A HIGH dI/dt CMOS DIFFERENTIAL OPTICAL TRANSMITTER FOR A LASER DIODE APPROVED: ____________________________________ Martin A. Brooke, Chairman ____________________________________ Joy Laskar ____________________________________ Russell Callen ____________________________________ Thomas Habetler ____________________________________ ?????? Date approved by chairman:_____________ TABLE OF CONTENTS ACKNOWLEDGMENTS ......................................................................... iii LIST OF TABLES .................................................................................... vii LIST OF FIGURES ................................................................................. viii SUMMARY ..................................................................................... xi Chapter I INTRODUCTION .............................................................. 1 Chapter II BACKGROUND ................................................................ 7 2.1 Optical Interconnect Systems and Optical Media................... 7 2.2 Optical Sources ..................................................................... 10 2.3 Optical Transmitters.............................................................. 14 2.4 Eye Diagram ......................................................................... 19 Chapter III Through-Silicon Optical Interconnect Systems .................... 23 3.1 Introduction and Applications............................................... 23 3.2 Optical Devices..................................................................... 25 3.3 Single-Ended Transmitter Design......................................... 28 3.4 Single-Ended Receiver Design ............................................. 31 3.5 Two-Layer Systems .............................................................. 34 3.6 Three-Layer Systems ............................................................ 38 Chapter IV DIFFERENTIAL LASER DRIVER..................................... 41 4.1 Introduction........................................................................... 41 4.2 Differential Transmitter Design............................................ 44 ii 4.3 Simulations ........................................................................... 48 4.4 Layout .................................................................................. 52 4.5 Scalability ............................................................................. 53 Chapter V PACKAGING PARASITIC CONSIDERATION................ 55 5.1 Introduction........................................................................... 55 5.2 Background ........................................................................... 57 5.3 Modeling of the Parasitics .................................................... 59 5.4 Differential Topology ........................................................... 65 5.5 Decoupling Capacitors.......................................................... 67 5.6 Parasitic Effect Simulation ................................................... 69 5.7 Chip Layout .......................................................................... 74 5.8 Measurements ....................................................................... 76 Chapter VI A DIFFERENTIAL LASER DRIVER FOR LVDS STANDARD......................................................................... 85 6.1 Introduction and Application ................................................ 85 6.2 Differential Transmitter Design for LVDS Standard............ 87 6.3 Simulation and Layout.......................................................... 91 Chapter VII CONCLUSIONS AND PROPOSED FUTURE RESEARCH........................................................................... 96 6.1 Contribution ........................................................................... 96 6.2 Future Research ..................................................................... 99 6.3 Conclusions.......................................................................... 101 iii Appendix A BRIEF LVDS SPECIFICATION ................................... 103 Appendix B EDGE EMITTING LASER FABRICATED IN GEORGIA TECH ........................................................... 105 Appendix C HSPICE INPUT CONTROL FILES AND BSIM MODEL PARAMETERS USED IN SIMULATION..... 111 REFERENCES .................................................................................. 143 VITA .................................................................................. 153 iv LIST OF TABLES Tables Page 1.1 List of recently published optical transmitters..................................... 3 4.1 Design specification of the differential laser driver........................... 43 5.1 The parameter values for the model of bonding wires ...................... 60 5.2 The length and width of metal strips in PCB..................................... 62 5.3 The value of parasitic model.............................................................. 64 6.1 Design specification of the differential laser driver for LVDS.......... 86 7.1 The performance comparison of the transmitter in this research with recently published transmitters .................................................. 97 v LIST OF FIGURES Figures Page 2.1 A block diagram of a typical optical communication system.............. 8 2.2 The light output versus current characteristic of Laser and LED ...... 12 2.3 An example of the LED driver circuit I ............................................. 15 2.4 An example of the LED driver circuit II............................................ 15 2.5 An example of the laser driver I ........................................................ 18 2.6 An example of the laser driver II ....................................................... 18 2.7 Characteristics of an eye diagram ...................................................... 20 2.8 SONET eye diagram mask................................................................. 22 3.1 Diagram of vertical optical interconnect system ............................... 24 3.2 Illustration of the optical device integration on Si circuit substrate .. 26 3.3 Circuit schematic of single-ended transmitter ................................... 28 3.4 The microphotograph of the transmitter with integrated LED .......... 30 3.5 The measured eye diagram of the integrated transmitter at 155 Mbps .................................................................................... 30 3.6 Overall circuit schematic of the receiver ........................................... 31 3.7 The microphotograph of the receiver with integrated I-MSM detector.................................................................................. 32 3.8 The measured eye diagram of the integrated receiver at 155 Mbps .. 33 vi 3.9 Test setup block diagram for through-wafer system.......................... 35 3.10 The microphotograph of the OEIC for two-layer system .................. 36 3.11 The microphotograph of the two-layer system .................................. 36 3.12 The measured eye diagram of two-layer system at 10 Mbps............. 37 3.13 The measured eye diagram of two-layer system at 40 Mbps............. 37 3.14 Layout of the OEIC for three-layer system........................................ 39 3.15 Microphotograph of three-layer system............................................. 40 3.16 The measured eye diagram of three-layer system at 1 Mbps............. 40 4.1 Design procedure of differential transmitter...................................... 42 4.2 A differential laser driver................................................................... 46 4.3 The optimization in terms of the transistor size................................. 47 4.4 Equivalent Model of a laser diode ..................................................... 48 4.5 Transient response of 1 Gbps differential laser driver....................... 49 4.6 Temperature simulation at 27 and 200 degree................................... 50 4.7 Transient response of differential laser driver at 2 Gbps................... 51 4.8 MAGIC layout of the driver .............................................................. 52 4.9 MAGIC layout of the driver using 0.18 µm technology.................... 54 4.10 Transient response of differential driver at 10 Gbps ......................... 54 5.1 The example of the delta-I noise in a circuit...................................... 58 5.2 The PCB for the driver testing ........................................................... 61 5.3 The diagram of metal strip in PCB .................................................... 62 5.4 The final equivalent model of packaging........................................... 63 5.5 Bias current comparison between single-ended and differential vii drivers ................................................................................. 66 5.6 The model of the capacitor ................................................................ 68 5.7 Parasitic impedance effect simulation ............................................... 70 5.8 Output signal with the ideal decoupling capacitor............................. 71 5.9 Output signal with the real model of 10 nF decoupling capacitor..... 72 5.10 Cadence layout of the chip submitted to fabrication ......................... 75 5.11 The block diagram of the test structure.............................................. 77 5.12 Microphotograph of the chip ............................................................. 78 5.13 Test board with a bonded chip ........................................................... 79 5.14 622 Mbps pulse waveform................................................................. 82 5.15 622 Mbps eye diagram....................................................................... 82 5.16 900 Mbps pulse waveform................................................................. 83 5.17 900 Mbps eye diagram....................................................................... 83 5.18 1 Gbps pulse waveform ..................................................................... 84 5.19 1 Gbps eye diagram ........................................................................... 84 6.1 The differential amplifier for the pre-driver stage ............................. 89 6.2 The overall schematic of the driver for LVDS .................................. 90 6.3 Transient response of LVDS compatible differential laser driver at 1 Gbps ................................................................................... 92 6.4 The layout of the overall driver for LVDS ........................................ 93 6.5 The final layout of the whole chip submitted to fabrication.............. 94 6.6 Microphotograph of the chip for LVDS compatible driver ............... 95 viii SUMMARY As high data rate and large throughput are necessary in telecommunication systems, optical communication systems have become attractive solutions to cope with bottleneck of the electrical communications. In optical communication systems, an optical transmitter is one of the key components, where it performs as the interface between the electronics and the emitters. It is very challenging to design optical transmitters since its requirements of large output current and high speed are contradictory, necessitating a large driving signal and large output transistors. To date, the majority of optical transmitters have been designed using GaAs HBT or GaAs MESFET due to wider bandwidth and good quality of passive components. However, the standard digital CMOS technology provides advantages such as low power, low cost of fabrication due to high yield, and a higher degree of integration. Thus, Si CMOS technology, which is well known for low cost and high density is preferred for design of optoelectronic circuitry. This thesis describes the development of a high dI/dt differential transmitter meeting greater than 1 Gbps data rate for free-space optical communication. Since the performance of the system is limited by unwanted packaging parasitics as the data rate is increased, the equivalent circuit model of parasitics is developed and incorporated in the design process. To overcome the effect of parasitics, the solution using a decoupling capacitor is suggested and verified in the simulation and measurement. To test optical transmitters, chip-on-board (COB) technology is employed and printed circuit board (PCB) is designed and manufactured for it. In addition, the optical transmitter compatible with low-voltage differential signal (LVDS) that is one of the IEEE standards is introduced. The simulation results show that the transmitter can meet the 1 Gbps data rate. ix 1 CHAPTER I INTRODUCTION As high data rate and large throughput are necessary in telecommunication systems, optical communication systems have become attractive solutions to cope with bottleneck of the electrical communications [1-6]. Compared to the conventional electrical counterparts, optical communication can provide larger bandwidth, smaller channel crosstalk, shorter interconnection delays, and lower levels of power consumption. Thus, it is commonly used in digital transmission system such as long and short haul tele-communication and data communication, and also used in many applications such as optical storage system, printers, and cable TV [7]. The typical optical communication system consists of a transmitter, optical source, transmission media, a detector, and a receiver [8]. In such a system, an optical transmitter is one of the key components, where it performs as the interface between the electronics and the emitters. It is very challenging to design optical drivers since its requirements of large output current and high speed are contradictory, necessitating a large driving signal and large output transistors. Therefore, suitable circuit structures, 2 suitable decoupling techniques, and a series of optimization steps are necessary for optical transmitters. To date, to attain the high-speed data rates, many researchers have designed and fabricated optical transmitter using various technologies different applications such as GaAs MESFETs, AlGaAs/GaAs HEMTs, AlGaAs/GaAs HBTs, Si Bipolar transistors, or SiGe Bipolar transistors [9-18] as shown in Table 1.1. However, those technologies are not compatible with the non-optoelectronic digital circuits that are widely used in telecommunications. The enormous development of research in the field of optical transmitter in different technologies is not only because bipolar or GaAs transistors usually provide wider bandwidth, but also because the process technology associated with these transistors can provide relatively good quality of passive components such as resistors and capacitors. However, standard digital CMOS technology provides advantages such as low power, low cost of fabrication due to high yield, and a higher degree of integration which gives more function blocks in a given size [19]. In the past years, standard digital CMOS technology has been steadily improved [20,21], and therefore, is intruding the area of other technologies. In addition, new technology such as Epitaxial-Lift-Off (ELO) [22-26] is now available to integrate a hybrid-material device into a silicon material substrate. This technology enables to achieve low cost and high-speed optical communication systems. 3 Table 1.1. List of recently published optical transmitters Channel Length Ref. Process or Optical Source Speed [Gbit/s] Max. Output Current or Output voltage Eye Diagram BER Remark fT [3] Si Bipolar 0.6 um Off-chip Laser 5 45 mA Yes No -Electrical test [4] GaAs MESFET 0.5 um LiNbO electro-optic Moculator 5 36 mA Yes No -Measured in package Modulator 20 [5] AlGaAs/GaAs HBT 105 GHz -Electrical test 4 Vpp Yes No -On-wafer measure -Electrical test [6] AlGaAs/GaAs HEMT 0.3 um On-chip Laser 20 90 mA Yes No - Measured in package -Electrical test [7] AlGaAs/GaAs HEMT 0.2 um Modulator 30 2.2 Vpp Yes No - Measured in package -Electrical test [9] CMOS 0.5 um On-chip VCSEL 2.5 1.6 mA Yes Yes -Optical test [10] CMOS 1.2 um On-chip Laser 1 1.2 mA Yes Yes -Optical test [11] CMOS 1.0 um On-chip VCSEL 0.622 40 mA Yes No -Optical test [31] SiGe Bipolar 0.3 um Modulator 23 2 Vpp Yes No - Measured in package -Electrical test [32] SiGe Bipolar 0.2 um Modulator 20 0.8 Vpp Yes No - On-wafer measure -Electrical test [33] CMOS 0.8 um Laser 2.5 40 mA No No - On-wafer measure -Electrical test [34] CMOS 0.35 um VCSEL 1 NA No No -Simulation results 4 Consequently, Si CMOS technology, which is well known for low cost and high density is preferred for design of optoelectronic circuitry. Several CMOS driver circuits have been previously reported for high-speed operation but they have provided small output current to a laser to achieve high-speed [27-34]. As the data rate is increased, the performance of the system is limited by packaging parasitics [35,36]. The output of optical transmitter is degraded when packaging parasitics are combined with abrupt current ripple in bias lines. However not enough research has been done on packaging parasitics with optical transmitter design. Thus, thorough research is necessary to address the related issues such as the simultaneous switching nose. Also, the extraction of packaging parasitics is required. The primary objective of this research is to develop an differential optical transmitter suitable for high-speed and high-power using standard digital CMOS technology. The CMOS optical transmitter will be hybrid integrated with an edge emitting laser using ELO technology. It is low cost at a given die size, easy to manufacture, and meets high-speed requirement on optical communication. In this research, two types of optical transmitters are introduced to achieve the objective. First one is a scaleable, high dI/dt differential transmitter to meet greater than 1 Gbps data rate. Second one is the optical transmitter compatible with low-voltage differential signal (LVDS) that is one of the IEEE standards to meet 1 Gbps data rate. To test optical transmitters, chip-on-board (COB) technology is employed and printed circuit board (PCB) is designed and manufactured for it. With this technology, 1Gbps 5 performance of the first differential transmitter was achieved with 10-11 bit-error-rate (BER) electrically due to the poor laser development. This dissertation consists of 7 chapter. In chapter 2, background to design an optical transmitter is reviewed. The brief description of optical communication systems are reviewed and the each components related to optical transmitters are described. Basic technologies of design optical transmitters for LED’s and lasers are presented and the advantages and disadvantages of each design methods are addressed. A LED and a laser are briefly compared. As criteria of evaluating the performance of optical transmitters, eye diagram is discussed. Chapter 3 starts with discussion of through silicon optical interconnect system which is an example of free space optical communication. The MSM photodetector and InP LED, which is integrated onto the circuit substrate using ELO technology are described followed by the optical receiver and transmitter circuitry. Also, the test strategy and methods used for verifying the performance of the system is described. Finally, 2 and 3 layer through silicon systems are implemented and the details of operation including layout, integration of detector, and measurement results are presented. Chapter 4 addresses the development and application of a scaleable differential laser transmitter. The design, simulation, and layout of the differential transmitter are presented in detail. The scaleability of the transmitter is discussed based on the simulation using a different minimum gate-length. 