Background Statement for SEMI Draft Document 5002B
NEW STANDARD: SPECIFICATION FOR EDA COMMON METADATA
Notice: This background statement is not part of the balloted item. It is provided solely to assist the recipient in
reaching an informed decision based on the rationale of the activity that preceded the creation of this Document.
Notice: Recipients of this Document are invited to submit, with their comments, notification of any relevant
patented technology or copyrighted items of which they are aware and to provide supporting documentation. In this
context, “patented technology” is defined as technology for which a patent has issued or has been applied for. In the
latter case, only publicly available information on the contents of the patent application is to be provided.
What is the problem being solved?
 The Equipment Data Acquisition (EDA) standards (SEMI E125, E134, and supporting standards) have entered a
second freeze, based on the 0710 standards release, in preparation for widespread commercial use. The equipment
metadata specified by SEMI E125 plays an important role in allowing the factory client to largely self-configure in
support of rapid deployment and on-the-fly adjustment of data collection. Experience from initial EDA
implementation showed that more direction is needed to attain the consistency of metadata definitions needed to
optimize the data collection management process in a factory.
SEMI E120 provides the basic building blocks to model the equipment structure in metadata. SEMI E125 adds the
definitions of state machines, objects, parameters, and exceptions. These general requirements provide a solid basis
for metadata definitions. However, experience shows that much of the metadata model's concepts are already
covered in other SEMI standards. This includes those most typically used for 300 mm process equipment. A
consistent rendering of ProcessJobs, Substrates, Load Ports, and other such concepts specified in these standards
would make the job of the EDA clients simpler. A standard definition of these concepts acceptable to all users
would also make the job of the equipment-side implementer much easier.
EDA standards E125 and E120 define the structure and format of the metadata. What is needed is a specification
that provides a definition of the metadata content commonly found on most equipment. This document proposes a
new specification for that purpose. This specification does not conflict with SEMI E125. This means that an
implementation can conform to both SEMI E125 and this specification.
This specification is expected to be synchronized with SEMI E125 so that if and when SEMI E125 changes, this
specification will be changed to accommodate it.
What is the history of this issue and ballot?
 This subject was first addressed by publicly available ISMI-published guidance and sample metadata. This
material was refined through public input and various ISMI activities. The resulting content was brought into the
SEMI standards process to undergo the global consensus process for the purpose of creating a specification
acceptable to all. This is the third time this document has been balloted. It has undergone close scrutiny by
standards members in multiple regions.
Who will this affect? How? Why?
 This document will affect implementers and users of the 0710 version of EDA. All known EDA
implementations to date are of the 1105 version. The industry is expected to transition to 0710 EDA beginning in
2012, a process that had begun. This specification is timely and if approved promptly, will aid this transition. Many
implementers are already aware of the ISMI version of EDA Common Metadata and are using it to influence their
current work.
Is this a change to an existing solution, or, is it a new activity?
 This is a new activity that is related the existing E125 Equipment Self-Description specification.
Revision Control
This revision control records activity within the task force as well as formal submit and resubmit dates and results
per SEMI. Entries have been made by the task force.
Date
Version
Name
Edits
1/11/2012
2.1
Lance Rist
First draft of 5002B for DDA TF review. Issues addressed noted in
issues list at top.
1/17/2012
2.2
Lance Rist
Second draft of 5002B for DDA TF review. Updated XML files
included with this draft. Issues addressed noted in issues list at top.
1/24/2012
2.3
Lance Rist
Third draft of 5002B for DDA TF review. Incorporated new I&CJapan inputs and feedback from telecons on 1/19.
1/30/2012
2.4
Lance Rist
Fourth draft of 5002B for DDA TF review. Most issues resolved.
2/2/2012
2.5
Lance Rist
Fifth draft of 5002B. This version was approved for Cycle 2 ballot by
the DDA TF pending final edits.
2/3/2012
3.0
Lance Rist
Sixth draft of 5002B. This version includes the final edits and
modifications approved by the DDA TF.
A Note on Requirements ID’s
Requirements ID’s are included in the proposed new standard by direction of the North America Information &
Control Committee. The Requirements Identification section of the conventions, ¶6.1 describes how these are
delimited. All requirements are clearly marked. No other text should be considered a requirement. Sections near a
requirement may provide examples or other supporting text that can help with interpreting the requirement. Note
that the word “should” is used in some non-requirements text and it denotes a recommendation or a suggestion, not a
requirement.
The authors of this proposal have suggested requirement id numbers, but the final assignment will be made by
SEMI. Corrections to the requirement numbers are considered editorial by agreement of the Information & Control
Committee.
Review and Adjudication Information
Committee Adjudication
North America I&C Committee
Wednesday, April 4, 2012
8:00 AM to 4:30 PM, Pacific Time
SEMI Headquarters
San Jose, California
Jack Ghiselli (Ghiselli Consulting)
David Bricker (Applied Materials)
Lance Rist (RistTex)
Paul Trio (SEMI NA)
Paul Trio (SEMI NA)
Standards Staff:
408.943.7041 /ptrio@semi.org
408.943.7041 / ptrio@semi.org
This meeting’s details are subject to change, and additional review sessions may be scheduled if necessary. Contact
Standards staff for confirmation.
Group:
Date:
Time & Timezone:
Location:
City, State/Country:
Leader(s):
Task Force Review
Diagnostic Data Acquisition Task Force
Tuesday, April 3, 2012
8:00 AM to 3:00 PM, Pacific Time
SEMI Headquarters
San Jose, California
Gino Crispieri (ISMI)
Brian Rubow (Cimetrix)
Telephone and web information will be distributed to interested parties as the meeting date approaches. If you will
not be able to attend these meetings in person but would like to participate by telephone/web, please contact
Standards staff.
Semiconductor Equipment and Materials International
3081 Zanker Road
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Phone: 408.943.6900, Fax: 408.943.7943
SEMI Draft Document 5002B
NEW STANDARD: SPECIFICATION FOR EDA COMMON METADATA
Table of Contents
1 PURPOSE .................................................................................................................................................. 1
2 SCOPE ....................................................................................................................................................... 1
3 LIMITATIONS ............................................................................................................................................ 2
4 REFERENCED STANDARDS AND DOCUMENTS ................................................................................. 2
4.1 SEMI Standards......................................................................................................................................................2
5 TERMINOLOGY ........................................................................................................................................ 2
5.1 Acronyms and Abbreviations ..................................................................................................................................2
5.2 Definitions ...............................................................................................................................................................3
6 CONVENTIONS ......................................................................................................................................... 3
6.1 Requirements Identification ...................................................................................................................................3
6.2 Parameter Listings ..................................................................................................................................................4
7 COMMON METADATA OVERVIEW ......................................................................................................... 5
8 PREREQUISITES ...................................................................................................................................... 6
8.1 Required Standards ................................................................................................................................................6
9 REQUIREMENTS ...................................................................................................................................... 6
9.2 General Metadata Requirements ............................................................................................................................6
9.3 Content Standards Requirements ......................................................................................................................... 13
APPENDIX 1 ............................................................................................................................................... 40
APPENDIX 2 ............................................................................................................................................... 63
RELATED INFORMATION 1 ...................................................................................................................... 74
RELATED INFORMATION 2 ...................................................................................................................... 79
1 Purpose
1.1 The purpose of this specification is to promote commonality among implementations by defining common
representations and conventions of equipment metadata based on SEMI E125 Specification for Equipment SelfDescription.
