CENTER FOR NANOSCALE SCIENCE AND ENGINEERING
Standard Operating Procedures
Large Sputtering Machine
By Brian Wajdyk, Bonnie Cheng, Matt Deye
Version 1.1
Page 1 of 15
Important
•
•
•
•
•
You can only use CeNSE laboratories and equipment if you have been approved by Brian or
Chuck, reserved the tool on the calendar, and filled out a form. No Exceptions!
If the equipment is acting unusual STOP! Please discuss with Brian or Chuck before proceeding
and leave a note on the machine.
Gloves should be worn while handling substrate and deposition to reduce contamination.
Any accidental damage must be reported immediately.
All CeNSE laboratories are protected by video surveillance.
Version 1.1
Page 2 of 15
Machine exterior and chamber
Figure 1a: Chambers
Figure 1b: Left panel
control
Figure 2a: Right panel control
Version 1.1
Page 3 of 15
Figure 2b: Deposition Monitor
Version 1.1
Page 4 of 15
Other Parts of the Machine
Figure 3a: Stage
Figure 3b: Inside Load Lock Chamber
Figure 3c: Motor controllers
Version 1.1
Page 5 of 15
Operating Procedure
1. Preparation
1.1. Before beginning, be sure to wear gloves to reduce contamination and to protect the hands.
2. Start-up operations
2.1. Turn on compressed air cylinder. Check that regulator is set to 60 psi.
2.2. Turn on argon cylinder. Check that regulator is set to 30psi.
3. Load the sample
3.1. Remove the lid from load lock chamber.
3.1.1. If the chamber is under vacuum, turn on nitrogen gas to flood chamber to open it. Be
sure to turn off nitrogen afterwards.
3.2. Use wrench from inside chamber to loosen clamps on the stage. Be sure to place the wrench
back inside the chamber
3.3. Clamp the sample to the stage
3.4. Place the stage back in the chamber, with the sample facing down, aligning the slots on the pins
3.5. Replace the lid on the load lock chamber
3.6. Put the “on” button for the load lock vacuum located on the machine control cabinet
3.7. Turn on the load lock ion gauge. Press the “gauge” button on the display that says load lock ion
gauge. Wait for the gauge to stabilize ( at least 5 e-6)
3.8. Turn on the main chamber ion gauge. Press the “IG1 button on the display that says main
chamber ion gauge.
3.9. Wait for chamber to pressurize (About 30 minutes)
4. Transferring the holder
4.1. Turn gauges off.
4.2. Manually crank open the isolation valve in the counter-clockwise direction until the crank
stops.
4.3. Slowly slide in your sample using the transfer handle. Push slowly add steadily until the handle
rests against the stop ring. DO NOT TWIST THE HANDLE
4.4. Use controller to move the stage upwards to align the screw with the stage
4.5. Once the screw is aligned, press FWD on the controller to screw it on (or screw it on manually)
4.6. Once it us screwed on correctly, use controller to move the stage downwards to a
measurement of 4 inches.
4.7. Pull the stage apparatus back all the way using the transfer handle
4.8. Use crank to close the isolation valve. It will be fully closed when you hear the valve click.
4.9. Turn off the load lock vacuum and turn on rotating stage.
Version 1.1
Page 6 of 15
Operating Procedure, continued
5. Running the Sputtering Process (Completed on the computer)
5.1. Construct layers
5.1.1.Click “Program Layers”
5.1.2.Enter desired parameters
5.1.3.Name and save the layer
5.1.4.Repeat for as many layers as needed
5.2. Construct a Process
5.2.1.Click “Program Processes”
5.2.2.High light the desired layer and click “add”
5.2.3.Repeat until all desired layers are listed under process
5.2.4.Save the process list
5.3. Run the process
5.3.1.Click on “Run Process”
5.3.2.Enter the process name file or select “browse”
5.3.3.Other information on the screen is NOT necessary.
5.3.4. Click “next”
5.3.5.When the main chamber has reached the desired vacuum (best is in the -7 range), follow
the instructions on the screen to start.
