Micro transductors ’08 CMOS Basics Dr.-Ing. Frank Sill Department of Electrical Engineering, Federal University of Minas Gerais, Av. Antônio Carlos 6627, CEP: 31270-010, Belo Horizonte (MG), Brazil franksill@ufmg.br http://www.cpdee.ufmg.br/~frank/ Announcement Next class: Thursday, 13. March Room 308 CCE Copyright Sill, 2008 Micro transductors ‘08, CMOS Basics 2 Optional Topics Please, choose 2 out of the following 4 topics Final date: 14th of March 1. 2. 3. 4. Future trends in VLSI design Basics of Hspice-Simulations Effects in nanometer CMOS circuits Reliability problems in current and future designs Copyright Sill, 2008 Micro transductors ‘08, CMOS Basics 3 Goals Where do we find Integrated Ciruits? History and Trends CMOS: basic ideas Logic gates Delay estimation Sizing Copyright Sill, 2008 Micro transductors ‘08, CMOS Basics 4 Where do we find chips? 100% „Computer are the workhorses of the semiconductors industry.“ Processors Memory 80% Logic Motivation Performance Flexibility Mobility Analog 60% Discretes Optoelectronics/ Sensors/Bipolar 40% 20% 0% ~ 2 % are processors Units ~ 6.5 Billion processors per year ~ 40 % of all parts are used in the PC area Copyright Sill, 2008 Micro transductors ‘08, CMOS Basics Revenue Source: WSTS ‘02 5 Scenarios Obviously tasks High performance demands Fast execution Copyright Sill, 2008 Micro transductors ‘08, CMOS Basics 6 Scenarios cont’d Hidden helper Low performance demands Copyright Sill, 2008 Micro transductors ‘08, CMOS Basics 7 History 1906 – Semiconductors used to detect radio signals 1925 – FET concept patent by J. Lilienfeld 1941 – Z3 by Konrad Zuse – first computer 1946 – ENIAC – first electronic computer 1947 – Transistor “Invented” 1958 – Integrated Circuit AT&T ignores Lilienfeld Bardeen, Brattain and Schockley, AT&T, Nobel Prize in 1956 Kilby & Noyce (died 1990) Kilby - Noble Prize in 2000 1960 - MOSFET manufactured and patented 1963 - CMOS logic invented Resistors replaced by transistors Copyright Sill, 2008 Micro transductors ‘08, CMOS Basics 8 History cont’d Zuse Z3 – First computer* (1941) First working programmable, fully automatic computing machine 2,000 Relays Clock frequency of ~5 - 10 Hz Word length of 22 bits Programmed by punched film stock Addition, Multiplication, Division, Square root * Elected at “1st International Conference on the History of Computing" in Paderborn, Germany, 1998 Copyright Sill, 2008 Micro transductors ‘08, CMOS Basics 9 History cont’d ENIAC – First electronic computer (1946) Electronic Numerical Integrator And Computer At Moore School of Electrical Engineering, University of Pennsylvania 17,468 vacuum tubes, 7,200 diodes (+ ca. 80k resistors & capacitors) 5 Million hand-soldered joints Copyright Sill, 2008 Micro transductors ‘08, CMOS Basics 10 History cont’d Vacuum Tubes in ENIAC Copyright Sill, 2008 Micro transductors ‘08, CMOS Basics 11 History cont’d (a) First transistor (1947, Bardeen & Brattain, Bell labs) (b) First integrated circuit (1958, Kilby, AT&T) Source: Weste,“CMOS VLSI design”,2003 Copyright Sill, 2008 Micro transductors ‘08, CMOS Basics 12 per integrated function Log2 of number of components Moore‘s Law Prediction by Gordon Moore in 1965 Semiconductor technology will double its effectiveness every 18 months