Phase‐Change Reconfigurable Circuits Cheng‐Yuan Wen Jeyanandh Paramesh Larry Pileggi Reconfigurable electronics are becoming a necessity to address increasing silicon costs and the need for flexible operation. Digital and analog circuits often use CMOS switches to achieve reconfiguration for programmable logic functions and for programmable gain or bandwidth. However, due to their high capacitive parasitics and high ON state resistance (RON), CMOS switches are not well‐suited to reconfiguring RF circuits in multi‐standard radios. Here, we propose a new approach for reconfiguration by implementing on‐chip switches using non‐ volatile phase‐change (PC) materials that feature high dynamic range ROFF and RON in the amorphous and crystalline states, with low parasitics. To prove the proposed concept, cross‐ coupled LC VCO’s with two different PC via‐reconfigurable inductors: (a) series connected and (b) coupling controlled have been designed and fabricated as demonstration vehicles, as shown in Fig. 1. The transistors, capacitors, resistors and inductor traces are fabricated in a 130 nm CMOS process, and flip‐chip integrated with a PC chip fabricated in an in‐house PC process (Fig. 2). The two LC VCOs can be band‐switched by PC‐switched reconfigurable inductors, coarsely tuned using a programmable capacitor array and finely tuned by MOS varactors. Measured results of the integrated VCOs show successful reconfiguration with wide frequency tuning. The characterized tuning ranges of the two designs are shown in Fig. 3 and Fig. 4, respectively. VDD 100 μm pad with solder bump PC switch VO+ 8C 4C 2C VDD C inductor in 0.13µm CMOS process Cap SW8 Cap SW4 Cap SW2 Cap SW1 8C GSG probe pads 4C 2C VO+ series connection (a) VO‐ reflowed solder bumps 5 mm GSG probe pads C PC switch w/ GSG pads flip‐chip solder bumps 5 mm PC switch VDD VS VB 2.5 mm Vcont IBIAS Bias switch network VO+ 2.5 mm CMOS chip VO‐ coupling controlled Fig. 1: Reconfigurable PC switch VCO Integrated chip PC chip Fig. 2: Flip‐chip bonded VCO Frequency (GHz) OFF state ON state 7 (b) 12 8 Frequency (GHz) to cross‐coupled NFETs VO‐ 6 5 4 3 OFF state ON state 10 8 6 4 2 0 2 0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 Band index Fig. 3: Frequency tuning of series connection VCO 30 | Center for Silicon System Implementation Research Summary Band index Fig. 4: Frequency tuning of coupling controlled VCO