Academic Advisor:
Dr. Dave Turcic
Sponsoring Company:
Edwards Vacuum Ltd.
Team Members:
Ron Pahle
Khoa T. Tran
Duc M. Le
Thanh Q. Nguyen
Shafi Alhajri
Contact Engineers:
Mark Romeo
Bree Edwards
 Project
Background
 Mission Statement
 Project Plan
 Customer Identification
 PDS Requirements
 House of Quality
 Risk Mitigation
 Questions
 Edwards Vacuum
Ltd. is contracted by
Intel Corporation to provide pumps
designed for atmospheric control in
sensitive microchip fabrication
processes.
 These
manufacturing processes have a
strict tolerance in the range of the nanoscale.
 There
is evidence that Edward’s Vacuum
pumps are a cause of unwanted
vibrations, and could effect the
manufacturing tools used in Intel’s
microchip fabrication processes.
 Edwards has a current vibration isolation
plan implemented, but would like to
pursue an improved product to stay at the
top of the vacuum pump supply industry.
 Derive
a solution to minimize the
vibration propagated from the pump
system, through the steel frame and to
the surrounding workplace.
 This solution will consist of a working
prototype, supporting data, detailed
drawings and a final report.
 Access
to Intel Corporation’s
manufacturing facility is not available.
This requires that the solution derived be
tested and applied at Edward’s facility.
 The solution will then be applied to new
systems and tested and improved by
Edward’s Engineers.
Highlights of our Gantt Chart.
 PDS Document- 2/9
 Research- 2/21
 Diagnostic Testing- 3/1
 Concept Evaluation- 3/13
 Detail Design- 4/10
 Prototyping and Testing- 5/1
 Finalized Solution- 5/22
 Design Reviews- 2/21, 3/13, 5/22
 External
Customers
Primary- Edwards Vacuum Ltd.
Secondary- Intel Corporations
 Internal
Customers
Portland State University Faculty
Capstone Courses ME 491/492/493
High Priority Requirements
 Vibration Reduction- 25% (Edwards)
 Clean Room Compatible (Intel)
 Power Consumption- 0 Watts (Edwards)
 Timeline- 5/22 (Edwards/PSU)
Medium Priority Requirements
 Cost- <1000$/Pump (Edwards)
 Size- Must fit within frame (Intel)
 Ease of Use- Totally Passive (Edwards)
 No
current solution to compare to.
 Attempting
to reduce the risk in the
following categories