National Nanofabrication Centre
Centre for Nano Science and Engineering
IISc, Bangalore, India
Cleanroom Admin Committee Meeting
Prabhakara Rao
November 3, 2015
Reports
September month charges
o 122 Users - Total charges at a high of 29.7 L
o 29 NON-MITO users (Paid Users) - Total charges of 4 L
o 93 MITO084 users - Total charges of 25.7 L
o 64 users from CeNSE - Total charges of 21.45 L
•
CeNSE users charged 72% of total value
Reports
Data
April-15
May-15
June-15
July-15
Aug-15
Sep-15
Total Users
97
110
120
103
113
122
MITO084 users
79
91
95
80
87
93
Non-MITO Users
18
19
25
23
26
29
Total users
from CeNSE
55
63
60
52
61
64
Total charges
for MITO084
18.75 L
15.5 L
22.25 L
22.47 L
22.18 L
25.7 L
Total charges
for Paid users
2.3 L
1.86 L
2.5 L
2.95 L
3.54 L
4L
April 2015 - Nov 2015 - INUP project Status
Summary
completed
23
ongoing
4
pending
27
INUP Project Status from April-Nov,2015
Sl.No:
Participant Name
University
1
Sudhakumari
ISM Dhanbad
2
Lintu rajan
NIT jaipur
3
Mahaveer
Jain University
4
Papanasam
IIIT kancheepuram
5
Anjali Choudary
BHU
6
Manjunath
BMS college
7
Ummer
IIT Kanpur
8
Robin khosla
IIT Mandi
9
Arun Mehta
KSR Group of Institutions ,Namakal
10
11
12
Vidya Rajan
Shanker Narayanan
Sumanth
Calicut University
Anna University
Bangalore University
13
Jaya
calicut University
14
Priyanka kakoty
Tezpur
15
16
Anil kumar Pal
Sunitha
Pondicherry university
Victoria college PKD
17
Sivasundari
Annamalai university
18
joshitha
SSN College TN
19
Dinesh Kumar
Jain University
20
Hema Rao
IIT bhubaneshwar
21
Nimith K
NIT surathkal
22
Tarun Sharma
Thapar University punjab
23
24
25
Manu krishnan
parmeshwari
Anita Murugakar
IITM
Mangalore University
ECE , IISC
26
Satyajit Sahoo
VIT chennai
27
Jyotirmoy Dutta
Shiv Nadar University, UP
Project Title
Fabrication of gold nanoslit binary grating
for developing ultrasensitive label free
plasmonic biosensor
Design and characterization of
nanostructured ZnO thin films based
heterojunction/schottky diode for gas
sensing application
Microchannel //master preparation
Fabrication and characterization of SiC
MIS capacitors with different dielectrics
Fabrication of Microfluidic based
Neuromuscular junctions on a chip
Microwave assisted synthesis of metal
oxide nanomaterials and study of opto
electronic properties
Silicon photonic crystal
Alternate High K dielectric for
semiconductor memories
Natural Rutile Sand as a sustainable source
of nano Titania for Dye Sensitized Solar
Cell Applications
Studies on functionalized graphene
AlGaN Based biosensors
Colloidal quantum dot solar cell
Fabrication and characterization of
transparent p-n heterojunction diodes
Fabrication of MOS gate sensor for tea and
other food aroma sensing
ZnO based hybrid nanostructures
P type oxide semiconductors
Pulse width modulation technique based
MEMS pressure sensor
Bistable switch
Preparation and Characterization of the
(Pt-Ti)/TiO2/Silicon MOS capacitor for
sensor applications.
Fabrication of MOS using SiC substrate
Fabrication and Characterization of
Polymer Light Emitting Diodes (PLEDs)
Fabrication of Nano-channel Hybrid
Plasmonic Waveguide for Nano-scale
Optical Confinement and Long range
Propagation
Fabrication of optical MEMS device
Characterisation
Microwave cavity resonators
TiO2 based memristor (ReRAM) crossbar
solid state memory
Design and Development of Thin Film
Bulk Acoustic Wave Resonator Filter for
RF applications
Status
completed
completed
completed
completed
completed
completed
completed
completed
characterisation to be scheduled
completed
completed
completed
completed
completed
ongoing
First stage completed
First stage completed
completed
completed
completed
First stage completed
completed
completed
completed
ongoing
Ongoing
Ongoing
Internal Users
Sl.no
Professor
Project Code
Amount
1.
