Data Sheet MEEZDEN
PhotoKleenTM EZD
Filter Assembly
Description
The PhotoKleenTM EZD filter is designed for clean, simple,
safe and fast filter change outs in point-of-use photochemical
dispense applications. The PhotoKleenTM EZD filter assembly
consists of a head manifold interface and an HDPE (High
Density Polyethylene) capsule filter. It is ideal for improving
the performance of existing installations and can be specified
on new, state-of-the-art dispense pumps. The XP option is
available for advanced lithography processes.
Features & Benefits
•
•
•
•
•
•
•
•
Low hold-up volume
Manufactured in a cleanroom environment
Capsule-style filter assembly
Top in / top out flow direction
Quick filter disconnect (one step)
Minimized dead space
Reduces chemical waste during filter start up and change out
Minimized organic extractables by XP option for rapid
start-up and reducing chemical waste
• XP option quarantees low organic, metal and particle
cleanliness for the most advanced processes
Filter Capsules
Specifications (Filter Capsules)
Materials of Construction
Components
Materials
Filter Medium
P-Nylon : Hydrophilic Nylon 6,6
PE-Kleen : High Density Polyethylene (HDPE)
P Emflon : PTFE
Support and Drainage
High Density Polyethylene (HDPE)
Core, Cage and End Caps
High Density Polyethylene (HDPE)
Housing
High Density Polyethylene (HDPE)
O-ring
Perfluoro elastomer, Kalrez1, EPDM
1
P-Nylon
Removal Ratings (nm)
PE-Kleen
5, 10, 20, 40, 0.1 µm, 0.2 µm
PHD22
Nominal
Filter
Areas
P Emflon
2, 5, 10, 30, 50
50, 0.1 µm, 0.2 µm
HXN5
AN01, ANM
: 1900 cm2
: 2500 cm2
UG2, UG5 : 2600 cm2
UG001
: 2500 cm2
2800 cm2
AND
: 2500 cm2
UG003
: 2200 cm2
UNI, UNA
: 1960 cm2
UG005
: 3200 cm2
2
PHD44
Kalrez is a registered trademark of E. I. du Pont de Nemours and Company
HXN5
: 4100 cm
AN01, ANM, AND : 5300 cm2
UNI, UNA
: 3340 cm2
UG2, UG5 : 5200 cm2
UG001
: 5100 cm2
UG003
UG005
Maximum Operating Temperature
23 ˚C / 73 ˚F
Maximum Operating Pressure
0.39 MPa @ 23 ˚C / 57 psid @ 73 ˚F
: 4400 cm2
: 5400 cm2
4400 cm2
Part Numbers / Ordering Information (Filter Capsules)
PHD 1
2
E
3
Table 1
4
5
Table 2
Table 3
Length (Nominal)
Code
mm
inch
HXN5
22
99
3.9
AN01
44
159
6.3
ANM
20 nm
AND
40 nm
Table 4
P-Nylon
(Nylon 6,6)
0.1 µm
Code
O-ring materials
0.2 µm
H23
Perfluoro elastomer
PE-Kleen
(HDPE)
2 nm
H11
Kalrez
5 nm
J
EPDM
Code
UNI
UNA
UG2
UG5
Filter Media
Removal ratings
Code
Head Manifold Connections
P-Nylon
(Asymmetric Nylon 6,6)
5 nm
absent
1/4", 3/8", 6 mm, 8 mm
10 nm
-2
1/2", 10 mm
UG001
10 nm
UG003
30 nm
UG005
50 nm
UFD
UFT
P-Emflon
(PTFE)
UFR
Table 5
50 nm
0.1 µm
Code
Cleanliness Options
absent
standard products
low organic, metal and
particle cleanliness
-XP
0.2 µm
Filter Media Electron Micrograph
P-Nylon (Nylon 6,6)
PE-Kleen (HDPE)
P Emflon (PTFE)
Dimensions
Dummy Capsule
φ70
65
Filter Capsule
φ70
L
PHDC1H23 (1/4", 3/8", 6 mm, 8 mm)
PHDC2H23 (1/2", 10 mm)
Specifications (Head Manifold)
Materials of Construction
Components
Materials
Head
Polypropylene (Non Wetted)
Fitting
PTFE / PFA
Ring-nut
SCS13 equivalent
(with knob for handling aids)
Head Manifold, Filter Capsule, Dummy Capsule
Connections
Type
2
Super Pillar type
Inlet / Outlet
Vent
1/4" (6.35 x 3.9 mm) Elbow union
1/4" (6.35 x 3.9 mm) Elbow union
3/8" (9.53 x 6.3 mm) Elbow union
1/2" (12.7 x 9.5 mm) Elbow union
1/4" (6.35 x 3.9 mm) Straight union
1/4" (6.35 x 3.9 mm) Straight union
3/8" (9.53 x 6.3 mm) Straight union
3
Flowell 60 series
1/4" (6.35 x 3.9 mm) Fitting
1/4" (6.35 x 3.9 mm) Fitting
6 x 4 mm Fitting
4 x 3 mm Fitting
8 x 6 mm Fitting
10 x 8 mm Fitting
6 x 4 mm Fitting
10 x 8 mm Fitting
2
Pillar is a trademark of Nippon Plillar Packing Co.,Ltd.
