference signal is measured periodically, e.g., during idle periods of the system. The resulting measurement value is used to correct all further measurement results during the digital post-processing. However, the quantization of both the actual measurement and the reference measurement may cause numeric issues like a non-monotonic phase characteristics even if the TDC provides monotonic measurements. This effect is a drawback of the digital calibration but can be mitigated by a sufficiently high resolution. Most applications work with normalized values, anyway: In a digital PLL for instance the time difference between a rising reference edge and a rising edge of the local oscillator is normalized to the period. If both time measurements are done with the same TDC, i.e., subject to the same process variations, the global variation impact cancels out during the digital normalization. 1668 IEEE JOURNAL OF SOLID-STATE CIRCUITS, VOL. 43, NO. 7, JULY 2008 Fig. 2. Time-to-digital converter operated in a delay-locked-loop which makes the overall delay equal to an external time reference independent of process variations or environmental conditions. The loop filter and the charge pump are analog components which is in contradiction to a purely digital approach. Other than that, environmental variations, i.e., voltage and temperature variations, necessitate a regular calibration. However, if this is feasible the digital calibration is nearly for free as the digital infrastructure required for the normalization is already there due to other post-processing tasks [6], [7]. In the GHz domain the signal period is that small that the delay line can be designed long enough to capture a full period? This allows for continuous calibration without the need for calibration intervals. C. TDC Concepts for Sub-Gate Delay Resolution In the deep-submicron regime, increasing leakage currents preclude further constant field scaling. As a consequence the speed leverage of new technologies is moderate, especially in the field of low-power. Hence, without new architectural concepts TDC resolution will not improve significantly for the next couple of technology nodes. Time-to-digital converters with sub-gate delay resolution have been developed for applications that require a resolution higher than one inverter delay. In principle, parallel scaled delay elements [5] may provide a high sub-gate delay resolution. The drive strength or the load of parallel inverters or buffers is slightly modified in order to alter their delay. The drawback with this approach is the missing causal relation among the signal edges occurring at the outputs of the inverters, so local process variations may easily disarrange the switching sequence of the inverters. To some extent a digital correction can compensate for this effect, however, it is difficult for the designer to guarantee for a certain resolution and linearity. The Vernier TDC [8]–[10] utilizes a technique known as the Nonius principle in the context of slide gauges [Fig. 3(a)]. Both the start and the stop signal are delayed in independent delaylines. The delay elements for the stop signal are designed for slightly faster signal propagation than the delay elements for the start signal. Therefore, in each stage the stop signal catches up more and more with the start signal. Early-late-detectors, e.g., flip-flops, detect the buffer stage where the stop signal outruns the start signal, so providing a measure for the initial time difis given by the delay difference ference. The resolution . Assuming local process variations of the buffer delays, the time difference between the start and the stop confidence only if edge in a certain stage is reduced with a . This can be seen as a simple rule of thumb for an upper bound of the TDC resolution. In practice the variations of the early-late-detectors, i.e., of the flip-flops degrade the resolution further. One stage consisting of two buffers, i.e., four inverters, and an early-late-detector is required to re, the consolve one LSB. According to version time increases linearly with the time interval and even hyperbolically with increasing resolution. The same holds for Vernier the area consumption, thus, for large and small TDCs become both slow and area expensive. Another TDC concept which is also based on unequally sized inverters is the pulse shrinking TDC [11] illustrated in Fig. 3(b). First, the start and the stop signal are used to generate a pulse with a pulsewidth equal to the time difference. Again, this pulse propagates in a chain or in a ring of delay elements. Some of these delay elements, the so-called pulse shrinking elements, . After have the property to modify the pulsewidth by one two inverters a pulse with an initial pulsewidth has a mod. For ified pulsewidth given by symmetrical rising and falling delays or for asymmetrical but equal inverters the pulsewidth does not change. However, for unequally sized inverters the pulsewidth is changed by . The input time interval can be measured by detecting the pulse shrinking element after which the pulse vanishes. One