Prof. S. Raghavan
CDAC0018/ Consumables
21,63,753.00
2.
Prof. S. Raghavan
MITO-098
5,70,000.00
3.
Prof.Rudra Pratap
NPMA-034
9,00,000.00
4.
Prof.Rudra Pratap
NPMA-034
84,304.00
5.
Prof.Navakanta Bhat
BIARC
1,50,000.00
6.
Prof.Navakanta Bhat
NPMA-035
6,12,365.00
7.
Prof.Navakanta Bhat
NPMA-035
51,000.00
Total Amount – 45,31,422
Comparison with other cleanrooms
Description
SITAR
SCL
CeNSE
Remarks
Fire alarm
system
Addressable(Notifie Addressable(Morley Conventiona Need to check all detectors in a
r)
)
l
Zone.
Panic button
Installed in each
bay
FM200
Installed
Water sprinkler
Not
available
In Emergency user need to call BMS.
Not installed
Not
installed
Not harmful to the equipment.
Not installed
Installed
Installed
Equipment may damage. Need to
install in A/C ducts & utility
cleanroom tunnel also.
VESDA
Not installed
Not installed
Installed
Aspirators locations need to be
change.
Liquid leak
detector
Not installed
Installed
Not
installed
Leakage (other than PCW,DI) only
can find when go for an inspection.
Hydrant system
Installed
Installed
Installed,
but
functional
System not working, pump house
under Biological Dept.
Gas cabinMagnehelic
gauge
Installed
Installed
Not
installed
Exhaust- rate of air flow can’t see.
Fire and safety need to improve

Emergency Response team (ERT) to be formed.

Addressable panel to be installed in cleanroom with minimum 6 detectors in
each bay and return air path(5-8 Lakhs).

Aspirator system to be installed at return air path before mixing with the fresh
air 11-15 Lakhs).(present Vesda system 4 nos can utilize)

Corridor area, Utility building, – FAS to be installed. (Present conventional
panel for cleanroom can utilize.)

Panic button to be installed at each bay.(50,000 with in-house team)

Fire alarm to be integrated with Access control system.(In-house team)

CCTV to be installed at plenum area. (1Lakh)

CeNSE building Fire Alarm system to be reprogrammed with new
locations.(75,000)

Hydrant system to be maintained with pressurized water. (Pump house under
Biological dept., Nozzles and hoses to be placed in each fire Hydrant box)
ERT - Members
Cleanroom- BMS
Utility- Thiyagu, Shift Electrician
Faculty
NNfC- Raghu, Smitha,
Adithi, Suresh
MNCF- Prakash, Sterin
GF- Narahari, Arun
FF- Marsha, Gajendra
SF- Reshma, Jithin
TF- Manjunath,
Pandian
Cleanroom Vesda & FAS Sensor location
Plenum
FFU
Cleanroom
From AHUs
Air flow pattern
Aspirators (VESDA)
FAS Sensor
Below raise
floor
Dry Cooling coil
Annual maintenance schedule
Dec-15
Sl
Team Leader
Remarks
Effected areas
5
6
7
8 9 10 11
12
13 CeNSE
Vendor
1 Wet Scrubber
Gajendra
Nanoclean
Cleaning of -poll rings, nozzles, Tank ,leak arresting, Pump
installation.
2 General & Dry exhaust system
Gajendra
Nanoclean
General servicing.
3 AHU-1, 2 & 3
Gajendra
Nanoclean
Over all servcing
4 Gas system
Gajendra
UHP
Over all servcing
5 Chilled water pumps
Gajendra
Nanoclean
General servicing, Water seal replacement.
6 Chiller 1,2&3
Gajendra
PJP
General servicing.
