A VERSATILE, MULTIMODE SCANNING PROBE MICROSCOPE by Christoph Hebeisen Vordiplom (Universität Stuttgart, Germany, 1998) T HESIS SUBMITTED IN PARTIAL FULFILLMENT OF THE REQUIREMENTS FOR THE DEGREE OF M ASTER OF S CIENCE IN THE DEPARTMENT OF P HYSICS c Christoph Hebeisen 2002 SIMON FRASER UNIVERSITY April 26, 2002 Copyrights are not reserved. Permission is hereby granted to reproduce this work in whole or in part provided that proper credit is given to the original author. APPROVAL Name: Christoph Hebeisen Degree: Master of Science Title of Thesis: A Versatile, Multimode Scanning Probe Microscope Examining Committee: Dr. Howard Trottier, Professor Department of Physics, SFU (Chair) Dr. John Bechhoefer, Professor Department of Physics, SFU Dr. Karen Kavanagh, Professor Department of Physics, SFU Dr. Michael Wortis, Professor Department of Physics, SFU Dr. Simon Watkins, Professor Department of Physics, SFU Date Approved: April 26, 2002 ii Abstract The superior resolution capability of scanning probe microscopy (SPM) makes it an ideal tool for investigations beyond the diffraction limit of ordinary optical microscopy. We have designed and built a scanning probe microscope that combines atomic force microscopy (AFM), near field scanning optical microscopy (NSOM) and scanning tunnelling microscopy (STM) with simultaneous optical far field detection. The simultaneous use of AFM and NSOM or STM and optical detection has potential applications in molecular biology and biophysics. iii Acknowledgments I would like to thank my supervisor John Bechhoefer for his encouragement, helpful discussions and suggestions throughout this project. Russell Greenall deserves credit for software and many other important contributions. I also want to thank Vincent Fourmond and Bram Sadlik for their help with this project. I want to thank the German Academic Exchange Service for financial support and for making my studies at SFU possible in the first place. Last but not least I want to thank my family and Lana Fong for patience, encouragement and love. iv Contents Approval ii Abstract iii Acknowledgments iv Contents v List of Tables viii List of Figures ix 1 Introduction 1 1.1 Objective . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1 1.2 Scanning Probe Microscopy . . . . . . . . . . . . . . . . . . . . . . . . . 2 1.2.1 Scanning Tunnelling Microscopy . . . . . . . . . . . . . . . . . . 2 1.2.2 Atomic Force Microscopy . . . . . . . . . . . . . . . . . . . . . . 3 1.2.3 Near Field Scanning Optical Microscopy . . . . . . . . . . . . . . 4 2 Theory 6 2.1 Vacuum Electron Tunnelling . . . . . . . . . . . . . . . . . . . . . . . . . 6 2.2 Forces Involved in AFM . . . . . . . . . . . . . . . . . . . . . . . . . . . 8 2.2.1 Tip-Surface Interaction Forces . . . . . . . . . . . . . . . . . . . . 8 2.2.2 Static Bending of a Cantilever . . . . . . . . . . . . . . . . . . . . 9 Near-Field Optical Imaging . . . . . . . . . . . . . . . . . . . . . . . . . . 10 2.3.1 12 2.3 NSOM Probes . . . . . . . . . . . . . . . . . . . . . . . . . . . . v CONTENTS 2.3.2 2.4 vi Signal Estimation for NSOM . . . . . . . . . . . . . . . . . . . . . 12 The Digital PID Controller . . . . . . . . . . . . . . . . . . . . . . . . . . 15 3 Technical Implementation 3.1 3.2 3.3 3.4 18 Mechanical Design . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 18 3.1.1 Sources of Mechanical Disturbances . . . . . . . . . . . . . . . . . 19 3.1.2 Countermeasures . . . . . . . . . . . . . . . . . . . . . . . . . . . 21 Controller . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 24 3.2.1 Hardware . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 24 3.2.2 Software . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 25 Optics . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 27 3.3.1 Detection and Signal Conditioning, AFM . . . . . . . . . . . . . . 27 3.3.2 Sample Emission Detection . . . . . . . . . . . . . . . . . . . . . 29 Electronics . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 29 3.4.1 Detection and Signal-Conditioning, STM . . . . . . . . . . . . . . 29 3.4.2 Positioning Driver Electronics . . . . . . . . . . . . . . . . . . . . 30 3.4.3 Supplementary Electronics . . . . . . . . . . . . . . . . . . . . . . 32 4 Results 33 4.1 AFM . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 33 4.2 NSOM . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 33 4.3 STM . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 34 5 Conclusions and Further Projects 38 5.1 AFM -translation Modification . . . . . . . . . . . . . . . . . . . . . . . 38 5.2 Photon Emission from Inelastic Tunnelling . . . . . . . . . . . . . . . . . 39 Appendices A Electronic Circuits 40 A.1 STM Signal Conditioning . . . . . . . . . . . . . . . . . . . . . . . . . . . 40 A.1.1 IV-converter . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 40 A.1.2 Second Stage Amplifier . . . . . . . . . . . . . . . . . . . . . . . 40 A.1.3 Stable Power Supply . . . . . . . . . . . . . . . . . . . . . . . . . 42 CONTENTS vii A.2 Vernier Circuits . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 43 A.3 Close-Approach Motor-Control . . . . . . . . . . . . . . . . . . . . . . . . 48 B Optics 51 B.1 AFM detection optics . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 51 B.1.1 Laser Spot Size . . . . . . . . . . . . . . . . . . . . . . . . . . . . 51 B.1.2 Lever Deflection Signal Conditioning . . . . . . . . . . . . . . . . 51 B.2 Sample Emission Detection Optics . . . . . . . . . . . . . . . . . . . . . . 54 C Controller 56 C.1 Controller Software . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 56 C.1.1 The Fast Task . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 56 C.1.2 The Slow Tasks . . . . . . . . . . . . . . . . . . . . . . . . . . . . 59 D Scanner Calibration 62 E Dynamic Characterisation of the STM 64 List of Abbreviations 66 Bibliography 67 List of Tables A.1 Noise and common mode response (RMS) of the vernier and buffer circuits. 48 D.1 The SPM scanner calibrations. . . . . . . . . . . . . . . . . . . . . . . . . 62 viii List of Figures 1.1 Schematic drawing of an AFM. . . . . . . . . . . . . . . . . . . . . . . . . 2.1 The potential of a tunnelling barrier between two metals; (a) Two different 3 metals with a bias voltage applied between them; (b) two identical conductors with no bias voltage. . . . . . . . . . . . . . . . . . . . . . . . . . . . 7 2.2 An AFM Cantilever. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9 2.3 The SPM feedback system. . . . . . . . . . . . . . . . . . . . . . . . . . . 15 3.1 a) Damping system for insulating the SPM from building vibrations; b) Model of the SPM for vibration analysis. . . . . . . . . . . . . . . . . . . . 21 3.2 A harmonic oscillator with different damping coefficients. . . . . . . . . . 22 3.3 Mechanical design of the instrument, STM configuration. . . . . . . . . . . 25 3.4 The AFM head (closeup on the right side), the bungee cord vibration damping system and the acoustic and thermal shielding system. The inside of the shielding box is coated with aluminum foil for additional protection against electrical interference. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 26 3.5 Schematic drawing of the AFM detection optics . . . . . . . . . . . . . . . 28 4.1 a) An SPM test grating; black to white range . b) Atomic step on graphite; -range ca. Å. . . . . . . . . . . . . . . . . . . . . . . . . . . 34 4.2 AFM and NSOM images of a test sample with fluorescent microspheres. . . 35 4.3 AFM/NSOM images taken with a damaged NSOM tip. . . . . . . . . . . . 36 4.4 STM images Gold evaporated on a microscope slip. a), b) Two images taken during the same scan as left and right image. c) closeup of the same sample. Bias voltage .. . . . . . . . . . . . . . . . . . . . . . . . ix 37 LIST OF FIGURES 4.5 x Typical result of an attempt to image freshly cleaved HOPG surface. Bias voltage . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 37 A.1 Block diagram of the electronics . . . . . . . . . . . . . . . . . . . . . . . 41 A.2 The STM signal conditioning circuits - IV-converter (left) and second-stage amplifier (right). . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 42 A.3 The measured transfer function of the STM signal-conditioning electronics; second-stage amplifier (solid) and (dashed). . . . . . . . . . . . . 43 A.4 Stable power supply for STM signal conditioning. . . . . . . . . . . . . . . 43 A.5 The idea of the vernier circuit. . . . . . . . . . . . . . . . . . . . . . . . . 44 A.6 The -vernier circuit. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 46 A.7 The transfer functions of the coarse (solid) and fine (dashed) channels of the vernier circuit. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 48 A.8 DC-motor speed control circuit. . . . . . . . . . . . . . . . . . . . . . . . 49 A.9 Close approach speed vs. control voltage. . . . . . . . . . . . . . . . . . . 50 B.1 The quad photodetector; is the detector radius, the radius of the laser spot and the offset of the laser spot. . . . . . . . . . . . . . . . . . B.2 right left vs. 52 ; solid: numerical calculation; dashed: linear approximation. 53 B.3 The sample emission pickup optics, NSOM configuration. . . . . . . . . . 54 C.1 Flowchart of the fast task. Splits in the execution path mean alternating execution of the different targets. . . . . . . . . . . . . . . . . . . . . . . . 57 C.2 The principle of the -feedback system. . . . . . . . . . . . . . . . . . . . 59 tunnelling current. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 60 D.1 Calibration of the piezoelectric positioners. . . . . . . . . . . . . . . . . . 63 E.1 The system transfer function of the STM. . . . . . . . . . . . . . . . . . . 64 C.3 The STM approach algorithm; is the fine -piezo control voltage, is the Chapter 1 Introduction 1.1 Objective The goal of this project is to build a multimode scanning probe microscope especially for biophysical applications; the particular application that motivated it is high-resolution imaging of fluorescently labelled DNA [1]. Our main requirements for the instrument are Atomic Force Microscopy (AFM); Near Field Scanning Optical Microscopy (NSOM); Scanning Tunnelling Microscopy (STM); Efficient optical detection suitable for fluorescence experiments; Large scan range and positioning reproducibility to allow detailed scans of small areas that were previously identified in an overview scan. Although instruments that combine AFM and NSOM or AFM and STM are commercially available, we are not aware of any SPM that implements all of the above features in one instrument. 1 CHAPTER 1. INTRODUCTION 2 1.2 Scanning Probe Microscopy At the heart of any of the various SPM methods is some type of short-range interaction between a probe and a surface. The nature of this interaction is specific to each type of SPM. By scanning the probe over the sample, one can obtain a map of the sample in terms of the interaction. Often, a feedback system is used to keep the interaction at a specific strength by controlling the tip-sample separation. The image obtained in this way is usually referred to as “sample topography,” although this is not entirely correct since it shows a surface of constant interaction strength that depends both on topography and material properties. Obviously, high-precision imaging requires ways of carefully positioning the sample relative to the probe tip in all three dimensions. In addition, an SPM needs a close-approach mechanism to bring the probe within range of the positioning mechanism that controls the tip-sample separation. 