Year Source: Moore, 1665 Copyright Sill, 2008 Micro transductors ‘08, CMOS Basics 13 Moore’s Law cont’d Source: Moore, ISSCC 2003 Copyright Sill, 2008 Micro transductors ‘08, CMOS Basics 14 Price of a transistor Trend: Cost per function Copyright Sill, 2008 Micro transductors ‘08, CMOS Basics 15 Trend: Performance 1000000 100000 Pentium® 4 proc 10000 1 TIPS 1000 MIPS 100 10 1 386 Pentium® proc 8086 0,1 0,01 1970 8080 1980 1990 2000 2010 2020 Source: Moore, ISSCC 2003 Copyright Sill, 2008 Micro transductors ‘08, CMOS Basics 16 Trend: Power Source: Moore, ISSCC 2003 Copyright Sill, 2008 Micro transductors ‘08, CMOS Basics 17 Trend: Power Density Sun’s Surface Power Density (W/cm2) 10000 Rocket Nozzle 1000 100 Nuclear Reactor Prescott Pentium® 8086 Hot Plate 10 4004 P4 8008 8085 Pentium® 386 286 486 8080 1 1970 Copyright Sill, 2008 1980 1990 Year 2000 Micro transductors ‘08, CMOS Basics 2010 Source: Moore, ISSCC 2003 18 Dimensions m 10 cm 100 nm 10 111mm cm µm µm Source: „Spektrum der Wissenschaften“ „65 nm“-Transistor Source: Intel Copyright Sill, 2008 Micro transductors ‘08, CMOS Basics 19 The CMOS Technology CMOS = Complementary Metal Oxide Semiconductor Currently most applied logic family Main advantages: Low Power (compared to other technologies) Very good scalability High Speed High packaging density Copyright Sill, 2008 Micro transductors ‘08, CMOS Basics 20 The CMOS Technique cont’d Main Idea: Combination of two complementary switches Switches are metal-oxide-semiconductor field-effect transistors (MOSFET) Realization of logic gates (AND, NAND, …) “Metal–Oxide–Semiconductor“: Physical structure of MOSFETs (metal gate electrode, oxide insulator, semiconductor material) Today: Copyright Sill, 2008 polysilicon instead of metal Micro transductors ‘08, CMOS Basics 21 What is a transistor? S D Source: Rabaey,“Digital Integrated Circuits”,1995 Copyright Sill, 2008 Micro transductors ‘08, CMOS Basics 22 PMOS and NMOS d nMOS pMOS g=0 g=1 d d OFF g ON s s s d d d g OFF ON s s s Source: Rabaey,“Digital Integrated Circuits”,1995 Copyright Sill, 2008 Micro transductors ‘08, CMOS Basics 23 NMOS-Transistor Source Gate Drain Polysilicon SiO2 G n+ n+ S p D bulk Si @NMOS: Body is (commonly) tied to ground (0 V) @PMOS: Body is (commonly) tied to VDD Source: Rabaey,“Digital Integrated Circuits”,1995 Copyright Sill, 2008 Micro transductors ‘08, CMOS Basics 24 NMOS-Transistor (2) polysilicon gate Gate-width W tox n+ L n+ SiO2 gate oxide (good insulator, eox = 3.9 p-type body tox – thickness of oxide layer Gate length Source: Rabaey,“Digital Integrated Circuits”,1995 Copyright Sill, 2008 Micro transductors ‘08, CMOS Basics 25 Cross section of NMOS and PMOS Source: Weste,“CMOS VLSI design”,2003 Copyright Sill, 2008 Micro transductors ‘08, CMOS Basics 26 Layout Mask Set Transistors and wires are defined by masks Cross-section taken along dashed line A Y GND VDD nMOS transistor pMOS transistor well tap substrate tap Copyright Sill, 2008 Micro transductors ‘08, CMOS Basics 27 I-V Curves of NMOS Drain Gate Ids Vds Vgs Source Source: Weste,“CMOS VLSI design”,2003 Copyright Sill, 2008 Micro transductors ‘08, CMOS Basics 28 Threshold Voltage Vth Transistor characteristic If: „Gate-Source“-Voltage Vgs higher than Vth Channel under Gate