6. Unloading the substrate
6.1. Open the transfer gate valve
6.2. Push the transfer into the main chamber with the transfer handle. Push slowly and steadily
until the handle rests against the stop ring. DO NOT TWIST THE HANDLE
6.3. While looking through the viewport, bring the hoist “in” using the pendant control
6.4. Bring the hoist in until the pins on the transfer ring are just in the slots on the substrate holder.
Turn the screw with the knob on top of the hoist assembly to line the slots with the pins
6.5. Release the holder from the hoist. Turn the screw with the knob on top of the hoist assemble
counter-clockwise to release the holder. Turn the knob until the holder drops from the hoist.
6.6. Bring the hoist” out until the holder is clear of the pins on the transfer
6.7. Push the transfer out of the chamber
6.8. Close the transfer gate valve. The valve will make a click when it is fully closed
7. Removing the substrate
7.1. Push the “off” button for the load lock vacuum. The button is on the machine control cabinet
Version 1.1
Page 7 of 15
7.2. Turn on Nitrogen cylinder.
7.3. Put on gloves
7.4. Remove the lid from the load lock chamber
7.5. Turn off the nitrogen cylinder
7.6. Remove the substrate holder.
7.7. Remove the substrate from under the clips on the holder and re- tighten the screws
7.8. Place the holder on the ring of the transfer. The substrate side will be facing down and the pins
on the ring will fit into the slots on the substrate holder
7.9. Place the lid on the load lock chamber
Version 1.1
Page 8 of 15
Deposition material properties:1
Formula
Ag
AgBr
AgCl
Al
Al2O3
Al4C3
AlF3
AlN
AlSb
As
As2Se3
Au
B
B2O3
B4C
BN
Ba
BaF2
BaN2O6
BaO
BaTiO3
BaTiO3
Be
BeF2
BeO
Bi
Bi2O3
Bi2S3
Bi2Se3
Bi2Te3
BiF3
C
C
C8H8
Ca
CaF2
1
Density
10.5
6.47
5.56
2.70
3.97
2.36
3.07
3.26
4.36
5.73
4.75
19.3
2.37
1.82
2.37
1.86
3.5
4.886
3.244
5.72
5.999
6.035
1.85
1.99
3.01
9.8
8.9
7.39
6.82
7.7
5.32
2.25
3.52
1.1
1.55
3.18
Z-Ratio
0.529
1.18
1.32
1.08
0.336
?
?
?
0.743
0.966
?
0.381
0.389
?
?
?
2.1
0.793
1.261
?
0.464
0.412
0.543
?
?
0.79
?
?
?
?
?
3.26
0.22
?
2.62
0.775
Acoustic
Impedance
16.69
7.48
6.69
8.18
26.28
11.88
9.14
23.18
22.70
4.20
11.13
7.00
19.03
21.43
16.26
11.18
2.71
40.14
3.37
11.39
SQM-160 User’s Guide, Version 4.06. Sigma Instruments, Inc. 2000-2008.
Version 1.1
Page 9 of 15
Material Name
Silver
Silver Bromide
Silver Chloride
Aluminum
Aluminum Oxide
Aluminum Carbide
Aluminum Fluoride
Aluminum Nitride
Aluminum Antimonide
Arsenic
Arsenic Selenide
Gold
Boron
Boron Oxide
Boron Carbide
Boron Nitride
Barium
Barium Fluoride
Barium Nitrate
Barium Oxide
Barium Titanate (Tetr)
Barium Titanate (Cubic)
Beryllium
Beryllium Fluoride
Beryllium Oxide
Bismuth
Bismuth Oxide
Bismuth Trisuiphide
Bismuth Selenide
Bismuth Telluride
Bismuth Fluoride
Carbon (Graphite)
Carbon (Diamond)
Parlyene (Union Carbide)
Calcium
Calcium Fluoride
Formula
CaO
CaO-SiO2
CaSO4
CaTiO3
CaWO4
Cd
CdF2
CdO
CdS
CdSe
CdTe
Ce
CeF3
CeO2
Co
CoO
Cr
Cr2O3
Cr3C2
CrB
Cs
Cs2SO4
CsBr
CsCl
CsI
Cu
Cu2O
Cu2S
Cu2S
CuS
Dy
Dy2O3
Er
Er2O3
Eu
EuF2
Fe
Fe2O3
FeO
FeS
Version 1.1
Density
3.35
2.9
2.962
4.1
6.06
8.64
6.64
8.15
4.83
5.81
6.2
6.78
6.16
7.13
8.9
6.44
7.2
5.21
6.68
6.17
1.87
4.243
4.456
3.988
4.516
8.93
6
Cu2S
Cu2S
CuS
Dy
Dy2O3
Er
Er2O3
Eu
EuF2
7.86
5.24
5.7
4.84
Z-Ratio
?