1.2.1 Scanning Tunnelling Microscopy STM is historically the oldest SPM method [2]. It relies on the ability of electrons to tunnel through a very narrow vacuum gap between two conductors. A sharp tunnelling tip is brought near a (conducting) surface. If a voltage bias is applied between the surface and the tip, a tunnelling current flows across the gap between the sample and the tip. Its magnitude changes roughly exponentially with the distance between the tip and the surface. The tunnelling current also depends on the electronic structure and the bias voltage; this dependence may be used to examine the properties of semiconductors (tunnelling spectroscopy). STM routinely reaches true atomic resolution. However, the sample must obviously be at least moderately conducting for STM. This rules out the use of STM on many interesting surfaces. Also, STM cannot be used in a conducting solution, which makes it unsuitable for many biological applications. CHAPTER 1. INTRODUCTION 3 1.2.2 Atomic Force Microscopy AFM [3] can use different types of surface forces (e.g., electric and van der Waals) to image a surface. It uses attractive, repulsive or lateral (friction) interatomic forces (see Ch. 2.2.1) between a sharp tip and the sample in its different modes of operation. Close− approach mechanism Position− sensitive photodetector Laser Cantilever and tip sample z xyz translation stage y x Figure 1.1: Schematic drawing of an AFM. We use only the “contact mode,” where the tip actually touches the surface and repulsive forces between the sample and the tip dominate the interaction. Fig. 1.1 is a schematic drawing of a contact-mode AFM with optical detection. The cantilever acts as a spring that bends when a force acts on the tip. A laser beam is reflected off the back side of the lever, and hence the beam is deflected when the lever bends. This can then be detected with a position-sensitive photodetector. In non-contact mode, the tip oscillates horizontally (shear- or lateral-force microscopy) or vertically just above the surface. The tip-surface interaction influences the behaviour of this oscillator, which can be detected by examining the amplitude, phase or frequency of the oscillations. A hybrid between contact and non-contact mode is the “tapping mode,” in which the lever also oscillates vertically but the tip lightly hits the surface during every cycle of the oscillation. Material properties of the sample (such as elasticity and “stickiness” on a microscopic level) strongly influence the data obtained in this mode. CHAPTER 1. INTRODUCTION 4 In contrast to STM, AFM does not need conducting surfaces, and operation in solution is not a problem. It has thus become an important tool for many fields. Its resolving capabilities are not as good as STM; although the lattice structure of crystals can be resolved [4], AFM does not normally reach true atomic resolution. Because of the finite interaction area between tip and sample, one observes a convolution between the tip shape and the sample topography that smears out details on the surface [5, 6]. Under ultra high vacuum (UHV) conditions, however, true atomic resolution has been reported [7]. 1.2.3 Near Field Scanning Optical Microscopy A significant limitation of classical optical microscopy is that the wavelength of light sets its resolution. An object that scatters light creates a diffraction pattern that spans the whole solid angle around it. Since no optical microscope can capture all diffraction orders, information about the object is lost and the image reconstruction is incomplete, leading to finite resolution [8]: , (1.1) NA where is the minimum distance at which two objects can still be distinguished, NA is the numerical aperture of the microscope objective ( with the index of refraction of the medium between object and lens and the half-angle of the cone of rays captured by the lens) and is the wavelength of the light used. A good oil immersion objective with NA of can resolve two objects down to about if visible light is used. Although other methods clearly offer higher resolution, optical microscopy has retained its importance because of its versatility: Many techniques, such as fluorescence microscopy and polarising microscopy, still have wide application. In 1928, Synge [9] suggested that one could overcome the diffraction limit by illuminating the sample through a sub-wavelength ( ) aperture that is brought extremely close ( "!# ) to the sample. The light transmitted from the near-field probe through the sample can then be collected in the far field by a conventional microscope objective and detected with a sensitive photodetector, such as a photomultiplier tube or avalanche photodiode. The size of the area of the sample that is illuminated essentially depends only on the size of the aperture. Obviously, some mechanism is required to maintain the small distance between the near CHAPTER 1. INTRODUCTION 5 field probe and the sample. Typically, AFM (shear force or contact mode) is used for this purpose [10]. This combination of AFM and NSOM also allows to obtain topographical and optical information of the surface simultaneously. The aforementioned DNA samples require dual labeling for distinguishing different sections of the strands when standard optical microscopy is used. This is because the DNA strands are not visible without labeling. In a combined AFM/NSOM, however, the topography information can be used to “see” the DNA while the photon count identifies tagged regions. Therefore only one dye is necessary, which simplifies the sample preparation. Since the topographic data obtained from shear force microscopy is not reliable [11], we use contact mode AFM. Chapter 2 Theory In this chapter, we discuss the probe-sample interactions of different SPM methods and the discrete PID (proportional, integral, differential) controller as a means of maintaining a constant tip-sample interaction. 2.1 Vacuum Electron Tunnelling The quantum-mechanical phenomenon of tunnelling arises because the wave function describing a particle can extend into areas where classically it would be forbidden. The Fermi energy of a typical metal is about below the vacuum potential. Two pieces of metal separated by a vacuum gap will therefore have a energy barrier between them. , (2.1) Since electrons follow the Fermi-Dirac distribution, it is extremely unlikely for them at room temperature to have enough energy ( ! ) to pass this barrier classically by thermal fluctuations. The one-dimensional potential of a tunnelling gap is shown in Fig. 2.1. It is instructive to look at the case of electrons tunnelling between two identical conductors with no bias voltage (Fig. 2.1b). For a detailed treatment of this problem, see [12]. The time-independent Schrödinger equation for this simple tunnelling system is ! #" %)$'( & * & ,+-! * & 6 , (2.2) CHAPTER 2. THEORY V 7 V Gap ∆V V gap Metal 1 Metal 2 e− EF 0 z 0 z d (a) (b) Figure 2.1: The potential of a tunnelling barrier between two metals; (a) Two different metals with a bias voltage applied between them; (b) two identical conductors with no bias voltage. where is the potential energy of the electron: We will assume regions of the potential are ! gap . gap . (2.3) Then the solutions to the Schrödinger equation in the three $ $ $ $ )( ( $ gap . (2.4) We will only look at electrons tunnelling from the left side to the right side and ignore the more, we replace , where by term describing electrons approaching the barrier from the right side ( ! and ! ). Further- is the tunnelling matrix element for electrons tunnelling from the left to the right side. The conditions that be continuous at and yield four equations. Since we have five parameters and all equations are linear, we may choose the CHAPTER 2. THEORY 8 amplitude of the incoming electron wave to be $ . Solving the equations yields . $ & $& & The probability of transmission of an electron through the barrier . & & If the decay length of the electron wave function, ( ), we can simplify Eq. 2.6 to read ! gap gap " " gap is (2.6) gap , is much smaller than the gap width + " ( gap $ + (2.5) gap gap '+ (2.7) (2.8) )( ! Å . & Hence, the tunnelling probability (and, therefore, the tunnelling current) depends expo , we expect the nentially on the distance between the metal pieces. Assuming where gap is the tunnelling barrier height and tunnelling current to change by a factor of for every Å change in the tunnelling distance. A more detailed calculation that takes the bias voltage into account [13] yields where , is the bias voltage applied between the tip and the sample and (2.9) is the average tunnelling barrier height. 2.2 Forces Involved in AFM In normal force AFM, the attractive and repulsive forces between the tip and the surface are balanced by the spring force of a bent cantilever. 2.2.1 Tip-Surface Interaction Forces In contact-mode AFM, the dominating force is the repulsive interaction between two atoms whose electron clouds overlap. Although there is no general expression that describes their CHAPTER 2. THEORY 9 distance dependence, they can be modelled empirically [14]. The simplest model for the interaction force is the “hard-sphere model”, which completely ignores any compressibility of the atoms: where , (2.10) is the sum of the radii of the two atoms and is the distance between them. Other approaches use a power-law potential or an exponential potential. However, the exact shape of the potential does not matter, given that the potential rises very steeply when the distance decreases below a certain distance, that is on the order of two atomic radii, and it only acts on very short distances. The other important force is the attractive van der Waals interaction . Once the tip is in contact with the surface, it will be compensated by the repulsion. However, this increases the force of the tip on the surface where they are in contact. In reality, neither tip nor surface is infinitely stiff. This causes the tip to be in contact with the sample over a finite contact area instead of a single point [5]. 2.2.2 Static Bending of a Cantilever The cantilever in a contact-mode AFM holds the tip and acts as a spring that compensates the forces between the tip and the surface and allows their measurement. α ∆z z x F y Figure 2.2: An AFM Cantilever. Fig. 2.2 shows a lever that is rigidly mounted on one side and bent upwards by a force applied to the other end. For small forces, the lever takes the shape [15] & , (2.11) CHAPTER 2. THEORY where 10 is the force acting on the end of the lever, material, is the Young’s modulus of the lever is the area moment of inertia (a constant that depends on the geometry of the lever) and is the lever length. The spring constant at is: . (2.12) Since the spring constant is a parameter of commercial cantilevers that can experimentally be determined [16], we rewrite Eq. 2.11 as & . (2.13) In AFM, we use the deflection of a laser beam reflected off the back side of a cantilever for detecting bending of the lever. Hence, the angle of deflection of the cantilever is much more useful than the displacement. For small angles we can write "! and, assuming that the laser is focused on the end of the beam ( (2.14) For biological samples, forces of ! ), we obtain . (2.15) or less must be used to avoid damage to the specimen. With the soft contact mode cantilevers that we use ( , TM Microscopes (Veeco) Microlever “C”), we therefore expect angles around ! , . The optical detection system (see App. B.1.2) allows detection down to about . 