3
Flowell is a trademark of Flowell Co.,Ltd.
6 x 4 mm Fitting
Part Numbers / Ordering Information (Head Manifold)
PHYG 1
Table 1
Code
Inlet / Outlet
Vent
PS44B
1/4" (6.35 x 3.9 mm) Super Pillar Elbow union
1/4" (6.35 x 3.9 mm) Super Pillar Elbow union
PS64B
3/8" (9.53 x 6.3 mm) Super Pillar Elbow union
PS84B
1/2" (12.7 x 9.5 mm) Super Pillar Elbow union
PS44BS
1/4" (6.35 x 3.9 mm) Super Pillar Straight union
PS64BS
3/8" (9.53 x 6.3 mm) Super Pillar Straight union
FS44B
1/4" (6.35 x 3.9 mm) Flowell 60 Fitting
1/4" (6.35 x 3.9 mm) Flowell 60 Fitting
FS64MB
6 x 4 mm Flowell 60 Fitting
4 x 3 mm Flowell 60 Fitting
FS84MB
8 x 6 mm Flowell 60 Fitting
FS104MB
10 x 8 mm Flowell 60 Fitting
FS66MB
6 x 4 mm Flowell 60 Fitting
FS106MB
10 x 8 mm Flowell 60 Fitting
1/4" (6.35 x 3.9 mm) Super Pillar Straight union
6 x 4 mm Flowell 60 Fitting
Spare Parts
Produt Name
Part Number
Applicable Head Manifold
PHDC1H23
PHYGPS44B(S), PHYGPS64B(S), PHYGFS64MB, PHYGFS64MB
PHYGFS66MB, PHYGFS84MB
PHDC2H23
PHYGPS84B, PHYGFS104MB, PHYGFS106MB
PHFGBRACKET14
All
Dummy Capsule
Mounting Bracket
Dimensions
Super Pillar fitting
PHYGPS44B
PHYGPS64B
PHYGPS84B
PHYGPS44BS
PHYGPS64BS
Flowell 60 fitting
PHYGFS44B
PHYGFS66MB
PHYGFS64MB
PHYGFS84MB
PHYGFS104MB
PHYGFS106MB
Pressure Drop vs. Liquid Flow Rate (Water, 20℃)4
1/4" Super Pillar fitting : PHYGPS44B
PHYGPS44BS
P-Nylon / PHD44
P-Nylon / PHD22
120
ANM
AN01
100
ANM
Clean pressure drop (kPa)
Clean pressure drop (kPa)
120
AND
80
UNI
HXN5
60
UNA
40
20
0
100
HXN5
AN01
40
20
1
3
2
0
Liquid Flow Rate (L/min)
2
120
UG2
Clean pressure drop (kPa)
UG003
100
UG5
UG001
80
3
4
PE-Kleen / PHD44
PE-Kleen / PHD22
Clean pressure drop (kPa)
1
Liquid Flow Rate (L/min)
120
UG005
60
40
20
UG003
UG005
100
UG001
UG5
80
UG2
60
40
20
0
0
0
1
2
0
3
Liquid Flow Rate (L/min)
1
2
3
4
Liquid Flow Rate (L/min)
P-Emflon / PHD22
P-Emflon / PHD44
120
120
100
100
Clean pressure drop (kPa)
Clean pressure drop (kPa)
UNA
60
0
0
UFD
80
UFT
60
UFR
40
20
UFD
UFT
80
UFR
60
40
20
0
0
0
1
2
3
Liquid Flow Rate (L/min)
4
AND, UNI
80
For liquids with viscosity differing from water, multiply the pressure drop by the viscosity in mPa･s.