6 Chapter 5 states the effect of packaging parasitics in optical transmitter design. In first section, it starts with the description of the simultaneous switching noise caused by packaging parasitics. The equivalent circuit model of parasitics is developed by spice model generator of Advanced Design System (ADS) tool and the values of parasitics are extracted. To overcome the effect of parasitics, two solutions are suggested. Using differential topology in transmitter design, the current ripple in the bias line can be minimized and using decoupling capacitors, the voltage bias is stabilized in the presence of parasitics. The simulation results, a chip layout, and measurement results of differential transmitter is presented with 1 Gbps speed operation. Chapter 6 describes the development of LVDS compatible transmitter which consists of pre-driver stage and laser driver stage. For high-speed and high-gain, a differential amplifier with an additional current source are described in pre-driver stage. The simulation results and layout are presented. However, the measurement results are not available at the time of this writing due to the bonding problem. The final chapter of this dissertation is devoted to summarizing the results and contributions of this research. Also, the possible future work after this research of optical transmitter is addressed. 7 CHAPTER II BACKGROUND In this chapter, three main part of the optical interconnect system are reviewed. The first one reviewed is optical media which propagates light signal to the optical detector. Next, two primary optical sources which generate light signal related to the driving current are review. The next one reviewed is optical transmitter circuitry to drive optical sources. In addition, the criteria such as eye diagram to evaluate the performance of the system are reviewed. 2.1 Optical interconnect systems and optical media An Optical communication system is similar in basic concept to any type of communication system. The function of a general communication system is to transmit the signal from the information source through the transmission medium to the destination. A block diagram of a typical optical interconnect system is shown in Figure 2.1. It consists of a transmitter, optical source, optical media, optical detector, and a 8 receiver. At the transmitter, the information source provides electrical signal to a transmitter circuitry and it drives an optical source such as a laser and a LED to give modulation of the lightwave carrier. The optical source converts electrical signal to optical signal and the light output is propagated through the optical media such as optical fiber and free space. The light signal from the optical media is collected on an optical detector such as avalanche photodiodes and p-i-n photodiodes and converted to the electrical signal. Finally, the electrical signal is amplified and recovered by the optical receiver. Information Source Optical Transmitter Optical Receiver Optical Source Recovered Information Optical Optical Media Detector Figure 2.1. A block diagrm of a typical optical communication system For optical interconnects, optical transmission media is categorized into free space, optical fibers, and integrated optical waveguides [1]. The difficulties associated with the fiber-optic approach stem from the alignment requirements for the fibers and detectors. Also, the fibers cannot be allowed to bend too much since bends cause radiation losses. In waveguide approach, the difficulties lie on the requirement to 9 efficiently couple into and out of the guides. Careful alignment of the sources with the integrated waveguides is required. The other major category of optical interconnects is free-space techniques which light is propagated in the free space. Free-space interconnects can be distinguished between two types of techniques, unfocused [37] and focused [38-40]. Unfocused interconnections are established simply by propagating the optical signals to the entire electronic chip. However, the system is very inefficient since only a small fraction of the optical energy might be absorbed on the photosensitive areas of the detectors and the rest is wasted. Therefore, inefficient use of optical energy may result in requirements for the extra amplification of the detected signals on the chip. In focused interconnections, the optical source is actually imaged by an optical element onto a multitude of detection sites simultaneously. The efficiency of such a scheme can obviously exceed that of the unfocused case, provided that the optical elements have suitable efficiency. However, the disadvantage of the focused interconnect technique is the very high degree of alignment precision that should be achieved and maintained to ensure that the focused spots are the appropriate places on the chip. 10 2.2 Optical Sources Optical transmitters in optical interconnection consist of two main parts, a driver circuit and an emitter [41]. The driver circuit converts electrical signals into an emitter drive current and the emitter converts this current into light. The two primary light sources used in telecommunications are semiconductor lasers and light emitting diodes (LED) [42,43]. These optical sources have several requirements for optical emitter. First, they should be linear with the electrical input signal to minimize the distortion and noise. Second, they should emit light at wavelengths which has low losses and low dispersion. Last, they should have capability to maintain a stable optical output in the condition of temperature variation. In a forward biased p-n junction, the normally empty conduction band of the semiconductor is populated by electrons injected into it by the forward current through the junction, and light is generated when these electrons recombine with holes in the valence band to emit a photon. The energy of the emitted photons is roughly equal to the bandgap energy of the semiconductor material which gives a much wider spectral linewidth. Therefore, the drawbacks of the LED are low output power, higher divergence degree, and wide optical spectral bandwidth which are not suitable for high-speed communication. However, the LED has been widely used in low-speed communication as an alternatives to the laser since the LED has a number of distinct advantages which are simpler fabrication, less expensive, high reliability, less temperature dependence, simpler driver circuitry, and higher linearity. The LED has been developed for edge or 11 surface emission. The edge-emitting LED shows more output power and a somewhat narrower spectral width since it has a structure more like a laser but it requires the complexity both in fabrication and in driver circuitry. In contrast to the edge-emitting LED, the surface-emitting LED shows long device lifetime, low cost, and insensitivity to ambient temperature. The term laser is an acronym for light amplification by stimulated emission of radiation. The light is stimulated utilizing the addition of an optical cavity and mirror facets to provide feedback of photons. The emission process of the laser can occur in two ways, which are spontaneous emission and stimulated emission. First, spontaneous emission is occurred with the same mechanism in which the atom returns to the lower energy state in a random manner. Second, stimulated emission is occurred when a photon having an energy equal to the energy difference between the tow states interacts with the atom in the upper energy state causing it to return to the lower state with the creation of a second photon. Therefore, LEDs and Lasers have different characteristics as shown in Fig 2.2. In Figure 2.2, it may be observed that the laser emits little light output in the region below the threshold current but above threshold current, the light output increases eminently and linearly for small increases in current though the device acting as an amplifier of light. This linear region can be used for data transmission. 12 Light Output (Power) Laser LED Threshold current Current Figure 2.2. The light output versus current characteristic of Laser and LED There are two broad kinds of lasers, edge emitting lasers and vertical cavity surface emitting lasers (VCSELs). VSCEL has been interested because it has low threshold current and a symmetric output for efficient optical coupling to the fiber. However, it has shortcomings including small lifetime, high cost and short wavelength because of the lack of mirrors for 1.3 to 1.55 µm. 1.3 to 1.55 µm wavelengths has been of interest for fiber optic communication since the optical fiber has zero dispersion near the 1.3 µm wavelength and has lower loss near 1.55 µm wavelength although 0.85 µm range is still useful since the wavelength is compatible with on-chip Si detectors. Several kinds of structure have been developed such as Gain-guided lasers, Indexguided lasers, and Quantum-well lasers for edge emitting lasers. The simplest and least expensive laser is the double heterostructure Fabry-Perot (DH FP) laser. However, the 13 modulation bandwidth is limited by relaxation oscillations which is the oscillation between the carrier and photon population when the current is suddenly increased. In addition, it shows frequency chirp which is the critical for long haul communication due to fiber dispersion. For long haul communication, distributed feedback (DFB) lasers has been developed with single frequency operation. The structure is the distributed Bragg diffraction grating which provides frequency selective feedback in the optical cavity. For the high-speed communication faster than 10 Gbps, lasers cannot be used with direct modulation due to chirp but they can be used with external modulator such as electro-absorptive modulator and mach-zehnder modulator. As a result, the optical source should be selected carefully in terms of the application area. 14 2.3 Optical transmitters There are two categories in optical transmitter circuitry with respect to the optical sources, LED and laser. Although the application of the LED is restricted compare with the laser, it can be an effective alternative to the laser for low-capacity and short-distance link such as local area network. For the on-off keying modulation in digital transmission, the LED are operated with switching on and off of a current in the range of a few tens to a few hundreds mA. This current switching is performed in response to input logic voltage levels at the driving circuit. A common method of performing this current switching operation of the LED is shown in Figure 2.3. The common emitter configuration is adapted with a bipolar transistor providing current gain. In this circuit, the output current flowing through the LED is set by the value of R2. However, the switching speed is limited by the diffusion capacitance which means that the bandwidth and current gain have the tradeoff relation. To increase the switching speed, low impedance driver is developed as shown in Figure 2.4. In this configuration, the emitter follower stage is placed with the common emitter stage to drive the LED. As well as these LED transmitters, many kinds of transmitter circuitry have been developed in terms of the requirement such as emitter-coupled logic (ECL) or transistor-transistor logic (TTL) compatibility [44-47]. In digital transmission, the interface between the transmitter and a common logic family is a frequent 15 requirement. In addition, LED has been considered for analog transmission because of the linear output response of the optical power as seen in Figure 2.2. V CC LED R2 V in R1 V EE Figure 2.3. An example of the LED driver circuit I V CC V in R2 R1 LE D V EE Figure 2.4. An example of the LED driver circuit II 16 The laser transmitter circuitry is somewhat different from the LED drivers since as shown in the light-versus-current characteristics of the laser in Figure 2.2, the light output is very small until the DC current reaches the threshold current [48]. After the threshold current, the optical power is approximately linear with current. The problem associated with typical lasers is that the characteristic curve is not linear at high current and tends to shift to the right as both the temperature and device ages are increased. This results in unwanted changes in output power, extinction ratio, and turn-on delay in digital transmission. Thus, the laser should be biased near the threshold current when it is in off state to reduce the turn-on delay and to minimize any relaxation oscillations, and also to easily compensate for variations in threshold due to temperature and device ageing. For biasing the laser, a bias control circuit is necessary in designing laser driver circuits. A simple laser driver circuit used to connect the output of a current driver circuit directly to the laser diode is shown in Figure 2.5 [49]. The threshold current for a laser is provided by Vbias and modulation current is provided by source resistor, Rmod, respectively. This type of single-ended laser driver is typically used with low operating speed due to the unwanted parasitic inductance from the package’s bonding wires. When this parasitic inductance is combined with the capacitance of the laser driver circuits and lasers, it degrades output of the laser’s rise time and causes power supply current ripple. Another example of the laser driver circuit is shown in Figure 2.6 when the driver circuit and the laser are placed in different package. In this topology, a matching circuitry between the driver and the laser is necessitated to overcome the large impedance mis- 17 match. In this circuit, Ibias controls the DC threshold current and Imod provides the modulation current for the laser. With these laser drivers, many types of drivers has been developed with various technology in terms of the different application areas [50-55]. As mentioned above, it becomes critical to consider the interactions among circuitry, interconnections and packaging at high-speed operation. As a result, the suitable topology should be selected in the design of the drivers and also, interconnections and packaging should be considered. 18 Laser Input Signal Rmod Vbias VSS Figure 2.5. An example of the laser driver I VCC Laser Vin- Imod Ibias VEE Figure 2.6. An example of the laser driver II 19 2.4 Eye Diagram To evaluate the system performance, the eye diagram is a simple method for digital transmission systems [56]. The performance of the systems depends on the amount of intersymbol interference (ISI) and noise [57]. ISI can be occurred when the signal passes through the dispersive system. In optical interconnect system, dispersion is associated with the fiber, coupler, the transmitter circuitry, and the receiver circuitry. ISI is that the pulses corresponding to any one-bit smear into adjacent bits and overlaps. So, if ISI is large enough, this might trigger a false detection in the adjacent time slot. As a result, an increasing number of errors may be encountered as the ISI becomes more pronounced. When observing data transmitted by optical driver on the oscilloscope, there is a visual method that is often used to qualitatively measure the properties of a recovered data waveform. If the pulse stream is applied to the vertical input and the sampling clock is applied to the external trigger, a waveform looking like a human eye is obtained. This is called an eye-diagram due to its similarity of shape to a human eye. An eye diagram is easily generated using an oscilloscope that is triggered by the symbol-timing clock and keeping the curve trace for certain duration of time. The eye diagram is a composite of multiple pulses captured with a series of triggers based on data-clock pulse fed separately into the scope. The scope overlays the multiple pulses to form the eye diagram. 20 Usually, long pseudo-random data patterns are often used when generating eyediagrams to guarantee that the eye-diagram is representative of virtually all possible symbol transitions. By measuring the width of the eye opening both in the vertical and in horizontal directions, the information about the system’s ISI, noise, and jitter is obtained as shown in Figure 2.7. The jitter, which is due to variations in the pulse duration or the accuracy of the symbol clock, will cause the eye closing in the horizontal direction. Noise and ISI are indicated by the vertical width of eye diagram. The ideal decision sampling point occurs at the time of maximum vertical opening. This point corresponds to the time when the signal-to-noise ration is at its maximum. Also, the size and shape of the eye diagram changes depending on the data rate. Optimum sampling time Sensitivity to timing error Distortion of zero crossings Noise margin Peak distortion Figure 2.7. Characteristics of an eye diagram 21 After the signal is displayed in the form of eye diagram in oscilloscope, the signal should meet the certain criteria to ensure the proper performance of the system. Therefore, eye pattern mask is defined and employed measuring the eye diagram. As an example of eye mask, the SONET specifications provide a mask inside and around the eye diagram with required parameter values that can sustain the system link BER as shown in the Figure 2.7 according to the Bellcore’s technical report [58]. 