2.3 Near-Field Optical Imaging A simple definition of near-field optics is given by Paesler and Moyer [17] who define “near-field optics as that branch of optics that considers configurations that depend on the passage of light to, from, through or near an element with subwavelength features and the coupling of that light to a second element located a subwavelength distance from the first”. In illumination NSOM, laser light is coupled through the probe tip and used to illuminate the sample. The tip takes on the role of the sub-wavelength emitter whose near CHAPTER 2. THEORY 11 field probes the sample details that can convert evanescent modes into propagating waves that can then be detected in the far field. This can happen either by scattering or by other processes such as fluorescence. Modes with high spatial frequencies, i.e., the ones that carry information about subwavelength details, decay exponentially with increasing distance from the object [18, 19]. While inaccessible to traditional far-field microscopy, they can be used to image in NSOM and to boost the resolution beyond the diffraction limit. The exponential decay of these modes and their detection at short distances is closely analogous to electron tunnelling through a vacuum gap (see Ch. 2.1), which is why nearfield optical microscopy is sometimes dubbed photon tunnelling microscopy 1 . The resolution of NSOM is essentially limited by the size of the near-field aperture. This, however, cannot be made arbitrarily small. One limitation is the difficulty in funnelling enough light through the aperture to detect a signal. A second limitation comes from the finite skin depth of the material used to make the “opaque” wall of the aperture. Electromagnetic radiation penetrates even good conductors (typically, metals are used to shield the light) to a certain depth, known as the skin depth. It sets the limit for the res- olution2 in aperture NSOM (ca. [22]). Since the coating is somewhat dissipative, this process heats the NSOM probe which can be destroyed if the power coupled into it becomes too high. For completeness, we mention a variant of NSOM, apertureless NSOM, that does not, at least in theory, suffer from the above mentioned resolution limitations. Different methods have been tested, including scattering techniques in which light is scattered by a sharp tip which enhances the intensity in the vicinity of the tip [23] and illumination of the sample using a single molecule in a crystal that has been glued to a conventional NSOM tip [24]. However, these techniques are not only very complicated to use but also so far have failed to produce resolutions that are better than those routinely achieved in conventional aperture NSOM. 1 In the literature (e.g. [20]), sometimes the term PSTM is used to describe what we call collection mode NSOM while NSOM is used referring to illumination mode NSOM. 2 When light near the surface plasmon resonance is used, as is typically the case, light will penetrate much longer than the simple skin depth ( for aluminum at !! ) [21] suggests. CHAPTER 2. THEORY 12 2.3.1 NSOM Probes The most popular probes for NSOM are tapered fiber probes. To produce them, a singlemode optical fiber is pulled in a pipet puller while heated by a laser [22]. Alternatively & diameter with [25]. the taper can be achieved by etching the fiber to the desired aperture To prevent light from escaping from the fiber in the taper, thus creating far field background, the fiber is coated by evaporating a layer of aluminum onto it. These NSOM tips are commercially available3 as straight tips for shear force microscopy and as cantilevered tips for normal force microscopy [26, 27] as distance feedback mechanism. The manufacturers claim typical light transmission coefficients for tapered fiber probes on the order of . Another type of commercially available NSOM probes are pyramidal AFM tips with a hole through their center4 . A laser, focused on the hole in the back of the cantilever, can be used to illuminate the sample. The transmission coefficient is on the order of . 2.3.2 Signal Estimation for NSOM As a design goal for NSOM performance, we want to be able to observe single fluorophores [28]. To demonstrate the feasibility of this, we estimate the expected signal [29]. As a typical fluorescent molecule, we will assume the example of fluorescein, excited by the line of an -ion laser. The problem that limits most single molecule fluorescence measurements is photobleaching. In the excited state the molecule is more susceptible to reactions with its environment [30]. At high intensities, however, double excitation of the fluorophores becomes a problem. In this process, a molecule that is already in an excited state gets excited to a higher state when it is hit by another photon. The molecule then irreversibly bleaches with high probability. To estimate the optical signal we can expect, without bleaching the sample too fast, we calculate the probability for this process. Assuming identical photon absorption cross sections for the first and second excitation and using the Poisson distribution, we calculate the probability that the molecule is struck by no other photon within the lifetime of the 3 4 e.g. Nanonics Imaging Ltd.; Jerusalem, Israel; http://www.nanonics.co.il e.g. Witec GmbH; Ulm, Germany; http://www.witec-instruments.com/ CHAPTER 2. THEORY 13 excited state : (2.16) with the average rate of excitation and the lifetime of the excited state. In a time interval , the molecule is excited bleached after is times. Therefore the probability that the photon has not With the lifetime of the excited state of max & . (2.17) [31] we estimate a maximum excitation rate life ! (2.18) of the molecule before photobleaching. [31] a molecule excited at this rate emits At the quantum yield of fluorescein photons. A objective captures about of the emitted emission for a lifetime of life photons assuming spherical symmetry of the emission. The avalanche photodiode we use for detection has detection efficiency at the emission wavelength of fluorescein . As an example, we assume a image with pixels scanned at a speed of (line scan frequency: "! ). Without fluorescent molecules in the image we expect an average of count per pixel, while a molecule in the center of the pixel would $# counts. The molecule is only exposed to the light for , therefore the cause and a dark count of dark bleaching probability is extremely low. By using slower scan speeds the signal-to-noise ratio can easily be increased. In practice, we expect a somewhat lower signal because of losses from the fluorescence filters and other parts of the optics, as well as an increase in the dark count caused by stray fluorescence. We have shown that the detection of single molecules is possible provided that we can reach the excitation rate that we assumed. To estimate the excitation rate of a single dye molecule, we need to know its effective absorption cross section to the excitation light. Since normally only the bulk behaviour of most dyes is known, we need to relate the absorption cross section to the bulk extinction coefficient ( % [30]). & ('*),+- for fluorescein CHAPTER 2. THEORY 14 The number of photons absorbed of dye molecules per unit volume is proportional to the photon density, the number , the absorption cross section and the distance element the light travels: . (2.19) By integrating this equation, we get and for the intensity " (2.20) + . (2.21) Comparing this to the familiar law of absorption, % , (2.22) where is the molarity of the solution, we determine (after changing units) & % , (2.23) is Avogadro’s number. For fluorescein and an excitation wavelength of , . we obtain an effective absorption cross section of & & The maximum input power into the cantilevered fiber tips we are using is in . Using its transmission , aperture area for a diameter where & aperture tip, and the wavelength, we estimate a photon flux of in aperture & & (2.24) through the aperture, assuming that the intensity distribution over the aperture size is uniform. From this we calculate the maximum possible excitation rate a dye molecule as absorption . This is almost three orders of magnitude above the necessary and safe level. Therefore the power density in the near field is certainly sufficient and has to be reduced to prevent excessive photobleaching. CHAPTER 2. THEORY 15 2.4 The Digital PID Controller In all SPM methods, one measures some type of interaction between the surface and the probe tip that depends on the tip-sample distance. For imaging the topography of the sample, it is desirable to keep the distance between the surface and the tip constant. This can be achieved by employing a feedback system. Fig. 2.3 shows such an SPM feedback system [32]; h r e u Controller K Actuator G x y z Sensor H Figure 2.3: The SPM feedback system. For this discussion, we assume the dependence of the interaction strength of the tipsample distance to be linear5 , at least for small deviations. The tip-sample distance de- pends on the height of the sample at the current -position and the actuator extension . The interaction is measured with a sensor with a response and compared to the setpoint to calculate the error input. When the feedback is engaged, the controller’s task, for which its transfer function has to be designed, is to zero the error signal, i.e., to keep the measured interaction strength at the setpoint. Ideally, the controller would stabilize the tip-sample distance but this is not directly accessible. Via its output , the controller operates the -actuator whose dynamic behaviour is described by . A detailed discussion of a feedback system for STM can be found in [33]. 5 An exception is STM in which the tunnelling current varies roughly exponentially with the distance. Linearization can be achieved by using the logarithm of the tunnelling current and setpoint instead of the actual values. CHAPTER 2. THEORY 16 Proportional Controller The simplest controller is the proportional controller. Its action is . (2.25) is called the proportional gain. Obviously the sign of has to be chosen so that the effect of the controller action is counteracting the error of the system instead of increasing it. For a fixed setpoint , the error Therefore, this steady state error does not go to zero but is In the DC limit (zero frequency), . (2.26) and are just real, finite constants. only vanishes if is infinite. In practice, is limited because dynamic systems become unstable at high gain. Integral Term The problem of the steady state error can be solved by adding an integral term in the controller: or (2.27) (2.28) in frequency space. The gain for zero frequency now becomes infinite, solving the problem of the steady state error. System Stability The output of real systems is never purely immediate but also depends on the history. This can seriously interfere with the controller action. If the system is subjected to a disturbance at frequency , where is the loop delay time, the controller action is in phase with the oscillations and& will therefore enhance them. If the controller gain is high enough, the system becomes unstable and starts oscillating spontaneously. CHAPTER 2. THEORY 17 Differential Term The integral term introduces a phase lag in the controller which adds to the total sys- tem delay. This makes the system more susceptible to feedback oscillations. To compensate for this, one can introduce a differential term into the controller: or in frequency space. The differential term has a (2.29) (2.30) phase lead and therefore effectively damps the system, making faster feedback possible. However, in noisy systems adding the differential term normally leads to an increase in the noise levels because it especially increases the response to high frequency fluctuations of the error signal. Discretisation So far we have discussed continuous systems in which there are no discrete timesteps. This is obviously not possible when the feedback controller is implemented in software. The discretisation of Eq. 2.29 is , (2.31) where is the time interval between two controller iterations and and are the error signal and the controller output signal at time step . Since the digital controller only examines the error signal at discrete times and sets its output accordingly, it discards some of the available information. This leads to slightly lower performance of digital controllers when compared to analog controllers with respect to overshoot and settling time [32]. Obviously, the performance of the digital controller will approach that of an analog controller if the execution frequency of the control loop is much higher than the frequencies of the disturbances the feedback needs to compensate. Despite the disadvantages, the much greater flexibility of a digital controller makes it the much more suitable solution for our application. Chapter 3 Technical Implementation In any SPM, the control over the position of the tip relative to the sample in the lateral ( ) directions as well as in the axial ( ) direction has to be better than the desired resolution. This criterion is clearly the dominating factor in the design of all components [34]. To define the “desired resolution”, we consider highly oriented pyrolitic graphite (HOPG), a standard STM sample. The apparent nearest neighbour distance 1 is Å and the corrugation is around Å, depending on the bias voltage. To be able to resolve this lattice, we need better than Å lateral resolution. The necessary control over the displacement is dictated not only by the desired resolution but also by the stability of the tunnelling gap. As a rough rule of thumb, the tunnelling current changes by one order of magnitude when the tunnelling gap width changes by Å. Therefore, control over the position to Å is needed. 