0
1
Liquid Flow Rate (L/min)
2
3
4
Pressure Drop vs. Liquid Flow Rate (Water, 20℃)4
3/8" Super Pillar fitting : PHYGPS64B
PHYGPS64BS
P-Nylon / PHD44
P-Nylon / PHD22
AN01
120
HXN5
100
UNI
AND
80
Clean pressure drop (kPa)
Clean pressure drop (kPa)
120
ANM
UNA
60
40
20
0
ANM
60
UNA
40
20
2
4
6
8
0
Liquid Flow Rate (L/min)
6
4
8
PE-Kleen / PHD44
PE-Kleen / PHD22
120
UG5
UG2
UG001
UG2
100
Clean pressure drop (kPa)
Clean pressure drop (kPa)
2
Liquid Flow Rate (L/min)
120
UG003
UG005
80
60
40
20
UG001
UG003
100
UG005
80
UG5
60
40
20
0
0
0
2
4
0
6
Liquid Flow Rate (L/min)
2
4
6
8
Liquid Flow Rate (L/min)
P-Emflon / PHD22
P-Emflon / PHD44
120
120
100
100
Clean pressure drop (kPa)
Clean pressure drop (kPa)
AND, UNI
80
0
0
80
60
UFD
40
UFT
UFR
20
80
UFD
60
UFT
40
UFR
20
0
0
0
2
4
6
Liquid Flow Rate (L/min)
4
HXN5
AN01
100
For liquids with viscosity differing from water, multiply the pressure drop by the viscosity in mPa･s.
0
2
Liquid Flow Rate (L/min)
4
6
8
Pressure Drop vs. Liquid Flow Rate (Water, 20℃)4
1/2" Super Pillar fitting : PHYGPS84B
P-Nylon / PHD22
AN01
P-Nylon / PHD44
120
AN01
HXN5
100
Clean pressure drop (kPa)
Clean pressure drop (kPa)
120
AND
80
UNI
ANM
60
UNA
40
20
0
100
80
60
AND, UNI
20
2
4
6
8
0
Liquid Flow Rate (L/min)
UG2
4
6
8
10
8
10
PE-Kleen / PHD44
120
UG5
UG5
UG2
Clean pressure drop (kPa)
UG003
100
2
Liquid Flow Rate (L/min)
PE-Kleen / PHD22
120
Clean pressure drop (kPa)
UNA
40
0
0
UG005
UG001
80
60
40
20
0
100
UG001
UG003
80
UG005
60
40
20
0
0
2
4
6
0
8
Liquid Flow Rate (L/min)
2
4
6
Liquid Flow Rate (L/min)
P-Emflon / PHD22
P-Emflon / PHD44
120
120
100
100
Clean pressure drop (kPa)
Clean pressure drop (kPa)
ANM
HXN5
80
60
40
UFD
UFT
20
80
60
UFD
40
UFT
20
UFR
UFR
0
0
0
2
4
6
8
Liquid Flow Rate (L/min)
4
For liquids with viscosity differing from water, multiply the pressure drop by the viscosity in mPa･s.
0
2
4
Liquid Flow Rate (L/min)
6
8
10
Pressure Drop vs. Liquid Flow Rate (Water, 20℃)4
6 mm Flowell 60 fitting : PHYGFS66MAB
P-Nylon / PHD22
P-Nylon / PHD44
120
120
ANM
UNI
100
ANM
AND
80
Clean pressure drop (kPa)
Clean pressure drop (kPa)
AN01
UNA
HXN5
60
40
20
0
100
HXN5
80
AN01
UNA
60
40
20
0
0
1
2
0
3
Liquid Flow Rate (L/min)
1
PE-Kleen / PHD22
4
3
4
3
4
PE-Kleen / PHD44
UG001
Clean pressure drop (kPa)
100
UG005
UG5
80
UG001
UG5
UG003
Clean pressure drop (kPa)
3
120
UG2
60
40
20
100
UG003
80
UG005
UG2
60
40
20
0
0
0
1
2
0
3
Liquid Flow Rate (L/min)
1
2
Liquid Flow Rate (L/min)
P-Emflon / PHD22
P-Emflon / PHD44
120
120
100
100
80
Clean pressure drop (kPa)
Clean pressure drop (kPa)
2
Liquid Flow Rate (L/min)
120
UFD
UFT
60
UFR
40
20
UFT
80
UFD
60
UFR
40
20
0
0
0
1
2
3
Liquid Flow Rate (L/min)
4
AND, UNI
For liquids with viscosity differing from water, multiply the pressure drop by the viscosity in mPa･s.