22 1 + Y1 Normalized Amplitude 1 Logic "1" level 1 - Y1 0.5 Y1 0 Logic "0" level - Y1 0 X1 X2 1 - X2 1 - X1 1 Time [UI] Rates X1 X2 Y1 OC-1 and OC-3 0.15 0.35 0.20 OC-9 through OC-24 0.25 0.40 0.20 Figure 2.8. SONET eye diagram mask [58] 23 CHAPTER III THROUGH-SILICON OPTICAL INTERCONNECT SYSTEMS 3.1 Introduction and Applications Advances in integrated circuit have remarkably increased device densities and speeds. However a large portion of the available area and bandwidth is consumed by interconnects. As line lengths get longer, propagation delays, crosstalk between lines, and dominance of line capacitance will restrict the utility of conventional electrical interconnections [2]. Therefore, new chip architectures are required to cope with associated interconnect problems. One possible solution is multichip modules (MCM’s). However, as the density of chips on an MCM substrate increases and the interconnections between chips increase, problems with unwanted coupled noise and simultaneous switching noise limit the scalability of these architectures [59]. Another approach is to use vertical optical interconnections [60-66]. They provide high speed, high bandwidth, 24 low loss, small crosstalk, short interconnect delay, and massively parallel interconnection. In this chapter, through-wafer vertical optical interconnect system between stacked silicon circuitry shown in Figure 3.1 is introduced. It is utilized by using optoelectronic devices operating at wavelengths which silicon substrate is transparent. To achieve the system, a receiver, a transmitter, and optical devices such as a LED and a detector are contained. The OEIC (Opto-Electronic Integrated Circuit) was fabricated in 0.8 µm CMOS process through MOSIS foundry. Then optical devices were integrated onto silicon circuit substrate using thin film hybrid integration technology. This integration provides the reduction of the packaging parasitics between the optical devices and the silicon circuits compared with hybrid packaging using wire bonding. InP/InGaAsP InGaAsP Detector Emitter Detector Amplifier Silicon Circuitry Emitter Driver Silicon Circuitry Emitter Detector InGaAsP InP/InGaAsP Emitter Driver Silicon Detector Silicon Circuitry Figure 3.1. Diagram of vertical optical interconnect 25 3.2 Optical Devices Optoelectronics have been explored as a solution to bypass bottlenecks in electrical interconnections. The extent of the problem has justified the integration of optical devices onto a fabricated circuit substrates. Monolithic integration of optical devices and high-speed circuitry has been demonstrated. However, the costs of these systems are expensive due to the expensive substrates, growth technologies, and poor yield [67,68]. An alternative method for combing optical devices with electrical circuits is a hybrid approach. Hybrid integration enables individual optimization of the optical devices and of the electrical circuits. In this method, optical devices are grown and fabricated on their own growth substrate and then attached onto silicon circuitry by either flip-chip technology or thin film integration. Flip-chip technology attaches optical devices onto a silicon substrate using bump bonds. However, bump bonding consumes a large amount of expensive optical materials. Thin film integration, bonding to the host substrate is performed using standard microelectronic processing techniques since the devices are on the order of 0.01 to 5 microns thick [23][25]. Furthermore, only a small quantity of optical materials is required to integrate a large number of host substrates minimizing the use of expensive optical materials. Another advantage of thin film devices is integration into three-dimensional systems [63], which are useful for parallel applications such as image processing. 26 In this research, InP based light-emitting diodes (LED’s) [69] and metalsemiconductor-metal (MSM) photodetectors [70,71] are fabricated and integrated onto silicon circuit substrate as illustrated in Figure 3.2. The operating wavelength of these optical devices is in the range of 1.3-1.6 µm where silicon is transparent. The thin-film optical devices are fabricated by epitaxial lift off (ELO) technology [23]. As shown in Figure 3.2, the thin film materials and devices are processed separately and bonded without degrading the quality of the devices by parasitics due to packaging. Final Integration Figure 3.2 Illustration of the optical device integration on Si circuit substrate. 27 For vertical interconnects, LED’s are used since they have demonstrated high reliability, and are low cost, simple to fabricate. Also, LED’s can be operated at the desired modulation speed up to 155 Mbps with good quantum efficiency. Although the divergence angle of LED’s is large, it also results in a high degree of alignment tolerance for the vertical interconnects. In the case of detectors, inverted MSM (I-MSM) detectors are selected since they have low capacitance per unit area and high responsivity that are important factors in design of high speed and low power receiver units. MSM detectors have low capacitance but low responsivity because of the shadowing effect of the electrodes. Therefore, I-MSM detectors are developed to overcome the low responsivity of MSM’s defining electrodes on the bottom of the detector to eliminate the shadowing effect. To construct through-wafer system, 100 µm LED’s and 50 µm I-MSM photodetectors are integrated onto transmitters and receivers respectively and then each chip containing silicon circuits and integrated optical devices is stacked together. 28 3.3 Single-Ended Transmitter Design The single-ended CMOS transmitter is designed to meet the SONET OC-3 speed specification of 155 Mbps. The transmitter circuit was optimized to drive up to 80 mA of output modulation current to the emitter. It consists of two tapered buffers, a current switch, and a current mirror as shown in figure 3.3. The transmitter is fabricated through the MOSIS foundry in a 0.8 µm Si CMOS process. VDD M1 M3 M5 M2 M4 M6 M9 M10 M11 I2 V1 D1 I1 M7 M12 M8 VSS Figure 3.3 Circuit schematic of single-ended transmitter. 29 The two-stage tapered buffer input is designed to minimize power consumption at desired speeds and begins with a minimum geometry inverter used to drive a current switch. The ratio of two inverter sizes has the tradeoffs between speed, power, and chip size. For the maximum speed, the ratio of 2.7 is rational but it reveals high power consumption. If the ratio is above 2.7, speed is slightly decreased but also power dissipation is decreased. Thus, the optimal value of the ratio considering the tradeoff between speed and power is set to 5 for 155 Mbps. The current switch was used before the power transistor stage to avoid large voltage spikes and signal distortion in the output. In output stage, a current mirror for dc bias of the emitter is included for increased speed. To test the optical performance of the transmitter unit, the transmitter circuits with integrated LEDs were wire-bonded onto a quad flat pack. 27-1 psudo random bit sequence (PRBS) were generated by Tektronix 1400TX and the emitted light was detected by a New Focus 1811 receiver. A microphotograph of the transmitter with integrated LED is shown in Figure 3.4. In Figure 3.5, the eye diagram of testing the integrated chip is shown at 155 Mbps. Bit error rate (BER) was measured by Tektronix 1400RX and 10-13 was achieved at 100 Mbps. 30 Transmitter Integrated LED Figure 3.4 The microphotograph of the transmitter with integrated LED. Figure 3.5. The measured eye diagram of the integrated transmitter at 155 Mbps. 31 3.4 Single-Ended Receiver Design The single-ended transimpedance receiver was designed and fabricated through the MOSIS foundry in a 0.8 µm Si CMOS process [72]. To obtain the target bandwidth, which is greater than 155 Mbps, the receiver used a multistage low-gain-per-stage open loop configuration. The receiver consists of five identical cascaded stage with a current gain of 3, an offset circuit, and bias circuitry as shown in Figure 3.6. . VDD2 VDD1 Offset Pi1a 120 si2 Pi1 120 Stage 1 Pba 2.4 Pi2a 2.4 P5a 2.4 P8a 2.4 P6a 7.2 si1 Pi2 2.4 P5 2.4 P8 2.4 P6 7.2 BiasP Pb 2.4 iin Isource N2 2.4 Ioffset Ni1 120 ig2 Nia2 2.4 ig1 Nia1 2.4 N7 2.4 N1 2.4 vout N4 7.2 RL N4a 7.2 Isink Ni2 120 N3 2.4 N7a 2.4 Nb 2.4 VSS1 AI = 3 AI = 3 AI = 3 AI = 3 AI = 3 Figure 3.6. Overall circuit schematic of the receiver. VSS2 BiasN 32 Since this receiver is a current –mode amplifier, the current gain of each stage, AI, is set by the gate width ratio of two transistor in a current mirror. Also, overall transimpedance gain of the receiver is given by R = AI * *5 * RL = 243 * RL (3-1) Figure 3.7 shows the microphotograph of the receiver integrated with I-MSM photodetector. To bond the thin-film detector to the input side of the circuit, two small pads are required. The pad size should be small enough to minimize the pad capacitance since this capacitance increases the total input capacitance of the circuit limiting high bandwidth. Figure 3.7. The microphotograph of the receiver with integrated I-MSM detector. 33 The receiver with integrated I-MSM detector was tested and an eye diagram was measured using 27-1 PRBS input data which is generated by Tektronix 1400TX. The input signal is fed into a modulator to generate a light emitting with a laser source. Then the lightwave is illuminated onto the I-MSM detector of the receiver. The detected light signal is converted into an electrical signal and amplified in the receiver. The output of the receiver is measured in an oscilloscope with an output load of 50 Ω. Figure 3.8 shows the measured eye diagram at 155 Mbps. In eye diagram, top trace is the clock signal and the bottom trance is the eye diagram of the amplifier output. Bit error rate (BER) was measured by Tektronix 1400RX and 10-10 was achieved. Figure 3.8. The measured eye diagram of the integrated receiver at 155 Mbps. 34 3.5 Two-Layer Systems To demonstrate vertical optical interconnects, two-layer system is realized [64]. Each integrated circuit layer in the two-layer stack consisted of an optical transmitter and an optical receiver. Each of the chips were integrated with a thin film LED and an IMSM photodetector. Figure 3.11 shows the microphotograph of each layer before integrating of optical devices and stacking of two chips. This chip stacked with two layers where the top chip is rotated 180o relative to the bottom chip as illustrated in Figure 3.11. After all three layers were assembled, the system was wire-bonded into a LDCC 44-pin flat package for testing. To test the two-chip stack, the test set up is shown in Figure 3.9. 27-1 PRBS digital signal from Tektronix 1400TX was fed into the bottom transmitter. Then the transmitter supplies current to drive an emitter and the electrical input signal is converted into the light output signal from the emitter. The voltages and currents in each circuits of the system were controlled using Keithley 238 source measurement units. An oscilloscope measured the output signal from the top receiver circuit. The two-layer system performed well at 10 Mbps with 3.5 V power supply voltage for both the transmitter and the receiver as shown in Figure 3.12. However, a ringing due to ground bounce was noticeable in output eye diagram. It causes significant noise, as the bit rates are higher as shown in Figure 3.13. This noise is primarily due to decoupling problems in the test fixture. Therefore, the system worked up to 40 Mbps even though each components of the system has been tested up to 155 Mbps. 35 M ic r o w a v e L o g ic LE D L E D D r iv e r g ig a B E R T - 1 4 0 0 T X D e te c to r R e c e iv e r T e k t r o n ix 1 1 4 0 3 A O s c illo s c o p e M ic r o w a v e L o g ic g ig a B E R T - 1 4 0 0 R X C lo c k f o r T r a n s ie n t o u t p u t c u r v e a n d B E R s y n c h r o n iz a t io n Figure 3.9. Test setup block diagram for through-wafer system 36 Figure 3.10. The microphotograph of the OEIC for two-layer system. Figure 3.11. The microphotograph of the two-layer system 37 Figure 3.12. The measured eye diagram of two-layer system at 10 Mbps. Figure 3.13. The measured eye diagram of two-layer system at 40 Mbps. 38 3.6. Three-layer systems To demonstrate the applicability of through-wafer optical interconnects, a threelayer system is also introduced [65]. The same components, which were used in twolayer system are used in this system. The three-layer system was assembled by aligning the individual layers using an infrared backplane mask aligner. After all three layers were assembled, the system was wire-bonded into a 144-pin grid array (PGA). Figure 3.14 shows the layout for three-layer system. In this layout, isolation method was used to minimize the noise coupled from the digital section to the sensitive analog input stage of the receiver since this system contains several digital blocks such as a transmitter, a clock generator, and a comparator. Isolation method is to attempt to keep the sensitive analog circuitry separated from the noisy digital circuitry, or to block the transmission of the noise from the digital circuitry to the analog circuits using n-well or p-well appropriately. In Figure 3.14, n-well and p-well contact are shown between the receiver part on the left side and the digital blocks on the right side. Figure 3.15 shows a microphotograph of the packaged 3-D systems, which is measured to show the performance of the whole system. The primary goal of this system is to demonstrate optical through-wafer interconnect from the bottom layer to the top layer. First, the data from the bottom transmitter goes to the receiver of the middle layer, then the middle layer routes the 39 receiver data through the comparator to the transmitter input. Last, the data is transmitted from the middle layer to the top layer. To test three-layer systems, the same test setup as in Figure 3.9 was used. 27-1 PRBS data was generated by pattern generator and the eye diagram is measured by oscilloscope. BER was also measured by Tektronix 1400RX. The test results at 1 Mbps was shown in Figure 3.16 with 1.3x10-9 BER. As well as two-layer systems, the speed of the system is limited due to decoupling problem of the test fixture and signal coupling within the high-pin PGA package. High-speed demonstrations would be enabled by utilizing improved decoupling method, by using different package and by employing differential topology in the design of CMOS transceiver circuits. Figure 3.14. Layout of the OEIC for three-layer system 40 Figure 3.15 Microphotograph of three-layer system Figure 3.16 The measured eye diagram of three-layer system at 1 Mbps. 41 CHAPTER IV DIFFERENTIAL LASER DRIVER 4.1 Introduction In chapter 3, the free space optical communication was implemented. However, as the speed is increased, the receiver requires high incident optical power for high signalto-ratio (SNR) and high sensitivity. Therefore, the laser should be chosen for optical source since it has low divergence degree and high power efficiency. A differential CMOS transmitter circuit to drive a laser is introduced in this chapter. The driver was fabricated in a 0.35 µm technology process through national semiconductor. A laser driver circuit that is capable of operating above Gbps and providing large output current for high optical power is designed for high-speed optical interconnect. For the development of high-speed driver, the differential topology is employed to stabilize current ripple in the power supply lines [73], which would otherwise corrupt the laser output. Differential design minimizes simultaneous switching noise by using parallel but inverted signal paths with subsequent subtraction of the two signals. In 42 addition to conventional differential pairs, current mirrors are used to provide adjustable threshold current and modulation current for the laser. In this research, the goal is to design the driver with greater than 1 Gbps speed operation providing high modulation output current (up to 180 mA) to the laser. The driver has been laid out using MAGIC layout tool. Then the parameters of the circuit layout has been extracted and simulated. When the simulation result did not meet design specification, the design procedure has been repeated as shown in Figure 4.1. D e s ig n Layout E x t r a c t io n S im u la tio n No S p e c ific a tio n Yes F in a l Layout Figure 4.1 Design procedure of differential transmitter 43 Final layout has been converted into cadence layout with existing electric static protection pads, which is provided by National Semiconductor. After the chip was fabricated, it has been tested to meet the design goal, which was predetermined. The predetermined design specification of the transmitter is shown in the table below. The specification was predetermined by the optical device group in Georgia Institute of Technology. Table 4-1. Design specification of the differential laser driver Specification Predetermined Goal of Design Speed Greater than 1Gbps Output Current Current Density DC range: 0 – 30 mA AC range: 0 – 180 mA Less than 30uA/1um square meter 44 4.2 Differential Transmitter Design The silicon CMOS high dI/dt differential laser driver circuit described herein was designed to meet the predetermined specification. For giga bit interconnect, some laser drivers using CMOS has been recently reported [27-35]. However, these laser drivers provide small output modulation current as shown in Table 2.1. The driver in this research consists of current mirrors and a current switch, as illustrated in Figure 4.2. In this driver circuit, the output delivered to the laser diode is composed of Ith for dc biasing the laser near the threshold current, and Imod for the modulation current above threshold. In an integrated implementation, the diode would be removed and a laser would be integrated instead of the diode. Also, Z1 would be replaced either a laser or a resistor. As shown in Figure 4.2, the switching circuit is realized by differential NMOS transistors in common source configuration. The current sources for dc biasing and modulation current are realized by current mirrors, where a reference current should be supplied through the external source measurement unit. The transistor size is optimized for up to 180 mA peak-to-peak modulation current and up to 30 mA laser-biasing current. The primary effects of determining the operating speed are switching delay of input transistors and the RC time constant of wire interconnect on a chip. As transistor size increases, higher output currents are achievable but the speed is decreased since the gate capacitance of the input transistor increases the total input capacitance, which is given by 45 Ctotal = Cox (WL )n , (4-1) Cox = εxoxox , where the oxide permittivity εox is 3.9εo F/cm when silicon dioxide is used as the gate insulator, xox is oxide thickness, and W and L are the width and the length of the input transistor. In this expression, εo is the permittivity of free space and εo≈8.854×10-14 F/cm. If total capacitance is increased, it causes large switching delay of the circuit. Thus, the optimization of the transistor size is necessary for the design of the driver circuit to provide large modulation current maintaining high-speed operation. Also careful layouts to reduce parasitic capacitance of transistors are required. The simulated results of the speed versus output current and speed versus input magnitude are illustrated in Figure 4.3. The speed is proportional to input magnitude but inversely proportional to output current. In Figure 4.3 (b), it is shown that the speed is saturated above 2 V peakto-peak input magnitudes since drift velocity of electron is saturated. As a result, the optimal size of transistor has been selected to perform 1 Gbps operation driving proper modulation current and laser-biasing current. 