2 Scope
2.1 The scope of this specification includes:


Common approaches for defining specific elements of equipment metadata
The metadata representation of selected SEMI communication standards, including those widely used
in 300 mm semiconductor factories
2.2 This specification defines equipment metadata based on SEMI E125-0710 and SEMI E120-0310.
2.3 This specification applies only to production equipment that act on substrates.
This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline.
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NOTICE: SEMI Standards and Safety Guidelines do not purport to address all safety issues associated with their
use. It is the responsibility of the users of the Documents to establish appropriate safety and health practices, and
determine the applicability of regulatory or other limitations prior to use.
3 Limitations
3.1 This specification defines metadata representations for data from selected SEMI communication standards.
3.1.1 This specification is not intended to require those standards be implemented in equipment. If a standard is not
implemented, its associated data would not be required.
3.2 Intellectual property protection is a known issue that is related data collection. A mechanism for data security
may exist.
3.2.1 An EDA client’s access to the items specified in an equipment’s metadata may be subject to user-controlled
limitations.
3.2.1.1 SEMI E132-0310 (Section 10.2.10.1) provides for the definition of Privileges by equipment suppliers and
by other SEMI specifications. Privileges may exist that grant or limit access to specific data.
3.2.1.2 Client-by-client data access limitations are not within the scope of this document.
3.2.2 Data security and intellectual property protection mechanisms are beyond the scope of this specification.
4 Referenced Standards and Documents
4.1 SEMI Standards
SEMI E30 — Generic Model for Communications and Control of Manufacturing Equipment (GEM)
SEMI E39 — Object Services Standard: Concepts, Behavior, and Services
SEMI E40 — Standard for Processing Management
SEMI E87 — Specification for Carrier Management (CMS)
SEMI E90 — Specification for Substrate Tracking
SEMI E94 — Specification for Control Job Management
SEMI E116 — Specification for Equipment Performance Tracking (EPT)
SEMI E120 — Specification for the Common Equipment Model (CEM)
SEMI E125 — Specification for Equipment Self-Description (EqSD)
SEMI E128 — Specification for XML Message Structures
SEMI E132 — Specification for Equipment Client Authentication and Authorization
SEMI E134 — Specification for Data Collection Management (DCM)
SEMI E138 — XML Semiconductor Common Components
SEMI E145 — Classification for Measurement Unit Symbols in XML
SEMI E148 — Specification for Time Synchronization and Definition of the TS-Clock Object
SEMI E157 — Specification for Module Process Tracking
NOTICE: Unless otherwise indicated, all documents cited shall be the latest published versions.
5 Terminology
5.1 Acronyms and Abbreviations
5.1.1 EDA — Equipment Data Acquisition — Refers to the collection of SEMI standards that define the
XML/SOAP-based data collection interface and consists of SEMI E125, SEMI E132, SEMI E134, SEMI E120, and
those specifications that these standards reference.
5.1.2 EFEM — Equipment Front-End Module — A hardware component that provides access for carriers to the
equipment. An EFEM encapsulates load ports, carrier locations, carrier handlers, and other associated mechanisms.
In many cases, the EFEM also includes a substrate handler.
This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline.
Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document
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5.1.3 FIMS — Front-Opening Interface Mechanical Standard.
5.1.4 Uid — Unique Identifier — SEMI E120 Nameable instance identifier based on uuid.
5.1.5 uuid — Universally Unique Identifier — Defined in ISO/IEC 11578.
5.2 Definitions
5.2.1 camelcase — the practice of writing compound words or phrases in which each word is capitalized and all
spaces, hyphens, and underscores are removed. When abbreviations are included, they retain the all-capitals form
(e.g., AMHSPort).
5.2.2 content standards — for the purpose of this specification, the term content standards refers to the collection
of standards containing definitions of data and behavior for the equipment which are to be represented in the
equipment metadata within the scope of this specification. See ¶9.1 for a list of the content standards.
5.2.3 FIMS location — the "docked" position of a FOUP at a Load Port where the FOUP may be opened and
wafers inserted or removed.
5.2.4 fixed buffer equipment — production equipment that has only fixed load ports and no internal buffer for
carrier storage. Substrates are loaded and unloaded directly from the carrier at the load port for processing.
5.2.5 internal buffer — a set of locations within the equipment to store carriers. These locations exclude load ports.
5.2.6 internal buffer equipment — equipment that uses an internal buffer.
5.2.7 undocked location — the position of a FOUP at a load port where the FOUP may be loaded or unloaded from
the equipment. See also the FIMS location definition.
6 Conventions
6.1 Requirements Identification
6.1.1 The following notation specifies the structure of requirement identifiers.
6.1.1.1 The following requirements prefix format is used at the beginning of requirement text. See Table 1 for the
format notation of the requirements prefix.

[Esss.ss-RQ-nnnnn-nn]
6.1.1.2 To mark the end of the requirement text the following suffix format is used.

[/RQ]
6.1.1.3 Requirements in the body text are highlighted with a border and light green background (may appear gray in
black and white printouts)
[Esss.ss-RQ-nnnnn-nn] Requirement text. [/RQ]
Table 1 Requirement Identifiers
Format Notation
Purpose
Esss.ss
SEMI standards specification identifier. Examples: E087.00, E087.01, E134.00
RQ
Indicates this is a requirement identifier.
nnnnn
Unique five-digit number within this specification. 90000-99999 are reserved for use by
SEMI.
.nn
Two-digit number that indicates version level of the requirement (.00 is used for the first
version of a requirement)
/RQ
Indicates the end of a requirement
This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline.
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6.1.2 Requirements in tables are delimited in one of two ways.
6.1.2.1 Where the requirement occupies an entire row in the table, the requirement ID is placed in column 1. No
"[/RQ]" is used to mark the end of the requirements text in this case. The table may also contain rows that are not
requirements. In this case, the column 1 cell is left blank.