0
1
Liquid Flow Rate (L/min)
2
Pressure Drop vs. Liquid Flow Rate (Water, 20℃)4
8 mm Flowell 60 fitting : PHYGFS84MB
P-Nylon / PHD22
AN01
P-Nylon / PHD44
120
HXN5
80
UNI
AND
ANM
60
UNA
40
20
0
100
2
4
UNA
40
20
0
6
2
PE-Kleen / PHD22
6
8
PE-Kleen / PHD44
120
UG2
4
Liquid Flow Rate (L/min)
120
UG5
UG5
UG2
100
Clean pressure drop (kPa)
Clean pressure drop (kPa)
AND, UNI
60
Liquid Flow Rate (L/min)
UG003
UG001
UG005
80
60
40
20
UG001
100
UG003
UG005
80
60
40
20
0
0
0
2
4
0
6
Liquid Flow Rate (L/min)
2
4
6
8
Liquid Flow Rate (L/min)
P-Emflon / PHD22
P-Emflon / PHD44
120
120
100
100
Clean pressure drop (kPa)
Clean pressure drop (kPa)
ANM
80
0
0
80
60
UFD
40
UFT
UFR
20
0
80
60
UFD
UFT
40
UFR
20
0
0
2
4
6
Liquid Flow Rate (L/min)
4
HXN5
AN01
100
Clean pressure drop (kPa)
Clean pressure drop (kPa)
120
For liquids with viscosity differing from water, multiply the pressure drop by the viscosity in mPa･s.
0
2
Liquid Flow Rate (L/min)
4
6
8
Pressure Drop vs. Liquid Flow Rate (Water, 20℃)4
10 mm Flowell 60 fitting : PHYGFS104MB
PHYGFS106MB
P-Nylon / PHD44
P-Nylon / PHD22
120
AN01
120
HXN5
AN01
100
Clean pressure drop (kPa)
Clean pressure drop (kPa)
ANM
80
UNI
AND
60
UNA
40
20
0
80
UNA
40
20
2
6
4
8
0
Liquid Flow Rate (L/min)
100
4
6
8
10
8
10
PE-Kleen / PHD44
120
UG5
UG5
UG2
Clean pressure drop (kPa)
Clean pressure drop (kPa)
UG2
2
Liquid Flow Rate (L/min)
PE-Kleen / PHD22
120
UG003
UG001
80
UG005
60
40
20
0
UG001
100
UG003
80
UG005
60
40
20
0
0
2
4
6
0
8
Liquid Flow Rate (L/min)
2
4
6
Liquid Flow Rate (L/min)
P-Emflon / PHD22
P-Emflon / PHD44
120
120
100
100
Clean pressure drop (kPa)
Clean pressure drop (kPa)
AND, UNI
60
0
0
80
60
UFD
40
UFT
UFR
20
0
80
60
UFD
40
UFT
UFR
20
0
0
2
4
6
8
Liquid Flow Rate (L/min)
4
ANM
HXN5
100
For liquids with viscosity differing from water, multiply the pressure drop by the viscosity in mPa･s.
0
2
4
Liquid Flow Rate (L/min)
6
8
10
Representative example part numbers
(Head Manifold)
(Capsules)
PHYGPS44B
PHD22UNIEH11
PHYGPS64B
PHD22UNIEJ
PHYGPS84B
PHD22UNDEJ
PHYGFS44B
PHD22UNDEH11
PHYGFS64MB
PHD44UNDEH11-2
PHYGFS84MB
PHYGFS104MB
PHD22ANDEH11
PHGF-Bracket 05
PHD44ANDEH11
(Mounting Bracket)
PHD22ANMEH11
PHD44ANMEH11
PHD44UFNEH11
PHD22UFREH11
PHD22UFDEH11
PHD22UFTEH11
PHD44FTEH11
PHD44UFTEH11-2
PHD22UFDEH11
PHD44UFDEH11
PHD44UFDEH11-2
PHD22UG005EH11
PHD44UG005EH11
PHD22UG003EH11
Microelectronics
25 Harbor Park Drive
Port Washington, NY 11050
+1 800 360 7255
toll free US
+1 516 484 3600
telephone
+1 516 801 9711
fax
microelectronics@pall.com
Nihon Pall Ltd.
6-5-1, Nishishinjuku,
Shinjuku-ku
Tokyo 163-1325 Japan
+81 3 6901 5700
telephone
+81 3 5322 2109
fax
Visit us on the Web at www.pall.com/micro
Pall Corporation has offices and plants throughout the world. For Pall representatives in your
area, please go to www.pall.com/corporate_contact.asp.
Because of technological developments related to the products, systems, and/or services
described herein, the data and procedures are subject to change without notice. Please consult your Pall representative or visit www.pall.com to verify that this information remains valid.
© Copyright 2016, Pall Corporation. Pall,
, and PhotoKleen are trademarks of Pall Corporation.
® Indicates a Pall trademark registered in the USA.
is a service mark of Pall
Corporation.
MEEZDEN
January 2016