7 PCW & DC system
Gajendra
Nanoclean
Draining & refilling of water & general servicing
8 Process vacuum, HV
Gajendra
Nanoclean
General servicing.
9 Clean room UPS & EB panel
Tyaganand
Nanoclean
Cleaning of contactors, tightening of contacts,cables etc.
10 ETP
Gajendra
Nanoclean
General servicing,
11 RO
Gajendra
Nanoclean
General servicing,
12 Fire protection system
Gajendra
Nanoclean
General servicing,
13 DI
Gajendra
Nanoclean
General servicing,
14 LT & UPS panels Utility
Thiyaganand
Nanoclean
Cleaning of contactors, tightening of contacts,cables etc.
15 Electrical panels- CeNSE
Thiyaganand
Nanoclean
Cleaning of contactors, tightening of contacts,cables etc.
16
Thiyaganand
NK Diesel
General servicing,Cleaning of contactors, tightening of
contacts,cables etc.
DGs
17 Final inspection and Cleaning
Major Spare parts requirement: VFD for PCW- 3 Lakhs, General exhaust dampers 2nos – 1.5 Lakhs, DCP, AHU Valve
actuators- 2 Lakhs.
Staff Concerns
• Wage Revision
• Medical Insurance
Lithography Bay October, 2015
Equipments:
•Laser writer, MicroTech
•Laser writer, Heidelberg
•EVG Mask aligner
•MJB4 mask aligner
•EVG Bonder
•E‐Line system
•Pioneer E‐beam system
Gopal
Litho Equipments Utilization Chart – Oct 2015, E- beam
systems
600
500
Total hrs
400
300
200
100
0
Raith eLine off
hrs
Total
180
Unavailable
0
Downtime
0
Not Used
1
Used
179
Raith eLine non
off hrs
540
180
0
17
343
Raith
Pioneer
off hrs
180
0
0
1
179
Raith
Pioneer
non off hrs
540
180
0
0
360
Litho Equipments Utilization Chart-October- 2015
600
500
Total hrs
400
300
200
100
0
Laser
writer
(OH)
Total
180
Unavailable
0
Downtime
0
Not Used
150
Used
30
Laser
UPG501 UPG501 EVG620 EVG620 EVG501 EVG501
writer
(OH)
(NOH)
(OH)
(NOH)
(OH)
(NOH)
(NOH)
540
180
540
180
540
180
540
180
0
180
0
180
0
180
0
0
0
0
0
0
0
346
16
350
50
280
159
352
14
164
10
130
80
21
8
MJB4
(OH)
MJB4
(NOH)
180
15
0
125
40
540
180
0
348
12
Maintenance Issues
 All Litho tools are up, no down time during Sept.
MJB4 needs AMC
Raith PIONNER Training Database
Sl No Requested date Batch
Staring date End Date
Name
Department
Status
1
5/6/2015
1
6/29/2015
7/22/2015
Tathagata Paul
Physics
Done
2
5/12/2015
1
6/29/2015
7/22/2015
Banani Biswas
CeNSE
Done
3
5/14/2015
1
6/29/2015
7/22/2015
sukanya pal
physics, IISc
Done
4
5/14/2015
1
6/29/2015
7/22/2015
Awanish pandey
CeNSE
Done
5
5/14/2015
2
7/27/2015
8/12/2015
Vadivukkarasi J
CeNSE
Done
6
5/20/2015
2
7/27/2015
8/12/2015
Chandrika T N
ECE
Did Not
come
7
6/3/2015
2
7/27/2015
8/12/2015
Basant Chitara
MRC
Done
8
6/24/2015
2
7/27/2015
8/12/2015 Bhupendra Kumar Sharma
CeNSE
Done
9
6/24/2015
3
8/17/2015
09-09-2015
Physics
Done
10
6/24/2015
3
8/17/2015
09-09-2015 Pranav Santosh Mundada
UG
programme
Done
11
7/17/2015
3
8/17/2015