46 VDD Z1 M1 D2 M2 V1 V2 Ith Imod M6 M4 M3 M5 VSS Figure 4.2. A differential laser driver. M7 47 25 Speed (Gbit/s) 20 15 10 5 0 0 200 400 600 800 Output current (mA) (a) Speed versus output current 14 Speed (Gbit/s) 12 10 8 6 4 2 0 0 0.5 1 1.5 2 2.5 3 Input magnitude (V) (b) Speed versus input magnitude Figure 4.3. The optimization in terms of the transistor size 48 4.3 Simulation The HSPICE simulation on the overall transmitter has been performed using 0.4 µm, BSIM level 4 model parameters (See Appendix II) provided by national semiconductor. The simulation has been done with extracted SPICE files from magic layout. Figure 4.5 shows the transient response of the driver at 1 Gbps speed with 180 mA output current. In the simulation result, the top trace represents the psudo random bit input signal and the middle trace is the transient output. The bottom trace is the eye diagram to prove that there is not any missing bit. As shown in the simulation results, the driver works properly at the predetermined design specification. For the SPICE simulation of the laser and the driver circuit, the electrical equivalent circuit model of the laser is developed and presented as shown in Figure 4.4 [74,75]. For practical usage, it should be as simple as possible to minimize calculation time. Lb Rs Cp Rj Figure 4.4. Equivalent Model of a laser diode Cj 49 In this model, chip and package parasitics are included, but for simplicity they are not incorporated in simulations. In Fig. 4.4, the components of the equivalent circuit model are inductance Lb due to the wire bond, capacitance Cp of the laser chip, resistance Rs from the metal contacts, capacitance Cj from the p-n junction, and resistance Rj from the p-n junction. Using this equivalent model, optical output of the laser is treated as an electrical output, which can be displayed by SPICE. 4.5 Measurement and Test Results Figure 4.5. Transient response of 1 Gbps differential laser driver 50 Figure 4.6. Temperature simulation at 27 and 200 degree Next, temperature is considered since integrated circuits slow as temperature increases due to the mobility variation. Thus, this simulation is to verify that the driver works properly at higher temperature. Figure 4.6 shows the transient response of the driver with temperature variation at 27 degree and 200 degree. The top trace is the transient output at 27 degree and the second trace is the eye diagram of the top trace. The third trace represents the transient output at 200 degree and the bottom one is the eye diagram of the third trace. As shown in Figure 4.5, output is a little slower at 200 degree than room temperature 27 degree but still shows a wide-open eye diagram. 51 Figure4.7. Transient response of differential laser driver at 2 Gbps. Figure 4.7 shows the transient response of the drive operating at 2 Gbps. The top trace is the input signal and the middle trace is the transient output. The bottom trance represents the eye diagram of the output current. Even though the laser driver was designed and optimized for 1 Gbps operation with 180 mA modulation current, it worked well at 2 Gbps as shown in Figure 4.7. Compared with the 1 Gbps simulation result, the rising and falling time is a little slow but still works with a wide-open eye diagram. 52 4.4 Layout The driver was laid out carefully for fabrication using magic layout tool as shown in Figure 4.8. While the driver was laying out, every effort was made to minimize the parasitic capacitance of input transistors since it was found out that the capacitance was very critical for the system performance. In the layout, multiple finger structure with one wide transistor is used to minimize the depletion capacitance such as metal to poly and metal to metal. Figure 4.8. MAGIC layout of the driver 53 4.5 Scalability Since the driver has been designed using 0.35 µm standard CMOS process without any passive components, the design is scalable, which means there is a room for speed up in advanced technology. In the CMOS, the speed is related to gm/C. So, The speed can be improved by a scale factor because the capacitance (C) of the device is reduced while the transconductance (gm) of the device is almost same. The performance scalability of the integrated circuits is important to reduce chip area and to improve the circuit performance [76-80]. The driver in Figure 4.2 is scaled down from 0.35 µm to 0.18 µm with a scale factor of 1.944 and the bandwidth of the driver increases from 2 Gbps to 10 Gbps as shown in Figure 4.10. In this simulation, there are two factors increasing the speed. One is from scaling down the minimum gate length and another is from decreasing the modulation current from 180 mA to 25 mA. Since the total transistor size is depending on the current density of the gate in CMOS, reduced current result in the smaller total transistor size, which allows the smaller parasitic capacitance. Figure 4.9 shows the layout of the driver that is scaled down using 0.18 µm technology. In Figure 4.10, the top trace is the input signal and the middle trace is the transient output. The bottom trance represents the eye diagram of the output current. 54 Figure 4.9. MAGIC layout of the driver using 0.18 µm technology. Figure4.10. Transient response of differential driver at 10 Gbps. 55 CHAPTER V PACKAGING PARASITIC CONSIDERATION 5.1 Introduction The signal degradation due to the presence of the parasitics associated with packages and bonding wires has been a crucial factor as the higher data rate and higher density is required in telecommunication [81]. These parasitics causes switching noise known as delta-I noise when the current is switched in power distribution systems [8284]. This noise degrades edge rate of digital signal, reduces noise margins, and finally causes false switching of digital logics that is the error of the system. Therefore, packaging parasitics should be included in the design of the drivers. To date, silicon CMOS drivers for bit rates up to several gigabits per second for low cost, low power consumption implementations have been reported. Also, delta-I noise has been analyzed and investigated by many researchers [85-87]. However, the parasites of the package and bonding wires have not been considered in the design of 56 these laser drivers due to the lack of efficient methods and models, although they are bonded into a package. In this research, an equivalent circuit model of parasitics containing bonding wires and packages are developed. The equivalent model is included in HSPICE simulation of the driver and shows the effect of the parasitics. In order to solve the parasitic problem, the differential topology can be selected instead of single-ended topology by stabilizing the bias current since it has symmetric but inverse current flowing path to the power supply lines [88]. However, the effect of the parasitics cannot be eliminated fully due to a device mismatch in the differential pairs and a different delays in the current path, although it has better bias current stabilization compared with single-ended version. Thus, use of an decoupling capacitor is also suggested to eliminate the effect of packaging parasitics [89-93]. In the simulation of the driver, actual equivalent model of capacitors is included to predict the precise effect of decoupling capacitor when the driver is tested and compared with the ideal capacitor. Finally, the differential driver described in chapter 4 has been tested with the decoupling capacitor and shows the good accordance with the simulation results. 57 5.2 Background In a single chip package and printed circuit board (PCB) system, voltage fluctuation named simultaneous switching noise or delta-I noise has exceeding increased and affected the performance of integrated circuits as the circuit transition time is increased. The delta-I noise is caused by the parasitic inductance of the power supply lines in the package and abrupt current change in the switching circuits. To describe the mechanism of delta-I noise, a simple inverter with parasitic inductance is shown in Figure 5.1. When the input signal of the inverter (Vin) switches state from low-to-high or high-to-low, it causes an abrupt current change to the power supply distribution system through the interconnections. This results in a voltage drop in the power supply (Vp) in the presence of the parasitic inductance (L_parasitics) as explained in Vnoise = L dI dt (5-1) The magnitude of the delta-I noise is proportional to the parasitic inductance and power supply current variation. If the magnitude of the voltage drop becomes too large, it results in the errors of the system. Therefore, the current variation should be reduced to minimize the voltage drop and it can be achieved by choosing differential topology in 58 circuit design. Another way of reducing the delta-I noise is to minimize the parasitic inductance with carefully selecting package and PCB. However, the delta-I noise is not fully eliminated but partially reduced since the inductance has always a finite value in bonding wires as well as in the package and PCB. Therefore, by placing the decoupling capacitor near the internal power supply to provide charge during switching, delta-I noise can be effectively reduced as illustrated in Figure 5.1. L_parasitics Vin C_decouple Figure 5.1. The example of the delta-I noise in a circuit. Vp 59 5.2 Modeling of the parasitics A lumped-element equivalent model (RLC) for the packaging parasitics is developed to predict and analyze the behavior of the parasitics in the driver design. The model includes package bonding wire impedance, PCB metal line impedance, and bias wire impedance. The model and the values of the PCB impedance were generated and extracted from Advanced Design System (ADS) design tool. And the inductive impedance of bonding wires and bias wires were calculated [94] by L= 4l µ ol (ln( ) + µrδ − 1) d 2π (5-2) where µo is the permeability of free space, µr is the relative permeability of the bonding wire material, d is diameter of the boding wire, l is the length of the bonding wire, δ is the skin effect factor give by δ = 0.25 tanh( 4ds ), d And the skin depth of the bonding wire material is given by (5-3) 60 ds = ρ πfµrµ 0 (5-4) where ρ is the resistivity of the bonding wire material and f is the frequency. The resistive impedance of bonding wires is ignored since the length of bonding wires is very short which means the associated resistance is very low. To calculate the values of bonding wire impedance, the parameter values are shown in Table 5.1. The material of bonding wires is gold. Table 5.1. The parameter values for the model of bonding wires Parameter Value Unit µo 4π×10-7 H/m µr 1 H/m ρ 2.44×10-8 Ohms/m l 3 mm d 0.0363 mm 61 The PCB is specially designed and built for the driver testing. As shown in Figure 5.2, the board is designed as small as possible to minimize the parasitics. However, the board has parasitic impedance in itself that should be modeled for realistic prediction of the signal behavior. The size of the board is 4.5 cm × 4.5 cm. The model of metal strips in the board is constructed by ADS with five-ladder structure. In the board, the metal strip is partitioned into five parts as illustrated in Figure 5.3 for modeling since the metal strip is tapered to fit SMA connectors and bonding wires. Figure 5.2. The PCB for the driver testing. 62 l1 l2 l3 l4 w1 l5 w2 w3 Figure 5.3. The diagram of metal strip in PCB To extract the values of the board impedance, the lengths and widths are shown in Table 5.2. The material of the metal strip is tin. Table 5.2. The length and width of metal strips in PCB Parame l1 l2 l3 l4 l5 w1 w2 w3 59.421 16.745 21.33 27.735 620.18 10.01 29.981 49.894 mil mil mil mil mil mil mil mi. -ter Value L1 R1 B ia s W ire L2 C2 R2 L3 C3 R3 C4 R4 L5 R5 L6 R6 C5 C6 L7 W ire B o a rd T ra c e L4 B o n d in g P rin te d C irc u it 63 Figure 5.4. The final equivalent model of packaging 64 The final equivalent model of packaging is shown in Figure 5.4. It consists of bonding wire, board line, and bias wire parasitics. The value of parasitic impedance in the model is given in Table 5.3. Table 5.3. The value of parasitic model Parameter Value Parameter Value L1 105 nH C4 0.367874 pF L2 1.38664 nH C5 0.367874 pF L3 1.38664 nH C6 0.367874 pF L4 1.38664 nH R1 0.1 Ω L5 1.38664 nH R2 0.0280365 Ω L6 1.38664 nH R3 0.0280365 Ω L7 3.996 nH R4 0.0280635 Ω C2 0.367874 pF R5 0.0280635 Ω C3 0.367874 pF R6 0.0280635 Ω 65 5.3 Differential Topology As described in Chapter 5.2, the performance of the IC is limited by the packaging technology. To overcome the packaging restriction, the differential topology can be used so as to greatly minimize the current ripples in power supply lines. Finally, it results in reduction of delta-I noise. To illustrate the stabilization of power supply lines in the differential topology, the current ripple of a single-ended optical driver described in Figure 3.3 is compared with that of the differential driver in Figure 4.2. These drivers have been simulated using HSPICE. In Figure 13, the bias current of the single-ended version contains signal components in it. However, the bias current of the differential version does not contain an input signal component. Also, the ripple in the bias current is significantly reduced in the differential version. These simulation shows a dramatic improvement in the current fluctuation related performance of the differential driver over the single-ended design. Hence, the differential topology should be used to reduce the effect of parasitic inductance. Although differential design is effective to reduce the effect of parasitic inductance, current ripple in the differential version is small but clearly present as seen in Figure 13. Therefore, if it is combined with the huge packaging parasitics, there is a possibility that the output of the driver is corrupted. 66 (a) Current ripple of single-ended version (b) Current ripple of differential version Figure 5.5. Bias current comparison between single-ended and differential drivers 67 5.4 Decoupling Capacitors As seen in Figure 5.5, the current ripple, which cause delta-I noise cannot be eliminated fully although the differential topology is employed. Thus decoupling capacitors are required to reduce the effect of the parasitics maintaining the constant dc power supply levels. The effectiveness of the decoupling capacitors can be expressed by the simple equation, I =C dV , dt dV I = dt C (5-5) (5-6) Equation (5-6) states that the voltage fluctuation in power supply line can be suppressed by the capacitors. Therefore, by adding an additional proper decoupling capacitance, the noise can be effectively reduced to the desirable level. In the ideal case of capacitors, it is manifest that the improvement can be increased by using higher capacitance according to equation (5-6). However, the value of decoupling capacitor should be optimized since the real capacitors include a parasitic series resistance and an inductance which is called the equivalent series resistance (ESR) and the equivalent series inductance (ESL) as shown in Figure 5.6 [95,96]. In the presence of parasitics in the capacitor model, it also causes voltage fluctuation although the magnitude is much 68 smaller than that of the case of the packaging parasitics. In addition, it causes resonance that gives the signal attenuation because of the parasitic LC in the capacitor model. Therefore, the value and the type of the decoupling capacitor for suppressing the delta-I noise should be chosen carefully since some type of capacitors contains the higher parasitic inductance than others. In this research, ceramic surface mount capacitors were selected since it offers low parasitic inductance value and the value of the capacitance was optimized using HSPICE simulation. On chip decoupling capacitor was embedded on the circuit substrate as well to minimize the effect of the packaging parasitics. ESR ESR C Figure 5.6. The model of the capacitor 69 5.5 Parasitic effect simulation The purpose of this simulation is to optimize the decoupling strategy, which includes the placement, and value of capacitance required to minimize the effect of line impedance to ensure that the circuit works in testing environment with real value of parasitics such as line inductive impedance and board capacitive impedance. The model values of the parasitic impedance were calculated as seen in Table 5.3. The parasitic model is included between the power supply lines, Vdd and Vss. In the simulation, ideal capacitor and the real capacitor model was compared each other. It showed that the real model is practical since the simulation results with the real model is consistent with the measured data. In the capacitor model, 1.12 nH of ESL, 10.015 nF of the capacitance, and 0.855 Ω of ESR provided by manufacturing company was used. On-chip decoupling capacitor was embedded with a few tenth of pico farad but it is not sufficient to suppress to the desired level of noise. Thus, the off-chip capacitor was placed between bonding wire model and the board model in Figure 5.4 as well as the on-chip capacitor. The simulation was performed at 1 Gbps by HSPICE using 0.35 µm BSIM level 4 model parameter provided by national semiconductor. The simulation results show that 10 nF of decoupling capacitor is enough to reduce the noise. 70 Figure 5.7. Parasitic impedance effect simulation The figure above 5-7 shows the effect of the parasitic impedance. It was simulated the parasitic model with no decoupling capacitance at all. The output affected by this effect is shown in transient response analysis (the middle trace) and eye diagram (the bottom trace). As shown in the simulation result, the output is totally distorted and the eye is completely closed due to the effect of parasitic inductance and current ripples in the power supply lines. This shows the importance of the decoupling capacitance although the differential topology is employed. The simulation result illustrated that even though the circuit may work in the simulation without considering the bias line parasitics, it will not work in the real world where the parasitics are exhibited. To prevent this 71 unwanted situation, it is necessary to consider and predict the effect of the parasitics that can come into real test environment and check the valid functionality of the driver. (a) 1 nF capacitance (b) 10 nF capacitance Figure 5.8. Output signal with the ideal decoupling capacitor 72 To find the optimal value of decoupling capacitors to suppress the delta-I noise in the driver, the simulation was performed with various values of capacitance. The figure 5.8 show the results of 1 nF and 10 nF decoupling capacitor with the parasitic model. The simulation shows that 1 nF of capacitance is not sufficient to eliminate the effect of the parasitics. Even with this small capacitance of 10 nF, the output was fully recovered to the desired one, which has the same performance as shown in Figure 4.4. Therefore, 10 nF was selected for the optimal value for decoupling capacitor, which may be used in the real test environment. However, since the ideal model of capacitor was used in this simulation, the real model including parasitics should be incorporated in the simulation to predict the realizable output of the driver. Figure 5.9. Output signal with the real model of 10 nF decoupling capacitor 73 Figure 5.9 shows the result of the real capacitor model with the packaging parasitics. In the simulation, it is found that the transient response seems a little slower and the ringing cannot be eliminated perfectly unlike the result of the case of the ideal capacitor model. But it still provides wide opened eye diagram and also shows the more realistic result. 