pulse shrinking element plus a pulse de, so the latency as well as tector is required to resolve one the power and area consumption rapidly grows with increasing dynamic range and resolution (delay line). To guarantee that the pulsewidth is reduced in each stage even under process variconfidence) the resolution is again limited ations (with a . To limit the length of the chain the pulse to can be also propagated in a looped delay-line with a single pulse shrinking element [11]. As the complete pulse must fit . Even without into the loop, the minimum length is any pulse shrinking elements the pulse width is altered in each due to local process variiteration by HENZLER et al.: LOCAL PASSIVE TIME INTERPOLATION CONCEPT FOR VARIATION-TOLERANT HIGH-RESOLUTION TDC 1669 of several TDCs can be compared by adopting the established for ADC figures of merit, namely for the area, where the power and is the power consumption, the maximum conversion rate, the area, and the effective number of bits. Fig. 3. Basic circuit structure of (a) a Vernier delay-line based TDC and (b) a pulse shrinking TDC. ations. ( describes a normal distribution with mean m and standard deviation .) The pulse shrinking element must at least compensate for the variation induced pulse growing, so the resolution is degraded with increasing dynamic range. Tuneable pulse shrinking elements could avoid this drawback, however, the calibration is much more difficult than the simple tuning of delay-line. D. TDC Performance Metrices Functionally, TDCs are very similar to ADCs except the fact that not a continuous voltage but a continuous time interval is quantized. Hence, all performance figures describing the step function of ADCs (e.g., offset and gain error, differential and integral nonlinearity) may be also used for a TDC characteristics. The dynamic range of a TDC is the maximum time interval that can be measured without any saturation effects. The conversion time or the latency, respectively, describe how long it takes after a start or stop signal before the measurement result is available. The dead time is the minimum time between two acquisitions before a new measurement can be started. For TDCs with sub-gate delay resolution the interpolation factor IF is a useful quantity to review defined by which resolution is provided by the technology and which additional resolution is accomplished by circuit techniques. The noise performance of a TDC is usually described by the single shot precision: If a constant time interval is measured repeatedly, the digital output values vary with a standard deviation that is called single shot precision. The area and power consumption E. Linearity of Delay-Line Based TDCs Global process variations and varying operating conditions affect all delay elements, causing gain and offset errors. By applying a calibration measure these effects can be cancelled out. Local variations like random dopant fluctuation or line edge roughness, however, affect each transistor independently and result in uncorrelated delay variations along the chain of delay elements. These delay variations accumulate along the chain. So the delay of a chain consisting of n elements varies with . Operating the TDC a standard deviation equal to within a DLL makes the overall delay equal to a fixed reference delay. This reduces the maximum uncertainty by a factor of which is a moderate benefit compared to the considerable effort required for the DLL (see Fig. 4 for schematic illustration). A better linearity can be achieved by keeping the delay-line as short as possible. A high dynamic range is preserved by folding the chain into a loop, so the start signal can traverse the same delay-line multiple times. A counter determines the number of loop cycles. Depending on the TDC approach a loop configured as ring oscillator or as ring-shaped shift register which propagates pulses is possible. Consequently, for good linearity a short delay-line in a loop configuration should be applied. However, in a looped TDC the layout is a very critical point as the feedback path causes asymmetries and so nonlinearity. Another critical point is the control logic of the loop. As the stop signal is completely asynchronous to any other signal in the TDC the sampling of this stop signal and the disabling of the loop counter is very important [7]. A LSB error in the loop counter is not acceptable because it corresponds to a full cycle of the TDC and is therefore not an LSB error of the overall result. III. PRINCIPLE OF LPI TIME-TO-DIGITAL CONVERSION The local passive interpolation TDC achieves a sub-gate delay resolution by subdividing the coarse time interval given by an inverter delay line. The basic principle is similar to the voltage interpolation in interpolating flash or folding ADCs [12] and is illustrated in Fig. 5. Assume two rising signal . Single-stage transitions with a skew of one inverter delay CMOS gates provide a signal transition time in the order of the gate delay. If the rise-time is larger than the gate delay, the second signal starts rising while the first signal still increases. defined