?
0.955
?
?
0.682
?
?
1.02
?
0.98
?
?
?
0.343
0.412
0.305
?
?
?
?
1.212
1.41
1.399
1.542
0.437
?
5.6
5.8
4.6
8.55
7.81
9.05
8.64
5.26
6.5
0.349
?
?
?
Acoustic
Impedance
9.25
12.95
8.66
9.01
25.74
21.43
28.95
7.29
6.26
6.31
5.73
20.21
1.58
1.52
1.92
1.03
1.13
0.98
1.02
1.68
1.36
25.30
Page 10 of 15
Material Name
Calcium Oxide
Calcium Silicate (3)
Calcium Sulfate
Calcium Titanate
Calcium Tungstate
Cadmium
Cadmium Fluoride
Cadmium Oxide
Cadmium Sulfide
Cadmium Selenide,
Cadmium Telluride
Cerium
Cerium (III) Fluoride
Cerium (IV) Dioxide
Cobalt
Cobalt Oxide
Chromium
Chromium (III) Oxide
Chromium Carbide
Chromium Boride
Cesium
Cesium Sulfate
Cesium Bromide
Cesium Chloride
Cesium Iodide
Copper
Copper Oxide
Copper (I) Sulfide (Alpha)
Copper (I) Sulfide (Beta)
Copper (II) Sulfide
Dysprosium
Dysprosium Oxide
Erbium
Erbium Oxide
Europium
Europium Fluoride
Iron
Iron Oxide
Iron Oxide
Iron Sulphide
Formula
Ga
Ga2O3
GaAs
GaN
GaP
GaSb
Gd
Gd2O3
Ge
Ge3N2
GeO2
GeTe
Hf
HfB2
HfC
HfN
HfO2
HfSi2
Hg
Ho
Ho2O3
In
In2O3
In2Se3
In2Te3
InAs
InP
InSb
Ir
K
KBr
KCl
KF
KI
La
La2O3
LaB6
LaF3
Li
LiBr
Version 1.1
Density
5.93
5.88
5.31
6.1
4.1
5.6
7.89
7.41
5.35
5.2
6.24
6.2
13.09
10.5
12.2
13.8
9.68
7.2
13.46
8.8
8.41
7.3
7.18
5.7
5.8
5.7
4.8
5.76
22.4
0.86
2.75
1.98
2.48
3.128
6.17
6.51
2.61
5.94
0.53
3.47
Z-Ratio
0.593
?
1.59
?
?
?
0.67
?
0.516
?
?
?
0.36
?
?
?
?
?
0.74
0.58
?
0.841
?
?
?
?
?
0.769
0.129
10.189
1.893
2.05
?
2.077
0.92
?
?
?