3.1 Mechanical Design The quality of the mechanical setup is of paramount importance for achieving good results with an SPM since precision positioning obviously cannot exceed the steadiness of its mounts that act as a reference. Since the requirements for the -positioning are the highest, the system is most sensitive to changes in this direction. We will therefore focus on issues 1 The real nearest neighbour distance in graphite is but since the atoms are alternatingly either directly above an atom in the layer below or above the center of a hexagon of atoms [35], the obvious periodicity in STM images of graphite is Å 18 CHAPTER 3. TECHNICAL IMPLEMENTATION 19 that affect the tip-sample distance. However, the basic considerations are the same for the - and -axes. 3.1.1 Sources of Mechanical Disturbances There are different disturbances that should be considered in the design with the goal of making the instrument immune to them, or at least minimising their effect. Thermal Drift While the body and most of the rest of the instrument are made from aluminum with thermal expansion coefficient2 Al [36], the piezoelectric actuators are made from ceramic materials that have a much lower expansion coefficient piezo . Therefore, overall changes in the instrument temperature will cause changes in the tipsample position. A long piezoelectric stack causes a change of piezo Al piezo ! (3.1) in the tip-sample distance when the temperature of the instrument changes uniformly. Assuming a rate of change of , we expect about Å drift due to these temperature changes. Thermal drift is a very slow process caused by overall changes in room temperature. Provided there are no periodic disturbances (caused, for example, by an air conditioner), typical variations occur on the scale of hours. Localised Thermal Fluctuations Air currents and other effects can cause local temperature changes that alter the length of parts of the setup thereby changing the tip-sample position. Between the sample and the probe tip, the instrument forms a large loop through the -stage, the instrument body and the probe head. The characteristic vertical length of this setup is difference 2 . If a temperature occurs between a part of the instrument body and the rest of the setup, the Different parts of the setup might actually be made from different aluminum alloys that have slightly different expansion coefficients CHAPTER 3. TECHNICAL IMPLEMENTATION tip-to-sample distance will change by 20 ! Al . Obviously, the instrument is very sensitive to small temperature differences. These temperature differences are evened out by heat conduction. The time constant for this process [37] is where & with is the distance over which the temperature difference occurs, diffusivity, (3.2) is the thermal is the density, the specific heat capacity and the heat conductivity of the material. Substituting values for aluminum [38], and the characteristic length of the instrument, we find that the time constant is on the order of ten minutes. Obviously, temperature changes that happen much slower than this can be treated as overall temperature changes while very fast fluctuations get damped strongly because they cannot penetrate the material deeply. Thus, it is important to minimise temperature variations that occur at about this most dangerous time scale. Building Vibrations Building vibrations are caused by many different sources such as fans and machines as well as people walking nearby. The typical frequency range for these disturbances is ! and peaks in the spectrum frequently occur around the subharmonics of the line frequency [34]. Acoustic Noise Another source of vibrations that can cause problems is sound. Talking, music and noisy equipment have caused problems. These sources cover a wide frequency spectrum from below "! to several "! . Intrinsic Sources All movements of positioning elements in the setup itself can to some degree couple to other axes and cause displacements there. The main source for this type of vibrations is CHAPTER 3. TECHNICAL IMPLEMENTATION 21 the approach motor with gearhead (Diamond Motion, 1200-1-1616-1670) but we have also observed signs of crosstalk between the three piezo actuators. 3.1.2 Countermeasures Thermal and Acoustic Insulation For imaging, we are typically not interested in overall slope, i.e. features that cover the whole image with one shape. With a line scanning frequency between "! , signals much slower than this can be ignored and are simply filtered out by a high-pass filter. However, if thermal drifts or fluctuations are too violent, they may cause the instrument to run out of range on the -positioning or cause image distortion when a drift in lateral direction occurs. For this reason, and also to reduce acoustic vibrations, we built a box from insulating material that contains the instrument and protects it from air currents, lowpasses thermal changes and reduces acoustic influence. Vibration Isolation a) b) Mass m Damper λ’ x(t) Spring k Head x(t) Tip Spring k Sample f(t) Base f(t) Figure 3.1: a) Damping system for insulating the SPM from building vibrations; b) Model of the SPM for vibration analysis. To shield the SPM from building vibrations, we use damping systems as shown in Fig. 3.1.a to decouple it from the floor. The damping system is a damped harmonic oscillator with a low resonance frequency. The differential equation describing such a system is ( , (3.3) CHAPTER 3. TECHNICAL IMPLEMENTATION where is the offset of the floor and 22 is the offset of the load (SPM). By Fourier transformation, we obtain the system transfer function , (3.4) & is the frequency normalised to the resonance frequency of the undamped and is a dimensionless damping parameter. system where The absolute value of the system transfer function is called transmittivity. It is the ratio of the amplitudes of the oscillation of the mass and the oscillation of the floor: & & & & & & . (3.5) Figure 3.2: A harmonic oscillator with different damping coefficients. Fig. 3.2 shows transfer functions for different damping coefficients . There are clearly distinguishable frequency regimes in this transfer function: At low frequencies, the transmittivity is unity. Around the resonance frequency, there is resonant enhancement, so the vibrations in this frequency range actually get worse than without the damper. The lower the damping coefficient, the stronger the resonant enhancement. Obviously, the resonance frequency has to lie well below the frequencies the instrument is sensitive to. CHAPTER 3. TECHNICAL IMPLEMENTATION 23 At higher frequencies, we achieve the desired damping of the vibrations. It is obvious in Eq. 3.5 that for very high frequencies, a system with finite damping ( the behaviour of a first-order system ) approaches . However, for lower damping there is & two regimes is clearly visible in the curve in Fig. 3.2. a transition region in which the system shows behaviour. The transition between the In the regime where these systems reduce vibrations, lower damping coefficients are therefore favourable. However, systems with very low damping take a long time to attenuate accidental excitations which are unavoidable during manipulations on the instrument. Therefore, the damping coefficient should not be too low. We are currently using two damping systems; the first one is an optical table on air springs with a vertical resonance frequency of about bungee cords ( table "! and the second is a set of ! ) with which the instrument is suspended from a frame that sits on top of the optical table. A commercial damping system with "! was ordered but bungee did not arrive in time for this thesis. Instrument Design The SPM itself forms an oscillator as well (Fig. 3.1.b). An infinitely stiff instrument would not be affected by external vibrations. The design goals are quite the opposite to those of the damper elements: the desired behaviour is that the tip moves with the same amplitude and in phase with the sample to keep the relative position constant. Therefore, we redefine the transmittivity for the instrument as & & & & & , (3.6) describing the ratio between the tip-sample position oscillation amplitude and the excitation amplitude. Since the system is made mostly of metal which has very low dissipation, we can ignore its damping term. Then we can see from Eq. 3.6 that it will perform well for i.e. . Obviously, the resonance frequency of the setup should be made as high as possible. To estimate the range of frequencies that the system rejects, we look at the lowest reso- CHAPTER 3. TECHNICAL IMPLEMENTATION 24 nance frequency of a rectangular plate whose edges are supported [39]: Here, & is the Young’s modulus, the density and & & . (3.7) is the Poisson ratio of the material, is the thickness and the length of the longer side of the plate. Substituting the values for aluminum for , with aspect ratio (3.8) . Obviously, there are two ways to increase the resonance fre quency of a part: reduce its size and [38], we get or decrease the aspect ratio . The element that dictates the minimum size of the instrument is the -stage with . After two failed attempts to build the instrument out of relatively thin ( and respectively) plates in which vibrations of the instrument body made ! accurate -positioning basically impossible, we changed the design to an L-shape made out of aluminum bar stock as shown in Fig. 3.3. Using Eq. 3.8 we obtain a lowest resonance frequency of ca. ! for the vertical piece of the instrument body. Although this is certainly lowered by the weight of the head and the bottom piece, no increase of noise is observed in the ! frequency range so we assume that the vibration damping and acoustic insulation are working effectively. 3.2 Controller 3.2.1 Hardware Modern SPM designs use digital controllers to control the instrument and image acquisition. This allows the user to adapt the controller to a wide range of instruments and situations by simply changing parameters or the code. Although there are several commercial turnkey solutions available, we decided to develop a controller especially for this instrument mainly because we wanted to implement a number of nonstandard features such as DC approach motor control using a DC voltage. As the source code of the controlling software is normally not provided with the commercial solutions, the extra flexibility of a home-built controller is essential. CHAPTER 3. TECHNICAL IMPLEMENTATION 25 Close Approach Motor 3" STM Head 7" xy−stage 3" 6.5" Figure 3.3: Mechanical design of the instrument, STM configuration. Apart from the obvious necessity of a sufficient number of high-resolution analog inputs and outputs, it is essential to be able to control the timing of the feedback loop for the tip-sample distance control and that this feedback provides high bandwidth. Therefore it is necessary to use a device that is capable of fast real-time processing of analog data. Furthermore, image acquisition requires high-speed data transfer to the computer and a sufficient amount of memory to buffer data on the real-time system. We decided to use an ADwin Gold system as the controller hardware (Jäger Messtechnik GmbH) that, apart from the previously mentioned features, can be programmed in a simple, high-level programming language (ADbasic) that allows fast software development and easy maintenance by future users. It connects to a personal computer via a universal serial bus interface. 