09-09-2015 Abraham Mathew Koshy
PHYSICS
Done
12
8/14/2015
4
10/5/2015
Going on
Samprita Nandi
UG (Physics)
done
13
8-25-2015
4
10/5/2015
Going on
Aditya Hambarde
CeNSE
done
Irfan Ansari
Raith e-LiNE Training Database ( July-Aug. 2015)
Sl No
1
2
Requested date
4/7/2015
4/15/2015
Batch
1
1
Staring date
6/9/2015
6/9/2015
End Date
7/6/2015
7/6/2015
Name
Siddharth Nambiar
Vadivukkarasi J
Department
CeNSE
CeNSE
3
4/17/2015
1
6/9/2015
7/6/2015
banani biswas
CeNSE
4
4/26/2015
1
6/9/2015
7/6/2015
CeNSE
5
6
7
4/28/2015
4/29/2015
5/3/2015
2
2
2
7/9/2015
7/9/2015
7/9/2015
8/3/2015
8/3/2015
8/3/2015
Awanish pandey
Venkateshwara Rao
Kolli
Avijit Chatterjee
Shubhadeep B
ECE,IISC
CeNSE
CeNSE
8
4/29/2015
2
7/9/2015
8/3/2015
Charanjeet Malhi
IISc
9
10
11
12
5/3/2015
5/18/2015
5/20/2015
5/24/2015
2
3
3
3
7/9/2015
8/6/2015
8/6/2015
8/6/2015
8/3/2015
8/27/2015
8/27/2015
8/27/2015
Rameshnaidu jenjeti
Sandip Mondal
manas ranjan sahu
Arup Paul
IPC
Physics
physics
physics
13
6/12/2015
3
8/6/2015
8/27/2015
Swapnil
CeNSE
14
6/15/2015
3
8/6/2015
8/27/2015
Sumit kumar
CeNSE
15
16
17
18
6/16/2015
6/16/2015
6/20/2015
7/1/2015
3
4
4
4
8/6/2015
9/1/2015
9/1/2015
9/1/2015
8/27/2015
9/22/2015
9/22/2015
9/22/2015
Jafar Hasan
Dharitri Narjaree
Divya Somvanshi
santosh chiniwar
19
7/9/2015
4
9/1/2015
9/22/2015
Soumyadeep Dutta
Materials Engineering
cense
ECE
Physics
Indian Institute of
Science
20
21
22
23
24
25
8/4/2015
8/5/2015
8/19/2015
8/24/2015
9/15/2015
9/21/2015
4
5
5
5
5
5
9/1/2015
24-9-2015
24-9-2016
24-9-2017
24-9-2018
24-9-2019
9/22/2015
Going on
Going on
Going on
Going on
Going on
Chandrika T N
Vijay
vaibhav rana
Chandan Kumar
Abinash Kumar
Arjun Shetty
ECE
CeNSE
CeNSE
Physics
ECE
Status
Done
Done
Did not
Come
Did not
Come
Done
Done
Done
Did not
Come
Did not
Come
Skipped
Done
Done
Did not
Come
Did not
Come
Did not
Come
Skipped
Done
Done
Did not
Come
Did not
Come
Done
Done
Going on
Going on
Going on
EVG Mask aligner training statistics (July-Aug.2015)
Full Name
Department
Contact email address
Level of Training
Pramod Ravindra
CeNSE
pramod.rvndr@gmail.com
Not attended
B K Sharma
Physics
bhupi11@gmail.com
Not attended
Mrityunjay
CeNSE
mrityunjay@cense.iisc.ernet.in,
Level 1
Nayana Ramesh
CeNSE
nayana.r@cense.iisc.ernet.in,
Not attended
Thulasi
IAP
ramantfb@iap.iisc.ernet.in,
Prabhat
CeNSE
prabhat@cense.iisc.ernet.in,
Level 1
Rizwana parween
CeNSE
rizwanap@gmail.com,
Level 1
Harshitha
CeNSE
skharshitha@cense.iisc.ernet.in,
Level 1
Dhananjay
CeNSE
dhananjay@cense.iisc.ernet.in
Yet to be trained
Ankit soni
CEDT
sankit@cedt.iisc.ernet.in
Level 1
Dharithri
CeNSE
dhar.9.narj@gmail.com
Level 1
Nithin
CeNSE
nithinb@cense.iisc.ernet.in
Level 2
Avijit
CeNSE
avijitc@cense.iisc.ernet.in
Yet to be trained
Puneet sharma
CeNSE
