YSD 11.00
- ‫מבוא לתהליכי מזעור‬
‫טכנולוגיות ייצור מערכות מיקרו וננו‬
Prof. Yosi Shacham-Diamand
Department of Physical Electronics
Tel-Aviv University, Ramat-Aviv, 69978
yosish@eng.tau.ac.il
Talk to be found at www.eng.tau.ac.il\~yosish
Delivered by Yoram Shapira
Introduction to Nano bio technologies, TAU 30 Oct. 2001
YSD 11.00
Micro and Nano technologies - status
 Micro technologies
 1/1,000,000 of a meter
 Devices dimensions
today in the
Microelectronics industry
~0.18 mm
 The dimensions will
reach 0.1 mm in 2010
 ~1000 million devices on
a chip
 Nano technologies
 1/1,000,000,000 of a
meter
 1000 Billion devices
on a chip
 Atomic scale devices
 Not in
production……... yet.
YSD 11.00
Materials Characterization
107 1010
30T 160G 6nm
2n
20n
5
10
108
200n
103
101
106
550 20M 0.18mm 4nm
4
10
10
-1
-3
2
T/Die
mips
10 10
2µ
Design Rule [m]
109 1012
20µ
0.03 3K 10mm 200nm
1970 1980 1990 2000 2010 2020 2030
Year
Year
Courtesy Yoram Shapira, TAU
YSD 11.00
Top-down evolution of Micro-System Technologies
Semiconductor microelectronics, (1960 -),
180B$ (@2000), 17% CAGR
Micro-ElectroMechanical
Systems
(1985 - )
mElectro-Opto
Mechanical
Systems
(1980 - )
m-Biom-Chem
(1995 - )
Micro-System-Technology (MST) - System on a chip
- Integrated electronics, MEMS, mBio, mChemistry
& mElectro-optics
MEMS Market and Industry Studies
YSD 11.00
Projected Growth of Worldwide MEMS Market
14
Singapore
Australia
Taiwan
12
Universities/Federal
Labs
Switzerland
Companies
10
Sales ($B)
China
Korea
8
Scandinavia
6
UK
France
4
USA
2
Germany
Japan
0
1993
1994
1995
1996
1997
Year
Not
1998
1999
0
2000
100
200
300
Number of Organizations
SPC Study
SPC and ATIP
Studies
dominated by traditional defense contractors
In FY97 there were 95 U.S. companies active in MEMS
In FY97 15 U.S. companies represented 90% of the market
In FY98 U.S. MEMS program supported 50 small businesses
MEMS Market and Industry Studies
Source: Research & Development (July 1998)
YSD 11.00
There are two ways to build
a house…...
Topdown
Bottom
-up
YSD 11.00
YSD 11.00
There are two ways to
make tools...
Topdown
Bottom
-up
Towards Nanotechnology: merging of
science & technology disciplines
YSD 11.00
Source: Rohrer, 1995
MACRO
mm
solid -state
technology;
miniaturization
MICRO
um
chemistry;
increasing complexity
NANO
macromolecules;
biology
nm
1940
2020
1960
1980
2000
15
YSD 11.00
YSD 11.00
Micro-technology - Similar to painting &
carving - just on a much smaller scale
Add layers of paint or other matter remove excess matter
YSD 11.00
Structure of microchips
Interconnect network - 6-7 layers of metallization
Active device layer ( 1-2 mm)
Silicon substrate (600-800 mm)
Chip vertical cross section
YSD 11.00
‫מתכת‬
‫מבודד‬
‫מתכת‬
‫אינטל‬
2000
‫סיליקון‬
YSD 11.00
Multi-level metallization
YSD 11.00
Top down approach
 Develop micron scale disciplines:
Mechanical, biological, chemical
and integrate them on a chip with
microelectronics
 Build “ a system on a chip”
 Keep miniaturizing it - the
evolutionary methodology
YSD 11.00
What can we put on a silicon chip ?
 MEMS - Micro Electro Mechanical
Systems
 MEOMS - Micro Electro Optical
Mechanical Systems
 Micro-biological systems
 Micro-Chemistry, and
 Microelectronics…..