5.9
1.23
Acoustic
Impedance
14.89
5.55
13.18
17.11
24.53
11.93
15.22
10.50
11.48
68.45
0.87
4.66
4.31
4.25
9.60
1.50
7.18
Page 11 of 15
Material Name
Gallium
Gallium Oxide (B)
Gallium Arsenide
Gallium Nitride
Gallium Phosphide
Gallium Antimonide
Gadolinium
Gadolinium Oxide
Germanium
Germanium Nitride
Germanium Oxide
Germanium Telluride
Hafnium
Hafnium Boride,
Hafnium Carbide
Hafnium Nitride
Hafnium Oxide
Hafnium Silicide
Mercury
Holminum
Holminum Oxide
Indium
Indium Sesquioxide
Indium Selenide
Indium Telluride
Indium Arsenide
Indium Phosphide
Indium Antimonide
Iridium
Potassium
Potassium Bromide
Potassium Chloride
Potassium Fluoride
Potassium Iodide
Lanthanum
Lanthanum Oxide
Lanthanum Boride
Lanthanum Fluoride
Lithium
Lithium Bromide
Formula
LiF
LiNbO3
Lu
Mg
MgAl2O4
MgAl2O6
MgF2
MgO
Mn
MnO
MnS
Mo
Mo2C
MoB2
MoO3
MoS2
Na
Na3AlF6
Na5AL3F14
NaBr
NaCl
NaClO3
NaF
NaNO3
Nb
Nb2O3
Nb2O5
NbB2
NbC
NbN
Nd
Nd2O3
NdF3
Ni
NiCr
NiCrFe
NiFe
NiFeMo
NiO
P3N5
Version 1.1
Density
2.638
4.7
9.84
1.74
3.6
8
3.18
3.58
7.2
5.39
3.99
10.2
9.18
7.12
4.7
4.8
0.97
2.9
2.9
3.2
2.17
2.164
2.558
2.27
8.578
7.5
4.47
6.97
7.82
8.4
7
7.24
6.506
8.91
8.5
8.5
8.7
8.9
7.45
2.51
Z-Ratio
0.778
0.463
?
1.61
?
?
0.637
0.411
0.377
0.467
0.94
0.257
?
?
?
?
4.8
?
?
?
1.57
1.565
0.949
1.194
0.492
?
?
?
?
?
?
?
?
0.331
?
?
?
?
?
?
Acoustic
Impedance
11.35
19.07
5.48
13.86
21.48
23.42
18.91
9.39
34.36
1.84
5.62
5.64
9.30
7.40
17.95
26.68
Page 12 of 15
Material Name
Lithium Fluoride
Lithium Niobate
Lutetium
Magnesium
Magnesium Aluminate
Spinel
Magnesium Fluoride
Magnesium Oxide
Manganese
Manganese Oxide
Manganese (II) Sulfide
Molybdenum
Molybdenum Carbide
Molybdenum Boride
Molybdenum Trioxdide
Molybdenum Disulfide
Sodium
Cryolite
Chiolite
Sodium Bromide
Sodium Chloride
Sodium Chlorate
Sodium Fluoride
Sodium Nitrate
Niobium (Columbium)
Niobium Trioxide
Niobium (V) Oxide
Niobium Boride
Niobium Carbide
Niobium Nitride
Neodynium
Neodynium Oxide
Neodynium Fluoride
Nickel
Nichrome
Inconel
Permalloy
Supermalloy
Nickel Oxide
Phosphorus Nitride
Formula
Pb
PbCl2
PbF2
PbO
PbS
PbSe
PbSnO3
PbTe
Pd
PdO
Po
Pr
Pr2O3
Pt
PtO2
Ra
Rb
Rbl
Re
Rh
Ru
S8
Sb
Sb2O3
Sb2S3
Sc
Sc2O3
Se
Si
Si3N4
SiC
SiO
SiO2
Sm
Sm2O3
Sn
SnO2
SnS
SnSe
SnTe
Version 1.1
Density
11.3
5.85
8.24
9.53
7.5
8.1
8.1
8.16
12.038
8.31
9.4
6.78
6.88
21.4
10.2
5
1.53
3.55
21.04
12.41
12.362
2.07
6.62
5.2
4.64
3
3.86
4.81
2.32
3.44
3.22
2.13
2.648
7.54
7.43
7.3
6.95
5.08
6.18
6.44
Z-Ratio
1.13
?
0.661
?
0.566
?
?
0.651
0.357
?
?
?
?
0.245
?
?
2.54
?
0.15
0.21
0.182
2.29
0.768
?
?
0.91
?
0.864
0.712
*1000
?
0.87
1
0.89
?
0.724
?
?
?
?