sharma_puneet@live.in
Level 2
Adithi raman
Mechanical
araman@mecheng.iisc.ernet.in
Level 1
Sreenath
Mechanical
bsreenat@mecheng.iisc.ernet.in
Level 1
Vikram
Mechanical
vikramg@mecheng.iisc.ernet.in
Level 1
Manish sachdeva
Mechanical
sachdeva@mecheng.iisc.ernet.in
Level 1
Divya
ECE
dsomvanshi@ece.iisc.ernet.in
Not attended
Bhavin
Mechanical
bhavin@mecheng.iisc.ernet.in
Level 1
Meera
CeNSE
meera.v.garud@gmail.com
Level 1
Shreesha prabhu
CeNSE
prabhu.shreesha@gmail.com
Level 1
Semonti
Physics
semonti@physics.iisc.ernet.in,
Not attended
Jatin
Chemical
jatin@nanobiophotonics.org
Level 1
Rituparna
CeNSE
ritu@cense.iisc.ernet.in
Level 2
Mustaque ali
MRC
mustaqueali@mrc.iisc.ernet.in
Yet to be trained
Praneet
CeNSE
praneet@cense.iisc.ernet.in
Yet to be trained
Banani
CeNSE
biswas.banani18@gmail.com
Level 1
Hailu Dessalegn Ayalew
ECE
hailudessalegn@yahoo.com
Not attended
Sujoy
Chemistry
sujoy@ipc.iisc.ernet.in
Not attended
kondaiah
Physics
paruchurikondaiah@gmail.com
Not attended
Atul
Physics
atul@physics.iisc.ernet.in
Not attended
Basant
Physics
b.aawargi@gmail.com
Not attended
Bhuvana
CeNSE
bhuvana@cense.iisc.ernet.in
Not attended
Abhishek
CeNSE
abhishekka196@gmail.com
Not attended
Karthik
CeNSE
karthik@cense.iisc.ernet.in
Yet to be trained
Vinit
Mechanical
vkm@mecheng.iisc.ernet.in
Yet to be trained
Shashank
CeNSE
shashank@cense.iisc.ernet.in
Yet to be trained
Total: 38 users
Level 1
Single Layer Exposure
Level 2
Top Side Alignment
Level 3
Bottom Side Alignment
MJB4 Mask aligner training statistics (July-Aug.2015)
Si No
User Name
1 Preethi Deshpande
2 Abishek
3 Shreesha Phrabu
4 Sonthosh kumar
5 mrityunjay Shukla
6 Nayana Ramesh
7 Vinit Kumar
Department
CeNSE
CeNSE
CeNSE
CeNSE
CeNSE
CeNSE
MechEngg
Level 1
Level 2
Training
Training
Request Date Completion Date
8/9/2015
9/1/2015
8/8/2015
9/3/2015
8/11/2015
8/24/2015
8/11/2015
8/5/2015
9/5/2015
Going on
9/7/2015
Going on
Single Layer
Exposure
Top Side Alignment
Level of training
Level 1
Level 1
Level 2
Not attended
Not attended
Furnaces and wet benches
Savitha P
Total hrs
Equipment Utilization Chart (October)
500
450
400
350
300
250
200
150
100
50
0
BoronBoronDiff- off non
hrs offhrs
Total
Unavailable
Downtime
Not Used
Used
180 540
32 540
0
0
100 0
48
0
Dry-dry oxox- offnon off
hrs hrs
M MAAnnealTemp
- Temp
non off
off hrs hrs
pyro pyroox- non
office office
hrs hrs
CWB2CWB2non
office
office
hrs
hrs
180 540
32 540
0
0
112 0
36
0
180 540
32
0
0
0
126 525
22 15
180 540
32 540
0
0
32
0
116 0
180 540
10
0
0
0
45 507
125 33
LPCVD
LPCVD
SiN - SiNoffice non
hrs office
hrs
180 540
32 540
0
0
93
0
55
0
Dry Etch and Thin films
&
Process Integration
Nov 3 ,2015
Sunanda Babu
Equipment Utilization
DRIE:SMC chiller was down due to refrigerant leak, leak fixed.