by A new signal (1) shows its transition in between those of the two generating sigand . Together with a comparator latch detecting the nals crossing of the midlevel, the new signal can be used to quantize and . A passive voltage dithe time interval in between vider as shown in Fig. 6 can be connected between and to generate the interpolated signals defined by (1). Parallel sampling gives a high-resolution thermometer code but at the same low latency and dead-time as for the coarse inverter based TDC. 1670 IEEE JOURNAL OF SOLID-STATE CIRCUITS, VOL. 43, NO. 7, JULY 2008 Fig. 4. Uncertainty of the signal arrival time at a certain node in a delay-line caused by process variations. Uncorrelated variations accumulate along the chain, so long delay-lines suffer from large uncertainty. A gain compensation, e.g., by a DLL approach, or a short delay-line configured in a loop reduce this uncertainty. Fig. 5. Principle of time step interpolation by creating intermediate edges in between two logically equivalent signals with a skew of one inverter delay T . Fig. 6. Possible implementations of resistive interpolators. Resistor based interpolator (left) and diode based interpolator with reset transistors (right). In contrast to the Vernier and pulse shrinking TDC this means that the measurement time does not increase with increasing resolution. It is worth mentioning that the time interpolation in the LPI-TDC is monotonic by construction. The sequential inverter chain is monotonic even under strong variations due to the causality in the delay line [6]. The interpolated signals are linear dependent on the signals generated by the inverters. The passivity assures a monotonic local interpolation as an interpolated signal is always smaller than all interpolated signals further above in the interpolator and always larger than all signals below. The interpolated signal is exactly parallel to the generating signals and only in the middle of the transition region. Indeed this is sufficient as the comparators detect the crossing of the midlevel only. The passive interpolation is also the reason why the LPI TDC is said to be robust against local variations. If the delay of an inverter stage varies, the passive interpolation translates this variation to a subdivided variation of the intermediate signals. The sequence of the interpolated signals remains unchanged even for strongly varying resistors. The switching sequence of parallel scaled delay elements for example can be disordered by local variations. This may result in missing codes in the converter characteristic. Local variations also alter the sampling behaviour of the comparators which HENZLER et al.: LOCAL PASSIVE TIME INTERPOLATION CONCEPT FOR VARIATION-TOLERANT HIGH-RESOLUTION TDC 1671 Fig. 7. Design tradeoff for the passive interpolators between good linearity and low power consumption. Fig. 8. Truly monotonic differential inverter delay-line illustrating the principle of local passive time interpolation (LPI). The coarse transitions generated by the inverters are further resolved by monotonic voltage dividers. Differential sense amplifiers sample the chain on a rising edge of the stop signal. may disorder the switching sequence of all types of TDCs. Therefore, the sampling elements must be carefully designed. The voltage divider formula according to (1) holds only if there is no current drawn from the intermediate nodes. However, the intermediate nodes are loaded by the input capacitances of the sampling elements. For the interpolated signals to follow the input signals instantaneously, the resistor values have to be low enough. A good starting point for the circuit optimization can from to , where be derived by the Elmore delay is the lowest interpolation voltage, i.e., in Fig. 6: (2) where is the capacitance at the interpolation nodes and is the rise-time of the original signal. As small resistors mean large cross currents there is a tradeoff between a good linearity and a low power consumption. Fig. 7 illustrates this tradeoff. For the case on the left-hand side, the resistor values are to large which results in a weak interpolation. On the right-hand side, the interpolation is much better, but the power consumption illustrated by the current profile in the resistors is also higher. The figure in the middle shows a tradeoff between an acceptable nonlinearity and power consumption. Two logically equivalent signals with a skew of only one incannot be realized with single ended static verter delay CMOS logic. The large delay of buffers would require unattractively low signal slopes. Hence, according to Fig. 8 two coupled inverter chains are used to propagate both the start signal and the inverted start signal. Now, two rising signals with a skew of are available at a node A in the first delay chain and at the output node B of the subsequent inverter in the second delay chain. Therefore, the delay chain in Fig. 8 provides a set of skewed and a set of skewed copies of copies of the start signal aligned to the first set. The aligned the inverted start signal and complementary signals