3.2.2 Software The SPM software consists of two main parts: The real-time part, running on the SHARC CPU of the ADwin Gold system and the user interface, running on the PC under IGOR Pro CHAPTER 3. TECHNICAL IMPLEMENTATION 26 Figure 3.4: The AFM head (closeup on the right side), the bungee cord vibration damping system and the acoustic and thermal shielding system. The inside of the shielding box is coated with aluminum foil for additional protection against electrical interference. 4.0 (WaveMetrics Inc.). Both parts of the software were initially written by RTS Consulting. We later heavily modified them to adapt them to changes in the setup. The software allows data acquisition on up to 5 channels simultaneously. The user can choose each channel independently to be any of the analog inputs of the controller, one of the four counters, the -piezo position or the error for the feedback and derived values depending on the currently active SPM mode. All channels allow a maximum sampling rate of "! . There are three basic modes for acquiring data: static mode: CHAPTER 3. TECHNICAL IMPLEMENTATION 27 hunt mode; scan mode. In static mode, the tip sits over one point of the sample. Active channels can be displayed as a time series or as a power spectrum. In hunt mode a single scan line is continuously scanned and the data is presented versus the position along the scanline. This mode also allows space-time diagrams that repeatedly record the same scanline to make changes visible. Finally, in scan mode a two dimensional area of the sample is scanned and the acquired data is represented as a contour plot. 3.3 Optics 3.3.1 Detection and Signal Conditioning, AFM The detection of the cantilever deflection in AFM is realized with a laser beam deflection system: A laser beam, focused on the back of the cantilever, is deflected to twice the cantilever angle when the cantilever bends. By measuring the shift of the light-spot at a distance from the lever, we can determine the change in angle . Assuming get Since the levers are very narrow ( . we (3.9) ), the laser beam needs to be focused to a small spot. Ordinary laser diodes typically suffer from astigmatic aberrations and cannot be focused to the diffraction limit. Therefore we use laser diodes with integrated correction optics (Blue Sky Research, Circulaser). The light-spot position is detected using a split photodiode. The difference between the photocurrents from its segments is a measure of the displacement of the light spot. However, since the difference scales with the overall intensity of the light, we also measure the sum of the photocurrents. By dividing the difference by the sum, we can compensate for intensity fluctuations of the laser diode. Since we are only interested in the deflection in one direction, a one-dimensional diode (split into two segments) would be sufficient. However, for practical reasons (easier centering of the beam on the photodetector) we chose to use a quad-photodiode module with CHAPTER 3. TECHNICAL IMPLEMENTATION 28 integrated sum and difference amplifiers for both lateral directions (Pacific Silicon Sensor, PSS-QP50-6SD). CCD camera Quad photodiode Polarising beamsplitter λ/2 waveplate Laser diode λ/4 waveplate Collimator 19mm EFL achromat Lever Figure 3.5: Schematic drawing of the AFM detection optics Fig. 3.5 shows the principal setup of the AFM detection scheme. The light from the laser diode with correction optics is collimated into a parallel beam and reflected by a polarising beamsplitter. It then passes through a waveplate at , which turns the linearly polarised light into circularly polarised light. The laser beam is then focused on the back of the cantilever using an achromat. The reflected light from the cantilever is collimated again by the same lens and passes the waveplate again so that the linear polarisation of the resulting beam is rotated with respect to the original beam. Therefore it passes the beamsplitter without being reflected back into the laser diode. A rotates the polarisation by another waveplate at before the beam gets reflected onto the detector by another polarising beamsplitter. The setup allows lateral (with respect to the laser beam) movement of the lever to place it in the focus of the beam, axial displacement of the achromat for focusing and lateral movement of the sensor for centering the beam on the quad photodiode. A camera mounted on top of the assembly can be used to support positioning the laser spot on the cantilever and for focusing. CHAPTER 3. TECHNICAL IMPLEMENTATION 29 We use gold coated silicon nitride cantilevers (TM Microscopes (Veeco) sharpened Microlever) with sharpened pyramidal tips. Their tip radius of curvature is . They are mounted to the tip holder by gluing the chip attached to the cantilevers to the tip holder with an instant adhesive. 3.3.2 Sample Emission Detection Light that is emitted by the sample (either excited with an NSOM tip or by STM) can be detected through transparent and semitransparent samples. To achieve high efficiency in the detection of the light, we use a , microscope objective (Zeiss Jena, Achromat). The setup allows insertion of filters in the optical path, viewing of the sample through a CCD camera and focusing of the collected light into an optical fiber that can deliver it to a photomultiplier tube (Hamamatsu, H6180) or to an avalanche photodiode (Perkin Elmer Optoelectronics, SPCM-AQR-14-FC). For a more detailed description of the pickup optics see App. B.2. 3.4 Electronics The electronics in the setup can be divided into three major parts: Detection electronics Driver electronics for piezoelectric elements Supplementary electronics Because the detection and driver electronics directly influence the image by controlling the lateral position and the tip-sample distance, their noise levels greatly affect the resolution of the instrument. 3.4.1 Detection and Signal-Conditioning, STM In STM, the tunnelling current (nA) has to be measured with high accuracy (pA). Since the inputs of the controller allow to , this current has to be converted to a voltage in CHAPTER 3. TECHNICAL IMPLEMENTATION 30 that range. To achieve a flat frequency response in the targeted frequency range, we split the signal-conditioning electronics into a current-to-voltage converter (see App. A.1.1) with a conversion factor of and a x10 or x100 amplifier (see App. A.1.2) that boosts the signal to or respectively. The IV-converter converts the tunnelling current into a proportional voltage [40]. Often, logarithmic IV converters are used because they cover a greater range of currents [41] and linearise the tunnelling interaction. However, their bandwidth is severely reduced by the capacitance of the diodes used in the feedback. Since the circuit is designed to detect very small currents ( ), it must be well-shielded from electromagnetic noise in the environment. This is done by integrating it into the STM head which is made from an aluminum block. This placement also keeps the connections to the STM tip short which further prevents noise pickup. To prevent electrical interference from the power supply, we initially powered the circuit by batteries. After draining many batteries in a relatively short time, we replaced them with a very stable power supply (see App. A.1.3). 3.4.2 Positioning Driver Electronics Lateral Translation Stage A common problem with many SPMs is that the reproducibility of the positioning is very poor because of hysteresis, creep [42] and thermal drifts of the piezoelectric stacks that are typically used for positioning. A way to avoid these problems is to use position sensors and a closed-loop feedback circuit to compensate these effects. There are several commercial products available that use position sensors and a feedback system. They differ mainly in the type of position sensors (optical, piezoresistive and capacitive) they use. The stage we are using (Mad City Labs, Inc., Nano H100) uses flexure hinges to ensure straightness of motion and orthogonality, has piezoresistive sensors and comes with a variable bandwidth feedback- and driving circuit (NanoDrive). Its scan range is , and it claims sub-nanometer accuracy. CHAPTER 3. TECHNICAL IMPLEMENTATION 31 -Translation The requirements for the vertical translation are very different from the translation stage. Since SPM is normally used on relatively flat surfaces, the range required is much smaller than in the lateral direction. The bandwidth of the -translation has to be much higher though, because it is part of the feedback loop and therefore directly changes the tip- sample separation. Hence, the moving part of the -translation must be light and stiff so it will not cause any resonances within the target bandwidth. In STM-mode, we use a piezoelectric stack (Thorlabs AE0203D04) with over its range drive-voltage range to drive a small tip-holder so that the tip is moving in the -direction instead of the much heavier sample. However, in AFM this is not possible because of the optical detection system. By moving the tip vertically it would go out of focus of the laser beam. Currently, the tip-sample control is realized by moving the sample using three piezoelectric actuators (Thorlabs AE0505D08) with range. To produce the high voltage required to drive the piezoelectric actuators, we use a highvoltage amplifier. On the one hand it needs to provide large currents to allow high slew rates despite the relatively large capacitances of the piezoelectric stacks and a large smallsignal bandwidth. On the other hand the noise on the output must be low enough to allow (Piezomax PMDRV) has Å. The driver we are using RMS output noise over its "! bandwidth. controlling of the tip-sample distance in STM down to Vernier Circuits Given the ranges of the and positioning devices, the resolution of the analog outputs of the controller are not sufficient to reach the desired resolution of and , respectively. The vernier circuits combine two analog outputs of the controller into one with higher precision. The concept and their implementation are discussed in App. A.2. In addition to the vernier, these circuits buffer all outputs of the controller with differential amplifiers to eliminate interference from common-mode voltages on the outputs of the controller. CHAPTER 3. TECHNICAL IMPLEMENTATION 32 3.4.3 Supplementary Electronics For the operation of the SPM, several additional electronic circuits are necessary. However, most of them are not directly related to the SPM operation or are just serving interfacing purposes. I will therefore abstain from describing them here. Approach Motor Controller Although not directly involved in imaging, the approach motor control circuit is crucial for SPM operation. This is because for a reliable close approach, control over the speed of the approach motor down to very low speeds as well as fast spin-up and spin-down control are necessary. Concretely, motor steps smaller than the range of the -piezo are necessary. Because of the algorithm that is used for the close approach in STM, this is limited to the range of the fine control of the -piezo (ca. ). We developed a circuit that controls the speed of a DC-motor without the need for a tachometer by using the countervoltage induced in the motor coils. This circuit is described in detail in App. A.3. Chapter 4 Results Since this project constitutes the design and setup of a new instrument, the images presented here have to be viewed as tests of the instrument capabilities and therefore not as the primary fruits of the project. 4.1 AFM AFM was the first SPM method we implemented. Hence, the images shown here were taken with a very early setup. As is obvious in the image of the calibration grating Fig. 4.1.a (diagonal lines), there was a periodic signal, probably caused by a ground loop, superimposed on the image. Fig. 4.1.b was obtained on a freshly cleaved HOPG surface at very low bandwidth to circumvent interference problems. Since these images were taken with a Park Scientific AFM control unit (SPC400 and SFM-BD2-210) that had to be severely altered to interface with our AFM / NSOM head, neither the lateral calibration nor the -calibration is reliable. 