74 5.5 Chip Layout As in the driver design in chapter 4, the driver was laid out carefully for fabrication by MAGIC layout tool. Final layout has been exported into cadence layout to be wired with existing static protection circuitry provided by nation semiconductor. In the layout of this chip, the decoupling capacitor using metal1, metal2, metal3, and metal4 was embedded to prevent unwanted power supply ripple as the signal goes through the driver circuitry. The Figure 5.10 shows the layout of the chip submitted to national semiconductor for fabrication performed in CADENCE tool. The lower side is driver part and the left side is on-chip decoupling capacitor between Vdd and Vss. Two pads at upper part of the driver are prepared for a thin-film laser integration. In the large space between two pads, the laser will be integrated. 75 Decoupling capacitor The driver Figure 5.10. Cadence layout of the chip submitted to fabrication 76 5.5 Measurements To verify the functionality of the driver, BER measurement was performed observing time-domain transient output signal and eye-diagram at different speeds was measured. 5.5.1. Test Setup Before the optical test is performed, the electrical performance of the differential driver has been measured since the laser has not been fully functional for the laser driver. Figure 5.11 shows the test setup block diagram for the driver test. The test setup consists of Tektronix 1400 Bit Error Rate Tester (BERT) which generates different modes of pseudorandom digital pulse stream and measures the probability of an transmitted data error rate through the device under test, Keithley 236 Source Measurement Unit (SMU) to supply a precise modulation current, and Tektronix 11403A oscilloscope to monitor the output of the driver and measure the eye diagram and pulse waveform. An eye diagram and a pulse waveform of the driver were measured using 27-1 pseudorandom bit stream (PRBS). 77 Tektronix 11403A Oscilloscope Microwave Logic giga BERT-1400 TX Laser Driver Microwave Logic giga BERT-1400 RX Clock for Transient output curve and BER synchronization Figure 5.11. The block diagram of the test structure 78 Decoupling capacitor The driver circuit Figure 5.12. Microphotograph of the chip The microphotograph of the chip before wire bonding is shown in the figure above. The white area in the upper, rightmost, and leftmost sides is a metal on-chip decoupling capacitor to help stabilizing unwanted bias ripple through the biases. 79 Figure 5.13. Test board with a bonded chip Figure 5.13 shows the test board. To overcome the speed limitation of commercial package, Chip-on-Board (COB) technology was employed. The board was previously tested and experimentally showed no apparent distortion up to 1.5 Gbps. In this board, the decoupling capacitor should be placed as close as possible to the chip. Otherwise, it causes large parasitic inductance induced by the metal line between the chip and the place where the decoupling capacitor was located. 80 5.5.2. BER and Eye Diagram Measurement Before the optical test is performed, the electrical performance of the differential driver has been measured since the laser that has been developing in Georgia Tech has not been fully functional for the laser driver (see Appendix IV). The laser has been shown huge threshold current, which cannot be supplied by the laser driver and only 1% of yield. Therefore, a 50 Ω resistor that is the typical value of the commercial laser was placed between drain port of the driver and Vdd instead of the thin-film laser to measure the performance of the driver. As seen in Table 2.1, the functionality of the drivers were verified with electrical test in many laser drivers since it is hard to get the high-speed light source such as a laser. The Figure form 5-14 to 5-19 show the measurement results at different speeds that are 622 Mbps, 900 Mbps, and 1 Gbps. In each figures of pulse waveform, the top trace is the trigger pulse and the bottom one represents the measured output signal of the driver. For eye diagram, the top waveform is the clock signal and the bottom one is the measured eye diagram at output of the driver. The figures 5-14, 16, 18 are pulse waveform (bottom trace) of output from the driver and the Figures 5-15, 17, 19 show the eye diagram at each speed operation. As shown in the first two figures, the driver could work well enough to provide 10-11 BER with clearly opened eye diagram. However, as speed goes higher, the eye starts closing as shown in the next figures and shows some errors. Even though some researchers have reported the relationship between shape and 81 size of eye and BER, it is illustrated from the experimental results that the BER was dependent on the opening size of clear area rather than the shape of eye diagram. To get a certain BER, 10 times more bits were sent to make sure the functionality of circuit operation, for example to have 1×10-11 BER performance, at least 1012 bits were sent to the driver input. In this test, BER was measured up to 10-11 from 622 Mbps to 1 Gbps. 10-11 is a minimum BER that could be achieved due to the easiness and time limitation of test. 10-11 BER from 622 Mbps to 800 Mbps, 0.2×10-11 at 900 Mbps, and 5.9 ×10-11 at 1 Gbps was achieved respectively. 82 Figure 5.14. 622 Mbps pulse waveform Figure 5.15. 622 Mbps eye diagram 83 Figure 5.16. 900 Mbps pulse waveform Figure 5.17. 900 Mbps eye diagram 84 Figure 5.18. 1 Gbps pulse diagram Figure 5.19. 1Gbps eye diagram 85 CHAPTER VI A DIFFERENTIAL LASER DRIVER FOR LVDS STANDARD 6.1 Introduction and Applications For the demand for high-speed data rate and low power consumption in computing, Low-Voltage Differential Signals (LVDS) IEEE standard (see appendix III) was developed. This standard described a physical layer specification for drivers and receivers in low-cost workstation and personal computer application. LVDS standard employed low-voltage swing at maximum 400 mV to minimize power dissipation and to enable high-speed operation. Also differential signals are used to reduce noise and electromagnetic emissions. In chapter 3 and 4, the differential laser driver has been introduced. The main objective was to show the possibility that the digital differential driver was feasible for high-speed operation. However, it is not suitable for LVDS standard since it needs high input voltage to sustain high-speed operation. Therefore, the laser driver compatible with 86 LVDS standard was designed in this chapter. The driver has been laid out in magic layout tool and fabricated using TSMC 0.25 µm technology. The design specification of the driver was determined as in the table below. Table 6-1. Design specification of the differential laser driver for LVDS Specification Predetermined Goal of Design Speed Up to 1Gbps Input magnitude 100 – 400 mV Power supply 2.5 V Output current Current density DC range: 0 – 30 mA AC range: 0 – 40 mA Less than 30uA/1um square meter 87 6.2 Differential Transmitter Design for LVDS Standard The silicon CMOS LVDS compatible differential laser driver circuit described herein was designed to meet the predetermined specification. This driver design consists of pre-driving stage and a laser driving stage. The laser driving stage structure is the same as the one in chapter 3 but the size of the transistor was optimized for 40 mA modulation current of the laser. This stage cannot be operated at 1 Gbps speed with the input magnitude less than 400 mV due to the large input transistor size for high output current. Therefore, the pre-driving stage was added with two-stage tapered differential amplifiers to supply the enough input voltage to the laser driving stage. For the maximum speed and gain, additional current source was included in the pre-driver design. In developing pre-driver circuitry, the common differential amplifier was considered initially. However, the speed is limited even with the maximum current bias it can handle. Thus, the differential amplifier was newly developed containing additional current providing component. Figure 6.1 illustrates a differential amplifier, which is used as a pre-driver before the laser driving stage. The gain of the common differential amplifier is determined given [97] by Av = gm1 = gm 3 2 µnCox (W / L)m1ID 2µnCox (W / L) m 3 ID (6-1) 88 where gm1 and gm3 are the transconductances of transistors, M1 and M3, respectively, µn is the electron mobility, Cox is the oxide capacitance, and W/L is the aspect ratio of the MOS transistor. The idea of additional current is that the voltage gain of the common differential amplifier is determined by two transistors but to have an enough gain, input transistor, M1, should be large or output load transistor, M3, should be small. However, there are two main restrictions here, if the input transistor is increased, the parasitic capacitance will be also increased accordingly and this lowers bandwidth. In addition, if the output load transistor size is attempted to diminish, the transistor size is limited by the current bias since there is a limitation that one transistor can afford. So, to have enough gain while keeping input transistor sizes same, additional circuitry was needed to provide additional current to the input gm transistor. As seen in the equation (6-1), the gain is gm1/gm3 and gm is root-square proportional to device size (aspect ratio) and ID current. So, if 3 times bigger current is flowing into input gm transistor than into the load transistor, this makes the gain to be about 3 without requiring 3 times bigger input transistor size. In this research, the additional current source, I2, is adjustable from the external source to control the gain of each amplifier for maximum speed operation of the whole system. In the design of the driver for LVDS standard, fully differential topology has been used in the overall system to minimize delta-I noise, too. 89 VDD M9 M7 M3 M4 M8 O ut- I2 O ut+ M1 M2 V2 V1 I1 M6 M5 VSS Figure 6.1. The differential amplifier for the pre-driver stage The overall driver schematic is shown in Figure 6.2. Two buffers in pre-driver stage is tapered to the left to drive the last stage since the input transistor of the last stage is big which means that there is a speed bottleneck due to the large parasitic capacitance of the transistor. Therefore, the size of two buffers is scaled with the factor of 3 for maximum bandwidth. 90 M 9 I2 V 1 M 6 M 7 I1 M 2 M 3M 4 M 1 M 5 M 8 V 2 M 1 8 I4 I3 M 1 6 M 1 5 M 1M 2 1 3 M 1 0M 1 1 M 1 4 M 1 7 V D D M 2 2 I5 V S S Z 1 M 1 9M 2 0 M 2 1 D 2 M 2 4 M 2 3 I6 M 2 5 Figure 6.2. The overall schematic of the driver for LVDS 91 6.2 Simulation and Layout The HSPICE simulation on the overall driver has been performed using 0.25 µm, BSIM level 4 model parameters (see Appendix III) provided by MOSIS service. Figure 6.3 illustrates the transient response of the overall driver shown in Figure 6.2 for the bandwidth of 1 Gbps. The top trace represents the pulse waveform of input to the pre-driver circuitry and the middle trace shows the pulse train of output from the laser driving stage. This trace was shown to prove that there was not any missing bit, which cannot be revealed in simple eye diagram. Also, the shape of the output pulse indicates that the driver is fast enough to track the input pulse pattern. The bottom one is the equivalent eye diagram of output to show how well the driver complies with the incoming bit stream. In the simulation, the pattern of the input signal was 27-1 PRBS with LVDS signal size and power supply voltage between Vdd and Vss was 2.5 V. And the voltage gain of 2 was used in pre-driver stage. As shown in the simulation result, the output works well enough for LVDS standard at 1 Gbps speed operation. 92 Figure 6.3. Transient response of LVDS compatible differential laser driver at 1 Gbps The driver was laid out carefully for fabrication using magic layout tool as shown in Figure 6.4. During the layout, every effort was made to minimize the parasitic capacitance of the transistors. In the final layout of this chip, the decoupling capacitor using metal1, metal2, metal3, and metal4 was embedded to prevent unwanted power supply ripple as the signal goes through the driver circuitry. 93 Figure 6.4. The layout of the overall driver for LVDS The Figure 5.10 shows the final layout of the chip submitted to MOSIS for fabrication performed in magic tool. The lower side is driver part and the left side is onchip decoupling capacitor between Vdd and Vss. Two pads at upper part of the driver are prepared for thin-film laser integration. In the large space between two pads, the laser will be integrated. The right upper part is receiver part and the circuitry located in the left side of on-chip decoupling capacitor is DAC for the autobias of receiver and transmitter respectively. 94 Receiver DAC Decoupling Capacitor Transmitter Figure 6.5. The final layout of the whole chip submitted to farbrication 95 Figure 6.6. Microphotograph of the chip for LVDS compatible driver Figure 6.6 shows the microphotograph of the chip before wire bonding. The test procedure, method, and setup are almost the same as for the laser driver in chapter 3 and 4. However, the experimental results not available at the time of this writing because of the wire bonding problem using COB technology. 96 CHAPTER VII CONCLUSIONS AND PROPOSED FUTURE RESEARCH In this chapter, conclusions regarding the accomplished work and contribution of this research in development of optical transmitter using standard digital CMOS process are discussed. Finally, future research in this area is directed. 6.1 Contribution The optical transmitters were developed for free-space optical communication using available standard digital CMOS technology such as 0.35µm and 0.25µm. These transmitters worked up to 1 Gbps speed with 10-11 BER performance. They were first digital CMOS transmitters to date running at these speeds with high modulation current 97 greater than 100 mA. Table 7.1 shows the performance comparison between this transmitter and the recently published optical transmitters that are listed in Table 2.1. This comparison is limited to optical transmitters made only by CMOS technology. Table 7.1. The performance comparison of the transmitter in this research with recently published transmitters Ref. Process Channel Length Speed [Gbit/s] Max. Output Current Eye Diagram BER Remark [mA] [µm] -Measure in packaging This Work CMOS This Work CMOS 0.25 1 40 No No [9] CMOS 0.5 µm 2.5 1.6 Yes Yes 0.35 1 180 Yes Yes -Electrical test -Only simulation results -On-wafer measure -Optical test [10] CMOS 1.2 µm 1 1.2 Yes Yes -Optical test [11] CMOS 1.0 µm 0.622 40 Yes No -On-wafer measure -Optical test [33] [34] CMOS CMOS -On-wafer measure 0.8 µm 2.5 0.35 µm 1 40 No No -Electrical test NA No No -Only simulation results 98 In this research, the usefulness of differential topology of optical transmitter and decoupling capacitor to eliminate current ripples that produce the delta-I noise has been proved. The model of the packaging was implemented including bonding wires and bias wires and the model was included in the design procedure to predict actual performance of the driver. Also, the real model of decoupling capacitor was used to know the real effectiveness. Finally, the performance was measured in terms of BER and eye diagrams even though most of recent researches provided only scope captured data or eye-diagram without BER data. Besides the development of the transmitter for high dI/dt, the transmitter compatible with LVDS standard was also developed with new differential amplifier which provides high gain and high speed. Thus, two design topologies with characterized data can lead to a one-chip optical transmitter solution supporting high speed and high output power. 99 6.3 Future Research This research covered three schemes of optical transmitter circuit, which is the single-ended LED driver, the differential laser driver, and the differential LVDS compatible laser driver up to 10 Gbps speed operation. However, for the high-speed, external modulator has been widely used in the optical communication. Thus, for future research, modulator driver implementation is necessary. To drive the modulator, the transmitter circuit should provide voltage output to the modulator instead of providing current output to the laser. Also, other technologies such as InP HBT and SiGe BiCMOS might be applied to the design of optical transmitter since the speed greater than 10 Gbps is challenging in the current CMOS technology. In addition, more accurate model of packaging parasitics is required for future research since the effect of unwanted parasitics is more critical as the speed is increased. As mentioned in chapter 2, the characteristics of the laser is changed depending on the temperature and device aging. In this research, since the biases for threshold current and modulation current for the laser are adjusted manually using external current source to compensate the degradation of the laser due to the temperature and aging, an automatic bias control circuit is necessary for the future research. In addition to optical transmitter, other function blocks are necessary such as multiplexer to serialize the low-speed parallel incoming data stream to high-speed serial 100 signals or pre-distorter circuits to compensate the chromatic dispersion of the optical fiber. Also, the optical receiver circuitry, which can be compatible with the transmitters in this research, is needed to implement a transceiver system. It is the most probable tht both circuits will coexist on a single digital CMOS chip. 101 6.3 Conclusions A through-silicon optical communication system including single-ended transmitter was demonstrated as an example of free-space optical communication and it showed the restriction for high-speed operation. Thus, A differential optical transmitter meeting high-speed requirement were designed and tested. The transmitter was fabricated using standard digital CMOS technology through National Semiconductor under minimum feature size gate length, 0.35 µm. The performance of this transmitter has been verified along with BER measurement result and eye diagrams at the data rate of 1 Gbps non-returen-to-zero pseudorandom bit stream. This transmitter was scalable since any passive components were not used in the design. So, as the minimum geometry size of a transistor shrinks, the transmitter performance improvement is expected in accordance with reduced feature size of transistors as shown in chapter 4.5. For the transmitter design, the significance of the effect of unwanted packaging parasitics was discussed in chapter 5. The accurate model of packaging parasitics was developed and incorporated in the simulation to predict the actual behavior in the real test environment. The simulation results showed the output corruption in the presence of the parasitics. To reduce the effect of parastics, differential topology was employed and decoupling capacitor was suggested. The effectiveness of these methods was verified in the simulation results and the measurement result. 