YSD 11.00
Nanotechnology on Si: MEMS, pollen and red blood
cells
a grain of pollen
Drive gear
chain and
linkages
coagulated
red blood
cells
YSD 11.00
YSD 11.00
‫‪YSD 11.00‬‬
‫מה היתרון של מערכות על שבב ?‬
‫ניתן לממש מערכות בחוג סגור על שבב‪:‬‬
‫בקרה על מערכות אלקטרוניות‪ ,‬חומניות‪,‬‬
‫•‬
‫נוזלים‪ ,‬מגנטים‪ ,‬אופטיות וזרימת‬
‫מכניות‪ ,‬עם‬
‫מסה‬
‫•‬
‫שימוש בטכנולוגיות‬
‫‪MEMS, MEOMS, m-BIO, m-CHEMISTRY‬‬
‫•‬
‫מערכות מיקרוסקופיות יכולות ליצור אפקטים‬
‫‪YSD 11.00‬‬
‫טכנולוגיות מערכות ממוזערות (טכמ”מ)‬
‫)‪Micro Systems Technologies (MST‬‬
‫‪ ‬מהן מערכות ממוזערות ?‬
‫– מערכות עם התקנים אלקטרונים‪ ,‬מכניים‪ ,‬כימיים‬
‫וביולוגיים בממדים קטנים‪.‬‬
‫‪ ‬מה מאפיין מערכות אלו ?‬
‫– מערכת על שבב (‪ )System on a chip-SOC‬כוללת‬
‫מספר תת‪-‬מערכות ומשלבת מספר פעולות‪ .‬למשל‬
‫ניתן לשלב חישה‪ ,‬חישוב‪ ,‬הפעלה ( ‪,)ACTUATION‬‬
‫תקשורת‪ ,‬ובקרה על אותו שבב‪.‬‬
‫‪ ‬מערכות ממוזערות יכולות לחוש‪ ,‬לחשב ולפעול‬
‫באופן שישנה את תפישתנו לגבי יכולתנו לקלוט‬
‫‪YSD 11.00‬‬
‫מדוע לשלב מערכות על אותו שבב‬
‫מהירות‪ ,‬הורדת הספק (הגדלת זמן‬
‫‪ .1‬שיפור ביצועים ‪ -‬הגדלת ?‬
‫שימוש)‬
‫‪ .2‬הקטנת נפח‪ ,‬שטח ‪ -‬יותר ניידות‪ ,‬גישה ונוחות‪.‬‬
‫‪ .3‬הקטנת מחיר ‪ -‬חסכון בזיווד ואריזת מספר רכיבים ביחד‪.‬‬
‫‪ .4‬הגדלת אמינות ‪ -‬פחות חיבורים‪ ,‬נפח קטן יותר‬
‫‪ .5‬קלות תכנון ‪ -‬יצירת מערכים גדולים עם אותם תאי‪-‬יחידה‬
‫‪ .6‬הקטנת פרמטרים פרזיטיים ‪ -‬קיבוליות‪ ,‬השראות‪.‬‬
‫‪ .7‬חסכון בנפח מגיבים בתהליכים כימים‬
‫‪YSD 11.00‬‬
‫איך מייצרים מערכות ממוזערות ?‬
‫‪ ‬המערכות מיוצרות על בסיס טכנולוגיות‬
‫מיקרואלקטרוניקה קיימות לייצור המוני של מעגלים‬
‫משולבים (‪)IC‬‬
‫‪ ‬המערכות נמצאות על פני השטח של מצעי מוליכים‬
‫למחצה‪ ,‬זכוכית‪ ,‬חומרים אורגנים או בנפח שלהם‪.‬‬
‫‪ ‬ייצור הרכיבים נעשה בעזרת תהליכים כימיים או‬
‫פיזיקליים‪:‬‬
‫– הוספת שכבות או אלמנטים בודדים (תאים‪,‬‬
‫מולקולות‪)..‬‬
‫– הורדת שכבות ‪ -‬איכול חומר‬
MICROMACHINING - ‫עיבוד חומר‬-‫מיקרו‬
YSD 11.00
Single crystal Bulk Micro-machining
Wafer Surface
Cavity
Cantilevers
Nozzle
Bridge
Trench
Membrane
MICROMACHINING - ‫עיבוד חומר‬-‫מיקרו‬
YSD 11.00
Non-crystalline Bulk Micromachining
surface
Cavity
Cantilevers
Bridge
Nozzle
Trench
Membrane
‫עיבוד מכני של שכבות דקות על‬
‫‪Surface Micromachining‬‬
‫שבב‬
‫‪YSD 11.00‬‬
‫טכנולוגיות ייצור רכיבים מכנים‬
LIGA*,
Irradiation
YSD 11.00
Deep UV
Mold Insert
Synchrotron
Absorber
structure
Resist
Mask
membrane
Mold cavity
Substrate
Mold Filling
Development
Resist
structure
Plastic
mold
material
Mold Separation
Electroforming
Plastic
structure
Metal
Substrate
Source: IMM (Mainz Institute for Microtechnology)
*Lithographie,
Galvanoformung, Abformung
Wafer-to-Wafer Bonding
YSD 11.00
Mass wafer
Create etch stops and gap in back
Device wafer
Mass wafer
Fuse silicon
Sensing
elements and
interconnections
Process top and etch mass
Built-in
overacceleration
stops
Pyrex
Etch beam and bond Pyrex
Air gap for
squeeze film
damping
YSD 11.00
MEMS - Micro-Electro-Mechanical-Systems