at the inputs of the chain are generated by a balanced clock splitter. On the rising edge of the stop signal the state of the LPI delay chain is sampled by differential comparators connected to the pairs of complementary signals . A LPI delay line according to Fig. 8 can be combined with any existing TDC architectures, for instance the multistage TDC [9] or the reference recycling TDC [5]. It can be used open-loop, in a ring or in a DLL structure. In contrast to Vernier [8] or 1672 IEEE JOURNAL OF SOLID-STATE CIRCUITS, VOL. 43, NO. 7, JULY 2008 Fig. 9. Layout cutout of the LPI delay chain with delay elements (1), polysilicon resistors (2), and sense-amplifiers (3). Latches and clock tree are located in a different power domain and substrate well than the delay chain. pulse shrinking [11] TDCs both the latency and the dead-time are extremely low, i.e., equivalent to a basic delay-line TDC with coarse quantization. The complete thermometer code is available one clock-to-Q delay of the sampling latches after the stop edge and no deskewing is required. The overall latency depends on the digital post processing. A new conversion can be triggered as soon as the thermometer code is latched into the post processor. For the same resolution the LPI chain is by a factor of IF (level of local interpolation) shorter than a Vernier chain. This allows for area and power efficient TDCs and improves linearity. IV. IMPLEMENTATION ASPECTS AND DEMONSTRATOR The linearity of ohmic resistors makes salicide blocked polysilicon resistors the first choice for the interpolators. Integrated resistors are said to be (area) expensive and inaccurate. However, as the time constants for charging the intermediate nodes must be lower than the rise time of the base signals the resistors are small and the resistor length is usually limited by the design rules related to the salicide blocking mask. The interpolation is defined by a resistor ratio. Hence, global resistance variations are not critical. No additional process steps are required as salicide blocking is usually needed for ESD devices anyhow. Thermal noise in the resistors causes kT/C noise at the inputs of the comparators. However, due to the large signal slopes in the order of one inverter delay the noise voltage translates into a negligible time uncertainty. PN-diodes have been checked to allow for compact interpolator implementations (Fig. 6). Depending on the orientation of these diodes, only rising or falling signals can be interpolated and the internal nodes must be discharged by reset transistors before the next interpolation event. Transistor based interpolators, i.e., transmission gates or diode connected transistors require relatively large devices and suffer from voltage dependent resistance especially for medium voltages. As the gate of these transistors has to be connected to a constant potential the layout becomes less symmetrical compared to ohmic resistors. A 7-bit TDC is implemented in a 90 nm standard CMOS technology with a nominal supply voltage of 1.2 V. A fourfold local passive interpolation uses polysilicon resistors. For matching reasons a fully symmetrical interdigitated layout style is used for the two delay chains (Fig. 9). All signal wires are completely Fig. 10. Dependence of flip-flop delay on signal arrival time for nominal process parameters (right) and local process variations (left). For TDC applicais relevant (not the classical setup time used for tions the blackout time T the timing description of flip-flops in synchronous circuits). shielded to avoid cross coupling which would degrade the alignment of the complementary signals even in a symmetric design. Cross-coupled inverters are inserted as coupling elements to assure the phase alignment under local parameter variations. Any skew of the local stop signals results in a nonlinearity of the converter characteristics. Thus, the stop signal is distributed via an H-tree in which all driver outputs of the last two levels are connected (clock mesh). The latency along the tree results in an offset error of the converter characteristics which is compensated in the digital domain. The delay chains are located in an insulated substrate well (triple well process). A heavily decoupled power supply network separated from the power supply of the sampling flip-flops and the distribution tree of the stop signal allows for monotonic signal propagation in the chain. So the distribution of the stop signal and the activity of the flipflop cannot cause nonlinearities in the converter characteristics. Power supply noise may degrade the dynamic resolution of the TDC. Nonetheless, the low delay of basic inverters makes them the first choice for TDC applications even if other delay elements like differential amplifiers are preferable with respect to power supply rejection. Sense amplifier based flip-flops [13] with fully symmetrical layout and symmetrical connections to the delay chain are used as sampling elements. The precharge of the internal senseamp nodes avoids history effects from prior conversions. The footer and the differential pair