6.1.2.2 Non-requirements text related to a requirements row may be included in an adjacent row. The relationship
between the rows is indicated by a broken line separating the two.
6.1.2.3 Where the requirement occupies only one cell, the text in the cell includes the requirement ID prefix and
suffix similar to requirements in the body text.
6.1.2.4 No cell in a table will contain both requirement and non-requirement text.
6.1.2.5 Cells that contain requirements are shaded light green.
6.1.2.6 Table 2 provides an example of requirements in a table. Note that in this example, the same requirement is
presented in two alternative formats. In practice, mixing the two approaches in the same table is not typically done.
Table 2 Example Table with Requirements
RequirementID
Esss.ss-RQ-nnnnn-nn
Statement
Additional Detail
The light shall be blue
There shall be no similar color in the
light panel.
The blue light is typically placed at the leftmost position in
the light panel.
[Esss.ss-RQ-nnnnn-nn]The light shall be blue. There
shall be no similar color in the light panel. [/RQ]
The blue light is typically placed at
the leftmost position in the light
panel.
6.1.3 Only text marked with the requirement identifier is a requirement of this specification.
6.1.3.1 Clarification, examples, and related recommendations may be provided near a requirement, but are not part
of the requirement.
6.1.3.2 Note that the word “should” is used in some non-requirements text and it denotes a recommendation or a
best practice, not a requirement.
6.1.4 Parent-child relationships of requirements are noted in the tables in APPENDIX 1. Where a parent
requirement includes conditions or selection criteria, these are passed to their children. For example, if a parent
requirement is stated to apply only to photolithography equipment, any child requirements also apply only to such
equipment. The condition need not be restated for each child requirement.
6.2 Parameter Listings
6.2.1 Data variables from the content standards are represented in the equipment metadata as Parameters. The
mapping of the data variables to Parameters is specified in tables using the format of Table 3. Table 4 explains the
contents of each column in the Parameter Table example.
Table 3 Example Parameter Table
Requirement ID
[Esss.00-RQ-00xxx-00]
EDA Parameter
Parmeter1
Req
isTransient
Y
Unrestricted
SECS Variable
DataVariable1
Type
N/S
Explanation
See E999-0707, ¶4.3.5.
This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline.
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Table 4 Parameter Table Columns
Description
RequirementID
Requirement identifier defined according to ¶6.1
EDA Parameter
Name of the Parameter as it appears in the XML metadata files for the
associated content standard.
Req
Whether the Parameter is required:
Y – Required
N – Not Required
C – Conditional (required in specified circumstances)
isTransient
Value of the isTransient attribute of the Parameter:
Transient
Unrestricted
Restricted.
SECS Variable
The name of the SECS data variable or object attribute represented by
this metadata Parameter. This parameter is used in EDA wherever
these variables are used in SECS (e.g., for corresponding events).
Type
Type of SECS data variable:
SV – Status Value
DVVAL – Data Value
N/S – Not Specified
Explanation
Text explaining conditional requirements and/or referencing the
content standard specification of the variable.
6.2.2 The column labeled Req shows whether a Parameter is required for conformance to this specification.
6.2.2.1 For Parameters based upon a corresponding variable from a content standard, the Req value is generally
based on the specification of that variable in the content standard. If the content standard requires the variable, this
specification nearly always requires it. If the content standard specifies conditions, those are generally replicated
here.
6.2.2.2 Where the variable is explicitly not required in the content standard, the corresponding Parameter is
specified as not required. Parameters listed as not required are typically included so that when the implementer
chooses to include them, they are implemented consistently.
6.2.2.3 Note that Parameters that are required or conditional are specified within the context of the parent
requirements. For example, in Table 9, PRJobState is specified as required. A parent 1 requirement, RQ-00061, is
conditional upon support by the equipment of SEMI E40. PRJobState inherits that condition. Thus, the PRJobState
is also conditional upon E40 support by the equipment. The ultimate parent requirement for this specification,
RQ-00002, also includes a condition that, in this example, means that if PRJobState is not included in the
equipment’s SECS interface, it is not required in EDA.
7 Common Metadata Overview
7.1 SEMI E125 specifies equipment self-description. The equipment describes itself using metadata in XML
format as defined in SEMI E125.
7.2 Equipment metadata is obtained from the equipment using seven services specified by SEMI E125:







1
GetEquipmentStructure
GetEquipmentNodeDescriptions
GetSEMIObjTypes
GetStateMachines
GetExceptions
GetTypeDefinitions
GetUnits
This requirement is actually the parent of the parent requirement. Such conditions cascade to each succeeding inheritance level.
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7.3 The seven responses combine to describe the equipment for the purpose of data collection. There are many
references from the metadata in one response to the contents of another response.
7.3.1 The equipment structure provides the basis for the definition. The EquipmentNodeDescriptions add
parameters, exceptions, SEMI objects, and state machines to each equipment component. The SEMI objects, state
machines, exceptions, type definitions, and units are defined separately and included by reference.
7.4 The specification of metadata in SEMI E125 and its subordinate standard, SEMI E120 focuses primarily on the
form of the metadata. It does not specify content.
7.5 In order to achieve the desired commonality among equipment metadata implementations, this standard
specifies content for selected parts of the metadata.
7.5.1 Part of these requirements relate to general content. This includes the content of certain identifiers. For
example, EventIDs are a key part of each SEMI E134 event report. The format for the EventID is specified in
¶9.2.5.6 .
7.5.2 More specific metadata content requirements draw from concepts defined by commonly used SEMI
communication standards such as SEMI E40 (ProcessJobs), SEMI E87 (Carriers and Load Ports), and SEMI E90
(Substrates). Each of the content standards listed in ¶9.1 are addressed in separate subsections.
7.6 In addition to the requirements in this document, this specification also includes XML files containing the actual
renderings of the content files into E125 equipment metadata. These files support one version of each of the content
standards. Other versions can be supported by following the directions in APPENDIX 2. This is discussed further
below.