102 In chapter 6, a differential transmitter with a pre-driver for LVDS, one of common logic family, has been designed and fabricated with a 0.25 µm standard digital CMOS technology through MOSIS foundry to support 1 Gbps data rate. The transmitter consists of two differential amplifiers with additional current source for high-speed and high gain at the pre-driver stage and laser driver at later stage. This transmitter has not been tested at the time of writing. 179 APPENDIX A Brief LVDS Specifications Appendix A.1 Driver dc specification for general purpose link Symbol Parameter Min Max Units Voh Output voltage high 1475 mV Vol Output voltage low 925 |Vod| Output differential voltage 250 400 mV Vos Output offset voltage 1125 1275 mV mV 180 Appendix A.2 Driver dc specification for reduced range link Symbol Parameter Min Max Units Voh Output voltage high 1375 mV Vol Output voltage low 1025 |Vod| Output differential voltage 150 250 mV Vos Output offset voltage 1150 1250 mV mV 105 APPENDIX B EDEGE EMITTING LASER FABRICATED IN GT In this research, two kinds of lasers are implemented. One is a double heterojuction (DH) and another a multiple quantum well (MQW) of InP/InGaAsP for 1.3 um wavelength [98]. With the DB laser, stimulated emission is obtained with relatively small threshold currents since the optical confinement of the DH structure reduces the cavity loss. Typically, the DB laser has a thickness of 0.1 to 0.3 um in the active layer. There are several ways to produce lasers using double heterojunction structures such as the broad area laser, the gain guided laser, the weak index guided laser, and the buried heterostructure laser. Since the DH laser was fabricated to test the quality of the material and to gauge the light efficiency of the material, the broad area laser (the simplest design) was used. The broad area laser has contacts on the p and n side and then cleaves. These kinds of lasers lead to high threshold currents and nonlinearities in its light versus current characteristics since they do not have transverse mode confinement or current confinement. The layer structure of the InP substrate-based DH laser that has been grown at Georgia Tech is shown in Table B.1. 106 Table B.1. Layer structure of the DH laser Layer Thickness in µm In0.53Ga0.47As-p+-2×1019 0.1 p-InP-5×1017 1.7 InGaAsP-Cladding layer 0.1 InGaAsP-Undoped 0.1 InGaAsP-Cladding layer 0.1 n-InP-5×1017 1.6 In0.53Ga0.47As-n+-5×1018 0.2 InGaAs-n=1017 0.2 n-InP-1×1018 4 n-InP substrate With this structure, the DH laser was fabricated on a wafer and cleaved as shown in Figure B.1 and Figure B.2 respectively. The output versus current characteristics of the fabricated laser was measured and shown in Figure B.4. In Figure B.3, threshold current is in the range of 120 mA, and 1 mW optical power at 140 mA input current. 107 Figure B.1. The Fabricated DH Laser Figure B.2. The Cleaved DH Laser 3 output power(mW) 2.5 2 1.5 1 0.5 0 0 100 input current(mA) 200 Figure B.3. Measured light-current characteristics of the DH laser 108 For the hybrid thin film process, the MQW structure is employed. The MQW laser has active regions of ~100 nm thick. The MQW laser band structure is shown in Figure B.4. Quantum wells region Energy Outer cladding Inner cladding Z direction Figure B.4. MQW band structure It typically consists of a quantum well region, an inner cladding, and an outer cladding, although one additional stop etch layer should be added to the process for the fabrication of a thin-film laser. The light is emitted from the active regions, which are in the quantum well region. Outer and Inner cladding confine a high density of injected carriers and photons to produce stimulated emission at a low input power. A thin-film laser that has the MQW structure has been fabricated at Georgia Tech and will be 109 integrated onto the driver circuits and tested. The layer structure of the MQW laser is shown in Table B.2. Table B.2. Layer structure of the MQW laser Layers Thickness in µm p+-In0.53Ga0.47As-2×1019 0.1 p-InP-1×1019 (Be) 1 In0.84Ga0.16As0.33P0.67 0.2 InAs0.33P0.67 0.004 In0.84Ga0.16As0.33P0.67 0.02 InAs0.33P0.67 0.0041 In0.84Ga0.16As0.33P0.67 0.02 InAs0.33P0.67 0.0041 In0.84Ga0.16As0.33P0.67 0.2 n-InP-1×1019 (Si) 1 InP 0.1 InGaAs-1×1017 0.5 n-InP substrate 110 The output versus current characteristics of the fabricated laser was measured and shown in Figure B.5. In Figure B.5, threshold current is in the range of 210 mA. 0.4 Output power(mW) 0.35 0.3 0.25 0.2 0.15 0.1 0.05 0 0 50 100 150 200 250 300 Input current(mA) Figure B.5. Measured light-current characteristics of the MQW laser 111 APPENDIX C HSPICE INPUT CONTROL FILES AND BSIM MODEL PARAMETERS USED IN SIMULATION Appendix C.1. BSIM Model Parameter Used in chapter 4 and 5 ******************************************************************************** SPICE BSIM3 PARAMETERS NSC 0.35 µm process Temperature parameters=Default ******************************************************************************** . .MODEL NMOS NMOS ( LEVEL = 49 +Tox=7.00000E-09 Xj=1.0000000E-07 Nch=3.3644000E+17 +lln=0.00 lwn=1.0000000 wln=1.0000000 wwn=1.2350000 +lint=2.5000000E-08 ll=7.4641730E-11 wint=1.15E-07 +ww=-1.3117622E-15 Mobmod=1 binunit=2 Dwg=3.9968030E-15 +Dwb=3.9968030E-15 Vth0=0.5752980 K1=0.7150000 K2=-2.6116744E-02 +K3=17.5394080 Dvt0=3.4999880 Dvt1=0.3978510 Dvt2=-5.0000000E-02 +Dvt0w=-4.3896440E-02 Dvt1w=8.5083410E+04 Dvt2w=0.00 Nlx=1.2410904E-07 +W0=1.7371252E-06 K3b=-7.2379680 Vsat=9.3500000E+04 Ua=-1.3432969E-09 +Ub=2.7800000E-18 Uc=8.9720000E-11 Rdsw=4.8045270E+02 Prwb=6.0000000E-03 +Prwg=-9.9999980E-02 Wr=0.6949863 U0=3.2631520E-02 A0=1.0001768 +Keta=-8.0000000E-03 A1=0.00 A2=0.9900000 Ags=0.2412180 112 +B0=6.0000000E-08 B1=0.00 Voff=-0.1130000 NFactor=1.2126000 +Cit=0.00 Cdsc=1.0000000E-10 Cdscb=2.8000001E-04 Cdscd=0.00 +Eta0=8.9606450E-02 Etab=-6.5917600E-02 Dsub=0.4135655 +Pclm=1.4301770 Pdiblc1=1.1277000E-03 Pdiblc2=2.4813999E-04 +Pdiblcb=8.9971000E-02 Drout=7.7836970E-03 Pscbe1=5.6448000E+08 +Pscbe2=1.3766100E-05 Pvag=1.0752020 Delta=1.0000000E-02 +Alpha0=4.8038320E-05 Beta0=31.5666010 kt1=-0.3100000 +kt2=-4.7000000E-02 At=5.1700000E+04 Ute=-1.1500000 Ua1=3.5300000E-09 +Ub1=-4.5000000E-18 Uc1=-5.5100000E-11 Kt1l=-1.0E-08 Prt=0.00 +Cj=.000672 Mj=.407 Pb=.825 Cjsw=2.19E-10 Mjsw=.264 Php=.629 +Cta=0 Ctp=0 Pta=0 Ptp=0 JS=1.00E-4 Dlc=3.5E-8 Cgdo=1.42E-10 +Cgso=1.42E-10 Cgbo=4.3e-11 Capmod=2 NQSMOD=0 Elm=5 Xpart=1 +Cgsl=0 Cgdl=0 Ckappa=0.6 Cf=0 Clc=1E-7 Cle=0.6 +NoiMod=2 NoiA=1.508309e18 NoiB=5.030324e5 NoiC=9.014809e-12 +EM=4.1e7 EF=0.7691789 ) * .MODEL PMOS PMOS ( LEVEL = 49 +Tox=7.00000E-09 Xj=1.5000001E-07 Nch=2.3615000E+17 +lln=1.1819875 lwn=0.9500000 wln=1.0000000 wwn=-0.4865745 +lint=-2.5000000E-08 ll=3.9180390E-16 lwl=-2.4801771E-23 +wint=2.4000000E-08 ww=1.2377800E-06 Mobmod=1 binunit=2 +Dwg=5.0000000E-10 Dwb=-6.6959450E-10 Vth0=-0.7600000 +K1=0.6170700 K2=-4.0250000E-02 K3=1.2248999 Dvt0=4.2579680 +Dvt1=0.4418320 Dvt2=-4.2500000E-02 Dvt0w=9.7680010 +Dvt1w=1.8321000E+06 Dvt2w=0.00 Nlx=1.7350369E-07 +W0=1.0150001E-06 K3b=-7.0928000 Vsat=1.2902500E+05 +Ua=1.1400000E-10 Ub=1.2628350E-18 Uc=-1.3575000E-11 ++Rdsw=1.3341750E+03 wRdsw=-1.4000001E-03 pRdsw=4.2000000E-10 +Prwb=-1.0000000E-03 Prwg=0.00 Wr=1.0146334 U0=1.3271000E-02 +A0=0.6440000 Keta=-1.0000001E-02 A1=0.00 A2=0.4000000 +Ags=0.1773206 B0=2.1450019E-08 B1=1.0000000E-07 +Voff=-0.2212500 NFactor=5.2430400 Cit=-4.5400000E-03 +Cdsc=1.0000000E-03 Cdscb=4.2000000E-04 Cdscd=5.6000010E-04 +Eta0=2.7270000E-02 Etab=-6.3000000E-04 Dsub=0.2200600 +Pclm=3.6630000 Pdiblc1=2.0463699E-03 Pdiblc2=9.9620830E-04 +Pdiblcb=4.9049970E-02 Drout=0.5376000 Pscbe1=5.3452250E+08 113 +Pscbe2=1.0000000E-20 Pvag=0.00 Delta=1.0000000E-02 +Alpha0=1.5000000E-09 Beta0=20.0000000 kt1=-0.5162000 +kt2=-5.9000000E-02 At=2.4700000E+04 Ute=-1.1000000 +Ua1=8.5900000E-10 Ub1=-1.4100000E-18 Uc1=-5.8600000E-11 +Kt1l=0.00 Prt=0.00 Cj=.000794 Mj=.495 Pb=1 Cjsw=3.1E-10 +Mjsw=.327 Php=.726 Cta=0 Ctp=0 Pta=0 Ptp=0 JS=1.00E-04 +Dlc=1E-8 Cgdo=1.54E-10 Cgso=1.54E-10 Cgbo=4.7E-11 Capmod=2 +NQSMOD=0 Elm=5 Xpart=1 Cgsl=0 Cgdl=0 Ckappa=0.6 Cf=0 Clc=1E-7 +Cle=0.6 NoiMod=2 NoiA=1.35993e16 NoiB=6.503177e5 +NoiC=1.605921e-11 +EM=4.1e7 EF=0.8827707 ) * ******************************************************************************** 114 Appendix C.2. BSIM Model Parameter Used in chapter 6 ******************************************************************************** SPICE BSIM3 PARAMETERS TSMC 0.25 µm process Temperature parameters=Default ******************************************************************************** .MODEL CMOSN NMOS ( +VERSION = 3.1 TNOM +XJ = 1E-7 +K1 = 0.4144712 +K3B NCH DVT1 UA +UC = 3.117558E-11 VSAT = 6.322964E-3 +RDSW = 120 +WR =1 +XL = 3E-8 +DWB +CIT =0 WINT +DSUB XW = 0.5 =0 ETA0 B1 A2 LINT ETAB = 1.8534523 +PSCBE1 = 8E10 PSCBE2 = 2.278455E-8 +KT1L =0 UTE =0 = -7.61E-18 +WL =0 +WWN = 1.2127 = -1.5 KT2 +UB1 = 4.7 WLN KT1 WWL = 0.2666656 = 4.31E-9 AT WW =0 PVAG = -0.11 UA1 = -5.6E-11 =1 DROUT = 1 MOBMOD = 1 = 0.022 UC1 = 3.125491E-3 PDIBLC1 = 0.6857768 PDIBLCB = 0.050458 +PRT = -2.126447E-8 CDSCD = 0 = 0.0491777 RSH = -0.2 NFACTOR = 0 +PDIBLC2 = 0.01 +DELTA = 0.01 =1 = -2.42828E-9 = -0.0976674 PCLM = 0.631435 = 1.05362E-6 PRWB = 2.4E-4 = -0.0733355 = 2.037713E-18 A0 DWG VOFF = 0.2870242 DVT2 = 9.606552E-4 = 1.765394E-9 CDSC = 2.808104E-7 DVT2W = 0 = 3.658209E-7 PRWG +CDSCB = 0 NLX = 8.99117E4 A1 = 9.185176E-9 = 1.000752E-3 = -6.65353E-10 UB B0 +KETA = 0.408619 = 0.0981279 = 345.4738707 = 0.1288136 VTH0 = 1.000961E-7 +U0 +AGS = 5.8E-9 K3 DVT1W = 0 = 0.211976 TOX = 0.0122732 W0 +DVT0W = 0 = 27 = 2.3549E17 K2 = 0.8229319 +DVT0 LEVEL = 49 = 3.3E4 = -1.22182E-16 LL =0 115 +LLN =1 LW +LWL =0 CAPMOD = 2 +CGDO +CJ =0 = 6.27E-10 CGSO = 1.916804E-3 +CJSW LWN PB =0 +PK2 XPART = 0.4 = 6.27E-10 = 0.99 = 4.549787E-10 PBSW +CF =1 CGBO MJ = 1E-12 = 0.4744225 = 0.99 MJSW = 0.3235275 PVTH0 = -8.631195E-3 PRDSW = 0 = 3.5315E-3 WKETA = -4.378878E-3 LKETA = -0.0351436 * .MODEL CMOSP PMOS ( +VERSION = 3.1 TNOM +XJ = 1E-7 +K1 = 0.5416631 +K3B NCH +U0 = 134.7042677 +UC = -1E-10 UA = 0.1869313 +KETA = 0.0127477 +RDSW = 1.418086E3 +WR =1 +XL = 3E-8 +DWB +CIT WINT +DSUB VOFF CDSC ETA0 +PRT +KT1L =0 =0 KT2 +UB1 = -7.61E-18 +WL =0 +WWN = -0.0740874 PDIBLC1 = 0 DROUT = 0.3487536 KT1 WWL LL =1 LW =0 +LWL =0 CAPMOD = 2 CGSO = 4.31E-9 AT WW =0 = 15 = -0.11 UA1 = -5.6E-11 =1 PVAG MOBMOD = 1 = 0.022 WLN = 5.59E-10 ETAB = 1.8859363 +LLN +CGDO NFACTOR = 0 CDSCD = 0 = 3.5 UC1 =1 = -7.677822E-9 = -0.0925825 = -1.5 = -0.2753995 = 2.725798E-8 PSCBE2 = 6.262781E-9 RSH UTE = 0.576764 PRWB PDIBLCB = -1E-3 +PSCBE1 = 2.171928E10 +DELTA = 0.01 = 5E-6 A2 DWG = 0.2 PCLM +PDIBLC2 = 0.0969061 = 1E-21 B1 = 0.0500478 = 2.4E-4 = -0.072391 = 1.0980036 = 1.818942E-3 =0 = 1.1514586 UB = -1.899142E-8 LINT XW +CDSCB = 0 DVT2 A0 = 1.602029E-6 PRWG = 3.679257E-9 =0 = 0.7927238 A1 = 1E-9 DVT2W = 0 = 2E5 B0 =0 NLX = 1.795355E-9 VSAT = -0.556523 K3 = 6.279195E-6 DVT1 = 5.8E-9 VTH0 DVT1W = 0 = 4.3499141 +AGS TOX = 0.0245545 W0 +DVT0W = 0 = 27 = 4.1589E17 K2 = 8.6601778 +DVT0 LEVEL = 49 LWN = 3.3E4 =0 =0 =1 XPART = 0.4 = 5.59E-10 CGBO = 1E-12 ) 116 +CJ +CJSW +CF +PK2 * = 1.883133E-3 PB = 0.9807855 = 3.733241E-10 PBSW =0 = 0.7634647 PVTH0 = 6.146287E-3 = 3.091063E-3 MJ = 0.4655692 MJSW = 0.3208898 PRDSW = -9.6506777 WKETA = 6.365227E-3 LKETA = -0.0103601 ) 117 Appendix C.3. SPICE Netlist and Input Control File Appendix C.3.1. NSC Differential Transmitter Netlist ***** Subcircuit from file ./acsource1.ext M12 3 5 4 2 NMOS W=80.0U L=0.4U .SUBCKT acsource1 1 2 3 4 5 + AD=0.0P PD=242.0U AS=0.0P PS=245.2U M13 4 5 3 2 NMOS W=80.0U L=0.4U M1 4 5 3 2 NMOS W=80.0U L=0.4U + AD=0.0P PD=245.2U AS=0.0P PS=242.0U + AD=0.0P PD=245.2U AS=0.0P PS=242.0U M14 3 5 4 2 NMOS W=80.0U L=0.4U M2 3 5 4 2 NMOS W=80.0U L=0.4U + AD=0.0P PD=242.0U AS=0.0P PS=245.2U + AD=0.0P PD=242.0U AS=0.0P PS=245.2U M15 4 5 3 2 NMOS W=80.0U L=0.4U M3 4 5 3 2 NMOS W=80.0U L=0.4U + AD=0.0P PD=245.2U AS=0.0P PS=242.0U + AD=0.0P PD=245.2U AS=0.0P PS=242.0U M16 3 5 4 2 NMOS W=80.0U L=0.4U M4 3 5 4 2 NMOS W=80.0U L=0.4U + AD=0.0P PD=242.0U AS=0.0P PS=245.2U + AD=0.0P PD=242.0U AS=0.0P PS=245.2U M17 4 5 3 2 NMOS W=80.0U L=0.4U M5 4 5 3 2 NMOS W=80.0U L=0.4U + AD=0.0P PD=245.2U AS=0.0P PS=242.0U + AD=0.0P PD=245.2U AS=0.0P PS=242.0U M18 3 5 4 2 NMOS W=80.0U L=0.4U M6 3 5 4 2 NMOS W=80.0U L=0.4U + AD=0.0P PD=242.0U AS=0.0P PS=245.2U + AD=0.0P PD=242.0U AS=0.0P PS=245.2U M19 4 5 3 2 NMOS W=80.0U L=0.4U M7 4 5 3 2 NMOS W=80.0U L=0.4U + AD=0.0P PD=245.2U AS=0.0P PS=242.0U + AD=0.0P PD=245.2U AS=0.0P PS=242.0U M20 3 5 4 2 NMOS W=80.0U L=0.4U M8 3 5 4 2 NMOS W=80.0U L=0.4U + AD=0.0P PD=242.0U AS=0.0P PS=245.2U + AD=0.0P PD=242.0U AS=0.0P PS=245.2U M21 4 5 3 2 NMOS W=80.0U L=0.4U M9 4 5 3 2 NMOS W=80.0U L=0.4U + AD=0.0P PD=245.2U AS=0.0P PS=242.0U + AD=0.0P PD=245.2U AS=0.0P PS=242.0U M22 3 5 4 2 NMOS W=80.0U L=0.4U M10 3 5 4 2 NMOS W=80.0U L=0.4U + AD=0.0P PD=242.0U AS=0.0P PS=245.2U + AD=0.0P PD=242.0U AS=0.0P PS=245.2U M23 4 5 3 2 NMOS W=80.0U L=0.4U M11 4 5 3 2 NMOS W=80.0U L=0.4U + AD=0.0P PD=245.2U AS=0.0P PS=242.0U + AD=0.0P PD=245.2U AS=0.0P PS=242.0U M24 3 5 4 2 NMOS W=80.0U L=0.4U 118 + AD=0.0P PD=242.0U AS=0.0P PS=245.2U M43 4 5 3 2 NMOS W=80.0U L=0.4U M25 4 5 3 2 NMOS W=80.0U L=0.4U + AD=0.0P PD=245.2U AS=0.0P PS=242.0U + AD=0.0P PD=245.2U AS=0.0P PS=242.0U M44 3 5 4 2 NMOS W=80.0U L=0.4U M26 3 5 4 2 NMOS W=80.0U L=0.4U + AD=0.0P PD=242.0U AS=0.0P PS=245.2U + AD=0.0P PD=242.0U AS=0.0P PS=245.2U M45 4 5 3 2 NMOS W=80.0U L=0.4U M27 4 5 3 2 NMOS W=80.0U L=0.4U + AD=0.0P PD=245.2U AS=0.0P PS=242.0U + AD=0.0P PD=245.2U AS=0.0P PS=242.0U M46 3 5 4 2 NMOS W=80.0U L=0.4U M28 3 5 4 2 NMOS W=80.0U L=0.4U + AD=0.0P PD=242.0U AS=0.0P PS=245.2U + AD=0.0P PD=242.0U AS=0.0P PS=245.2U M47 4 5 3 2 NMOS W=80.0U L=0.4U M29 4 5 3 2 NMOS W=80.0U L=0.4U + AD=0.0P PD=245.2U AS=0.0P PS=242.0U + AD=0.0P PD=245.2U AS=0.0P PS=242.0U M48 3 5 4 2 NMOS W=80.0U L=0.4U M30 3 5 4 2 NMOS W=80.0U L=0.4U + AD=0.0P PD=242.0U AS=0.0P PS=245.2U + AD=0.0P PD=242.0U AS=0.0P PS=245.2U M49 4 5 3 2 NMOS W=80.0U L=0.4U M31 4 5 3 2 NMOS W=80.0U L=0.4U + AD=0.0P PD=245.2U AS=0.0P PS=242.0U + AD=0.0P PD=245.2U AS=0.0P PS=242.0U M50 3 5 4 2 NMOS W=80.0U L=0.4U M32 3 5 4 2 NMOS W=80.0U L=0.4U + AD=0.0P PD=242.0U AS=0.0P PS=245.2U + AD=0.0P PD=242.0U AS=0.0P PS=245.2U M51 4 5 3 2 NMOS W=80.0U L=0.4U M33 4 5 3 2 NMOS W=80.0U L=0.4U + AD=0.0P PD=245.2U AS=0.0P PS=242.0U + AD=0.0P PD=245.2U AS=0.0P PS=242.0U M52 3 5 4 2 NMOS W=80.0U L=0.4U M34 3 5 4 2 NMOS W=80.0U L=0.4U + AD=0.0P PD=242.0U AS=0.0P PS=245.2U + AD=0.0P PD=242.0U AS=0.0P PS=245.2U M53 4 5 3 2 NMOS W=80.0U L=0.4U M35 4 5 3 2 NMOS W=80.0U L=0.4U + AD=0.0P PD=245.2U AS=0.0P PS=242.0U + AD=0.0P PD=245.2U AS=0.0P PS=242.0U M54 3 5 4 2 NMOS W=80.0U L=0.4U M36 3 5 4 2 NMOS W=80.0U L=0.4U + AD=0.0P PD=242.0U AS=0.0P PS=245.2U + AD=0.0P PD=242.0U AS=0.0P PS=245.2U M55 4 5 3 2 NMOS W=80.0U L=0.4U M37 4 5 3 2 NMOS W=80.0U L=0.4U + AD=0.0P PD=245.2U AS=0.0P PS=242.0U + AD=0.0P PD=245.2U AS=0.0P PS=242.0U M56 3 5 4 2 NMOS W=80.0U L=0.4U M38 3 5 4 2 NMOS W=80.0U L=0.4U + AD=0.0P PD=242.0U AS=0.0P PS=245.2U + AD=0.0P PD=242.0U AS=0.0P PS=245.2U M57 4 5 3 2 NMOS W=80.0U L=0.4U M39 4 5 3 2 NMOS W=80.0U L=0.4U + AD=0.0P PD=245.2U AS=0.0P PS=242.0U + AD=0.0P PD=245.2U AS=0.0P PS=242.0U M58 3 5 4 2 NMOS W=80.0U L=0.4U M40 3 5 4 2 NMOS W=80.0U L=0.4U + AD=0.0P PD=242.0U AS=0.0P PS=245.2U + AD=0.0P PD=242.0U AS=0.0P PS=245.2U M59 4 5 3 2 NMOS W=80.0U L=0.4U M41 4 5 3 2 NMOS W=80.0U L=0.4U + AD=0.0P PD=245.2U AS=0.0P PS=242.0U + AD=0.0P PD=245.2U AS=0.0P PS=242.0U M60 3 5 4 2 NMOS W=80.0U L=0.4U M42 3 5 4 2 NMOS W=80.0U L=0.4U + AD=0.0P PD=242.0U AS=0.0P PS=245.2U + AD=0.0P PD=242.0U AS=0.0P PS=245.2U M61 4 5 3 2 NMOS W=80.0U L=0.4U 119 + AD=0.0P PD=245.2U AS=0.0P PS=242.0U M80 3 5 4 2 NMOS W=80.0U L=0.4U M62 3 5 4 2 NMOS W=80.0U L=0.4U + AD=0.0P PD=242.0U AS=0.0P PS=245.2U + AD=0.0P PD=242.0U AS=0.0P PS=245.2U M81 4 5 3 2 NMOS W=80.0U L=0.4U M63 4 5 3 2 NMOS W=80.0U L=0.4U + AD=0.0P PD=245.2U AS=0.0P PS=242.0U + AD=0.0P PD=245.2U AS=0.0P PS=242.0U M82 3 5 4 2 NMOS W=80.0U L=0.4U M64 3 5 4 2 NMOS W=80.0U L=0.4U + AD=0.0P PD=242.0U AS=0.0P PS=245.2U + AD=0.0P PD=242.0U AS=0.0P PS=245.2U M83 4 5 3 2 NMOS W=80.0U L=0.4U M65 4 5 3 2 NMOS W=80.0U L=0.4U + AD=0.0P PD=245.2U AS=0.0P PS=242.0U + AD=0.0P PD=245.2U AS=0.0P PS=242.0U M84 3 5 4 2 NMOS W=80.0U L=0.4U M66 3 5 4 2 NMOS W=80.0U L=0.4U + AD=0.0P PD=242.0U AS=0.0P PS=245.2U + AD=0.0P PD=242.0U AS=0.0P PS=245.2U M85 4 5 3 2 NMOS W=80.0U L=0.4U M67 4 5 3 2 NMOS W=80.0U L=0.4U + AD=0.0P PD=245.2U AS=0.0P PS=242.0U + AD=0.0P PD=245.2U AS=0.0P PS=242.0U M86 3 5 4 2 NMOS W=80.0U L=0.4U M68 3 5 4 2 NMOS W=80.0U L=0.4U + AD=0.0P PD=242.0U AS=0.0P PS=245.2U + AD=0.0P PD=242.0U AS=0.0P PS=245.2U M87 4 5 3 2 NMOS W=80.0U L=0.4U M69 4 5 3 2 NMOS W=80.0U L=0.4U + AD=0.0P PD=245.2U AS=0.0P PS=242.0U + AD=0.0P PD=245.2U AS=0.0P PS=242.0U M88 3 5 4 2 NMOS W=80.0U L=0.4U M70 3 5 4 2 NMOS W=80.0U L=0.4U + AD=0.0P PD=242.0U AS=0.0P PS=245.2U + AD=0.0P PD=242.0U AS=0.0P PS=245.2U M89 4 5 3 2 NMOS W=80.0U L=0.4U M71 4 5 3 2 NMOS W=80.0U L=0.4U + AD=0.0P PD=245.2U AS=0.0P PS=242.0U + AD=0.0P PD=245.2U AS=0.0P PS=242.0U M90 3 5 4 2 NMOS W=80.0U L=0.4U M72 3 5 4 2 NMOS W=80.0U L=0.4U + AD=0.0P PD=242.0U AS=0.0P PS=245.2U + AD=0.0P PD=242.0U AS=0.0P PS=245.2U M91 4 5 3 2 NMOS W=80.0U L=0.4U M73 4 5 3 2 NMOS W=80.0U L=0.4U + AD=0.0P PD=245.2U AS=0.0P PS=242.0U + AD=0.0P PD=245.2U AS=0.0P PS=242.0U M92 3 5 4 2 NMOS W=80.0U L=0.4U M74 3 5 4 2 NMOS W=80.0U L=0.4U + AD=0.0P PD=242.0U AS=0.0P PS=245.2U + AD=0.0P PD=242.0U AS=0.0P PS=245.2U M93 4 5 3 2 NMOS W=80.0U L=0.4U M75 4 5 3 2 NMOS W=80.0U L=0.4U + AD=0.0P PD=245.2U AS=0.0P PS=242.0U + AD=0.0P PD=245.2U AS=0.0P PS=242.0U M94 3 5 4 2 NMOS W=80.0U L=0.4U M76 3 5 4 2 NMOS W=80.0U L=0.4U + AD=0.0P PD=242.0U AS=0.0P PS=245.2U + AD=0.0P PD=242.0U AS=0.0P PS=245.2U M95 4 5 3 2 NMOS W=80.0U L=0.4U M77 4 5 3 2 NMOS W=80.0U L=0.4U + AD=0.0P PD=245.2U AS=0.0P PS=242.0U + AD=0.0P PD=245.2U AS=0.0P PS=242.0U M96 3 5 4 2 NMOS W=80.0U L=0.4U M78 3 5 4 2 NMOS W=80.0U L=0.4U + AD=0.0P PD=242.0U AS=0.0P PS=245.2U + AD=0.0P PD=242.0U AS=0.0P PS=245.2U M97 4 5 3 2 NMOS W=80.0U L=0.4U M79 4 5 3 2 NMOS W=80.0U L=0.4U + AD=0.0P PD=245.2U AS=0.0P PS=242.0U + AD=0.0P PD=245.2U AS=0.0P PS=242.0U M98 3 5 4 2 NMOS W=80.0U L=0.4U 120 + AD=0.0P PD=242.0U AS=0.0P PS=245.2U M117 4 5 3 2 NMOS W=80.0U L=0.4U M99 4 5 3 2 NMOS W=80.0U L=0.4U + AD=0.0P PD=245.2U AS=0.0P PS=242.0U + AD=0.0P PD=245.2U AS=0.0P PS=242.0U M118 3 5 4 2 NMOS W=80.0U L=0.4U M100 3 5 4 2 NMOS W=80.0U L=0.4U + AD=0.0P PD=242.0U AS=0.0P PS=245.2U + AD=0.0P PD=242.0U AS=0.0P PS=245.2U M119 4 5 5 2 NMOS W=8.0U L=0.4U M101 4 5 3 2 NMOS W=80.0U L=0.4U + AD=0.0P PD=24.5U AS=0.0P PS=26.0U + AD=0.0P PD=245.2U AS=0.0P PS=242.0U M120 5 5 4 2 NMOS W=8.0U L=0.4U M102 3 5 4 2 NMOS W=80.0U L=0.4U + AD=0.0P PD=26.0U AS=0.0P PS=24.5U + AD=0.0P PD=242.0U AS=0.0P PS=245.2U M121 4 5 5 2 NMOS W=8.0U L=0.4U M103 4 5 3 2 NMOS W=80.0U L=0.4U + AD=0.0P PD=24.5U AS=0.0P PS=26.0U + AD=0.0P PD=245.2U AS=0.0P PS=242.0U M122 5 5 4 2 NMOS W=8.0U L=0.4U M104 3 5 4 2 NMOS W=80.0U L=0.4U + AD=0.0P PD=26.0U AS=0.0P PS=24.5U + AD=0.0P PD=242.0U AS=0.0P PS=245.2U M123 4 5 5 2 NMOS W=8.0U L=0.4U M105 4 5 3 2 NMOS W=80.0U L=0.4U + AD=0.0P PD=24.5U AS=0.0P PS=26.0U + AD=0.0P PD=245.2U AS=0.0P PS=242.0U M124 5 5 4 2 NMOS W=8.0U L=0.4U M106 3 5 4 2 NMOS W=80.0U L=0.4U + AD=0.0P PD=26.0U AS=0.0P PS=24.5U + AD=0.0P PD=242.0U AS=0.0P PS=245.2U M125 4 5 5 2 NMOS W=8.0U L=0.4U M107 4 5 3 2 NMOS W=80.0U L=0.4U + AD=0.0P PD=24.5U AS=0.0P PS=26.0U + AD=0.0P PD=245.2U AS=0.0P PS=242.0U M126 5 5 4 2 NMOS W=8.0U L=0.4U M108 3 5 4 2 NMOS W=80.0U L=0.4U + AD=0.0P PD=26.0U AS=0.0P PS=24.5U + AD=0.0P PD=242.0U AS=0.0P PS=245.2U M127 4 5 5 2 NMOS W=8.0U L=0.4U M109 4 5 3 2 NMOS W=80.0U L=0.4U + AD=0.0P PD=24.5U AS=0.0P PS=26.0U + AD=0.0P PD=245.2U AS=0.0P PS=242.0U M128 5 5 4 2 NMOS W=8.0U L=0.4U M110 3 5 4 2 NMOS W=80.0U L=0.4U + AD=0.0P PD=26.0U AS=0.0P PS=24.5U + AD=0.0P PD=242.0U AS=0.0P PS=245.2U M111 4 5 3 2 NMOS W=80.0U L=0.4U C1 5 3 5.2F + AD=0.0P PD=245.2U AS=0.0P PS=242.0U C2 4 5 13.4F M112 3 5 4 2 NMOS W=80.0U L=0.4U C3 4 0 473.4F + AD=0.0P PD=242.0U AS=0.0P PS=245.2U C4 3 0 922.9F M113 4 5 3 2 NMOS W=80.0U L=0.4U C5 5 0 143.3F + AD=0.0P PD=245.2U AS=0.0P PS=242.0U *** Node Listing for subckt: acsource1 M114 3 5 4 2 NMOS W=80.0U L=0.4U ** 0 Node 0 is the global ground node + AD=0.0P PD=242.0U AS=0.0P PS=245.2U ** 1 Vdd! M115 4 5 3 2 NMOS W=80.0U L=0.4U ** 2 GND! + AD=0.0P PD=245.2U AS=0.0P PS=242.0U ** 3 a_n1062_679# M116 3 5 4 2 NMOS W=80.0U L=0.4U ** 4 a_n1080_669# + AD=0.0P PD=242.0U AS=0.0P PS=245.2U ** 5 IdcLast 121 .ENDS + AD=0.0P PD=24.0U AS=0.0P PS=25.0U M17 5 3 3 2 NMOS W=8.0U L=0.4U + AD=0.0P PD=25.0U AS=0.0P PS=24.0U ***** Subcircuit from file ./dcsource.ext M18 3 3 5 2 NMOS W=8.0U L=0.4U .SUBCKT dcsource 1 2 3 4 5 6 + AD=0.0P PD=24.0U AS=0.0P PS=25.0U M19 5 3 3 2 NMOS W=8.0U L=0.4U M1 5 3 3 2 NMOS W=8.0U L=0.4U + AD=0.0P PD=25.0U AS=0.0P PS=24.0U + AD=0.0P PD=25.0U AS=0.0P PS=24.0U M20 3 3 5 2 NMOS W=8.0U L=0.4U M2 3 3 5 2 NMOS W=8.0U L=0.4U + AD=0.0P PD=24.0U AS=0.0P PS=25.0U + AD=0.0P PD=24.0U AS=0.0P PS=25.0U M21 5 3 4 2 NMOS W=8.0U L=0.4U M3 5 3 3 2 NMOS W=8.0U L=0.4U + AD=0.0P PD=25.0U AS=0.0P PS=24.0U + AD=0.0P PD=25.0U AS=0.0P PS=24.0U M22 4 3 5 2 NMOS W=8.0U L=0.4U M4 3 3 5 2 NMOS W=8.0U L=0.4U + AD=0.0P PD=24.0U AS=0.0P PS=25.0U + AD=0.0P PD=24.0U AS=0.0P PS=25.0U M23 5 3 4 2 NMOS W=8.0U L=0.4U M5 5 3 3 2 NMOS W=8.0U L=0.4U + AD=0.0P PD=25.0U AS=0.0P PS=24.0U + AD=0.0P PD=25.0U AS=0.0P PS=24.0U M24 4 3 5 2 NMOS W=8.0U L=0.4U M6 3 3 5 2 NMOS W=8.0U L=0.4U + AD=0.0P PD=24.0U AS=0.0P PS=25.0U + AD=0.0P PD=24.0U AS=0.0P PS=25.0U M25 5 3 4 2 NMOS W=8.0U L=0.4U M7 5 3 3 2 NMOS W=8.0U L=0.4U + AD=0.0P PD=25.0U AS=0.0P PS=24.0U + AD=0.0P PD=25.0U AS=0.0P PS=24.0U M26 4 3 5 2 NMOS W=8.0U L=0.4U M8 3 3 5 2 NMOS W=8.0U L=0.4U + AD=0.0P PD=24.0U AS=0.0P PS=25.0U + AD=0.0P PD=24.0U AS=0.0P PS=25.0U M27 5 3 4 2 NMOS W=8.0U L=0.4U M9 5 3 3 2 NMOS W=8.0U L=0.4U + AD=0.0P PD=25.0U AS=0.0P PS=24.0U + AD=0.0P PD=25.0U AS=0.0P PS=24.0U M28 4 3 5 2 NMOS W=8.0U L=0.4U M10 3 3 5 2 NMOS W=8.0U L=0.4U + AD=0.0P PD=24.0U AS=0.0P PS=25.0U + AD=0.0P PD=24.0U AS=0.0P PS=25.0U M29 5 3 4 2 NMOS W=8.0U L=0.4U M11 5 3 3 2 NMOS W=8.0U L=0.4U + AD=0.0P PD=25.0U AS=0.0P PS=24.0U + AD=0.0P PD=25.0U AS=0.0P PS=24.0U M30 4 3 5 2 NMOS W=8.0U L=0.4U M12 3 3 5 2 NMOS W=8.0U L=0.4U + AD=0.0P PD=24.0U AS=0.0P PS=25.0U + AD=0.0P PD=24.0U AS=0.0P PS=25.0U M31 5 3 4 2 NMOS W=8.0U L=0.4U M13 5 3 3 2 NMOS W=8.0U L=0.4U + AD=0.0P PD=25.0U AS=0.0P PS=24.0U + AD=0.0P PD=25.0U AS=0.0P PS=24.0U M32 4 3 5 2 NMOS W=8.0U L=0.4U M14 3 3 5 2 NMOS W=8.0U L=0.4U + AD=0.0P PD=24.0U AS=0.0P PS=25.0U + AD=0.0P PD=24.0U AS=0.0P PS=25.0U M33 5 3 4 2 NMOS W=8.0U L=0.4U M15 5 3 3 2 NMOS W=8.0U L=0.4U + AD=0.0P PD=25.0U AS=0.0P PS=24.0U + AD=0.0P PD=25.0U AS=0.0P PS=24.0U M34 4 3 5 2 NMOS W=8.0U L=0.4U M16 3 3 5 2 NMOS W=8.0U L=0.4U + AD=0.0P PD=24.0U AS=0.0P PS=25.0U 122 M35 5 3 4 2 NMOS W=8.0U L=0.4U + AD=0.0P PD=25.0U AS=0.0P PS=24.0U + AD=0.0P PD=25.0U AS=0.0P PS=24.0U M54 4 3 5 2 NMOS W=8.0U L=0.4U M36 4 3 5 2 NMOS W=8.0U L=0.4U + AD=0.0P PD=24.0U AS=0.0P PS=25.0U + AD=0.0P PD=24.0U AS=0.0P PS=25.0U M55 5 3 4 2 NMOS W=8.0U L=0.4U M37 5 3 4 2 NMOS W=8.0U L=0.4U + AD=0.0P PD=25.0U AS=0.0P PS=24.0U + AD=0.0P PD=25.0U AS=0.0P PS=24.0U M56 4 3 5 2 NMOS W=8.0U L=0.4U M38 4 3 5 2 NMOS W=8.0U L=0.4U + AD=0.0P PD=24.0U AS=0.0P PS=25.0U + AD=0.0P PD=24.0U AS=0.0P PS=25.0U M57 5 3 4 2 NMOS W=8.0U L=0.4U M39 5 3 4 2 NMOS W=8.0U L=0.4U + AD=0.0P PD=25.0U AS=0.0P PS=24.0U + AD=0.0P PD=25.0U AS=0.0P PS=24.0U M58 4 3 5 2 NMOS W=8.0U L=0.4U M40 4 3 5 2 NMOS W=8.0U L=0.4U + AD=0.0P PD=24.0U AS=0.0P PS=25.0U + AD=0.0P PD=24.0U AS=0.0P PS=25.0U M59 5 3 4 2 NMOS W=8.0U L=0.4U M41 5 3 4 2 NMOS W=8.0U L=0.4U + AD=0.0P PD=25.0U AS=0.0P PS=24.0U + AD=0.0P PD=25.0U AS=0.0P PS=24.0U M60 4 3 5 2 NMOS W=8.0U L=0.4U M42 4 3 5 2 NMOS W=8.0U L=0.4U + AD=0.0P PD=24.0U AS=0.0P PS=25.0U + AD=0.0P PD=24.0U AS=0.0P PS=25.0U M61 5 3 6 2 NMOS W=8.0U L=0.4U M43 5 3 4 2 NMOS W=8.0U L=0.4U + AD=0.0P PD=25.0U AS=0.0P PS=24.0U + AD=0.0P PD=25.0U AS=0.0P PS=24.0U M62 6 3 5 2 NMOS W=8.0U L=0.4U M44 4 3 5 2 NMOS W=8.0U L=0.4U + AD=0.0P PD=24.0U AS=0.0P PS=25.0U + AD=0.0P PD=24.0U AS=0.0P PS=25.0U M63 5 3 6 2 NMOS W=8.0U L=0.4U M45 5 3 4 2 NMOS W=8.0U L=0.4U + AD=0.0P PD=25.0U AS=0.0P PS=24.0U + AD=0.0P PD=25.0U AS=0.0P PS=24.0U M64 6 3 5 2 NMOS W=8.0U L=0.4U M46 4 3 5 2 NMOS W=8.0U L=0.4U + AD=0.0P PD=24.0U AS=0.0P PS=25.0U + AD=0.0P PD=24.0U AS=0.0P PS=25.0U M65 5 3 6 2 NMOS W=8.0U L=0.4U M47 5 3 4 2 NMOS W=8.0U L=0.4U + AD=0.0P PD=25.0U AS=0.0P PS=24.0U + AD=0.0P PD=25.0U AS=0.0P PS=24.0U M66 6 3 5 2 NMOS W=8.0U L=0.4U M48 4 3 5 2 NMOS W=8.0U L=0.4U + AD=0.0P PD=24.0U AS=0.0P PS=25.0U + AD=0.0P PD=24.0U AS=0.0P PS=25.0U M67 5 3 6 2 NMOS W=8.0U L=0.4U M49 5 3 4 2 NMOS W=8.0U L=0.4U + AD=0.0P PD=25.0U AS=0.0P PS=24.0U + AD=0.0P PD=25.0U AS=0.0P PS=24.0U M68 6 3 5 2 NMOS W=8.0U L=0.4U M50 4 3 5 2 NMOS W=8.0U L=0.4U + AD=0.0P PD=24.0U AS=0.0P PS=25.0U + AD=0.0P PD=24.0U AS=0.0P PS=25.0U M69 5 3 6 2 NMOS W=8.0U L=0.4U M51 5 3 4 2 NMOS W=8.0U L=0.4U + AD=0.0P PD=25.0U AS=0.0P PS=24.0U + AD=0.0P PD=25.0U AS=0.0P PS=24.0U M70 6 3 5 2 NMOS W=8.0U L=0.4U M52 4 3 5 2 NMOS W=8.0U L=0.4U + AD=0.0P PD=24.0U AS=0.0P PS=25.0U + AD=0.0P PD=24.0U AS=0.0P PS=25.0U M71 5 3 6 2 NMOS W=8.0U L=0.4U M53 5 3 4 2 NMOS W=8.0U L=0.4U + AD=0.0P PD=25.0U AS=0.0P PS=24.0U 123 M72 6 3 5 2 NMOS W=8.0U L=0.4U + AD=0.0P PD=24.0U AS=0.0P PS=25.0U + AD=0.0P PD=24.0U AS=0.0P PS=25.0U M91 5 3 6 2 NMOS W=8.0U L=0.4U M73 5 3 6 2 NMOS W=8.0U L=0.4U + AD=0.0P PD=25.0U AS=0.0P PS=24.0U + AD=0.0P PD=25.0U AS=0.0P PS=24.0U M92 6 3 5 2 NMOS W=8.0U L=0.4U M74 6 3 5 2 NMOS W=8.0U L=0.4U + AD=0.0P PD=24.0U AS=0.0P PS=25.0U + AD=0.0P PD=24.0U AS=0.0P PS=25.0U M93 5 3 6 2 NMOS W=8.0U L=0.4U M75 5 3 6 2 NMOS W=8.0U L=0.4U + AD=0.0P PD=25.0U AS=0.0P PS=24.0U + AD=0.0P PD=25.0U AS=0.0P PS=24.0U M94 6 3 5 2 NMOS W=8.0U L=0.4U M76 6 3 5 2 NMOS W=8.0U L=0.4U + AD=0.0P PD=24.0U AS=0.0P PS=25.0U + AD=0.0P PD=24.0U AS=0.0P PS=25.0U M95 5 3 6 2 NMOS W=8.0U L=0.4U M77 5 3 6 2 NMOS W=8.0U L=0.4U + AD=0.0P PD=25.0U AS=0.0P PS=24.0U + AD=0.0P PD=25.0U AS=0.0P PS=24.0U M96 6 3 5 2 NMOS W=8.0U L=0.4U M78 6 3 5 2 NMOS W=8.0U L=0.4U + AD=0.0P PD=24.0U AS=0.0P PS=25.0U + AD=0.0P PD=24.0U AS=0.0P PS=25.0U M97 5 3 6 2 NMOS W=8.0U L=0.4U M79 5 3 6 2 NMOS W=8.0U L=0.4U + AD=0.0P PD=25.0U AS=0.0P PS=24.0U + AD=0.0P PD=25.0U AS=0.0P PS=24.0U M98 6 3 5 2 NMOS W=8.0U L=0.4U M80 6 3 5 2 NMOS W=8.0U L=0.4U + AD=0.0P PD=24.0U AS=0.0P PS=25.0U + AD=0.0P PD=24.0U AS=0.0P PS=25.0U M99 5 3 6 2 NMOS W=8.0U L=0.4U M81 5 3 6 2 NMOS W=8.0U L=0.4U + AD=0.0P PD=25.0U AS=0.0P PS=24.0U + AD=0.0P PD=25.0U AS=0.0P PS=24.0U M100 6 3 5 2 NMOS W=8.0U L=0.4U M82 6 3 5 2 NMOS W=8.0U L=0.4U + AD=0.0P PD=24.0U AS=0.0P PS=25.0U + AD=0.0P PD=24.0U AS=0.0P PS=25.0U M83 5 3 6 2 NMOS W=8.0U L=0.4U C1 3 4 4.0F + AD=0.0P PD=25.0U AS=0.0P PS=24.0U C2 3 6 4.0F M84 6 3 5 2 NMOS W=8.0U L=0.4U C3 5 3 10.1F + AD=0.0P PD=24.0U AS=0.0P PS=25.0U C4 5 0 100.7F M85 5 3 6 2 NMOS W=8.0U L=0.4U C5 3 0 118.9F + AD=0.0P PD=25.0U AS=0.0P PS=24.0U C6 6 0 36.0F M86 6 3 5 2 NMOS W=8.0U L=0.4U C7 4 0 36.0F + AD=0.0P PD=24.0U AS=0.0P PS=25.0U *** Node Listing for subckt: dcsource M87 5 3 6 2 NMOS W=8.0U L=0.4U ** 0 Node 0 is the global ground node + AD=0.0P PD=25.0U AS=0.0P PS=24.0U ** 1 Vdd! M88 6 3 5 2 NMOS W=8.0U L=0.4U ** 2 GND! + AD=0.0P PD=24.0U AS=0.0P PS=25.0U ** 3 Ilast_load M89 5 3 6 2 NMOS W=8.0U L=0.4U ** 4 a_n23_167# + AD=0.0P PD=25.0U AS=0.0P PS=24.0U ** 5 a_n41_71# M90 6 3 5 2 NMOS W=8.0U L=0.4U ** 6 a_n23_87# 124 .ENDS + AD=0.0P PD=240.0U AS=0.0P PS=240.0U M16 17 31 13 2 NMOS W=80.0U L=0.4U ***** Subcircuit from file ./input.ext + AD=0.0P PD=240.0U AS=0.0P PS=240.0U .SUBCKT input 1 2 3 4 5 6 7 8 9 10 11 12 13 14 M17 13 31 17 2 NMOS W=80.0U L=0.4U 15 16 17 18 19 20 21 + AD=0.0P PD=240.0U AS=0.0P PS=240.0U + 22 23 24 25 26 27 28 29 30 31 M18 17 31 12 2 NMOS W=80.0U L=0.4U + AD=0.0P PD=240.0U AS=0.0P PS=240.0U M1 29 31 17 2 NMOS W=80.0U L=0.4U M19 12 31 17 2 NMOS W=80.0U L=0.4U + AD=0.0P PD=400.0U AS=0.0P PS=240.0U + AD=0.0P PD=240.0U AS=0.0P PS=240.0U M2 17 31 28 2 NMOS W=80.0U L=0.4U M20 17 31 11 2 NMOS W=80.0U L=0.4U + AD=0.0P PD=240.0U AS=0.0P PS=240.0U + AD=0.0P PD=240.0U AS=0.0P PS=240.0U M3 28 31 17 2 NMOS W=80.0U L=0.4U M21 11 31 17 2 NMOS W=80.0U L=0.4U + AD=0.0P PD=240.0U AS=0.0P PS=240.0U + AD=0.0P PD=240.0U AS=0.0P PS=240.0U M4 17 31 18 2 NMOS W=80.0U L=0.4U M22 17 31 26 2 NMOS W=80.0U L=0.4U + AD=0.0P PD=240.0U AS=0.0P PS=240.0U + AD=0.0P PD=240.0U AS=0.0P PS=240.0U M5 18 31 17 2 NMOS W=80.0U L=0.4U M23 26 31 17 2 NMOS W=80.0U L=0.4U + AD=0.0P PD=240.0U AS=0.0P PS=240.0U + AD=0.0P PD=240.0U AS=0.0P PS=240.0U M6 17 31 16 2 NMOS W=80.0U L=0.4U M24 17 31 20 2 NMOS W=80.0U L=0.4U + AD=0.0P PD=240.0U AS=0.0P PS=240.0U + AD=0.0P PD=240.0U AS=0.0P PS=240.0U M7 16 31 17 2 NMOS W=80.0U L=0.4U M25 20 31 17 2 NMOS W=80.0U L=0.4U + AD=0.0P PD=240.0U AS=0.0P PS=240.0U + AD=0.0P PD=240.0U AS=0.0P PS=240.0U M8 17 31 15 2 NMOS W=80.0U L=0.4U M26 17 31 10 2 NMOS W=80.0U L=0.4U + AD=0.0P PD=240.0U AS=0.0P PS=240.0U + AD=0.0P PD=240.0U AS=0.0P PS=240.0U M9 15 31 17 2 NMOS W=80.0U L=0.4U M27 10 31 17 2 NMOS W=80.0U L=0.4U + AD=0.0P PD=240.0U AS=0.0P PS=240.0U + AD=0.0P PD=240.0U AS=0.0P PS=240.0U M10 17 31 14 2 NMOS W=80.0U L=0.4U M28 17 31 9 2 NMOS W=80.0U L=0.4U + AD=0.0P PD=240.0U AS=0.0P PS=240.0U + AD=0.0P PD=240.0U AS=0.0P PS=240.0U M11 14 31 17 2 NMOS W=80.0U L=0.4U M29 9 31 17 2 NMOS W=80.0U L=0.4U + AD=0.0P PD=240.0U AS=0.0P PS=240.0U + AD=0.0P PD=240.0U AS=0.0P PS=240.0U M12 17 31 27 2 NMOS W=80.0U L=0.4U M30 17 31 8 2 NMOS W=80.0U L=0.4U + AD=0.0P PD=240.0U AS=0.0P PS=240.0U + AD=0.0P PD=240.0U AS=0.0P PS=240.0U M13 27 31 17 2 NMOS W=80.0U L=0.4U M31 8 31 17 2 NMOS W=80.0U L=0.4U + AD=0.0P PD=240.0U AS=0.0P PS=240.0U + AD=0.0P PD=240.0U AS=0.0P PS=240.0U M14 17 31 19 2 NMOS W=80.0U L=0.4U M32 17 31 25 2 NMOS W=80.0U L=0.4U + AD=0.0P PD=240.0U AS=0.0P PS=240.0U + AD=0.0P PD=240.0U AS=0.0P PS=240.0U M15 19 31 17 2 NMOS W=80.0U L=0.4U M33 25 31 17 2 NMOS W=80.0U L=0.4U 125 + AD=0.0P PD=240.0U AS=0.0P PS=240.0U C2 9 0 6.5F M34 17 31 21 2 NMOS W=80.0U L=0.4U C3 29 0 6.5F + AD=0.0P PD=240.0U AS=0.0P PS=240.0U C4 8 0 6.5F M35 21 31 17 2 NMOS W=80.0U L=0.4U C5 25 0 6.5F + AD=0.0P PD=240.0U AS=0.0P PS=240.0U C6 21 0 6.5F M36 17 31 7 2 NMOS W=80.0U L=0.4U C7 7 0 6.5F + AD=0.0P PD=240.0U AS=0.0P PS=240.0U C8 18 0 6.5F M37 7 31 17 2 NMOS W=80.0U L=0.4U C9 3 0 6.5F + AD=0.0P PD=240.0U AS=0.0P PS=240.0U C10 28 0 6.5F M38 17 31 6 2 NMOS W=80.0U L=0.4U C11 23 0 6.6F + AD=0.0P PD=240.0U AS=0.0P PS=240.0U C12 30 0 29.0F M39 6 31 17 2 NMOS W=80.0U L=0.4U C13 12 0 6.5F + AD=0.0P PD=240.0U AS=0.0P PS=240.0U C14 11 0 6.5F M40 17 31 5 2 NMOS W=80.0U L=0.4U C15 26 0 6.5F + AD=0.0P PD=240.0U AS=0.0P PS=240.0U C16 20 0 6.5F M41 5 31 17 2 NMOS W=80.0U L=0.4U C17 10 0 6.5F + AD=0.0P PD=240.0U AS=0.0P PS=240.0U C18 6 0 6.5F M42 17 31 24 2 NMOS W=80.0U L=0.4U C19 5 0 6.5F + AD=0.0P PD=240.0U AS=0.0P PS=240.0U C20 16 0 6.5F M43 24 31 17 2 NMOS W=80.0U L=0.4U C21 24 0 6.5F + AD=0.0P PD=240.0U AS=0.0P PS=240.0U C22 22 0 6.5F M44 17 31 22 2 NMOS W=80.0U L=0.4U C23 15 0 6.5F + AD=0.0P PD=240.0U AS=0.0P PS=240.0U C24 17 0 195.9F M45 22 31 17 2 NMOS W=80.0U L=0.4U C25 4 0 6.5F + AD=0.0P PD=240.0U AS=0.0P PS=240.0U C26 14 0 6.5F M46 17 31 4 2 NMOS W=80.0U L=0.4U C27 27 0 6.5F + AD=0.0P PD=240.0U AS=0.0P PS=240.0U C28 31 0 49.4F M47 4 31 17 2 NMOS W=80.0U L=0.4U C29 19 0 6.5F + AD=0.0P PD=240.0U AS=0.0P PS=240.0U C30 13 0 6.5F M48 17 31 3 2 NMOS W=80.0U L=0.4U *** Node Listing for subckt: input + AD=0.0P PD=240.0U AS=0.0P PS=240.0U ** 0 Node 0 is the global ground node M49 3 31 17 2 NMOS W=80.0U L=0.4U ** 1 Vdd! + AD=0.0P PD=240.0U AS=0.0P PS=240.0U ** 2 GND! M50 17 31 23 2 NMOS W=80.0U L=0.4U ** 3 a_418_404# + AD=0.0P PD=240.0U AS=0.0P PS=400.0U ** 4 a_398_404# ** 5 a_338_404# ** 6 a_318_404# C1 31 17 2.2F 126 ** 7 a_298_404# xinput_0 1 2 3 3 3 3 3 3 3 3 3 3 3 3 3 3 7 3 3 ** 8 a_238_404# 3333333333 ** 9 a_218_404# + 4 10 input ** 10 a_198_404# ** 11 a_138_404# ** 12 a_118_404# C1 8 3 5.1F ** 13 a_98_404# C2 8 3 5.2F ** 14 a_38_404# C3 8 3 5.2F ** 15 a_18_404# C4 8 3 5.2F ** 16 a_n2_404# C5 8 3 5.2F ** 17 a_n52_404# C6 3 8 5.2F ** 18 a_n22_404# C7 8 3 5.2F ** 19 a_78_404# C8 8 3 5.2F ** 20 a_178_404# C9 8 3 5.2F ** 21 a_278_404# C10 8 3 5.2F ** 22 a_378_404# C11 8 3 5.2F ** 23 a_438_404# C12 9 8 1.3F ** 24 a_358_404# C13 7 0 398.5F ** 25 a_258_404# C14 8 0 388.6F ** 26 a_158_404# C15 10 0 6.2F ** 27 a_58_404# C16 9 0 4.0F ** 28 a_n42_404# C17 4 0 807.9F ** 29 a_n60_404# C18 6 0 1.1F ** 30 a_n76_396# *** Node Listing for subckt: nsc_tx1 ** 31 a_n65_397# ** 0 Node 0 is the global ground node ** 1 Vdd! ** 2 GND! ****** top level cell is ./nsc_tx1.ext ** 3 input_1/a_398_404# xacsource1_0 1 2 3 4 5 acsource1 ** 3 input_0/a_298_404# ** 3 input_0/a_n2_404# ** 3 input_1/a_378_404# ** 3 input_0/a_278_404# xinput_1 1 2 3 3 3 3 3 3 3 3 3 3 3 3 3 3 8 3 3 3 3 ** 3 input_1/a_358_404# 33333333 ** 3 input_0/a_18_404# + 4 9 input ** 3 input_0/a_258_404# ** 3 input_1/a_338_404# ** 3 input_0/a_38_404# .ENDS xdcsource_0 1 2 6 7 4 8 dcsource 127 ** 3 input_0/a_238_404# ** 3 input_0/a_118_404# ** 3 input_0/a_n60_404# ** 3 acsource1_0/a_n1062_679# ** 3 input_1/a_318_404# ** 3 input_0/a_438_404# ** 3 input_0/a_58_404# ** 3 input_0/a_n42_404# ** 3 input_0/a_218_404# ** 3 input_0/a_418_404# ** 3 input_1/a_198_404# ** 3 input_0/a_n22_404# ** 3 input_0/a_78_404# ** 4 acsource1_0/a_n1080_669# ** 3 input_1/a_178_404# ** 4 input_1/a_n76_396# ** 3 input_0/a_98_404# ** 4 dcsource_0/a_n41_71# ** 3 input_1/a_158_404# ** 4 Vss ** 3 input_1/a_138_404# ** 4 m1_1022_43# ** 3 input_1/a_118_404# ** 4 input_0/a_n76_396# ** 3 input_0/a_398_404# ** 4 m1_429_n459# ** 3 input_0/a_378_404# ** 5 acsource1_0/IdcLast ** 3 input_0/a_358_404# ** 5 Iac ** 3 input_1/a_n2_404# ** 6 dcsource_0/Ilast_load ** 3 input_1/a_438_404# ** 6 Idc ** 3 input_1/a_n42_404# ** 7 out1 ** 3 input_0/a_338_404# ** 7 dcsource_0/a_n23_167# ** 3 input_1/a_418_404# ** 7 input_0/a_n52_404# ** 3 input_1/a_n22_404# ** 8 input_1/a_n52_404# ** 3 input_1/a_18_404# ** 8 out2 ** 3 input_0/a_318_404# ** 8 dcsource_0/a_n23_87# ** 3 input_1/a_298_404# ** 9 vin2 ** 3 input_1/a_38_404# ** 9 input_1/a_n65_397# ** 3 input_0/a_198_404# ** 10 vin1 ** 3 input_1/a_278_404# ** 10 input_0/a_n65_397# ** 3 input_1/a_58_404# .END ** 3 input_0/a_178_404# ** 3 input_1/a_258_404# ** 3 input_1/a_78_404# ** 3 input_0/a_158_404# ** 3 input_1/a_238_404# ** 3 input_1/a_n60_404# ** 3 input_1/a_98_404# ** 3 input_0/a_138_404# ** 3 input_1/a_218_404# 128 Appendix C.3.2. NSC Differential Transmitter Input Control File .options ACCURATE post list .param v_1=2 v_2=1 v_0=1.5 bps=1n slope=0.001n *power supply *------------VVdd 100 Vvdd2 1 0 dc 3v 0 dc 3v VGND 2 0 dc 0v Vss 4 0 dc 0v *input & output *---------------V_in1 200 0 pwl + (0ns,'v_1') ('2*bps-slope','v_1') + ('2*bps','v_2') ('9*bps','v_2') + ('9*bps+slope','v_1') ('10*bps','v_1') + ('10*bps+slope','v_2') ('11*bps','v_2') + ('11*bps+slope','v_1') ('18*bps','v_1') + ('18*bps+slope','v_2') ('19*bps','v_2') + ('19*bps+slope','v_1') ('20*bps','v_1') + ('20*bps+slope','v_2') ('22*bps','v_2') + ('22*bps+slope','v_1') ('23*bps','v_1') + ('23*bps+slope','v_2') ('24*bps','v_2') + ('24*bps+slope','v_1') ('26*bps','v_1') + ('26*bps+slope','v_2') ('28*bps','v_2') + ,R v_in2 300 0 pwl + (0ns,'v_2') ('2*bps-slope','v_2') + ('2*bps','v_1') ('9*bps','v_1') + ('9*bps+slope','v_2') ('10*bps','v_2') + ('10*bps+slope','v_1') ('11*bps','v_1') 129 + ('11*bps+slope','v_2') ('18*bps','v_2') + ('18*bps+slope','v_1') ('19*bps','v_1') + ('19*bps+slope','v_2') ('20*bps','v_2') + ('20*bps+slope','v_1') ('22*bps','v_1') + ('22*bps+slope','v_2') ('23*bps','v_2') + ('23*bps+slope','v_1') ('24*bps','v_1') + ('24*bps+slope','v_2') ('26*bps','v_2') + ('26*bps+slope','v_1') ('28*bps','v_1') + ,R R_in1 200 10 25 R_in2 300 9 25 VDeye Reye eye 0 pulse 0v 1v 0n '3*bps-slope/100000' 'slope/100000' 0n '3*bps' eye 0 1T d1 emt1 1000 d1n3600 d2 emt1 2000 d1n3600 vout1 vled1 0 dc 3v vd1 1000 7 dc 0v vd2 2000 8 dc 0v *bias currents & voltage *----------------------idc iac 6 0 dc 2m 100 5 dc 1.6m *parasitic for Vdd *------------------------Lwire1 intw1 vled1 105n Rint1 intr1 intw1 0.01 xLboard1 ibrd1 intr1 pad Lbond1 emt1 ibrd1 1n *parasitic for Vss *------------------------------------Lwire1vss intw1vss 5000 105n 130 Rint1vss intr1vss intw1vss 0.01 xLboard1vss ibrd1vss intr1vss pad Lbond1vss 4 ibrd1vss .subckt pad 1 2 * L in nH, C in pF L1 1 3 1.38664N R1 3 4 0.0280365 C1 4 0 0.367874P L2 4 5 1.38664N R2 5 6 0.0280365 C2 6 0 0.367874P L3 6 7 1.38664N R3 7 8 0.0280365 C3 8 0 0.367874P L4 8 9 1.38664N R4 9 10 0.0280365 C4 10 0 0.367874P L5 10 11 1.38664N R5 11 2 0.0280365 C5 2 0 0.367874P * end of sub-circuit *decoupling capacitor *10ncap *Lcap emt1 nlc 1.12n *Rcap nlc ncr 0.438 *Ccap ncr 4 10n .include 'nsc035bsim3_typ.lib' .include 'diode.lib' .op .tran 0.01ns 48ns .include 'nsc_tx1.spice' .END 1n 131 Appendix C.3.3. LVDS Compatible differential Transmitter Netlist ***** Subcircuit from file + AD=0.0P PD=185.7U AS=0.0P PS=184.1U ./yama_direct_flat.ext M15 8 6 10 11 NMOS W=60.0U L=0.3U .SUBCKT yama_direct_flat 1 2 3 4 5 6 7 8 9 10 + AD=0.0P PD=184.1U AS=0.0P PS=185.7U M16 10 6 8 11 NMOS W=60.0U L=0.3U M1 8 6 10 11 NMOS W=60.0U L=0.3U + AD=0.0P PD=185.7U AS=0.0P PS=184.1U + AD=0.0P PD=184.1U AS=0.0P PS=185.7U M17 8 6 10 11 NMOS W=60.0U L=0.3U M2 10 6 8 11 NMOS W=60.0U L=0.3U + AD=0.0P PD=184.1U AS=0.0P PS=185.7U + AD=0.0P PD=185.7U AS=0.0P PS=184.1U M18 9 7 8 11 NMOS W=60.0U L=0.3U M3 8 6 10 11 NMOS W=60.0U L=0.3U + AD=0.0P PD=185.7U AS=0.0P PS=184.1U + AD=0.0P PD=184.1U AS=0.0P PS=185.7U M19 8 7 9 11 NMOS W=60.0U L=0.3U M4 10 6 8 11 NMOS W=60.0U L=0.3U + AD=0.0P PD=184.1U AS=0.0P PS=185.7U + AD=0.0P PD=185.7U AS=0.0P PS=184.1U M20 9 7 8 11 NMOS W=60.0U L=0.3U M5 8 6 10 11 NMOS W=60.0U L=0.3U + AD=0.0P PD=185.7U AS=0.0P PS=184.1U + AD=0.0P PD=184.1U AS=0.0P PS=185.7U M21 8 7 9 11 NMOS W=60.0U L=0.3U M6 10 6 8 11 NMOS W=60.0U L=0.3U + AD=0.0P PD=184.1U AS=0.0P PS=185.7U + AD=0.0P PD=185.7U AS=0.0P PS=184.1U M22 9 7 8 11 NMOS W=60.0U L=0.3U M7 8 6 10 11 NMOS W=60.0U L=0.3U + AD=0.0P PD=185.7U AS=0.0P PS=184.1U + AD=0.0P PD=184.1U AS=0.0P