4.2 NSOM To produce test samples for NSOM imaging we used fluorescent polystyrene micro- spheres (Bangs Labs, Estapor Uniform Dyed Microspheres) that we attached to the surface 33 CHAPTER 4. RESULTS 34 4µm a) 350nm b) 4µm 350nm Figure 4.1: a) An SPM test grating; black to white range . b) Atomic step on graphite; -range ca. Å. of a microscope coverslip by heating the sample to . Fig. 4.2 shows an image of such a sample. The -scale of the AFM image is and the scale of the NSOM image is from black to white. The tip we used had a aperture. Cantilevered optical fiber NSOM tips are extremely fragile. Fig. 4.3 shows images taken with a tip that consistently delivered a good optical signal as well as AFM feedback. However, it is obviously damaged since the features in the two images are offset. We assume that a piece of the aluminum coating of the tip broke off and light leaked out the side of the tip, illuminating an area of the sample that was not in contact with the tip. 4.3 STM Since STM has the simplest setup and is also the method most sensitive to vibrations, we used it for most of the debugging of the instrument. Many of the improvements such as the dual -feedback (App. C.1.1) and the sturdy instrument body were only tested with the STM setup but are expected to improve the performance of the other modes in the same way. Fig. 4.4 shows gold evaporated on a microscope slip (sample courtesy of Brian Leathem), imaged at tip bias with a Platinum-Iridium clipped wire tip. CHAPTER 4. RESULTS 35 AFM NSOM 10 µ m 10 µ m 10 µ m Figure 4.2: AFM and NSOM images of a test sample with fluorescent microspheres. Obviously, features on the order of several laterally as well as in -direction can be resolved. However, these images were taken without the voltage amplifier causes lateral oscillations at -piezo driver because its high "! , the sixth harmonic of the line fre- quency. This is probably because of poor power supply design in the Nanodrive ( -stage feedback circuit and high voltage amplifier). These horizontal oscillations have an ampli- tude on the order of , making stable tunnelling impossible. Running the instrument without the driver solves the problem of the oscillations but deprives the instrument of the closed-loop feedback, which normally compensates thermal drift, piezo hysteresis, creep and the like in the -stage. Fig. 4.4.a and 4.4.b were taken in the same scan. However, the scanning direction is from left to right (sample moving left) in Fig. 4.4.a and reversed in Fig. 4.4.b. The two images exhibit an -offset with respect to each other caused by bandwidth limiting of the piezo actuator voltages. Fig. 4.4.c is a closeup of the same surface. The grain structure that is visible in these images is caused by the fact that gold does not wet glass unless a chromium layer is applied first. To test the limits of the instrument on a reference surface, we tried imaging the lattice of HOPG. Although some of the images showed some structure and might even be interpreted as a badly distorted atomic resolution image, this is certainly not the case since the “lattice” CHAPTER 4. RESULTS 36 AFM NSOM 5µm 5µm 5µm Figure 4.3: AFM/NSOM images taken with a damaged NSOM tip. one can sometimes see does not scale with the size of the raster scan but does scale with the scan frequency. This is strong evidence for periodic interference. The amplitude for those noise oscillations is about Å peak-to-peak while the expected periodic variations of the graphite lattice are Å. We assume that this Å interference stems from the amplifier whose output noise is periodic with !. high-voltage CHAPTER 4. RESULTS 37 a) b) c) Figure 4.4: STM images Gold evaporated on a microscope slip. a), b) Two images taken during the same scan as left and right image. c) closeup of the same sample. Bias voltage . Figure 4.5: Typical result of an attempt to image freshly cleaved HOPG surface. Bias voltage . Chapter 5 Conclusions and Further Projects Although the design goals for the positioning control have not all been reached, the instrument should be capable of carrying out the tasks that motivated its construction. DNA has a height of when imaged with AFM [43]. This is clearly above the noise level of the instrument. The instrument is also capable of maintaining a stable tunnelling current in STM mode, which is an important prerequisite for experiments in which one expects to see photon emission induced by the tunnelling current. Apart from the obvious imperative to hunt down and eliminate the noise source that currently limits the resolution of the SPM, I would like to suggest a change in the setup that would improve the AFM capabilities of the instrument considerably. Also, a project that combines STM and the efficient light collection seems worthwhile. 5.1 AFM -translation Modification The design of the AFM requires that the tip stay fixed with respect to the rest of the head because of the change in the laser spot position if the cantilever is at an angle. Hence, the current design implements the -translation on top of the -stage, thereby moving the relatively heavy sample holder with the reaction force acting on the soft causes resonances in the ’s of "! (compared to ! -stage. This in STM mode where only the tip is moved, see App. E), leading to a very low feedback bandwidth. The dual feedback leads to a natural way out of this dilemma: while the slow feedback, which is limited to max. "! , still moves the sample, small, fast movements are done 38 CHAPTER 5. CONCLUSIONS AND FURTHER PROJECTS 39 by a piezoelectric actuator that moves the tip by small amounts. By splitting the feedback this way, much higher gains and therefore better tracking of the surface and faster scanning should be possible. This configuration would also allow easy implementation of intermediate and non-contact modes by adding another very small piezoelectric element to excite oscillations of the cantilever. 5.2 Photon Emission from Inelastic Tunnelling With its efficient light detection system consisting of the high NA microscope objective and the PMT/APD photon counters, this instrument is made for detection of light emission caused by the tip-sample interaction. Apart from the obvious case of NSOM, photon emission can be caused by electron tunnelling. This is commonly observed in metals [44] and semiconductors [45]. Obviously, since the instrument detects light from below the sample, we can detect light only from (semi)transparent sample substrates. One interesting project is that it might be possible to excite dye molecules by a tunnelling current [46]. Since the sample substrate has to be at least moderately conducting for STM, a thin metal layer or a layer of a conducting oxide such as which is partially & transparent needs to be deposited on the sample carrier. Although a conducting surface is an efficient quencher of fluorescence, the increased photostability caused by the vicinity of the metal surface may allow a sufficient number of photons to be detected [47]. The reason for both, the fluorescence quenching and the reduction of bleaching (see Ch. 2.3.2) is the shorter lifetime of the excited state, caused by energy dissipation in the metal. This allows higher excitation rates that can at least partially compensate for the decrease in quantum yield. If this technique works, it could provide much higher resolution than NSOM because it is not aperture limited. Appendix A Electronic Circuits A.1 STM Signal Conditioning A.1.1 IV-converter The IV-converter converts the tunnelling current from the STM tip into a voltage. The circuit is shown in Fig. A.2. A test of the circuit without bandwidth limiting showed that when the supply voltage dropped below the circuit started to oscillate at troduced in the feedback to limit the bandwidth to "! ! . Hence a capacitor 1 was in- . While cutting off well below the self-oscillation frequency of the circuit, this filter does not change the behaviour of the circuit significantly within the frequency range of the instrument ( "! ). The operational amplifier is a low-noise, precision model, optimised for low bias current (Burr-Brown OPA111/BM). To reduce noise further, we used a metal-film resistor as the feedback resistor [48]. A.1.2 Second Stage Amplifier The second amplifier boosts the voltage from the IV-converter by a factor of 10 or 100 to reach a signal of and , respectively. Additionally, this amplifier limits the The required, extremely low capacitance ( ) was obtained by using conducting traces on opposite sides of a printed-circuit board. 1 40 APPENDIX A. ELECTRONIC CIRCUITS AFM 41 STM IV Sensor Sum Approach Difference Motor xyz−Stage PMT APD Converter Piezo and STM Tip xy−Stage Amplifier Amplifier Power 1 Supply 2 3 4 5 7 9 11 13 15 2 4 Odd Row Analog Inputs Digital I/O Counter Buffers 1 3 2 z−Vernier 8 10 12 14 16 Even Row ADwin Gold 4 Counters 1 6 3 Buffer Analog Outputs 4 5 Buffer 6 x−Vernier 7 8 y−Vernier Piezomax PMDRV Mad City Labs Motor Nano Drive Controller Figure A.1: Block diagram of the electronics signal bandwidth to ! to prevent aliasing in the digitisation. Fig. A.3 shows the transfer function of the two signal conditioning circuits together. The phaseshift approaches for high frequencies because both the IV-converter as well as the second stage amplifier are bandwidth limited with a first-order RC-filter. The input noise of the circuits is . APPENDIX A. ELECTRONIC CIRCUITS 42 100K +18V + 1.5nF 10K 0.5pF − + − −18V 15nF 10M OPA27 − − + 1k OPA111/BM Signal out + Sample Bias in STM Tip Sample Bias out Figure A.2: The STM signal conditioning circuits - IV-converter (left) and second-stage amplifier (right). A.1.3 Stable Power Supply As a replacement for the batteries that powered the STM signal conditioning circuit, we built a double-stabilised power supply (Fig. A.4). The AC voltage ( V) from the secondary coil of the transformer is divided into a positive and negative half-cycle, smoothed by a capacitor and stabilised to # . To further reduce ripple on the output, we use another pair of voltage regulators that reduce the voltage to # . Each of the voltage regulators claims a ripple rejection of at least combined ripple rejection of the two stabilisation stages should be around . Therefore the . However, the real circuit is very close to the transformer and therefore subject to stray magnetic fields. Under our typical conditions ( ), the oscilloscope image of the AC component of APPENDIX A. ELECTRONIC CIRCUITS 43 Figure A.3: The measured transfer function of the STM signal-conditioning electronics; second-stage amplifier (solid) and (dashed). 