8 Prerequisites
8.1 Required Standards
[Esss.00-RQ-00001-00] Conformance to this specification requires conformance to SEMI E125-0710 and its
subordinate specifications and associated XML schemas and WSDL files. [/RQ]
8.1.1 Note that the SEMI E125-0710 standard specifies conformance to SEMI E120-0310.
9 Requirements
[Esss.00-RQ-00002-00] Conformance to this specification requires conformance to all other identified requirements
in this document as conditions apply. The exception to this requirement is that any Parameter derived from a
content standard that is not implemented in the SECS interface is not required to be implemented in the EDA
Common Metadata.[/RQ]
9.1 The requirements in this specification are divided into two parts. The first part contains requirements that are
generally applicable to metadata sets. The second part contains those requirements that are specific to the individual
content standards addressed by this specification. Each of the content standards is addressed in a separate
subsection. The content standards are:
 SEMI E30 — Generic Model for Communications and Control of Manufacturing Equipment (GEM)
 SEMI E40 — Standard for Processing Management
 SEMI E87 — Specification for Carrier Management (CMS)
 SEMI E90 — Specification for Substrate Tracking
 SEMI E94 — Specification for Control Job Management
 SEMI E116 — Specification for Equipment Performance Tracking (EPT)
 SEMI E148 — Specification for Time Synchronization and Definition of the TS-Clock Object
 SEMI E157 — Specification for Module Process Tracking
9.1.1 Table A1-1 catalogs the requirements for this specification.
9.2 General Metadata Requirements
9.2.1 In this section requirements are defined that apply generally to all applicable constructs within a metadata set.
These requirements are reflected in the attached metadata files (see ¶9.3 for more detail). Some requirements in this
section apply to all metadata content that models elements taken from other SEMI Standards. This includes the
content standards listed above and others not include here, such as SEMI E109 Reticle and Pod Management.
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9.2.1.1 SEMI E125 and E120 include a number of string elements. Some of the elements are required, for example
Uid and Name for Nameables. Other elements are optional and can be excluded, such as Supplier, Make, and Model
for EquipmentElement. When such strings are supplied in the metadata, it is important that they contain accurate
and useful information.
[Esss.00-RQ-00003-00] Unless SEMI E125 or SEMI E120 explicitly allows it, included string elements in the
metadata shall not be zero length strings or values that do not satisfy the intent of the attribute, including
"Unknown", "NA", "N/A", and "None". [/RQ]
9.2.1.1.1 Note that RQ-00003 does not apply to the values of Parameters defined for NodeDescriptions and
SEMIObjTypes because their values are provided through E134 services, not in the metadata.
9.2.1.2 An equipment’s metadata is intended to model only the components included on that instance of the
equipment.
[Esss.00-RQ-00004-00] The metadata shall not describe optional Modules that do not exist on the equipment.
[/RQ]
9.2.1.3 In most cases, the metadata should not describe optional Subsystems and IODevices that do not exist on the
equipment.
9.2.2 EquipmentNodeDescription
9.2.2.1 The EquipmentNodeDescription is at the heart of the equipment metadata. It links the static equipment
structure to the metadata components that provide behavior and dynamic data.
9.2.3 Equipment Structure
9.2.3.1 The SEMI E120 standard specifies how to create the equipment structure definition. The equipment
structure provides the static context information about the equipment and its components as sources of data and
behavior. The metadata equipment structure should match that of the equipment it models from a functional point of
view. It is important that the metadata model promotes understanding of the equipment and accessibility to the data
without sacrificing accuracy. It should relate the equipment function to its structural components. See RELATED
INFORMATION 1 for more discussion.
9.2.3.2 Nameable
9.2.3.2.1 Each node in the equipment structure is a type of Nameable. Types of Nameable include Equipment,
Module, Subsystem, IODevice, MaterialLocation, and LogicalElement. Each Nameable is linked to an
EquipmentNodeDescription.
9.2.3.3 EquipmentElement
9.2.3.3.1 Several attributes for EquipmentElement are allowed to be excluded. However, there are some elements
which, when included, need other attributes to provide needed context.
[Esss.00-RQ-00005-00] Any EquipmentElement that has a Model attribute value included shall also have an
accurate value for the Supplier attribute. [/RQ]
[Esss.00-RQ-00006-00] Any EquipmentElement that has an ImmutableID value included shall also have accurate
values for the Supplier and Model attributes. [/RQ]
9.2.3.4 SoftwareModule
9.2.3.4.1 The SoftwareModule version attribute is used to help identify changes to the equipment software
components.
[Esss.00-RQ-00007-00] The equipment metadata shall contain a SoftwareModule to represent the main equipment
control software. Additional SoftwareModules shall be included for any other software components that can change
independently from the main equipment control software. [/RQ]
9.2.3.5 LogicalElement
9.2.3.5.1 A LogicalElement defines a persistent, non-structural element in the equipment structure. Examples of
LogicalElements include the MaterialManager and JobManager, which are discussed in the immediately following
sections, and also the SEMI E116 EPTTracker object discussed in ¶9.3.8 . See also the discussion of persistent
objects in ¶9.3.2.5.5 .
This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline.
Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document
development) activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.
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9.2.3.5.2 Material
9.2.3.5.2.1 The content standards define various SEMI objects and parameters that are related to material (see ¶9.3 ).
9.2.3.5.2.2 MaterialManager is an E120 LogicalElement defined for the purpose of holding material-related object
instances and parameters. The MaterialManager function of grouping together these material-related items serves to
organize information that would otherwise be defined in the NodeDescription for the Equipment.
[Esss.00-RQ-00008-00] The equipment metadata shall include a MaterialManager, modeled as a LogicalElement
associated with the Equipment node. The value for the name and ElementType attributes shall be
“MaterialManager”. [/RQ]
9.2.3.5.2.3 Figure 1 illustrates the MaterialManager concept. It shows that the MaterialManager may include
material-related Parameters, SimpleEvents, Exceptions, and object instances. The actual content is determined by
requirements in ¶9.3 for the various content standards and by the implementer.
Equipment
Parameters
CarrierID (Transient)
CarrierLocationMatrix
1
EquipmentNodeDescription
MaterialManager
(LogicalElement)
1
Locator = "Equipment\MaterialManager"
SimpleEvents
DuplicateCarrierIDInProcess
Exceptions
1..*
Substrate
(SEMIObjType)
1..*
1..*
SubstLoc
(SEMIObjType)
Carrier
(SEMIObjType)
CarrierVerificationFailure
SlotMapReadFailed
SlotMapVerificationFailed
DuplicateCarrierID
Figure 1
MaterialManager Concept
9.2.3.5.3 Jobs
9.2.3.5.3.1 The content standards define various SEMI objects and parameters that are related to processing
activities or jobs (see ¶9.3 ).
9.2.3.5.3.2 JobManager is an E120 LogicalElement defined for the purpose of holding job-related object instances
and parameters. The JobManager function of grouping together these job-related items serves to organize
information that would otherwise be defined in the NodeDescription for the Equipment.
[Esss.00-RQ-00009-00] The equipment metadata shall include a JobManager, modeled as a LogicalElement
associated with the Equipment. The value for the name and ElementType attributes shall be “JobManager”. [/RQ]
9.2.3.5.3.3 In ¶9.3 , specific object instances and parameters from the content standards are designated for inclusion
in the JobManager. Figure 2 illustrates the JobManager concept. It shows that the JobManager may include jobrelated Parameters, Exceptions, and object instances. The actual content is determined by requirements in ¶9.3 for
the various content standards and by the implementer.