and in Fig. 8 transistor over curve shown in are large to achieve the sharp Fig. 10 and to minimize comparator offset. This sharp characteristic is essential to preserve the high resolution of the delay chain during the sampling process. In conventional logic designs the data signal fed to a register must be stable at least the setup time prior to the clock signal. In a TDC however, there is always a comparator, namely in the region of the signal transition, where the data signal arrives very late. Hence, in TDC HENZLER et al.: LOCAL PASSIVE TIME INTERPOLATION CONCEPT FOR VARIATION-TOLERANT HIGH-RESOLUTION TDC 1673 Fig. 11. On-chip measurement unit to stimulate the TDC and to map the TDC measurement result to an absolute time interval. applications the setup time is meaningless. More relevant is the data-to-clock time where the registers fail completely to sample the input signal. We refer to this particular data-to-clock interval . Due to the setup time violations in the as blackout time TDC, metastability is an issue when the measurement result is over transferred into a synchronous logic domain. A sharp curve reduces the risk of metastability in the comparators. Other than that Fig. 10 shows the impact of local process variations on the metastability curves of the comparators and so on the blackout time. This variation causes a sampling uncertainty and limits the maximum resolution of the TDC. provided To convert the pseudo thermometer code word is first by the comparators to a digital phase information, passed to a bubble correction stage which removes erroneous transitions. In a next step, the thermometer code is converted to a binary representation. V. EXPERIMENTAL VERIFICATION The acquisition of a TDC characteristics requires a time interval sweep, i.e., the time interval between the start and the stop signal has to be increased with a picosecond accuracy. Two independent signal sources are not suitable because they suffer from uncorrelated jitter. In this paper the on-chip characterization unit shown in Fig. 11 is used to stimulate the TDC. Therefore, a single signal edge is propagated in two independent delay chains providing a start and a stop signal to the TDC. The delay of the first delay line is fixed, whereas the second delay line can be tuned. A coarse tuning is achieved by inserting additional delay elements into the signal path. A fine delay tuning with a resolution below one buffer delay is enabled by an additional analog delay line consisting of current starved inverters. The TDC characteristics which includes all nonlinearity information is acquired by repeated TDC measurements with increasing time delay along the second delay line. However, the absolute time interval corresponding to a certain output word, and so the absolute time resolution of the TDC cannot be extracted from these measurements. For that purpose, the delays along both delay lines and so the skew between the start and the stop signal are to be measured separately. This is done by connecting both delay lines in a ring-oscillator-like structure. The number of cy, e.g., derived from cles during a well-known time interval the system quartz, is counted. The skew between a signal propagated along the first and along the second delay line is then determined according to where and are the number of cycles of the first and second ring-oscillator, respectively. The combination of these two measurements results in a converter characteristic with absolute time reference. Fig. 12 shows the resulting step function which is measured for the 90 nm demonstrator [7]. With a supply voltage of 1.2 V the resolution is 4.7 ps. Fig. 13 and Fig. 14 show the integral nonlinearity (INL) and the differential nonlinearity (DNL), respectively. The maximum values of LSB and LSB show that the 4x interpolation was a reasonable choice and encourages for an even higher resolution. A comparison of these measurement results with recently published TDCs is given in Table I. It can be seen, that among the variation robust concepts the best resolution and linearity is achieved. The power and area values are 1674 IEEE JOURNAL OF SOLID-STATE CIRCUITS, VOL. 43, NO. 7, JULY 2008 Fig. 14. Measured differential nonlinearity. Fig. 12. Measured converter characteristics. Fig. 15. Sampling in the vicinity of the signal transition. Fig. 13. Measured integral nonlinearity. also very good. However, the comparison is difficult as it is often not clear which peripheral components are included in the published values. VI. RESOLUTION LIMITS Local passive interpolation theoretically allows for an arbitrary fine resolution. Nevertheless, the actual resolution is limited by delay variations in the LPI delay chain and the variations of the sampling time. In this context only local variations have to be considered as global variations are cancelled out either by a DLL approach or by normalization to the clock period in the digital domain. Hence, the limitations due to local variations around the global process corner of interest are investiof the gated next. As shown in Fig. 10, the blackout time