Acoustic
Impedance
7.81
13.36
15.60
13.56
24.73
36.04
3.48
58.87
42.05
48.52
3.86
11.50
9.70
10.22
12.40
10.15
8.83
9.92
12.20
Page 13 of 15
Material Name
Lead
Lead Chloride
Lead Fluoride
Lead Oxide
Lead Sulfide
Lead Selenide
Lead Stannate
Lead Telluride
Palladium
Palladium Oxide
Polonium
Praseodymium
Praseodymium Oxide
Platinum
Platinum Oxide
Radium
Rubidium
Rubidium Iodide
Rhenium
Rhodium
Ruthenium
Sulphur
Antimony
Antimony Trioxide
Antimony Trisulfide
Scandium
Scandium Oxide
Selenium
Silicon
Silicon Nitride
Silicon Carbide
Silicon (II) Oxide
Silicon Dioxide
Samarium
Samarium Oxide
Tin
Tin Oxide
Tin Sulfide
Tin Selenide
Tin Telluride
Formula
Sr
SrF2
SrO
Ta
Ta2O5
TaB2
TaC
TaN
Tb
Tc
Te
TeO2
Th
ThF4
ThO2
ThOF2
Ti
Ti2O3
TiB2
TiC
TiN
TiO
TiO2
Tl
TlBr
TlCl
TlI
U
U3O8
U4O9
UO2
V
V2O5
VB2
VC
VN
VO2
W
WB2
WC
Version 1.1
Density
2.6
4.277
4.99
16.6
8.2
11.15
13.9
16.3
8.27
11.5
6.25
5.99
11.694
6.32
9.86
9.1
4.5
4.6
4.5
4.93
5.43
4.9
4.26
11.85
7.56
7
7.09
19.05
8.3
10.969
10.97
5.96
3.36
5.1
5.77
6.13
4.34
19.3
10.77
15.6
Z-Ratio
?
0.727
0.517
0.262
0.3
?
?
?
0.66
?
0.9
0.862
0.484
?
0.284
?
0.628
?
?
?
?
?
0.4
1.55
?
?
?
0.238
?
0.348
0.286
0.53
?
?
?
?
?
0.163
?
0.151
Acoustic
Impedance
12.15
17.08
33.70
29.43
13.38
9.81
10.24
18.24
31.09
14.06
22.08
5.70
37.10
25.37
30.87
16.66
54.17
58.48
Page 14 of 15
Material Name
Strontium
Strontium Fluroide
Strontium Oxide
Tantalum
Tantalum (V) Oxide
Tantalum Boride
Tantalum Carbide
Tantalum Nitride
Terbium
Technetium
Tellurium
Tellurium Oxide
Thorium
Thorium (IV) Fluoride
Thorium Dioxide
Thorium Oxyfluoride
Titanium
Titanium Sesquioxide
Titanium Boride
Titanium Carbide
Titanium Nitride
Titanium Oxide
Titanium (IV) Oxide
Thallium
Thallium Bromide
Thallium Chloride
Thallium Iodide (B)
Uranium
Tri Uranium Octoxide
Uranium Oxide
Uranium Dioxide
Vanadium
Vanadium Pentoxide
Vanadium Boride
Vanadium Carbide
Vanadium Nitride
Vanadium Dioxide
Tungsten
Tungsten Boride
Tungsten Carbide
Formula
WO3
WS2
WSi2
Y
Y2O3
Yb
Yb2O3
Zn
Zn3Sb2
ZnF2
ZnO
ZnS
ZnSe
ZnTe
Zr
ZrB2
ZrC
ZrN
ZrO2
Version 1.1
Density
7.16
7.5
9.4
4.34
5.01
6.98
9.17
7.04
6.3
4.95
5.61
4.09
5.26
6.34
6.49
6.08
6.73
7.09
5.6
Z-Ratio
?
?
?
0.835
?
1.13
?
0.514
?
?
0.556
0.775
0.722
0.77
0.6
?
0.264
?
?
Acoustic
Impedance
10.57
7.81
17.18
15.88
11.39
12.23
11.47
14.72
33.45
Page 15 of 15
Material Name
Tungsten Trioxide
Tungsten Disulphide
Tungsten Suicide
Yttrium
Yttrium Oxide
Ytterbium
Ytterbium Oxide
Zinc
Zinc Antimonide
Zinc Fluoride
Zinc Oxide
Zinc Sulfide
Zinc Selenide
Zinc Telluride
Zirconium
Zirconium Boride
Zirconium Carbide
Zirconium Nitride
Zirconium Oxide