This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline.
Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document
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Equipment
Parameters
CtrlJobID (Transient)
QueuedCJobs
QueueAvailableSpace
SetUpName (Configuration)
1
EquipmentNodeDescription
JobManager
(LogicalElement)
1
Locator = "Equipment\JobManager"
Exceptions
SubstrateDestinationNotAccessible
SubstrateDestinationUnknown
1..*
1..*
ProcessJob
(SEMIObjType)
ControlJob
(SEMIObjType)
Figure 2
JobManager Concept
9.2.3.6 Equipment
9.2.3.6.1 Each metadata set has an Equipment node at the top of the equipment structure hierarchy. There should
be only one Equipment node in the equipment structure except in the case of linked equipment (e.g., a
coat/bake/develop track linked to wafer stepper).
9.2.3.6.2 SEMIObjTypes that apply to the entire equipment should be modeled as part of the
EquipmentNodeDescription for the Equipment or as part of a LogicalElement of the Equipment.
9.2.3.7 IODevice
9.2.3.7.1 IODevices are intended to represent equipment components with direct links to the physical equipment via
sensors and actuators.
[Esss.00-RQ-00010-00] Each IODevice shall include at least one Parameter that represents an input to the IODevice
from a sensor or an output from the IODevice to an actuator. [/RQ]
9.2.3.7.2 In most cases, control parameters representing actuators should be modeled in the same IODevice as the
sensor values that they affect.
9.2.3.7.3 Other parameters that are closely related to sensor values should also be modeled in the same IODevice as
the sensor.
9.2.3.7.4 For example, an IODevice with a parameter measuring tank level might also contain parameters for level
set point as well as parameters for maximum level and minimum level settings.
9.2.3.8 MaterialLocation
[Esss.00-RQ-00011-00] With the exception of slots in carriers, all locations defined in the equipment metadata to
hold Substrates, Carriers, or ProcessDurables shall be modeled as SEMI E120 MaterialLocations. [/RQ]
9.2.3.8.1 For the details of modeling slots in carriers, see requirement RQ-00220 in ¶9.3.6.5 .
9.2.3.8.2 A parameter is specified by RQ-00012 to hold the identifier of the material in a MaterialLocation. This
provides a uniform way to access this information in all MaterialLocations defined in the metadata.
[Esss.00-RQ-00012-00] All MaterialLocations that are not batch locations (see SEMI E90) shall have a Parameter
that identifies the material currently held in the MaterialLocation. That parameter shall be formatted as a string and
named “MaterialID.” [/RQ]
This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline.
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9.2.3.8.3 If the MaterialLocation is for Carriers and E87 is supported, then the MaterialID would contain the Carrier
identifier (see ¶9.3.5.7 RQ-00126).
9.2.3.8.4 If the MaterialLocation is for Substrates and E90 is supported, the MaterialID would contain the Substrate
identifier (See ¶9.3.6.5 RQ-218).
9.2.3.8.5 Batch locations are defined in SEMI E90. They are exempted from RQ-00012 because there is no
standard batch identifier defined. MaterialID is allowed for batch locations, but not required.
9.2.3.8.6 All other types of MaterialLocations should use standard defined values for MaterialID if available.
9.2.4 Objects
9.2.4.1 According to E125-0710, ¶10.8.1.1, each SEMIObjType must include a Parameter in its Attribute set that
contains its instance id.
[Esss.00-RQ-00013-00] The SEMIObjType Attribute Parameter that contains the object instance id shall have a
name attribute equal to ObjID. [/RQ]
9.2.5 StateMachines
9.2.5.1 StateMachines can appear complex because they combine several elements to describe behavior, including
States, Transitions, Events, and embedded StateMachines. Below, each of these elements is considered, along with
the SimpleEvent construct used for discrete events.
9.2.5.2 It is very useful to know ahead of time the exact ids of standard StateMachines, States, Transitions, and,
most especially, Events. In an E134 EventReport, it is the EventID that is included.
[Esss.00-RQ-00014-00] The stateMachineId attribute of each StateMachine representing a state model defined by a
SEMI standard shall take the form <standard id>:<state model>, where <standard id> is of the form Vxxx-mmyy
where "V" is the SEMI standard volume designator, "xxx" is the standard number (1-3 characters, no leading zeros),
"mmyy" is the month and two-digit year of standard release, and <state model> is the name of the state model as it
appears in the standard, presented in CamelCase. [/RQ]
9.2.5.3 For example, using a recent version of SEMI E87, the LoadPortTransfer StateMachine id would be:
E87-0709:LoadPortTransfer.
9.2.5.4 States
[Esss.00-RQ-00015-00] The id attribute of a State which is defined in a StateMachine based on a SEMI standard
state model shall be the name of that State as specified in that SEMI standard, presented in CamelCase, except in the
case where this will result in duplicate id values. If the rule above will result in duplicate id values, the <state
machine> value as defined in RQ-00014, followed by a colon shall be prepended to the name of the State from the
SEMI standard as necessary to eliminate the duplication. [/RQ]
9.2.5.4.1 Note that SEMI E125-0710, Table 38 requires that the State id attribute be “unique across all states in the
top level StateMachine”.
9.2.5.4.2 For example, where an embedded StateMachine B exists within StateMachine A, the id for the NoState for
the embedded StateMachine will conflict with the parent StateMachine’s NoState. In this case, the id for NoState in
the embedded StateMachine could be “B:NoState”. The id for NoState in the parent could remain “NoState”, since
the id duplication has been eliminated.
9.2.5.4.3 Top State
[Esss.00-RQ-00016-00] The Top State's stateName and stateId attributes shall equal the <state machine> portion of
the stateMachineId that contains it (see RQ-00014) unless doing so conflicts with mandated state names as defined
in one of the content standards. [/RQ]
9.2.5.4.3.1 For example, the E40 ProcessJob StateMachine might have a StateMachine id of E40-0709:ProcessJob.
The Top State for that StateMachine would have stateName and stateId attributes equal to "ProcessJob"
9.2.5.4.3.2 An example of an exception for RQ-00016 is found in the E87 Carrier state model. For this state model,
E87 requires a Carrier state which is not the Top State to contain the three embedded StateMachines:
CarrierIDStatus, CarrierSlotMapStatus, and CarrierAccessingStatus. Since the state name "Carrier" was already
used, the Top State could be named CarrierObject. This would avoid the naming conflict.
This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline.
Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document
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[Esss.00-RQ-00017-00] The Top State of a StateMachine shall be neither the source nor the target of any transition.
[/RQ]
9.2.5.4.4 NoState
[Esss.00-RQ-00018-00] Each StateMachine shall include a “NoState” pseudo-state as described in SEMI E1250710, Section 10.7.3.3.2.1. [/RQ]
9.2.5.4.4.1 The NoState represents the initial and (if needed) final pseudo-states of the StateMachine.
9.2.5.4.4.2 SEMI E125-710 specifies that “NoState” be the name of this pseudo-state (that is, “NoState” is the last
part of the <state path name>). For example, the E90 SubstrateObject StateMachine would have a Top State with
stateName “SubstrateObject”. This would contain a NoState with stateName “SubstrateObject.NoState”.
9.2.5.5 Transitions
[Esss.00-RQ-00019-00] Transitions defined for a StateMachine shall correspond to each state change that can occur
in practice. [/RQ]
9.2.5.5.1 Transitions are reportable to the EDA client only if a corresponding Event is defined.
[Esss.00-RQ-00020-00] Within a StateMachine based on a SEMI Standard state model, each Transition’s id
attribute value shall be the transition number, if one is specified in that standard. The transition number may be
amended as specified in requirement RQ-00021. [/RQ]
[Esss.00-RQ-00021-00] Within a StateMachine based on a SEMI Standard state model, transitions that end in a
History or Conditional symbol shall be represented as multiple Transitions, one for each possible destination state.
Each resulting Transition shall have a unique id made up of its original transition number appended by a letter (e.g.,
3a, 3b, etc.). [/RQ]
9.2.5.6 Events
[Esss.00-RQ-00022-00] Within a StateMachine based on a SEMI standard state model, each Event’s id attribute
value shall be of the form <state machine>:<transition number>:<source state>-<target state> where <state
machine> is the name of the top level state machine as it appears in the standard, <transition number> is the number
of the Transition as it appears in the SEMI standard definition of the state model, and the <source state> and <target
state> are the values from the associated Transition’s sourceStateId and targetStateId attributes respectively.
Excepted from this requirement are any Events specified in the source SEMI standards to be used for multiple
Transitions. [/RQ]
9.2.5.6.1 Among the content standards, the exceptions to RQ-00022 are the SEMI E30 Control state model events
Offline, Local, and Remote and the SEMI E116 event EPTStateChangeEvent.
9.2.5.7 StateMachineInstances
9.2.5.7.1 In SEMI E125, StateMachines can be used by multiple StateMachineInstances. When different equipment
components exhibit the same behavior (that is, the same states, transitions and events), it is expected that the same
StateMachine definition will be used by each of the equipment components.
9.2.5.7.2 CurrentState and PreviousState
9.2.5.7.2.1 The StateMachineInstance includes attributes that reference parameters to hold the value of the current
state and the previous state of the StateMachine as it applies to the EquipmentNodeDescription that holds the
StateMachineInstance.
[Esss.00-RQ-00023-00] The Parameters referenced by a StateMachineInstance’s CurrentState and PreviousState
attributes shall be defined with isTransient="Unrestricted" and shall hold the stateId attribute value of the state being
referenced. [/RQ]
This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline.
Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document
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9.2.5.8 SimpleEvents
[Esss.00-RQ-00024-00] When a SEMI standard defines a discrete event that is independent of a state model, it shall
be modeled in the metadata as a SimpleEvent. The id attribute of the SimpleEvent shall be set to the name of the
event from the source standard, presented in CamelCase format. The name attribute of the SimpleEvent shall have
the form
urn:semi-org:event:<standard id>:<SimpleEvent id>
where <standard id> follows the definition used in RQ-00014 and <SimpleEvent id> is the id attribute of this
SimpleEvent. [/RQ]
[Esss.00-RQ-00025-00] Where a SEMI standard specifies a state model with more than one state, it shall be
represented in the equipment metadata as an E125 StateMachine. [/RQ]
9.2.6 Exceptions
9.2.6.1 Exceptions should be referenced by the EquipmentNodeDescriptions that represent the equipment
component to which that exception pertains.
9.2.6.2 If Exceptions from multiple sources within the equipment represent the same condition, they should have
the same ExceptionID.
9.2.6.3 The Exception Description field text should provide a clear picture of the nature of the problem and, in
conjunction with the ExceptionParameters, provide the user with enough information to diagnose the cause of the
exception.
9.2.6.4 An Exception should report any Parameters that describe the status of the source of the exception, especially
any sensor data. It should also report any Parameters related to external influences on the source of the exception,
including substrates, process jobs, carriers, status of related systems, etc.
9.2.7 Parameters
9.2.7.1 A Parameter should be a part of the EquipmentNodeDescription which it describes or should be included in
a LogicalElement that is part of that EquipmentNodeDescription.
9.2.7.2 AvailableParameters
9.2.7.2.1 The purpose of the AvailableParameter construct is to designate the transient Parameters that will have
valid values available for reporting with a given event.
[Esss.00-RQ-00026-00] Each Parameter referenced in an AvailableParameter construct shall have the isTransient
attribute set to Transient. [/RQ]
9.2.7.2.2 AvailableParameter constructs are found in SimpleEvents and in StateMachineInstances (within
EventMaps).
9.2.7.3 ParameterTypes
9.2.7.3.1 The use of the Structure data type to hold process data presents problems in the collection and use of that
data. Important process parameters are collected using trace reports. If the parameter of interest is available only in
a structure, then the entire structure must be collected and reported at each trace interval. This significantly
increases the amount of data that must be transferred via the EDA interface and stored by the factory system, but
with no added value.
[Esss.00-RQ-00027-00] Non-transient, numeric parameter data shall be defined as individual Parameters or arrays.
Numeric data include those with data types of integer, floating point, or Boolean. [/RQ]
9.2.7.3.2 These data values may additionally be included in Parameters formatted as Structures if necessary.
[Esss.00-RQ-00028-00] Parameters that report numeric data shall not be defined as string type unless mandated in
the SEMI Standards. [/RQ]
9.2.7.3.3 Date and time values are not considered to be numeric data for the purpose of RQ-00028.
This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline.
Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document
development) activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.
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9.2.7.3.4 Unlimited Strings and Arrays
9.2.7.3.4.1 Data constructs that are of an undetermined size are difficult for many database systems to handle.
Wherever possible, the maximum size should be specified.
[Esss.00-RQ-00029-00] The metadata shall include simple string type definitions named using the format "Stringx"
where x is one or more numeric characters and represents the maximum number of characters that any Parameter
using this data type can contain. [/RQ]
9.2.7.3.4.2 For example, a Parameter of type String80 would have a maximum of 80 characters. The EDA
Common Metadata xml files contain type definitions for String80, String128, and String255. See also ¶9.3.2.4 .