sampling latches is negative and the actual sampling instance is . Both the arrival time of the stop given by vary locally with the standard signal and the blackout time and . Assuming uncorrelated Gaussian disdeviations tributions, varies with . The inverter delays vary independently with a standard deviation . However, the signal arrival times are strongly correlated as local delay variations accumulate along the chain. The signal . If arrival time after the th inverter varies with a maximum integral nonlinearity of is requested with a confidence of three sigma this results in an upper res. Fig. 15 takes addiolution limit of tionally the clock variation into account. All times are subject to with mean value and standard Gaussian variations deviation according to HENZLER et al.: LOCAL PASSIVE TIME INTERPOLATION CONCEPT FOR VARIATION-TOLERANT HIGH-RESOLUTION TDC 1675 TABLE I COMPARISON OF RECENTLY REPORTED TDC PERFORMANCES VII. CONCLUSION Fig. 16. Error probability of delay-line sampling under process variations. where describes the position of the stop edge ] and the local variawithin the interval [ tion of the th inverter stage. The sampling instances are (common path in the composed of a correlated component clock-tree) and an uncorrelated component (which reflects itself as an independent component in the blackout time variation of each latch). Integrating the product of the independent probability density functions under the boundary conditions and results in the probability for correct operath tion, i.e., the th latch samples a HIGH signal and the latch a LOW signal. . The Fig. 16 shows scenario simulations for various standard deviation of the sampling instance is normalized to . For the delays is assumed. It can be seen that for resolutions below 5 [AU] no reliable decision is possible throughout the complete interval. With this investigation the maximum acceptable variability of the delay elements and the sampling instance can be estimated. As the scaling of time resolution is superior to voltage resolution the need for high-resolution TDCs will certainly increase. However, high-precision TDCs are not simply digital circuits off-the-shelf which can be designed quickly or even synthesized automatically. As the operating principle is digital all the advantages of digital circuits apply to the TDC. The design, however, has to be done in a full-custom style, i.e., considering the analog signal waveforms, signal synchronization, etc., and keeping analog criteria like noise, power supply integrity and matching in mind. Also technological aspects like variations have to be taken into account. In this paper we have presented a local passive time interpolation technique for high-resolution TDCs with minimum latency and minimum dead-time. The feasibility, potential and resolution limitations have been demonstrated on the basis of a 90 nm, 1.2 V TDC implementation with a resolution of 0.25 inverter delays. The maximum measured nonlinearity, namely the INL of only 1.2 LSB and the DNL of only 0.6 LSB show that a sub-gate delay resolution can be accomplished reliably with the local passive interpolation technique. This enables TDCs with a very high resolution even if the delay scaling might decelerate in future low-power technologies. REFERENCES [1] E. Raisanen-Ruotsalainen, T. Rahkonen, and J. Kostamovaara, “A high resolution time-to-digital converter based on time-to-voltage interpolation,” in Proc. 23rd European Solid-State Circuits Conf. (ESSCIRC), 1997, pp. 332–335. [2] R. Staszewski et al., “All-digital TX frequency synthesizer and discrete-time receiver for Bluetooth radio in 130-nm CMOS,” IEEE J. Solid-State Circuits, vol. 39, no. 12, pp. 2278–2291, Dec. 2004. [3] R. B. Staszewski, S. Vemulapalli, P. Vallur, J. Wallberg, and P. T. Balsara, “1.3 V 20 ps time-to-digital converter for frequency synthesis in 90-nm CMOS,” IEEE Trans. Circuits Syst. II, Expr. 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Rahkonen and J. T. Kostamovaara, “The use of stabilized CMOS delay lines for the digitization of short time intervals,” IEEE J. SolidState Circuits, vol. 28, no. 8, pp. 887–894, Aug. 1993. [9] V. Ramakrishnan and P. T. Balsara, “A wide-range, high-resolution, compact, CMOS time to digital converter,” in Proc. 19th Int. Conf. VLSI Design (VLSID’06), Jan. 2006, 6 pp. DOI 10.1109/VLSID.2006.28. [10] P. Dudek, S. Szczepanski, and J. Hatfield, “A high-resolution CMOS time-to-digital converter utilizing a Vernier delay line,” IEEE J. SolidState Circuits, vol. 35, no. 2, pp. 240–247, Feb. 2000. [11] P. Chen, S. I. Liu, and J. Wu, “A CMOS pulse-shrinking delay element for time interval measurement,” IEEE Trans. Circuits Syst. II, Analog Digit. Signal Process., vol. 47, no. 9, pp. 954–958, Sep. 2000. [12] J. van Valburg and R. J. van de Plassche, “An 8-b 650-MHz folding ADC,” IEEE J. Solid-State Circuits, vol. 27, no. 12, pp. 1662–1666, Dec. 1992. [13] B. Nikolic et al., “Improved sense-amplifier-based flip-flop: Design and measurement,” IEEE J. Solid-State Circuits, vol. 30, no. 6, pp. 876–884, Jun. 2000. [14] M. Lee and A. A. Abidi, “A 9b, 1.25ps resolution coarse-fine time-todigital converter in 90nm CMOS that amplifies a time residue,” in Symp. VLSI Circuits Dig. Tech. Papers, 2007, pp. 168–169. [15] B. M. Helal, M. Z. Straayer, G.