7818 + +15V 7815 1µ F 1µ F + 1000 µ F 4700 µ F + 0 + 4700 µ F 117V 60Hz 1µ F 7918 1µ F 7915 24V 1000 µ F −15V Figure A.4: Stable power supply for STM signal conditioning. the output voltage ( loads ( RMS) has no obvious correlation with the line frequency. Higher ) caused the output to show some ripple of about peak-to-peak. A.2 Vernier Circuits As introduced in Ch. 3, the desired resolution in the lateral direction is about Å while it Å control over the tip to sample distance to maintain a stable and tunnelling current. Given the ranges of and , the number of bits is necessary to have about needed are & & Å ! Å ! (A.1) , APPENDIX A. ELECTRONIC CIRCUITS 44 respectively. The analog outputs of the controller are 16-bit and therefore do not seem suitable for these tasks. Since adding high-resolution DACs would require much effort, we use a trick to achieve the required resolution. Rc Vc V Vf Rf Figure A.5: The idea of the vernier circuit. For the three high resolution outputs, we use two DAC outputs each and create a weighted sum voltage via an analog circuit. One analog output is used as “coarse” con- and the second one as “fine” control . The circuit is shown in Fig. A.5. For the trol output voltage of the circuit we get If , we can rewrite this as " ( (A.2) + ( (A.3) Hence, the result is a kind of vernier drive with an advantage of for the fine control. Since the full range of the DACs is an input range of for the voltage steps smaller than , one step is -controller and the for the # Å ! . With high-voltage amplifier, we need (A.4) Å ! (A.5) -control voltages and for the -control voltage which results in minimum vernier advantages of spectively. and , re- APPENDIX A. ELECTRONIC CIRCUITS 45 However, this calculation completely ignores the noise on the outputs. Noise measure- ments show that the output noise on all DACs is below Assuming white noise, this is a noise density of RMS on "! & advantages ! bandwidth. per channel. For vernier , only the noise on the coarse input has to be considered. While this noise can safely be ignored on the ! bandwidth of the controller 2 ( ! & ! ! RMS), it will obviously be higher than the stepsize on the ! bandwidth of the high-voltage amplifier. The bandwidth of the signal therefore "! "! to lower the RMS of the has to be limited to less than & & noise below the desired resolution. Obviously, this is not an acceptable bandwidth for the tip-sample distance regulation feedback. As mentioned earlier, though, because the noise of the coarse control voltage dominates in the final signal, there is no need to limit the bandwidth of the fine control voltage. To be able to make use of the lower noise in the controller, we choose a vernier advantage of ! bandwidth setting of the - . For the -vernier, we have to take the impact of the bandwidth limit on the imaging into account; the calculation of the actual output voltage from the fine voltage and the coarse voltage and history would require relatively CPU-intensive operations on the ADWIN controller and is therefore not a favourable solution3. To circumvent this, we place the cutoff-frequency for the coarse voltage so that it is below the frequencies of expected image features. We can then use the data from the fine voltage as image data, less overall slope and drift. On the one hand, this suggests a very low cutoff frequency; on the other hand, the fine voltage can only vary the position in a relatively small range, so a low bandwidth in the coarse setting might cause crashes due to overall slope of the sample or thermal drift. We chose the -cutoff frequency to be 10Hz. While this cutoff causes the noise of the coarse control to be much lower than necessary and therefore suggests using a higher vernier advantage than calculated earlier, it does not make sense to reduce the noise of the control voltage much below the input noise of the high-voltage amplifier (see Ch. 3.4.2). Furthermore, a high vernier advantage results in a small range of fine control. A vernier advantage of is a good compromise. The possible bandwidths are , and ; we typically use the setting because of detector-noise induced position-noise 3 Acquiring the data of both the coarse and the fine control should, together with the system transfer 2 function of the vernier circuit, allow the reconstruction of the complete image information, including slow components. APPENDIX A. ELECTRONIC CIRCUITS 50nF 150pF Vernier/ separate − 100 − 10K 10K 324K 324K Vc 10Hz/ full BW 46 V1 + + 324K 10Hz/ full BW 324K 75pF 50nF 324K Vf − 5K − 100K 100K 324K V2 + + 324K 324K Figure A.6: The -vernier circuit. The circuit for the -vernier is shown in Fig. A.6; the inputs are buffered by inverting differential amplifiers (gain: ) to prevent common mode problems that result from poor grounding design in the ADWIN Gold controller4 . The coarse-control channel has two capacitors to limit the bandwidth. These capacitors are not present in the - and -circuits. The signals from the input amplifiers are then combined into the sum signal using the vernier circuit ( and for , and for and ) and buffered by two inverting output amplifiers (gain: ). The two outputs are needed for the automatic vernier calibration; to execute the calibration, the output from the vernier circuit is fed back into an ADC input of the controller. Then the controller outputs different voltages on the coarse and fine output to determine the advantage of the vernier circuit. Separate buffering is necessary to eliminate interference 4 The digital and analog ground are not properly separated [49]; this leads to a signal on some of the analog outputs during memory access bursts. common mode APPENDIX A. ELECTRONIC CIRCUITS 47 because the ADC multiplexer circuit in the ADWIN controller changes the impedance of an input drastically when it is activated. The coarse and the fine channel can also be operated separately; the two outputs are then the coarse and the fine channel, respectively. This might be used, for example, for two different piezoelectric elements for the coarse and the fine tip-to-sample distance control. In all channels, the second amplifiers are bandwidth limited to ! as shown in the second channel in the circuit diagram, except for one of the channels (first channel). Since ! high-voltage amplifier only has a bandwidth of the , a bandwidth limit to reduce noise is not necessary at this point and would introduce unnecessary phase shift. In practice, it is still preferable to use a feedback capacitor to prevent amplifier oscillations. We chose it so that the bandwidth of the amplifier is "! . In this circuit, different resistor values were chosen to reduce thermal or Nyquist noise of the feedback resistors [50]: where is the RMS noise voltage of the noise, constant, is the temperature of the resistor and , (A.6) is the resistance, is the Boltzmann’s is the bandwidth over which the noise is detected. In a unity-gain inverting amplifier, both resistors contribute equally to the noise on the input. For two resistors we get (corresponding to at room temperature. Although this is below the acceptable noise ( dangerously close. Therefore, we chose to use ) RMS noise ) it is perhaps resistors. Although, strictly speaking, Eq. A.3 only holds for very high input impedances of the following amplifiers, it can still be used; a more detailed calculation shows that the reduces the range of the vernier circuit by about ( All resistors used are input impedance of the amplifier . metal film resistors. They were sorted to obtain better matches ) for the resistor quadruples of the input amplifier and the resistor pairs of the output amplifiers in order to have high common-mode rejection and nearly unity gain. Each channel is grounded separately to avoid cross-talk, and the operational amplifiers amplifiers are low-noise precision amplifiers (OP27GP). The output noise and common mode response are listed in Tab. A.1. For measuring the amplifier noise, we shorted and floated the inputs. The common mode response was measured by imposing a RMS, "! inputs. The detection bandwidth was square wave signal on both leads of the amplifier "! and the verniers were deactivated. APPENDIX A. ELECTRONIC CIRCUITS Channel Input Output 48 Noise [ ] CMR [ ] 1 coarse HV-Amplifier 14 900 2 fine calibration 52 240 3 approach motor 33 2130 4 STM bias voltage 39 270 controller 44 490 calibration 33 350 controller 53 330 calibration 53 680 5 6 coarse fine 7 8 coarse fine Table A.1: Noise and common mode response (RMS) of the vernier and buffer circuits. Figure A.7: The transfer functions of the coarse (solid) and fine (dashed) channels of the vernier circuit. A.3 Close-Approach Motor-Control At very low speeds, DC motors typically do not run reliably, tending to “stall” because of stiction. To overcome this, one can use different strategies. A very common one is to pulse the voltage supply, controlling the speed by varying the duty cycle. The disadvantage of this method is that the speed of the motor depends on the load. To get a more reliable control, one can use a tachometer that controls the voltage of the motor via a feedback mechanism. However, this is relatively costly because it requires additional hardware. Our solution uses the same principle as the latter possibility while not requiring a separate tachometer. A real motor can be modelled as an “ideal” motor, i.e. one without ohmic loss, in series with a resistor . While the voltage across the ideal motor is proportional to its APPENDIX A. ELECTRONIC CIRCUITS 49 angular momentum, the current through it, , is proportional to the torque. Of course, the only values that are accessible to us are the voltage across the terminals of the real motor and the current . But since , the resistance of the motor coils, can be measured, we can calculate . This voltage can then be compared to a setpoint and feedback can be employed. Control Voltage R=R m M Motor Rm Figure A.8: DC-motor speed control circuit. The principle of the circuit we are using to control the motor speed is shown in Fig. A.8. A resistor with resistance identical to the motor coils motor. The voltage across it motor: is used in series with the is measured and subtracted from the voltage across the . The difference between this and the setpoint is used to control the motor voltage through an amplifier, turning the circuit into a simple proportional controller. fit , where . For . The coefficients for the linear is the speed and is the control voltage, are and The approach speed can be controlled down to , the motor stalls. APPENDIX A. ELECTRONIC CIRCUITS Figure A.9: Close approach speed vs. control voltage. 50 Appendix B Optics B.1 AFM detection optics B.1.1 Laser Spot Size As pointed out in Ch. 3.3.1, it is important to design the optical AFM detection system so that the laser spot diameter on the cantilever is smaller than the cantilever diameter. In practice, the spot should be made as small as practically possible because in the case of a bent-fiber NSOM probe, the laser is reflected by a curved surface. The diameter of the laser beam is , and the focal length of the lens is . Using the laws for the propagation of a Gaussian laser beam [21], we determine after a lengthy calculation a spot diameter of . If the cantilever is not perfectly in focus, the spot size becomes larger. The calculation yields a tolerance of about # for a spot size . B.1.2 Lever Deflection Signal Conditioning By combining Eqs. 2.15 and 3.9, we can calculate the offset of the spot on the detector Here, laserspot on the detector. Hence, tip tip . is a displacement of the tip in -direction and (B.1) is the displacement of the is called “amplification” of the optical system. 51 APPENDIX B. OPTICS 52 the amplification is With the working distance . and the length of a cantilever ∆p 1 3 2 4 RL RD Figure B.1: The quad photodetector; is the detector radius, spot and the offset of the laser spot. the radius of the laser Fig. B.1 is a schematic drawing of the split photodetector that is hit by an off-center . The laser beam. Each of the four detector segments creates a current , top bottom and right left .