9.2.7.3.4.3 The maximum length should be kept as small as practical. Very large strings are handled inefficiently
by most databases.
9.2.7.3.4.4 The "Stringx" data types should be used in place of the unlimited length "string" data type.
9.2.7.3.4.5 Any use of unlimited strings, should be documented and justified by the supplier.
[Esss.00-RQ-00030-00] Parameters shall not be defined as unlimited arrays (MaxElements = 0 in XML). This
includes arrays within structures. [/RQ]
9.2.7.4 Units
[Esss.00-RQ-00031-00] The equipment metadata shall employ unit symbols, prefixes, powers, and names from
SEMI E145 wherever applicable. [/RQ]
[Esss.00-RQ-00032-00] Combined units shall be formed using the syntax defined in SEMI E145. [/RQ]
9.2.8 Mapping SECS Data to E125 Equipment Metadata
9.2.8.1 Data variables that are available via the SECS-II interface should typically be available via the EDA
interface as well. E125-0710 supports and requires mapping of SECS Data Variables, Alarms, and Events to the
corresponding constructs in the equipment metadata.
9.2.8.2 As a result, each SECS VID (variable identifier) should typically appear in the equipment metadata mapped
to one or more Parameters.
9.3 Content Standards Requirements
9.3.1 The requirements relating to each content standard are included within this section (¶9.3 ). The content
standards are listed in ¶9.1 .
9.3.2 EDA Common Metadata XML Files
9.3.2.1 Included in the requirements for this standard are the contents of the attached XML files. These files
address the modeling of each of the content standards in E125 equipment metadata.
9.3.2.2 For each of the content standards, a separate requirement is included to address the XML file content. For
example, see RQ-00037 in ¶9.3.3 .
9.3.2.3 The XML files are delivered in a .zip format with relative directory structure included.
9.3.2.4 Included in the XML file collection are two files, listed in Table 5, that hold type definitions and units that
apply to more than one of the standards.
[Esss.00-RQ-00033-00] All equipment metadata shall use the type definitions and units defined in the files listed in
Table 5 as they apply to the content standard-specific XML file content. [/RQ]
Table 5 XML Files The Apply To Multiple Content Standards
RequirementID
[Esss.00-RQ-00034-00]
[Esss.00-RQ-00035-00]
File Name
File Location Within collection
CommonGetTypeDefinitions.xml
CommonGetUnits.xml
\EDA 0710 Common Metadata
\EDA 0710 Common Metadata
9.3.2.5 Conventions Used in the EDA Common Metadata XML Files
9.3.2.5.1 When constructing the EDA Common Metadata XML files, some conventions were used to promote
consistency in the results. Some of these conventions are noted here as an aid to the reader.
This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline.
Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document
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9.3.2.5.2 General
9.3.2.5.2.1 All name and id fields formatted as strings are populated using CamelCase notation unless there is a
content standard requirement that prevents it.
9.3.2.5.2.2 Where possible, description fields are populated including text from the content standard that specifies
the corresponding element.
9.3.2.5.3 Parameters
9.3.2.5.3.1 To create the representations of the content standards in the EDA Common Metadata files, SECS data
variables and object attributes were translated into EDA parameters. This is noted in various tables in ¶9.3 (for
example, see Table 7).
9.3.2.5.3.2 SECS uses a simplistic view of the equipment. It does not specify the equipment component that is the
source of a data variable. In many cases, state model events (CEIDs) represent all instances of an object or
equipment component. When the event report is sent, it represents a single instance. To support this style of
reporting, DVVALs were created so that a value can be reported for whichever instance is the subject of a particular
event report.
9.3.2.5.3.3 EDA provides a more sophisticated view of the equipment. The equipment structure is provided.
Independent StateMachineInstances are defined so that separate data collection plans can be defined for each
possible source of the event. This means that unique data parameters for each source can be included in the event
report for that source. For this reason many SECS DVVALs are translated into EDA non-transient (unrestricted)
parameters. In some content standards a SECS SV and DVVAL existed for the same data. Some of these are
combined into a single EDA parameter.
9.3.2.5.3.4 Note that there remain some cases where transient parameters are needed in EDA. Some SECS
DVVALs were translated to transient parameters.
9.3.2.5.4 Dynamic Objects
9.3.2.5.4.1 Dynamic objects are those that are created and destroyed over time, such as SEMI E40 ProcessJobs.
Persistent objects are those that are consistently present on the equipment, such as the SEMI E90 Substrate Location
located in the process module.
9.3.2.5.4.2 SEMI E125 SEMIObjTypes are used to model dynamic objects defined in the content standards listed in
¶9.1 .
9.3.2.5.4.3 In this specification, each SEMIObjType attribute has been defined as a non-transient (isTransient =
Unrestricted) parameter in the Attributes collection of the SEMIObjType. Where the object is taken from one of the
content standards, each of these parameters is typically named to match the standard attribute, but formatted in
CamelCase.
9.3.2.5.4.4 The attribute values are non-transient in relation to an object instance. During the lifetime of the object
instance, its attributes are always available for reporting or ad hoc data collection. The attribute names are the same
for each instance of the object and are supplied in the SEMIObjType. The attribute for a specific object instance is
differentiated using the Source, which includes the ObjID (see SEMI E125.1-0710, ¶7.2.5.5).The metadata specifies
only the SEMIObjType definitions.
9.3.2.5.4.5 As shown in Figure 3, the SEMIObjType is a template for each object instance. Data collection plans
are typically defined in terms of the SEMIObjType (that is, applying to all instances), but each event report provides
data for the specific instance that generated the event.
This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline.
Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document
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Figure 3
Illustration of SEMIObjType Concept
9.3.2.5.4.6 Any data variables (SECS DVVAL, SV, or ECV) specified in the content standard that are associated
with a SEMIObjType are modeled as Parameters in the EventData collection within the SEMIObjType definition.
Where a resulting EventData parameter duplicated the value and usage of an Attribute parameter, the EventData
parameter was removed. Where both SV and DVVAL versions of the same value were specified in the content
standard, the DVVAL version was eliminated if not needed (see ¶9.3.2.5.3 ).
9.3.2.5.5 Persistent Objects
9.3.2.5.5.1 Persistent objects defined in the content standards are modeled as LogicalElements (see ¶9.2.3.5 ),
MaterialLocations (see ¶9.2.3.8 ), or other equipment components represented by EquipmentNodeDescriptions. This
approach allows the instances of these object types to be represented in the metadata. The SEMIObjType construct
is not used to model persistent objects because it does not allow specification of object instances in the metadata.