BUILDING THE MACHINE TOOL FOR THE MICROWORLD
‫ מבוא‬- ‫תהליכי ייצור במיקרואלקטרוניקה‬
Thicker films
deeper etches
fewer steps
PROBE
TESTING
Removal of underlying
materials to release
mechanical structures
Multiple Processing Cycles
DEPOSITION
OF
MATERIAL
SECTIONING
Special probing, sectioning and
handling procedures to protect
released parts
PATTERN
TRANSFER
INDIVIDUAL
DIE
YSD 11.00
REMOVAL
OF
MATERIAL
ASSEMBLY
INTO PACKAGE
PACKAGE
SEAL
Encapsulate some parts
of device but expose others
FINAL
TEST
Test more than just
electrical functions
‫‪YSD 11.00‬‬
‫דוגמה א’ ‪ -‬מערכת קשר ממוזערת‬
Wrist Communicator
YSD 11.00
Antenna
Mixer
LNA
Mixer
Baseband
Electronics
VCO
VCO
Transistor
Electronics
RF Filter
(ceramic)
Receiver
Block
Diagram
Xstal
Osc.
IF Filter
(Xstal)
IF Filter
(SAW)
0
Electrode
Micromechanical
Filter
Transmission [dB]
LNA
-10
-20
-30
-40
-50
-60
Coupling
Spring
358 359 360 361
Resonators
Anc
362
Frequency [kHz]
MEMS
Single-Chip
Version
Board-Level Implementation
Off-chip high-Q mechanical components present bottlenecks to miniaturization
replace them
with mmechanical versions
Univ. of Michigan
MEMS for Signal Processing
Wrist Communicator
:‫אתגרים טכנולוגים‬
YSD 11.00
,‫ מעגלים לברירת תדרים‬,‫אנטנה‬
•
‫ הספק‬,‫ משקל‬,‫גודל‬
•
:‫פתרון בטכמ”מ‬
,‫החלף אלקטרוניקה ברכיבים מכנים למימוש מסננים‬
)DEMODULATORS( ‫ מאפננים וממצי אפנון‬,‫מתנדים‬
Highlights of the Rockwell
MEMS Tunable Capacitor
Single Crystal Silicon
Superior Mechanical Properties
High Aspect Ratio (20 to 1)
Higher Linearity
Large Tuning Ratio (> 6.5 to 1)
SEM micrograph showing the high aspect ratio feature of the MEM tunable cap.
Wrist Communicator
YSD 11.00
Sixth-Order Bandpass Filter in MEMS Technology
(200 x 700 mm)
Coupling
Springs
Balanced
Electrodes
Balanced
Electrodes
Resonators
Univ. of Michigan
MEMS for Signal Processing
‫‪YSD 11.00‬‬
‫דוגמה ב’ ‪ -‬חיישן משולב‬
Micro Airborne Sensor/Communicator
MEMS
Microphone
YSD 11.00
MEMS
Actuator
MEMS
Uncooled
IR Sensor
MEMS
Structural
Material
MEMS
Optical
Communicator
MEMS Mass Data
Storage
Inertial
Measurement
Unit
Whip
Antenna
MEMS-Based Power
Generation & Energy
Conversion
‫ מיקרומחטים‬- ’‫דוגמה ג‬
YSD 11.00
40 mm
Lancet width = 170 mm
Needle width = 150 mm
‫‪YSD 11.00‬‬
‫ננוטכנולוגיות ‪ -‬השלב הבא‪...‬‬
‫•שילוב בין טכנולוגיות מיקרו לננו ‪ -‬אפשרי כיום‬
‫•טכנולוגיות ננו מתקדמות ‪ -‬עדיין לא קיימות‬
‫•טכנולוגיות ננו מתקדמות ‪ -‬עדיין יצטרכו‬
‫(‪ )INTERFACE‬לעולם החיצון‪,‬‬
‫ממשק‬
‫לאלקטרוניקה‪ ,‬אופטיקה ‪ ,‬מכניקה‪ .‬קרוב לוודאי‬
‫שהממשק יהיה בטכנולוגיות מזעור הדומות‬
‫לטכנולוגיות מיקרואלקטרוניקה ומיקרו‪-‬‬
‫אלקטרומכניקה כיום‪.‬‬
1989: Atomic manipulation by STM
IBM logo – 35 Xenon atoms
YSD 11.00
The enabling tool – STM (Scanning
Tunneling Microscope)
Can be used not only to image a
surface with atomic resolution, but
also to manipulate individual atoms
and molecules.