Current between Drain and Source If: Vgs lower than Vth No current Copyright Sill, 2008 Gate Gate Vgs < >V Vthth Drain Source Source Micro transductors ‘08, CMOS Basics Ids Drain 29 Logic Gates Task (e.g. calculation) Transfer into Logic Gates (Synthesis) Gate characteristics: Delay Power dissipation more ... Y = A+B Gates realized by transistors Transistors determine gate characteristics Copyright Sill, 2008 Micro transductors ‘08, CMOS Basics 30 Example: Half-adder How do you add the two bits A0 and B0 in binary logic? So called Half-adder: A0 B0 Result Carry Sum 0 0 00 0 0 1 0 01 0 1 0 1 01 0 1 1 1 10 1 0 A0 B0 CarryCarry HA Sum Sum Copyright Sill, 2008 In1 (A0) In2 (B0) AND XOR 0 0 0 0 1 0 0 1 0 1 0 1 1 1 1 0 Micro transductors ‘08, CMOS Basics 31 CMOS Scheme VDD PUN IN1 … INx (supply voltage) PUN – Pull-up Network PDN – Pull-down Network OUT PDN GND Copyright Sill, 2008 (ground) Micro transductors ‘08, CMOS Basics 32 CMOS Inverter VDD IN1 IN1 OUT 0 (GND) 1 (VDD) 1 (VDD) 0 (GND) OUT IN1 GND Copyright Sill, 2008 OUT Micro transductors ‘08, CMOS Basics 33 Transistor as Water-tap Copyright Sill, 2008 Micro transductors ‘08, CMOS Basics 34 Transistor as Water-tap cont’d Voltage (Volt, V) Water pressure (bar) Current (Ampere, A) Water quantity (liter) 0 Volt 1 Volt 1 Volt 1 Volt 1 Volt 1 Volt 0 Volt 1 Volt ? Volt 1 Volt 0 Volt ? Volt 0 Volt 1 Volt - - - - Source: Timmernann, 2007 Copyright Sill, 2008 Micro transductors ‘08, CMOS Basics 35 NAND Gate In1 Out In2 VDD VDD Pull-up Network T3 In1 In2 T2 X X Out XT1 XT0 In1 In2 PUN PDN Out 1 1 OFF ON 0 0 1 ON OFF 1 1 0 ON OFF 1 0 0 ON ON 1 Pull-down Network GND Copyright Sill, 2008 Micro transductors ‘08, CMOS Basics 36 NOR Gate VDD X In1 Pull-up Network T3 XT2 In2 Out Pull-down Network XT1 XT0 GND Copyright Sill, 2008 In1 In2 PUN PDN Out 1 1 OFF ON 0 0 1 OFF ON 0 1 0 OFF ON 0 0 0 ON OFF 1 GND Micro transductors ‘08, CMOS Basics 37 AND and OR Gate AND NAND INV OR NOR Copyright Sill, 2008 INV In1 In2 OutAND OutNAND 1 1 1 0 0 1 0 1 1 0 0 1 0 0 0 1 In1 In2 OutOR OutNOR 1 1 1 0 0 1 1 0 1 0 1 0 0 0 0 1 Micro transductors ‘08, CMOS Basics 38 Delay Definitions Vin Vout Vin input waveform 50% Propagation delay tp tpHL t tpLH Vout 90% output waveform signal slopes 50% 10% tf Copyright Sill, 2008 Micro transductors ‘08, CMOS Basics tr t 39 RC-Delay Model Simple but effective delay model Use equivalent circuits for MOS transistors Ideal switch Transistor capacitances ON resistance ( = when transistor is conducting (=ON) channel between Drain to Source acts as resistor) Delay t ~ R*C Copyright Sill, 2008 Micro transductors ‘08, CMOS Basics 40 MOSFET capacitances Any two conductors separated by an insulator create a capacitor MOS capacitances have three origins: The basic MOS structure The channel charge The pn-junctions depletion regions Gate Source CGS Drain CGB CSB CGD CDB Bulk Copyright Sill, 2008 Bulk Micro transductors ‘08, CMOS Basics 41 RC-Delay Model: Inverter Rising Slope CP,gate CN,gate Copyright Sill, 2008 RP,DS X Micro transductors ‘08, CMOS Basics Cout 42 RC-Delay Model: Inverter Falling Slope CP,gate X Cout RN,DS CN,gate Copyright Sill, 2008 Micro transductors ‘08, CMOS Basics 43 RC-Delay Model: Inverter cont’d Where does Cout come from? Input capacitance (= gate capacitances) of