RIE-Cl and RIE-F: AMC for both tools completed.
E-beam: Planetary rotation ball-bearing faulty, replaced and resolved.
Equipment Utilization
INUP External Project Status(Oct’15)
Project
PI Owner
Start Date
ECD
Mask
Layers
Status
MSRIT RF MEMS
switch(2014-2015 (Laxmi)
Owner: Siva
Bkup:Sabiha
Oct’14
May’15
4
Closed
MTRDC TWT
SWS(Anurag)
Owner: Siva
Bkup:Sabiha
Jun’15
May’16
2
3rd mask written wit both structures,
superimposed. With e-beam Al2O3 as hard
mask, DRIE of straight channel(70um deep)
and superimposed serpentine channel(375um
deep) processing completed. Results look
promising. Go ahead with gold coating, and
then wafer-wafer bonding.
RCI Accelerometer(Mandal)
Owner: Siva
Bkup:Sabiha
Jun ’12
Mar’12
7
7 masks done for 1st iteration. Optimize PECVD
BSG and re-try the 7um trench filling with BSG(
to achieve
Nanosniff Sensor (Sachin)
Owner:
Sabiha
Bkup:Siva
Aug’12
continuo
us
5
Gold peeling resolved with new Cr target, Pt
film blanket wet etch still patchy. Pt remolded
target quality suspected. Continue 7th process
run with Ti/Pt dry etch. Pilot run looks
promising.
IITGB Micro Needles
(Bhushan)
Owner:
Sabiha
Bkup:Siva
Jul’14
continuo
us
2
4” DSP wafers available, pending customer
feedback on requirement.
INUP External Project Status(Oct’15)
Project
PI Owner
Start Date
NAL Insulator
Deposition and
Etching (Prasanta
Choudhury)
Owner: Sabiha
Bkup:Siva
Aug’12
BMSIT Gold
electrodes(
Sreedevi)
Owner: Sabiha
Bkup:Siva
Sep’15
IIT Madras
Thermal Interface
resistance
measurement of
thin films, like
Graphene on
substrates( Arvind)
Owner: Sabiha
Bkup:Siva
Sep’15
ECD
continuous
Mask
Layers
Status
NA
2 2” wfrs
processed (
Oxide/Nitride
deposition, RIE pad
etch, PR strip and
Pad resistance
measurement),Pad
resistance meets
customer
requirements,
awaiting remaining
2 samples from
NAL.
1
Feasible, Process
estimate provided.
Payment process
ongoing.
Feasible, process
estimate provided,
pending customer
feedback.
INUP External Project Status(Oct’15)
Project
PI Owner
Start Date
ECD
SNS college of Engineering
Piezoelectric cantilever for
energy harvesting( Sreeja)
Owner: Sabiha
Bkup:Siva
Sep’15
Feasibility/customer requirements discussion on
going
Asarva chips/BNMIT Blood
pressure sensor (Veena)
Owner: Siva
Bkup:Sabiha
Sep’15
Feasible, Process estimate provided
NIT Trichy Pressure
Sensor(Sujan)
Owner: Siva
Bkup:Sabiha
Sep’15
Feasible, Process estimate provided,
Mask
Layers
Status
INUP External Project Status(Oct’15)
Project
PI Owner
Start Date
ECD
Delhi University
DRIE processing(
back side Si etch)
Owner: Lava
Bkup: Aditi
Sep’15
Oct’15
Dr Anzari(IITDM)
Cantilever project
Owner: Sabiha
Bkup: Siva
Sep’15
Process estimate
provided, pending
customer feedback
Owner: Sangeeth
Bkup: Siva
Oct’15
Previous work has
been done. To
continue further
Dr Palash Basu(IIST
Trivandrum,)Graphen
e FET
Mask Layers
Status
Done, customer
requirements met.
Closed.
Thank you