IBM Almaden Research Center, San Jose
What is Nanotechnology ?
YSD 11.00
 The classic talk, “There's Plenty of Room at the
Bottom” was given by Richard Feynman on December
29th 1959 at the annual meeting of the American
Physical Society at the California Institute of
Technology (Caltech)
 “Why cannot we write the entire 24 volumes of the
Encyclopedia Britannica on the head of a pin?”
 “Biology is not simply writing information; it is doing
something about it. A biological system can be
exceedingly small.”
 “I want to build a billion tiny factories, models of
each other, which are manufacturing
simultaneously,drilling holes, stamping parts, and so
on.”
What is Nanotechnology ?
YSD 11.00
 With the tools of the nanotechnology trade
becoming better defined, the ability to create new
materials and devices by placing every atom and
molecule in the right place is moving closer to reality.
Ralph C. Merckle, Xerox
 Nanotechnology: An art and science that has evolved
to arrange conditions so that atoms spontaneously
assemble into particular molecular structures.
 New terms such as “self assembly”, “molecular
machines”, represent a new “bottom up” approach:
building structures from atoms and molecules.
? ‫כיצד לממש מבני ננו‬
YSD 11.00
 Molecular engineering: An approach to the
development of general capabilities for molecular
manipulation
K. Eric Drexler,
Proc. Natl. Acad. Sci. USA Vol. 78, No. 9
pp. 5275-5278, September 1981 Chemistry section

Biochemical systems exhibit a "microtechnology"
quite different from ours: they are not built down
from the macroscopic level but up from the atomic.

Biochemical microtechnology provides a beachhead
at the molecular level from which to develop new
molecular systems by providing a variety of "tools”
and "devices" to use and to copy.
‫דוגמה לפוטנציאל העתידי של טכנולגיות ננו‬
YSD 11.00
Table 1. Comparison of macroscopic and microscopic components
Technology
Function
Molecular example(s)
Struts, beams,
Transmit force, hold
Microtubules, cellulose, mineral
casings
positions
structures
Cables
Transmit tension
Collagen
Fasteners, glue
Connect parts
Intermolecular forces
Solenoids,
Conformation-changing proteins,
Move things
actuators
actin/myosin
Motors
Turn shafts
Flagellar motor
Drive shafts
Transmit torque
Bacterial flagella
Bearings
Support moving parts
Sigma bonds
Containers
Hold fluids
Vesicles
Pipes
Carry fluids
Various tubular structures
Pumps
Move fluids
Flagella, membrane proteins
RNA moved by fixed ribosome (partial
Conveyor belts
Move components
analog)
Clamps
Hold workpieces
Enzymatic binding sites
Tools
Modify workpieces
Metallic complexes, functional groups
Production lines
Construct devices
Enzyme systems, ribosomes
Numerical control
Store and read programs Genetic system
systems
What is Nanotechnology ?
YSD 11.00
 Molecular technology has obvious
application to the storage and
processing of information
 Molecular devices can interact
directly with the ultimate molecular
components of the cell and thus
serve as probes in studying
processes within the cell
“There's Plenty of Room at the Bottom”
YSD 11.00
Richard Feynman 29/12/1959
“I am not afraid to consider the final question as to whether,
ultimately---in the great future---we can arrange the atoms the
way we want; the very atoms, all the way down!
The principles of physics do not speak against the possibility of
maneuvering things atom by atom.
…a development which I think cannot be avoided.”
 Development of the ability to design
protein molecules will make possible the
construction of molecular machines.
These machines can build secondgeneration machines able to perform
extremely general synthesis of threedimensional molecular structures, thus
permitting construction of devices and
materials to complex atomic
specifications. This capability has
implications for technology in general and
in particular for computation and
characterization, manipulation, and repair
of biological materials
YSD 11.00
What is Nanotechnology ?
YSD 11.00
•Wet nanotechnology:
Similar to living cell technology:
assembly of carbon based molecules in a liquid
environment
•Dry nanotechnology:
Technology of organic and inorganic molecules
in air or vacuum environment
YSD 11.00
Nanomachines
YSD 11.00
Large scale industrial nanotechnology
YSD 11.00
 Develop new techniques to produce food,
medicine, etc.
 Build machines, materials, and devices
with the ultimate finesse that life has
always used: atom by atom, on the same
nanometer scale as the machinery in living
cells
 Energy production.
 Replace / complement microelectronics as
leading enabling technology
YSD 11.00
Nano self-replicated machines