PS=185.7U M23 8 7 9 11 NMOS W=60.0U L=0.3U M8 10 6 8 11 NMOS W=60.0U L=0.3U + AD=0.0P PD=184.1U AS=0.0P PS=185.7U + AD=0.0P PD=185.7U AS=0.0P PS=184.1U M24 9 7 8 11 NMOS W=60.0U L=0.3U M9 8 6 10 11 NMOS W=60.0U L=0.3U + AD=0.0P PD=185.7U AS=0.0P PS=184.1U + AD=0.0P PD=184.1U AS=0.0P PS=185.7U M25 8 7 9 11 NMOS W=60.0U L=0.3U M10 10 6 8 11 NMOS W=60.0U L=0.3U + AD=0.0P PD=184.1U AS=0.0P PS=185.7U + AD=0.0P PD=185.7U AS=0.0P PS=184.1U M26 9 7 8 11 NMOS W=60.0U L=0.3U M11 8 6 10 11 NMOS W=60.0U L=0.3U + AD=0.0P PD=185.7U AS=0.0P PS=184.1U + AD=0.0P PD=184.1U AS=0.0P PS=185.7U M27 8 7 9 11 NMOS W=60.0U L=0.3U M12 10 6 8 11 NMOS W=60.0U L=0.3U + AD=0.0P PD=184.1U AS=0.0P PS=185.7U + AD=0.0P PD=185.7U AS=0.0P PS=184.1U M28 9 7 8 11 NMOS W=60.0U L=0.3U M13 8 6 10 11 NMOS W=60.0U L=0.3U + AD=0.0P PD=185.7U AS=0.0P PS=184.1U + AD=0.0P PD=184.1U AS=0.0P PS=185.7U M29 8 7 9 11 NMOS W=60.0U L=0.3U M14 10 6 8 11 NMOS W=60.0U L=0.3U + AD=0.0P PD=184.1U AS=0.0P PS=185.7U 132 M30 9 7 8 11 NMOS W=60.0U L=0.3U + AD=0.0P PD=18.8U AS=0.0P PS=18.6U + AD=0.0P PD=185.7U AS=0.0P PS=184.1U M49 10 4 3 11 NMOS W=6.0U L=0.3U M31 8 7 9 11 NMOS W=60.0U L=0.3U + AD=0.0P PD=18.6U AS=0.0P PS=18.8U + AD=0.0P PD=184.1U AS=0.0P PS=185.7U M50 3 4 10 11 NMOS W=6.0U L=0.3U M32 9 7 8 11 NMOS W=60.0U L=0.3U + AD=0.0P PD=18.8U AS=0.0P PS=18.6U + AD=0.0P PD=185.7U AS=0.0P PS=184.1U M51 10 4 3 11 NMOS W=6.0U L=0.3U M33 8 7 9 11 NMOS W=60.0U L=0.3U + AD=0.0P PD=18.6U AS=0.0P PS=18.8U + AD=0.0P PD=184.1U AS=0.0P PS=185.7U M52 3 4 10 11 NMOS W=6.0U L=0.3U M34 9 7 8 11 NMOS W=60.0U L=0.3U + AD=0.0P PD=18.8U AS=0.0P PS=18.6U + AD=0.0P PD=185.7U AS=0.0P PS=184.1U M53 10 4 3 11 NMOS W=6.0U L=0.3U M35 10 4 3 11 NMOS W=6.0U L=0.3U + AD=0.0P PD=18.6U AS=0.0P PS=18.8U + AD=0.0P PD=18.6U AS=0.0P PS=18.8U M54 3 4 10 11 NMOS W=6.0U L=0.3U M36 3 4 10 11 NMOS W=6.0U L=0.3U + AD=0.0P PD=18.8U AS=0.0P PS=18.6U + AD=0.0P PD=18.8U AS=0.0P PS=18.6U M55 4 4 3 11 NMOS W=6.0U L=0.3U M37 10 4 3 11 NMOS W=6.0U L=0.3U + AD=0.0P PD=18.0U AS=0.0P PS=18.8U + AD=0.0P PD=18.6U AS=0.0P PS=18.8U M56 3 4 4 11 NMOS W=6.0U L=0.3U M38 3 4 10 11 NMOS W=6.0U L=0.3U + AD=0.0P PD=18.8U AS=0.0P PS=18.0U + AD=0.0P PD=18.8U AS=0.0P PS=18.6U M57 4 4 3 11 NMOS W=6.0U L=0.3U M39 10 4 3 11 NMOS W=6.0U L=0.3U + AD=0.0P PD=18.0U AS=0.0P PS=18.8U + AD=0.0P PD=18.6U AS=0.0P PS=18.8U M58 3 4 4 11 NMOS W=6.0U L=0.3U M40 3 4 10 11 NMOS W=6.0U L=0.3U + AD=0.0P PD=18.8U AS=0.0P PS=18.0U + AD=0.0P PD=18.8U AS=0.0P PS=18.6U M59 4 4 3 11 NMOS W=6.0U L=0.3U M41 10 4 3 11 NMOS W=6.0U L=0.3U + AD=0.0P PD=18.0U AS=0.0P PS=18.8U + AD=0.0P PD=18.6U AS=0.0P PS=18.8U M60 3 4 4 11 NMOS W=6.0U L=0.3U M42 3 4 10 11 NMOS W=6.0U L=0.3U + AD=0.0P PD=18.8U AS=0.0P PS=18.0U + AD=0.0P PD=18.8U AS=0.0P PS=18.6U M61 4 4 3 11 NMOS W=6.0U L=0.3U M43 10 4 3 11 NMOS W=6.0U L=0.3U + AD=0.0P PD=18.0U AS=0.0P PS=18.8U + AD=0.0P PD=18.6U AS=0.0P PS=18.8U M62 3 4 4 11 NMOS W=6.0U L=0.3U M44 3 4 10 11 NMOS W=6.0U L=0.3U + AD=0.0P PD=18.8U AS=0.0P PS=18.0U + AD=0.0P PD=18.8U AS=0.0P PS=18.6U M63 4 4 3 11 NMOS W=6.0U L=0.3U M45 10 4 3 11 NMOS W=6.0U L=0.3U + AD=0.0P PD=18.0U AS=0.0P PS=18.8U + AD=0.0P PD=18.6U AS=0.0P PS=18.8U M64 3 4 4 11 NMOS W=6.0U L=0.3U M46 3 4 10 11 NMOS W=6.0U L=0.3U + AD=0.0P PD=18.8U AS=0.0P PS=18.0U + AD=0.0P PD=18.8U AS=0.0P PS=18.6U M65 4 4 3 11 NMOS W=6.0U L=0.3U M47 10 4 3 11 NMOS W=6.0U L=0.3U + AD=0.0P PD=18.0U AS=0.0P PS=18.8U + AD=0.0P PD=18.6U AS=0.0P PS=18.8U M66 3 4 4 11 NMOS W=6.0U L=0.3U M48 3 4 10 11 NMOS W=6.0U L=0.3U + AD=0.0P PD=18.8U AS=0.0P PS=18.0U 133 M67 4 4 3 11 NMOS W=6.0U L=0.3U + AD=0.0P PD=18.8U AS=0.0P PS=18.6U + AD=0.0P PD=18.0U AS=0.0P PS=18.8U M86 10 4 3 11 NMOS W=6.0U L=0.3U M68 3 4 4 11 NMOS W=6.0U L=0.3U + AD=0.0P PD=18.6U AS=0.0P PS=18.8U + AD=0.0P PD=18.8U AS=0.0P PS=18.0U M87 3 4 10 11 NMOS W=6.0U L=0.3U M69 4 4 3 11 NMOS W=6.0U L=0.3U + AD=0.0P PD=18.8U AS=0.0P PS=18.6U + AD=0.0P PD=18.0U AS=0.0P PS=18.8U M88 10 4 3 11 NMOS W=6.0U L=0.3U M70 3 4 4 11 NMOS W=6.0U L=0.3U + AD=0.0P PD=18.6U AS=0.0P PS=18.8U + AD=0.0P PD=18.8U AS=0.0P PS=18.0U M89 3 4 10 11 NMOS W=6.0U L=0.3U M71 4 4 3 11 NMOS W=6.0U L=0.3U + AD=0.0P PD=18.8U AS=0.0P PS=18.6U + AD=0.0P PD=18.0U AS=0.0P PS=18.8U M90 10 4 3 11 NMOS W=6.0U L=0.3U M72 3 4 4 11 NMOS W=6.0U L=0.3U + AD=0.0P PD=18.6U AS=0.0P PS=18.8U + AD=0.0P PD=18.8U AS=0.0P PS=18.0U M91 3 4 10 11 NMOS W=6.0U L=0.3U M73 4 4 3 11 NMOS W=6.0U L=0.3U + AD=0.0P PD=18.8U AS=0.0P PS=18.6U + AD=0.0P PD=18.0U AS=0.0P PS=18.8U M92 10 4 3 11 NMOS W=6.0U L=0.3U M74 10 4 3 11 NMOS W=6.0U L=0.3U + AD=0.0P PD=18.6U AS=0.0P PS=18.8U + AD=0.0P PD=18.6U AS=0.0P PS=18.8U M93 9 4 3 11 NMOS W=6.0U L=0.3U M75 3 4 10 11 NMOS W=6.0U L=0.3U + AD=0.0P PD=18.6U AS=0.0P PS=18.8U + AD=0.0P PD=18.8U AS=0.0P PS=18.6U M94 3 4 9 11 NMOS W=6.0U L=0.3U M76 10 4 3 11 NMOS W=6.0U L=0.3U + AD=0.0P PD=18.8U AS=0.0P PS=18.6U + AD=0.0P PD=18.6U AS=0.0P PS=18.8U M95 9 4 3 11 NMOS W=6.0U L=0.3U M77 3 4 10 11 NMOS W=6.0U L=0.3U + AD=0.0P PD=18.6U AS=0.0P PS=18.8U + AD=0.0P PD=18.8U AS=0.0P PS=18.6U M96 3 4 9 11 NMOS W=6.0U L=0.3U M78 10 4 3 11 NMOS W=6.0U L=0.3U + AD=0.0P PD=18.8U AS=0.0P PS=18.6U + AD=0.0P PD=18.6U AS=0.0P PS=18.8U M97 9 4 3 11 NMOS W=6.0U L=0.3U M79 3 4 10 11 NMOS W=6.0U L=0.3U + AD=0.0P PD=18.6U AS=0.0P PS=18.8U + AD=0.0P PD=18.8U AS=0.0P PS=18.6U M98 3 4 9 11 NMOS W=6.0U L=0.3U M80 10 4 3 11 NMOS W=6.0U L=0.3U + AD=0.0P PD=18.8U AS=0.0P PS=18.6U + AD=0.0P PD=18.6U AS=0.0P PS=18.8U M99 9 4 3 11 NMOS W=6.0U L=0.3U M81 3 4 10 11 NMOS W=6.0U L=0.3U + AD=0.0P PD=18.6U AS=0.0P PS=18.8U + AD=0.0P PD=18.8U AS=0.0P PS=18.6U M100 3 4 9 11 NMOS W=6.0U L=0.3U M82 10 4 3 11 NMOS W=6.0U L=0.3U + AD=0.0P PD=18.8U AS=0.0P PS=18.6U + AD=0.0P PD=18.6U AS=0.0P PS=18.8U M101 9 4 3 11 NMOS W=6.0U L=0.3U M83 3 4 10 11 NMOS W=6.0U L=0.3U + AD=0.0P PD=18.6U AS=0.0P PS=18.8U + AD=0.0P PD=18.8U AS=0.0P PS=18.6U M102 3 4 9 11 NMOS W=6.0U L=0.3U M84 10 4 3 11 NMOS W=6.0U L=0.3U + AD=0.0P PD=18.8U AS=0.0P PS=18.6U + AD=0.0P PD=18.6U AS=0.0P PS=18.8U M103 9 4 3 11 NMOS W=6.0U L=0.3U M85 3 4 10 11 NMOS W=6.0U L=0.3U + AD=0.0P PD=18.6U AS=0.0P PS=18.8U 134 M104 3 4 9 11 NMOS W=6.0U L=0.3U + AD=0.0P PD=18.8U AS=0.0P PS=18.6U + AD=0.0P PD=18.8U AS=0.0P PS=18.6U M123 9 4 3 11 NMOS W=6.0U L=0.3U M105 9 4 3 11 NMOS W=6.0U L=0.3U + AD=0.0P PD=18.6U AS=0.0P PS=18.8U + AD=0.0P PD=18.6U AS=0.0P PS=18.8U M124 3 4 9 11 NMOS W=6.0U L=0.3U M106 3 4 9 11 NMOS W=6.0U L=0.3U + AD=0.0P PD=18.8U AS=0.0P PS=18.6U + AD=0.0P PD=18.8U AS=0.0P PS=18.6U M125 9 4 3 11 NMOS W=6.0U L=0.3U M107 9 4 3 11 NMOS W=6.0U L=0.3U + AD=0.0P PD=18.6U AS=0.0P PS=18.8U + AD=0.0P PD=18.6U AS=0.0P PS=18.8U M126 3 4 9 11 NMOS W=6.0U L=0.3U M108 3 4 9 11 NMOS W=6.0U L=0.3U + AD=0.0P PD=18.8U AS=0.0P PS=18.6U + AD=0.0P PD=18.8U AS=0.0P PS=18.6U M127 9 4 3 11 NMOS W=6.0U L=0.3U M109 9 4 3 11 NMOS W=6.0U L=0.3U + AD=0.0P PD=18.6U AS=0.0P PS=18.8U + AD=0.0P PD=18.6U AS=0.0P PS=18.8U M128 3 4 9 11 NMOS W=6.0U L=0.3U M110 3 4 9 11 NMOS W=6.0U L=0.3U + AD=0.0P PD=18.8U AS=0.0P PS=18.6U + AD=0.0P PD=18.8U AS=0.0P PS=18.6U M129 9 4 3 11 NMOS W=6.0U L=0.3U M111 9 4 3 11 NMOS W=6.0U L=0.3U + AD=0.0P PD=18.6U AS=0.0P PS=18.8U + AD=0.0P PD=18.6U AS=0.0P PS=18.8U M130 3 4 9 11 NMOS W=6.0U L=0.3U M112 3 4 9 11 NMOS W=6.0U L=0.3U + AD=0.0P PD=18.8U AS=0.0P PS=18.6U + AD=0.0P PD=18.8U AS=0.0P PS=18.6U M131 9 4 3 11 NMOS W=6.0U L=0.3U M113 9 4 3 11 NMOS W=6.0U L=0.3U + AD=0.0P PD=18.6U AS=0.0P PS=18.8U + AD=0.0P PD=18.6U AS=0.0P PS=18.8U M132 3 4 4 11 NMOS W=6.0U L=0.3U M114 3 4 9 11 NMOS W=6.0U L=0.3U + AD=0.0P PD=18.8U AS=0.0P PS=18.0U + AD=0.0P PD=18.8U AS=0.0P PS=18.6U M133 3 4 10 11 NMOS W=6.0U L=0.3U M115 9 4 3 11 NMOS W=6.0U L=0.3U + AD=0.0P PD=18.8U AS=0.0P PS=18.6U + AD=0.0P PD=18.6U AS=0.0P PS=18.8U M134 3 4 9 11 NMOS W=6.0U L=0.3U M116 3 4 9 11 NMOS W=6.0U L=0.3U + AD=0.0P PD=18.8U AS=0.0P PS=18.6U + AD=0.0P PD=18.8U AS=0.0P PS=18.6U M135 3 5 8 11 NMOS W=60.0U L=0.3U M117 9 4 3 11 NMOS W=6.0U L=0.3U + AD=0.0P PD=188.1U AS=0.0P PS=184.1U + AD=0.0P PD=18.6U AS=0.0P PS=18.8U M136 8 5 3 11 NMOS W=60.0U L=0.3U M118 3 4 9 11 NMOS W=6.0U L=0.3U + AD=0.0P PD=184.1U AS=0.0P PS=188.1U + AD=0.0P PD=18.8U AS=0.0P PS=18.6U M137 3 5 8 11 NMOS W=60.0U L=0.3U M119 9 4 3 11 NMOS W=6.0U L=0.3U + AD=0.0P PD=188.1U AS=0.0P PS=184.1U + AD=0.0P PD=18.6U AS=0.0P PS=18.8U M138 8 5 3 11 NMOS W=60.0U L=0.3U M120 3 4 9 11 NMOS W=6.0U L=0.3U + AD=0.0P PD=184.1U AS=0.0P PS=188.1U + AD=0.0P PD=18.8U AS=0.0P PS=18.6U M139 3 5 8 11 NMOS W=60.0U L=0.3U M121 9 4 3 11 NMOS W=6.0U L=0.3U + AD=0.0P PD=188.1U AS=0.0P PS=184.1U + AD=0.0P PD=18.6U AS=0.0P PS=18.8U M140 8 5 3 11 NMOS W=60.0U L=0.3U M122 3 4 9 11 NMOS W=6.0U L=0.3U + AD=0.0P PD=184.1U AS=0.0P PS=188.1U 135 M141 3 5 8 11 NMOS W=60.0U L=0.3U + AD=0.0P PD=188.1U AS=0.0P + AD=0.0P PD=188.1U AS=0.0P PS=184.1U PS=184.1U M142 8 5 3 11 NMOS W=60.0U L=0.3U M160 8 5 3 11 NMOS W=60.0U L=0.3U + AD=0.0P PD=184.1U AS=0.0P PS=188.1U + AD=0.0P PD=184.1U AS=0.0P PS=188.1U M143 3 5 8 11 NMOS W=60.0U L=0.3U M161 3 5 8 11 NMOS W=60.0U L=0.3U + AD=0.0P PD=188.1U AS=0.0P PS=184.1U + AD=0.0P PD=188.1U AS=0.0P PS=184.1U M144 8 5 3 11 NMOS W=60.0U L=0.3U M162 8 5 3 11 NMOS W=60.0U L=0.3U + AD=0.0P PD=184.1U AS=0.0P PS=188.1U + AD=0.0P PD=184.1U AS=0.0P PS=188.1U M145 3 5 8 11 NMOS W=60.0U L=0.3U M163 3 5 8 11 NMOS W=60.0U L=0.3U + AD=0.0P PD=188.1U AS=0.0P PS=184.1U + AD=0.0P PD=188.1U AS=0.0P PS=184.1U M146 8 5 3 11 NMOS W=60.0U L=0.3U M164 8 5 3 11 NMOS W=60.0U L=0.3U + AD=0.0P PD=184.1U AS=0.0P PS=188.1U + AD=0.0P PD=184.1U AS=0.0P PS=188.1U M147 3 5 8 11 NMOS W=60.0U L=0.3U M165 3 5 8 11 NMOS W=60.0U L=0.3U + AD=0.0P PD=188.1U AS=0.0P PS=184.1U + AD=0.0P PD=188.1U AS=0.0P PS=184.1U M148 8 5 3 11 NMOS W=60.0U L=0.3U M166 8 5 3 11 NMOS W=60.0U L=0.3U + AD=0.0P PD=184.1U AS=0.0P PS=188.1U + AD=0.0P PD=184.1U AS=0.0P PS=188.1U M149 3 5 8 11 NMOS W=60.0U L=0.3U M167 3 5 8 11 NMOS W=60.0U L=0.3U + AD=0.0P PD=188.1U AS=0.0P PS=184.1U + AD=0.0P PD=188.1U AS=0.0P PS=184.1U M150 8 5 3 11 NMOS W=60.0U L=0.3U M168 8 5 3 11 NMOS W=60.0U L=0.3U + AD=0.0P PD=184.1U AS=0.0P PS=188.1U + AD=0.0P PD=184.1U AS=0.0P PS=188.1U M151 3 5 8 11 NMOS W=60.0U L=0.3U M169 3 5 8 11 NMOS W=60.0U L=0.3U + AD=0.0P PD=188.1U AS=0.0P PS=184.1U + AD=0.0P PD=188.1U AS=0.0P PS=184.1U M152 8 5 3 11 NMOS W=60.0U L=0.3U M170 8 5 3 11 NMOS W=60.0U L=0.3U + AD=0.0P PD=184.1U AS=0.0P PS=188.1U + AD=0.0P PD=184.1U AS=0.0P PS=188.1U M153 3 5 8 11 NMOS W=60.0U L=0.3U M171 3 5 8 11 NMOS W=60.0U L=0.3U + AD=0.0P PD=188.1U AS=0.0P PS=184.1U + AD=0.0P PD=188.1U AS=0.0P PS=184.1U M154 8 5 3 11 NMOS W=60.0U L=0.3U M172 8 5 3 11 NMOS W=60.0U L=0.3U + AD=0.0P PD=184.1U AS=0.0P PS=188.1U + AD=0.0P PD=184.1U AS=0.0P PS=188.1U M155 3 5 8 11 NMOS W=60.0U L=0.3U M173 3 5 8 11 NMOS W=60.0U L=0.3U + AD=0.0P PD=188.1U AS=0.0P PS=184.1U + AD=0.0P PD=188.1U AS=0.0P PS=184.1U M156 8 5 3 11 NMOS W=60.0U L=0.3U M174 8 5 3 11 NMOS W=60.0U L=0.3U + AD=0.0P PD=184.1U AS=0.0P PS=188.1U + AD=0.0P PD=184.1U AS=0.0P PS=188.1U M157 3 5 8 11 NMOS W=60.0U L=0.3U M175 3 5 5 11 NMOS W=6.0U L=0.3U + AD=0.0P PD=188.1U AS=0.0P PS=184.1U + AD=0.0P PD=18.8U AS=0.0P PS=19.5U M158 8 5 3 11 NMOS W=60.0U L=0.3U M176 5 5 3 11 NMOS W=6.0U L=0.3U + AD=0.0P PD=184.1U AS=0.0P PS=188.1U + AD=0.0P PD=19.5U AS=0.0P PS=18.8U M159 3 5 8 11 NMOS W=60.0U L=0.3U M177 3 5 5 11 NMOS W=6.0U L=0.3U 136 + AD=0.0P PD=18.8U AS=0.0P PS=19.5U ** 8 vac M178 5 5 3 11 NMOS W=6.0U L=0.3U ** 9 out2 + AD=0.0P PD=19.5U AS=0.0P PS=18.8U ** 10 out1 ** 11 Gnd! C1 4 9 9.2F .ENDS C2 4 10 9.2F C3 5 8 9.2F ****** top level cell is ./yama_logic2.ext C4 3 9 11.5F xyama_direct_flat_0 1 2 3 4 5 6 7 8 9 10 C5 3 10 11.5F yama_direct_flat C6 3 8 107.8F C7 9 8 56.2F M1 11 11 12 1 PMOS W=6.0U L=0.3U C8 9 7 4.3F + AD=0.0P PD=24.0U AS=2.5P PS=19.3U C9 10 8 45.1F M2 13 11 12 1 PMOS W=6.0U L=0.3U C10 5 3 11.8F + AD=6.1P PD=24.0U AS=2.5P PS=19.3U C11 10 6 4.3F M3 14 11 12 1 PMOS W=6.0U L=0.3U C12 8 7 4.5F + AD=6.2P PD=24.0U AS=2.5P PS=19.3U C13 4 3 29.0F M4 13 12 12 15 NMOS W=6.0U L=0.3U C14 8 6 4.1F + AD=0.0P PD=18.0U AS=0.0P PS=35.1U C15 10 0 91.1F M5 14 12 12 15 NMOS W=6.1U L=0.3U C16 9 0 89.7F + AD=0.0P PD=18.5U AS=0.0P PS=35.9U C17 6 0 9.5F M6 16 16 12 1 PMOS W=4.0U L=0.3U C18 7 0 6.1F + AD=0.0P PD=16.2U AS=1.7P PS=13.0U C19 3 0 239.7F M7 17 16 12 1 PMOS W=12.2U L=0.3U C20 5 0 14.6F + AD=11.7P PD=48.6U AS=5.1P PS=39.0U C21 4 0 35.7F M8 18 16 12 1 PMOS W=12.2U L=0.3U C22 8 0 201.2F + AD=11.7P PD=48.6U AS=5.1P PS=39.0U *** Node Listing for subckt: yama_direct_flat M9 17 12 12 15 NMOS W=12.2U L=0.3U ** 0 Node 0 is the global ground node + AD=0.0P PD=36.4U AS=0.0P PS=71.0U ** 1 Vdd! M10 18 12 12 15 NMOS W=12.2U L=0.3U ** 2 GND! + AD=0.0P PD=36.4U AS=0.0P PS=71.0U ** 3 Vss M11 19 19 12 1 PMOS W=4.0U L=0.3U ** 4 Idc + AD=0.0P PD=16.2U AS=1.7P PS=13.0U ** 4 Ilast_load M12 7 19 12 1 PMOS W=12.2U L=0.3U ** 5 IdcLast + AD=10.4P PD=32.4U AS=5.1P PS=39.0U ** 5 Iac M13 12 19 7 1 PMOS W=12.2U L=0.3U ** 6 vin1 + AD=5.1P PD=39.0U AS=10.4P PS=32.4U ** 7 vin2 M14 6 19 12 1 PMOS W=12.2U L=0.3U 137 + AD=10.4P PD=32.4U AS=5.1P PS=39.0U M33 23 13 18 15 NMOS W=12.2U L=0.3U M15 12 19 6 1 PMOS W=12.2U L=0.3U + AD=0.0P PD=36.6U AS=0.0P PS=36.4U + AD=5.1P PD=39.0U AS=10.4P PS=32.4U M34 18 13 23 15 NMOS W=12.2U L=0.3U M16 7 19 12 1 PMOS W=12.2U L=0.3U + AD=0.0P PD=36.4U AS=0.0P PS=36.6U + AD=10.4P PD=32.4U AS=5.1P PS=39.0U M35 23 13 18 15 NMOS W=12.2U L=0.3U M17 6 19 12 1 PMOS W=12.2U L=0.3U + AD=0.0P PD=36.6U AS=0.0P PS=36.4U + AD=10.4P PD=32.4U AS=5.1P PS=39.0U M36 24 18 7 15 NMOS W=12.2U L=0.3U M18 7 12 12 15 NMOS W=12.2U L=0.3U + AD=0.0P PD=29.3U AS=0.0P PS=43.7U + AD=0.0P PD=43.7U AS=0.0P PS=71.0U M37 7 18 24 15 NMOS W=12.2U L=0.3U M19 6 12 12 15 NMOS W=12.2U L=0.3U + AD=0.0P PD=43.7U AS=0.0P PS=29.3U + AD=0.0P PD=43.7U AS=0.0P PS=71.0U M38 24 18 7 15 NMOS W=12.2U L=0.3U M20 12 12 7 15 NMOS W=12.2U L=0.3U + AD=0.0P PD=29.3U AS=0.0P PS=43.7U + AD=0.0P PD=71.0U AS=0.0P PS=43.7U M39 7 18 24 15 NMOS W=12.2U L=0.3U M21 7 12 12 15 NMOS W=12.2U L=0.3U + AD=0.0P PD=43.7U AS=0.0P PS=29.3U + AD=0.0P PD=43.7U AS=0.0P PS=71.0U M40 24 18 7 15 NMOS W=12.2U L=0.3U M22 12 12 6 15 NMOS W=12.2U L=0.3U + AD=0.0P PD=29.3U AS=0.0P PS=43.7U + AD=0.0P PD=71.0U AS=0.0P PS=43.7U M41 7 18 24 15 NMOS W=12.2U L=0.3U M23 6 12 12 15 NMOS W=12.2U L=0.3U + AD=0.0P PD=43.7U AS=0.0P PS=29.3U + AD=0.0P PD=43.7U AS=0.0P PS=71.0U M42 24 18 7 15 NMOS W=12.2U L=0.3U M24 20 21 13 15 NMOS W=6.0U L=0.3U + AD=0.0P PD=29.3U AS=0.0P PS=43.7U + AD=0.0P PD=18.4U AS=0.0P PS=18.0U M43 24 17 6 15 NMOS W=12.2U L=0.3U M25 13 21 20 15 NMOS W=6.0U L=0.3U + AD=0.0P PD=29.3U AS=0.0P PS=43.7U + AD=0.0P PD=18.0U AS=0.0P PS=18.4U M44 6 17 24 15 NMOS W=12.2U L=0.3U M26 20 21 13 15 NMOS W=6.0U L=0.3U + AD=0.0P PD=43.7U AS=0.0P PS=29.3U + AD=0.0P PD=18.4U AS=0.0P PS=18.0U M45 24 17 6 15 NMOS W=12.2U L=0.3U M27 20 22 14 15 NMOS W=6.0U L=0.3U + AD=0.0P PD=29.3U AS=0.0P PS=43.7U + AD=0.0P PD=18.4U AS=0.0P PS=18.0U M46 6 17 24 15 NMOS W=12.2U L=0.3U M28 14 22 20 15 NMOS W=6.0U L=0.3U + AD=0.0P PD=43.7U AS=0.0P PS=29.3U + AD=0.0P PD=18.0U AS=0.0P PS=18.4U M47 24 17 6 15 NMOS W=12.2U L=0.3U M29 23 14 17 15 NMOS W=12.2U L=0.3U + AD=0.0P PD=29.3U AS=0.0P PS=43.7U + AD=0.0P PD=36.6U AS=0.0P PS=36.4U M48 6 17 24 15 NMOS W=12.2U L=0.3U M30 17 14 23 15 NMOS W=12.2U L=0.3U + AD=0.0P PD=43.7U AS=0.0P PS=29.3U + AD=0.0P PD=36.4U AS=0.0P PS=36.6U M49 24 17 6 15 NMOS W=12.2U L=0.3U M31 20 22 14 15 NMOS W=6.0U L=0.3U + AD=0.0P PD=29.3U AS=0.0P PS=43.7U + AD=0.0P PD=18.4U AS=0.0P PS=18.0U M50 3 25 24 15 NMOS W=24.3U L=0.3U M32 23 14 17 15 NMOS W=12.2U L=0.3U + AD=0.0P PD=80.2U AS=0.0P PS=58.6U + AD=0.0P PD=36.6U AS=0.0P PS=36.4U M51 24 25 3 15 NMOS W=24.3U L=0.3U 138 + AD=0.0P PD=58.6U AS=0.0P PS=80.2U C24 14 0 12.8F M52 3 26 26 15 NMOS W=4.0U L=0.3U C25 13 0 15.5F + AD=0.0P PD=13.4U AS=0.0P PS=19.2U C26 19 0 1.6F M53 3 26 20 15 NMOS W=12.2U L=0.3U C27 6 0 25.8F + AD=0.0P PD=40.1U AS=0.0P PS=37.2U C28 7 0 41.0F M54 3 27 27 15 NMOS W=4.0U L=0.3U C29 23 0 20.5F + AD=0.0P PD=13.4U AS=0.0P PS=17.4U C30 12 0 34.1F M55 3 27 23 15 NMOS W=24.3U L=0.3U C31 20 0 11.3F + AD=0.0P PD=80.2U AS=0.0P PS=73.2U C32 24 0 14.6F M56 3 25 25 15 NMOS W=4.0U L=0.3U C33 3 0 206.4F + AD=0.0P PD=13.4U AS=0.0P PS=17.4U C34 25 0 1.4F M57 3 25 24 15 NMOS W=24.3U L=0.3U C35 18 0 19.6F + AD=0.0P PD=80.2U AS=0.0P PS=58.6U C36 17 0 23.0F *** Node Listing for subckt: yama_logic2 C1 23 17 2.5F ** 0 Node 0 is the global ground node C2 6 12 5.7F ** 1 Vdd! C3 6 7 6.6F ** 2 GND! C4 7 12 5.4F ** 3 yama_direct_flat_0/Vss C5 23 13 4.3F ** 3 Vss C6 24 6 5.9F ** 4 yama_direct_flat_0/Ilast_load C7 18 12 1.6F ** 4 Iload_last C8 6 17 1.6F ** 5 Idc_last C9 17 12 1.6F ** 5 yama_direct_flat_0/IdcLast C10 14 13 3.1F ** 6 vdiff_out1 C11 3 24 4.9F ** 6 yama_direct_flat_0/vin1 C12 7 18 1.6F ** 7 vdiff_out2 C13 24 7 5.9F ** 7 yama_direct_flat_0/vin2 C14 3 23 1.6F ** 8 yama_direct_flat_0/vac C15 24 18 1.5F ** 9 out2 C16 18 17 7.7F ** 9 yama_direct_flat_0/out2 C17 20 14 1.3F ** 10 out1 C18 24 17 5.4F ** 10 yama_direct_flat_0/out1 C19 23 18 2.5F ** 11 Iload3 C20 19 12 1.0F ** 12 Vdd C21 20 13 1.3F ** 13 vdiff3_in2 C22 10 0 1.2F ** 14 vdiff3_in1 C23 9 0 1.1F ** 15 Gnd! 139 ** 16 Iload2 ** 17 vdiff2_in2 ** 18 vdiff2_in1 ** 19 Iload1 ** 20 a_n952_299# ** 21 vin1 ** 22 vin2 ** 23 a_n569_299# ** 24 a_n68_234# ** 25 Idc1 ** 26 Idc3 ** 27 Idc2 .END 140 Appendix C.3.4. LVDS Compatible Differential Transmitter SPICE Input Control File nsc transmitter last stage test .options ACCURATE post list .param v_1=1.30 v_2=1.20 v_0=1.25 bps=5n slope=0.001n *power supply *------------VVdd 100 0 dc 2.5v Vvdd2 1 0 dc 2.5v Vdd3 12 0 dc 2.5v VGND 2 0 dc 0v Vss1 15 0 dc 0v Vss 3 0 dc 0v *input & output *---------------v_in1 21 0 pwl + (0ns,'v_1') ('2*bps-slope','v_1') + ('2*bps','v_2') ('9*bps','v_2') + ('9*bps+slope','v_1') ('10*bps','v_1') + ('10*bps+slope','v_2') ('11*bps','v_2') + ('11*bps+slope','v_1') ('18*bps','v_1') + ('18*bps+slope','v_2') ('19*bps','v_2') + ('19*bps+slope','v_1') ('20*bps','v_1') + ('20*bps+slope','v_2') ('22*bps','v_2') + ('22*bps+slope','v_1') ('23*bps','v_1') + ('23*bps+slope','v_2') ('24*bps','v_2') + ('24*bps+slope','v_1') ('26*bps','v_1') + ('26*bps+slope','v_2') ('28*bps','v_2') + ,R 141 v_in2 22 0 pwl + (0ns,'v_2') ('2*bps-slope','v_2') + ('2*bps','v_1') ('9*bps','v_1') + ('9*bps+slope','v_2') ('10*bps','v_2') + ('10*bps+slope','v_1') ('11*bps','v_1') + ('11*bps+slope','v_2') ('18*bps','v_2') + ('18*bps+slope','v_1') ('19*bps','v_1') + ('19*bps+slope','v_2') ('20*bps','v_2') + ('20*bps+slope','v_1') ('22*bps','v_1') + ('22*bps+slope','v_2') ('23*bps','v_2') + ('23*bps+slope','v_1') ('24*bps','v_1') + ('24*bps+slope','v_2') ('26*bps','v_2') + ('26*bps+slope','v_1') ('28*bps','v_1') + ,R VDeye eye 0 pulse 0v 1v 0n '3*bps-slope/100000' 'slope/100000' 0n '3*bps' Reye eye 0 1T d1 vled1 10 d1n3600 d2 vled2 9 d1n3600 vled1 vled1 0 dc 2.5v vled2 vled2 0 dc 2.5v *bias currents & voltage *----------------------idc1 iload1 idc2 iload2 idc3 iload3 100 25 dc 150u 19 0 dc 120u 100 27 dc 150u 16 0 dc 120u 100 26 dc 150u 11 0 dc 120u iload_last 100 4 dc 1m idc_last 100 5 dc 0.3m 142 .include 'tsmc024.lib' .include 'diode.lib' .options nopage opts interp list post=2 ingold=2 newtol .tran 0.01ns 14ns .include 'yama_logic2.spice' .END 143 REFERENCES [1] J. 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