following gate Diffusion capacitances (Drain-Bulk) of PMOS- and NMOS transistors CP,gate CP,DB CN,DB Cout CN,gate Copyright Sill, 2008 Micro transductors ‘08, CMOS Basics 44 RC-Delay Model: Width Gate width W can be changed by Designer (L, Tox, VDD… are fixed) Capacitance proportional to width: C ~ W Resistance inversely proportional to width: R ~1 / W Resistance of NMOS approx. two times smaller than PMOS with same width: WP = WN WN RN WP = 2*WN Copyright Sill, 2008 RP = 2*RN Micro transductors ‘08, CMOS Basics RP = RN CP = 2*CN! 45 RC-Delay Model: Fanout W1=W2=W3 L1=L2=L3 Cload fanout : f Cin W2/L2 W1/L1 f=2 W3/L3 Copyright Sill, 2008 Micro transductors ‘08, CMOS Basics 46 RC-Delay Model: Rising Slope CP,gate CN,gate CP,DB WP=2n X RN ,DS Cload CN,DB WN=n R 2R , RP ,DS WN WP C N ,DB C WN , C N , gate C WN CP ,DB C WP , CP , gate C WP t RC RP ,DS C N ,DB CP ,DB Cload 2R C WN C WP f Cin WP 2R nC 2nC 3nfC 2n 3 1 f R C Copyright Sill, 2008 Micro transductors ‘08, CMOS Basics 47 RC-Delay Model: Falling Slope CP,gate X CP,DB WP=2n RN ,DS Cload CN,gate CN,DB WN=n R 2R , RP ,DS WN WP C N ,DB C WN , C N , gate C WN CP ,DB C WP , CP , gate C WP t RC RN ,DS CP ,DB C N ,DB Cload R C WP C WN f Cin WN R 2nC nC 3nfC n 3 1 f R C Copyright Sill, 2008 Micro transductors ‘08, CMOS Basics 48 RC-Delay Model: Examples Delay of an Inverter with a fanout of 64: t 3 1 f R C 3(1 64) R C 195 R C Copyright Sill, 2008 Micro transductors ‘08, CMOS Basics 49 RC-Delay Model: Examples cont’d Chain of Inverters with Cload = 192 C□ and Cin=3 C□ INV1 INV2 INV3 Cin=3 C□ f chain Cload=192 C□ Cload ,chain 64 f INV 3 f INV 2 f INV 1 Cin ,chain Cload , INV 3 Cload , INV 2 Cload , INV 1 Cload ,chain Cin , INV 3 Cin , INV 2 Cin , INV 3 Cin , INV 2 Cin , INV 1 Cin , INV 3 Cin , INV 2 Cin ,chain tchain tINV 1 tINV 2 tINV 3 3 R C (1 f INV 1 ) (1 f INV 2 ) (1 f INV 3 ) Copyright Sill, 2008 Micro transductors ‘08, CMOS Basics 50 RC-Delay Model: Examples cont’d Chain of Inverters with Cload = 192 C□ and Cin=3 C□ INV1 INV2 INV3 Cin=3 C□ f INV 1 1, f INV 2 1, f INV 3 64 tchain1,1,64 207 R C Cload=192 C□ f INV 1 4, f INV 2 4, f INV 3 4 tchain 4,4,4 45 R C Chain of Inverters: Optimum result (for speed) at equal fanout! Copyright Sill, 2008 Micro transductors ‘08, CMOS Basics 51 Chains of Inverters Copyright Sill, 2008 Micro transductors ‘08, CMOS Basics 52 Sizing Increasing Width Resistance get down Increasing current Decreasing delay BUT Capacitance increase too Internal capacitances increase + Output load of previous gates increases Copyright Sill, 2008 Micro transductors ‘08, CMOS Basics 53 Sizing for Performance Sizing (W↑) auch interne Kapazität (Cdb,PMOS, Cdb,NMOS) = > größer Effekt von Sizing sinkt! Source: Irwan, PSU, 2001 Copyright Sill, 2008 Micro transductors ‘08, CMOS Basics 54 Alpha Power Law Model k' CL VDD trise (WPMOS / L ) (VDD VTH ,PMOS ) k' CL VDD t fall (WNMOS / L ) (VDD VTH ,NMOS ) Copyright Sill, 2008 WPMOS Out In Micro transductors ‘08, CMOS Basics WNMOS CL 55 Logical Effort Source: Harris ‘05 Copyright Sill, 2008 Micro transductors ‘08, CMOS Basics 56 Logical Effort (LE) cont’d Cout gain * LE f * LE Cin Cin,firstGate Cout LE of the whole circuit: LEsum allGates LEi i fanout of the whole circuit: fsum = Cout / Cin,firstGate gain of the