& We are primarily interested in right left & . & of the beam the power density of the spot is Assuming a Gaussian intensity profile " & + (B.2) & & where is the distance from the center of the laser spot, is the total laser power and available outputs are sum is the radius of the beam. If we ignore the finite size of the detector, the power received by left side & and the right side & & and of the detector is & & , (B.3) respectively. Using the symmetry of the Gaussian, we write the difference between them as & & . (B.4) APPENDIX B. OPTICS 53 Since we are only interested in small deviations, we expand this expression to first order around : ! " & The difference voltage is therefore right left ! & + & tip . Fig. B.2 shows this linear approximation and a numerical calculation of tip offset for a Figure B.2: right left vs. long cantilever at (B.5) (B.6) right left versus the laser power. ; solid: numerical calculation; dashed: linear approximation. According to the manufacturer, the RMS noise voltage on the output of the quad pho- todiode module is !. On "! detection bandwidth this results in , under aforementioned conditions, detector noise. or APPENDIX B. OPTICS 54 B.2 Sample Emission Detection Optics Fig. B.3 shows the principle of the light collection optics. The light emitted from the sample is collected by the microscope objective, filtered and focused into an optical fiber that delivers it to the photomultiplier or avalanche photodiode. NSOM Tip Fluorescent Molecules Sample APD / PMT Microscope Objective Optional Filters Optical Fiber Mirror Removable Beamsplitter CCD Camera Figure B.3: The sample emission pickup optics, NSOM configuration. When the beamsplitter is inserted, one can obtain a spatially resolved image of the sample with a CCD camera. This is especially helpful for selecting interesting areas of the sample and for alignment. Filters can be inserted before or after the beamsplitter. Since the objective is infinity corrected, no other changes are necessary when filters or the beamsplitter are inserted, removed or changed. The optical fiber that delivers the light to the photon counting modules has a core diameter of . Since the microscope objective and the tube lens that focuses the light on the fiber produce a magnification of about 50, the area of the sample from which the light reaches the photon counter has a diameter of . This limitation of the detection area is APPENDIX B. OPTICS 55 very desirable in illumination NSOM to reduce photon counts from fluorescent molecules that get excited by far-field radiation. Also, stray fluorescence in the optical system (i.e. photons that do not originate from the sample surface) has very low detection efficiency because this light does not get focused on the fiber end. Appendix C Controller C.1 Controller Software The ADwin Gold system is a real-time DSP system and the software that runs on it is in some ways fundamentally different from “usual” programs. Most of the code is within the “event” part of a program; the event is called in regular time intervals and therefore should not take longer than the time interval to the next event. The ADwin system can run up to eight processes, one of which is a high-priority process. The event of this process will interrupt any other process that is currently running and override all other events to guarantee a very regular execution of this task. The ADwin system also allows processes whose events are not run regularly but triggered by an external event but we are not using this capability. For communication to the computer, 80 integer parameters and the same number of floating point parameters and 80 arrays or FIFOs are available. C.1.1 The Fast Task The high-priority process is executed at a rate of "! in the SPM control software which is the reason why we call it the “fast task”. The SHARC DSP in the ADwin Gold is running ! which makes one clock cycle and therefore the execution at a clock frequency of time of most commands . Hence, we have a maximum of clock cycles of the CPU per fast task. Fig. C.1 shows a flow-chart of the fast task. 56 APPENDIX C. CONTROLLER 57 80kHz Fast Task Entry Point 40kHz 40kHz Read Both ADCs 20kHz Start ADCs 20kHz Set MUX of Odd ADC to Fast Channel 10kHz Set MUX of Odd ADC to next slow Channel z−Feedback 10kHz x−Control y−Control 10kHz z−Feedback 10kHz FIFO5 Scan Housekeeping 40kHz Set MUX of Even ADC to next Channel 10kHz FIFO1 10kHz FIFO2 10kHz FIFO3 10kHz FIFO4 Figure C.1: Flowchart of the fast task. Splits in the execution path mean alternating execution of the different targets. The ADwin system has only two ADCs for its sixteen analog inputs. The inputs with odd numbers are multiplexed to ADC1, the inputs with even numbers to ADC2. Therefore the voltages on the inputs cannot be read simultaneously. The analog multiplexer has a settling time of and the ADC takes to perform the conversion. Therefore, in each event we either initiate the conversion of both ADCs (right flowpath) or we read the results and switch the multiplexer to the next pair of analog inputs we want to read (left flowpath). While all even channels are treated equally, they are all read at , one of the odd channels, the fast channel, is acquired at . This channel is used for the -feedback (i.e. tunnelling current in STM mode). Because of this, the other seven odd channels can only be acquired at about . The -feedback code is executed in two of the four slots in the right flowpath and hence has an execution rate of . The - and -control functions output the control voltages for the lateral translation, that are calculated by the scan function. The housekeeping function was introduced for load balancing away from the feedback controller. It mainly contains the code to prevent integral wind-up in the z-feedback. The acquired data is transported to the computer through FIFOs. For load balancing APPENDIX C. CONTROLLER 58 reasons, the five FIFO feeding procedures have been distributed over the flowpaths with the shortest execution times. Lateral Control For slow SPM modes such as NSOM it is interesting to allow non-rectangular scans of regions of interest. Therefore we use a non-conventional way to define the scan region: A scan is defined by two lists that we call - and -vector. While the -vector contains the scan information for one scan line, the -vector defines the position of each scanline relative to a separately defined center point. The -vector not only contains information about the shape of the scanline but also about the scan speed and which data points are to be fed into the FIFOs. Furthermore, it allows fields for additional control commands such as setting the bias voltage for tunnelling spectroscopy. While the creation of the - and -vectors is typically considered a high-level non-real- time task and therefore should be executed on the PC, for simple rectangular scans it is done on the ADwin controller in order to eliminate lengthy uploads of these lists to the controller. -Feedback The -feedback is realized in two stages as shown in Fig. C.2. The first stage, called the fast feedback, controls the fine -control and therefore has a high bandwidth but only a relatively limited range. It tracks image features and vibrations. The second stage or slow feedback controls the coarse -control. It uses the position of the fast feedback as its input and a setpoint of so it stabilizes the average of the fast feedback to the center position. The slow feedback mainly tracks overall slope of the sample and drifts. Both feedback stages are PID controllers. For practical use in the controller, we rewrite Eq. 2.31: " ,+ . (C.1) Here we introduced the integral and differential time constants and and the previous APPENDIX C. CONTROLLER 59 SPM Fast Feedback 1/50 Setpoint Slow Feedback Lowpass Controller Software Vernier Circuit Figure C.2: The principle of the -feedback system. integral term . After simplifying Eq. C.1 " + " + (C.2) we arrive at a form that contains very few mathematical operations and is therefore suitable for use in a fast algorithm [32]: (C.3) with the coefficients " + " + and . (C.4) In real controllers, one of the problems is the initialisation of the previous integral term when the controller is activated. The goal is to create a smooth transition from manually controlled operation to feedback control. In practice it turned out to be sufficient to use although this initialisation might still create a step in the controller output when the controller is activated at non-zero error. C.1.2 The Slow Tasks The slow tasks take care of various less time-critical issues such as building the - and vector, controlling the approach motor and calibrating the vernier circuits. There are three slow tasks; the - and -vector building task, the millisecond task and the centisecond task. APPENDIX C. CONTROLLER 60 Close Approach Motor Control The close approach motor control is located in the centisecond task. It is capable of two different approach modes: In AFM approach mode, the motor is simply run at a specified control voltage and automatically stopped when the force on the cantilever passes the setpoint. This will also activate the feedback. The STM approach mode is more complex because the tip must be brought extremely close (on the order of ) to the surface without touching it. The vibrations caused by the motor are too large for the feedback to be able to efficiently prevent the tip from crashing into the surface. Therefore the approach algorithm shown in Fig. C.3 is used for the close approach in STM mode. Ramp up z-Piezo Voltage until V>V0 I>I0 Activate Feedback Fully Retract Piezo Run Motor for t 0 Figure C.3: The STM approach algorithm; is the fine -piezo control voltage, is the tunnelling current. With the coarse piezo control voltage set to the middle of its range, the fine control voltage is ramped from minimum to maximum extension. If the tip current crosses the threshold current during this ramping process, the ramping is stopped and feedback is activated. Otherwise the motor will be run for a specified time to move the head closer to the sample. It is important that the motor advance step is smaller than the range of the fine APPENDIX C. CONTROLLER control to prevent tip crashes during motor advance. Typical values are ) for the motor control voltage and . 61 (roughly The active feedback used to control the motor speed causes vibrations when the motor is stopped. The power to the motor control circuit is therefore cut off with a relay after the motor has stopped. Appendix D Scanner Calibration The -translation stage as well as the -piezos initially are provided with very big toler- ances on the information about their extension at a certain voltage. Therefore we calibrated them using a “linear variable differential transformer” (LVDT) (Schaewitz, LVDT Type 500 and Analog Transducer ATA-101) to obtain a scale for all image dimensions. The displacement was measured versus the controller output voltage ( range) so that the calibrations include the effects of the high-voltage amplifier and position feedback where used. The data and linear fits to it are shown in Fig. D.1 and the calibration results are listed in Tab. D.1. Name Calibration (with Nanodrive) (with Nanodrive) (without Nanodrive) (without Nanodrive) (AFM with PMDRV) (STM with PMDRV) Table D.1: The SPM scanner calibrations. Although these values are certainly much better than the vendor provided data, all these calibrations can only be regarded as clues; the dynamic behaviour of piezoelectric elements includes hysteresis and creep, which, especially for the -piezos, cannot be ignored during 62 APPENDIX D. SCANNER CALIBRATION 63 Figure D.1: Calibration of the piezoelectric positioners. imaging. The only exception to this is the stage when the Nanodrive (position feedback) is used, since the feedback eliminates these effects. Appendix E Dynamic Characterisation of the STM Resonances and other strong variations in the system transfer function of a system can cause difficulties controlling it (see Ch. 2.4). Therefore, it is important to design the -positioning system in a way that it exhibits as little dynamic behaviour as possible. The system transfer function is measured by imposing a small reference signal from a lock-in amplifier on the -piezo control voltage of the controller. We cannot abandon feedback completely because thermal drift makes it impossible to maintain a constant average tunnelling gap width for the duration of the measurement without feedback. Therefore we reduce the feedback gain and increase the integration time constant so we can ignore the reaction of the feedback to the reference signal. Then the reference signal can be swept through the frequency range of interest and the amplitude and phase of the response in the tunnelling current can be measured1 . Figure E.1: The system transfer function of the STM. 1 This measurement includes the IV-converter and the second stage amplifier and the -piezo driver. 64 APPENDIX E. DYNAMIC CHARACTERISATION OF THE STM 65 The system transfer function is shown in Fig. E.1. In this setup the first resonance frequency occurs above ! . Since the tip holder and the tip are the moving parts, this value depends on the length of the tip wire and how it is mounted. 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