-Y. Wei, and M. H. Perrot, “A low jitter 1.6 GHz multiplying DLL utilizing a scrambling time-to-digital converter and digital correlation,” in Symp. VLSI Circuits Dig. Tech. Papers, 2007, pp. 166–167. Dominik Lorenz received the Dipl.-Ing. degree in electrical engineering from the Technical University of Munich (TUM), Germany, in 2007. From 2006 to 2007, he was with Infineon Technologies, Advanced Systems and Circuits Department, where he worked on time-to-digital converters. In 2007, he joined the Institute for Electronic Design Automation, Technical University of Munich, where he is currently working towards the Dr.-Ing. degree. His research interests are in reliability of integrated circuits, especially the age-related performance degradation of digital circuits. Stephan Henzler (M’06) received the Dipl.-Ing. degree in electrical engineering from the Technical University Munich (TUM), Germany, in 2002, and the Dr.-Ing. degree in 2006. From 2002 to 2005, he was with the Institute for Technical Electronics, Technical University Munich, where he worked on low-power digital integrated circuit design and leakage reduction techniques. In 2005, he joined the Advanced Systems and Circuits Department of Infineon Technologies AG, Munich, where he works on high-speed/high-performance digital integrated circuits, power-aware design and variability in deep-submicron CMOS technologies. He has authored or co-authored more than 30 technical publications, and holds several patents. He is a visiting Lecturer at TUM for high-speed/high-performance digital circuit design. Dr. Henzler is a member of the German Association of Electrical Engineers (VDE) and the IEEE. Ronald Kuenemund was born in Munich, Germany, in 1958. He received the Dipl.-Ing. degree in electrical engineering from the Technical University of Munich, Germany, in 1985. In 1985, he joined the Central Research and Development department of Siemens AG in Munich, where he worked on the design of CMOS circuits for digital signal processing. With the foundation of Infineon Technologies AG in 1999, he moved to the Corporate Logic Department where he worked on application-specific digital full-custom circuits. He is currently working as Senior Staff Engineer on CAD and methodology for digital full-custom design in the Base Technology and Services department at Infineon, Munich, Germany. Siegmar Koeppe received the Diploma in electrical engineering from the University of Hannover, Germany, in 1983. After working three years as a research assistant in the field of fault modelling and simulation of digital CMOS circuits, he joined Siemens Research Labs, Munich, Germany, in September 1987. His activities cover concept engineering, circuit design, characterization, test strategies, and project management. He has contributed to many projects, mainly in the area of digital full-custom design. His current interests are the design of high-speed circuits and topics of test and fault modeling and simulation. He holds around 24 patents worldwide. In 2004, Mr. Koeppe was appointed “Principal Advanced Systems and Circuits.” Winfried Kamp received the Diploma in computer science from the Technical University of Darmstadt, Germany, in 1984. He joined Siemens Research Labs, Munich, Germany, in January 1985. Since 1999, he has been with Infineon Technologies in several predevelopment departments. His activities cover concept engineering, circuit design and verification, design flow automation for digital full-custom design, and project management. He has contributed to many projects, mainly in the area of digital full-custom design. His current interests are new design methodologies at the interface between digital full- and semi-custom designs. He is head of the Digital Full-Custom Design Department. In 2001, Mr. Kamp was appointed “Principal Advanced Macros and Architectures.” Doris Schmitt-Landsiedel (M’80) received the Dipl. Ing. degree in electrical engineering from the Technical University of Karlsruhe, Germany, the diploma in physics from the University of Freiburg, Germany, and the Dr. rer. nat. degree from the Technical University of Munich, Germany. She joined the Corporate Research and Development Department of Siemens AG, Munich, in 1981. There she worked on scaling problems in MOS devices and on the design of high-speed logic and SRAM circuits. Since 1989, she has been Manager of a research section with projects in future generation memory design, analog and digital CMOS and BICMOS circuits, and design-based yield analysis. Since 1996, she has been a Professor of electrical engineering and Director of the Institute for Technical Electronics at the Technical University of Munich. She is a member of the German Scientific Council. Her research interests are in microelectronics including mixed-signal and low-power circuits design, design for manufacturability, and circuits with novel devices.