whole circuit: Copyright Sill, 2008 gainsum = LEsum * fsum Micro transductors ‘08, CMOS Basics 57 Logical Effort (LE) cont‘d gainsum gainsum for every gate (starting at the last gate): Cout , gate Copyright Sill, 2008 gaingate Cin , gate1 LE gate Micro transductors ‘08, CMOS Basics 58 BACKUP Copyright Sill, 2008 Micro transductors ‘08, CMOS Basics 59 Moore‘s Law (3) from Rabaey ‘05 Copyright Sill, 2008 Micro transductors ‘08, CMOS Basics 60 Holt 05 Copyright Sill, 2008 Micro transductors ‘08, CMOS Basics 61 Memory Processor ... Mainframe Memory Processor I/O Further Terminals Terminal Display Keyboard Mainframe-Age 1948 Shockley: 1958 Kilby: IC Copyright Sill, 2008 Transistor Cache Memory Controller Pic changed, NoC is “our” new approach, later Memory Processor Off-Chip/On-Board Bus Cache Memory Controller On-Chip Bus I/O Audio RF I/O Audio RF 3D Graphic Video Bluetooth 3D Graphic Video Bluetooth PC-Age SOC-Age MicroIBM: transductors 1981 5150 ‘08, PCCMOS Basics ~2000: On-chip integration 62 Metal Layers Conductors (Aluminum / Copper) Oxide Dielectric Tungsten Plugs THE DEVICE Copyright Sill, 2008 Micro transductors ‘08, CMOS Basics 63 Copyright Sill, 2008 Micro transductors ‘08, CMOS Basics 64 nMOS I-V Summary Saturation ID (m A) VGS = 4V 1 VGS = 3V 0.020 ÷ ID Triode 0.010 2 VGS = 5V Square Dependence VDS = VGS-VT Subthreshold Current VGS = 2V VGS = 1V 0.0 1.0 2.0 3.0 4.0 5.0 0.0 VDS (V) (a) ID as a function of VDS 2.0 VT1.0 VGS (V) (b) IDas a function of VGS (for VDS = 5V) (NMOS Enhancement Transistor: W = 100µm, L = 20 µm) Copyright Sill, 2008 3.0 Micro transductors ‘08, CMOS Basics from Rabaey '95 65 Copyright Sill, 2008 Micro transductors ‘08, CMOS Basics 66 Copyright Sill, 2008 Micro transductors ‘08, CMOS Basics 67 nMOS Cutoff No channel Ids = 0 Vgs = 0 g + - + - s d n+ n+ Vgd p-type body b from Harris Copyright Sill, 2008 Micro transductors ‘08, CMOS Basics 68 nMOS Linear Channel forms Current flows from d(rain) to s(ource) => Vgs > Vt + -s Vds = 0 n+ p-type body b Ids + - Vgd = Vgs d n+ e- from s to d increases with Vds Similar to linear resistor g Vgs > Vt + -s g Vgs > Vgd > Vt + - Ids d n+ n+ 0 < Vds < Vgs-Vt p-type body b from Harris Copyright Sill, 2008 Micro transductors ‘08, CMOS Basics 69 nMOS Saturation Channel pinches off Ids independent of Vds We say current saturates Similar to current source Vgs > Vt g + - + - Vgd < Vt d Ids s n+ n+ Vds > Vgs-Vt p-type body b Copyright Sill, 2008 Micro transductors ‘08, CMOS Basics from Harris 70 Inverter - Schaltverhalten NMOS off PMOS lin 5 Vout NMOS sat PMOS lin 4 PMOS Out In 3 NMOS sat PMOS sat 2 NMOS d 1 NMOS lin PMOS sat 1 Copyright Sill, 2008 CLoa 2 3 4 NMOS lin PMOS off 5 Vin Micro transductors ‘08, CMOS Basics 71 Delay (2) from Rabaey ‘05 Copyright Sill, 2008 Micro transductors ‘08, CMOS Basics 72 Inverter-Kette (2) x t 3(1 f1 ) RC 3(1 f 2 ) RC ... 3(1 f m ) RC m m 3( f1 ... f m ) RC 3nRC i m xi m 64 f1 * f 2 * ... * f m Gesucht ist minimales t, d.h. minimal bei: xi xi 1 ... x1 f1 ... f m gilt: x m m i m xi denn: m m * xi m m xi m d.h., wenn alle xi gleich sind, dann ist (in diesem Fall) die Summe am kleinsten. d.h. alle fanouts müssen gleich sein, somit gilt: x f 64 (x = Anzahl der Inverter) Copyright Sill, 2008 Micro transductors ‘08, CMOS Basics 73