9.3.2.5.5.2 Object attributes and related data variables are represented as parameters in the
EquipmentNodeDescription corresponding to the object. As with SEMIObjTypes, duplicate values are eliminated.
9.3.2.5.5.3 For example, Figure 4 illustrates the mapping of the E90 Substrate Location object to a
MaterialLocation (for Substrate Location requirements, see ¶9.3.6.5 ).
Figure 4
SEMI E87 Substrate Location Mapping to MaterialLocation
9.3.2.5.5.3.1 The Substrate Location variable data all duplicate attribute values. These were combined with the
corresponding attributes during the mapping process. The transient form for these values was determined to be
adequate and the non-transient form eliminated.
This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline.
Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document
development) activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.
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9.3.2.5.5.3.2 The Substrate Location attributes SubstID, SubstLocState, and DisableEvents are represented as
parameters of the EquipmentNodeDescription representing the MaterialLocation. The ObjID attribute is represented
by the SubstLocID parameter (using the more descriptive data variable name from SEMI E90). The ObjType
attribute is not included because it is implied by the MaterialLocation MaterialType value.
9.3.2.5.5.3.3 MaterialID and SubstrateLocationCurrState are included based on requirements unique to this
specification.
9.3.2.5.5.3.4 A similar process was used to map the attributes and variable data of other persistent objects to the
corresponding EquipmentNodeDescriptions.
9.3.2.5.6 StateMachine Transitions
9.3.2.5.6.1 In the metadata for the content standards, transitions that are not numbered are assigned transition
numbers. These are almost exclusively initial transitions. These initial transitions are most often assigned transition
number zero.
9.3.2.5.7 State Parameters
9.3.2.5.7.1 Most of the content standards define parameters to report the state and sometimes the previous state.
However, the naming and the values contained are inconsistent.
9.3.2.5.7.2 The StateMachineInstance provides attributes that can reference parameters for current and previous
state. For the EDA Common Metadata XML files, a consistent approach is taken for the parameters referenced by
these CurrentState and PreviousState attributes.
9.3.2.5.7.3 For all StateMachineInstances, a current state parameter is defined in the metadata. The name of the
parameter follows the convention “xxxCurrState”, where xxx = the name of the state model in the content standard.
For example, the E40 ProcessJob StateMachine will yield a parameter named ProcessJobCurrState.
9.3.2.5.7.4 If the StateMachine has only two states (excluding NoState), then the previous state is obvious. For
StateMachines with more states, a previous state parameter is also defined in the metadata. Its naming convention is
“xxxPrevState” where xxx is the same as above. The previous state parameters are not required since the previous
state might not be known in all cases.
9.3.2.5.8 The content standard’s state parameters are also included in the metadata files.
9.3.2.6 Constructing An Equipment's Metadata From The EDA Common Metadata
9.3.2.6.1 The EDA Common Metadata XML files contain the metadata constructs defined for each of the content
standards. The files contain the Parameter, StateMachine, Exception, SEMI Object, and SimpleEvent definitions.
They also contain supporting definitions for Units and TypeDefinitions.
9.3.2.6.2 The metadata constructs for each content standard are provided in multiple XML files – one
corresponding to each SEMI E125 service (listed in ¶7.2 ) to obtain the metadata from the equipment (for example
E30GetEquipmentStructure.xml).
9.3.2.6.3 Each content standard metadata set contains only those files that are affected by that standard. They have
as few as three and as many as six files. For example, the SEMI 30 XML file set does not contain a file named
E30GetSEMIObjTypes.xml because E30 does not define any objects.
9.3.2.6.4 Constructing the metadata for equipment requires merging the metadata for each of the supported content
standards and then adding the equipment-specific metadata. A suggested merger process is described here.
9.3.2.6.5 The EDA Common Metadata XML files must be modified to fit the substance of the equipment. The
implementer must determine which items to include among the items that are conditionally required or optional.
9.3.2.6.5.1 Requirement RQ-00002 says that content standard parameters not implemented in the SECS interface
are not required in EDA. Any such Parameters would be removed during the merging process.
9.3.2.6.5.2 Most of the metadata files contain embedded comments that explain actions or choices the implementer
should make during the implementation process. All comments should be read carefully and acted upon as
appropriate. These comments should be removed from the final version of the metadata.
9.3.2.6.6 To construct the final metadata for the equipment manually, the user should take the following steps:
1. Identify the content standards that will be implemented. Begin with the XML files provided in this
specification for those standards.
2. Identify the version of each standard that will be supported. For any supported standard version not
directly provided, modify the XML files provided according to the instructions in APPENDIX 2 that are
applicable to that standard.
This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline.
Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document
development) activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.
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3.
Update the metadata files by reading and following the directions embedded as comments in each metadata
file for each standard. These represent optional and conditional requirements that the implementer must
resolve.
4. For each of the seven responses, combine the metadata from the supported content standards.
a. GetUnitsResponse – Concatenate the lists of units provided for each supported content standard.
Add any needed entries from the CommonGetUnits.xml file for this version of EDA. It is
suggested that the list be sorted using the unit symbol.
b. GetTypeDefinitions Response – Concatenate the lists of units provided for each supported content
standard. Add any needed entries from the CommonGetTypeDefinitions.xml file for this version
of EDA. It is suggested that the list be sorted using the TypeDefinition name attribute.
c. GetExceptionsResponse – Concatenate the lists of Exceptions provided for each supported content
standard. It is suggested that the list be sorted using the Exception id attribute.
d. GetStateMachinesResponse – Concatenate the collections of StateMachines provided for each
supported content standard. It is recommended that the StateMachines be grouped by standard
with the lowest standard number first.
e. GetSEMIObjTypesResponse – Concatenate the collections of SEMIObjTypes provided for each
supported content standard. It is recommended that the SEMIObjTypes be grouped by standard
with the lowest standard number first.
f. GetEquipmentStructureResponse – Construct the basic equipment structure for the specific
equipment that is being modeled. Then examine the equipment structure in the Common
Metadata for each of the supported standards. In each case, the provided equipment components
are templates that focus on the effect of the particular content standard on a particular type of
node. Match the templates for the supported content standards to the corresponding nodes in the
actual equipment structure, and add the corresponding elements where they apply.
g. GetEquipmentNodeDescriptionsResponse – By association with the equipment structure, the
NodeDescriptions are representative of a type of node (Equipment, Module, Subsystem, or
IODevice). Each NodeDescription provides the Parameters, StateMachineInstances, etc. needed
for nodes of that type for that particular standard.
i. Combine the elements for the Equipment node for each of the content standards with
those from the other supported standards and apply them to the actual Equipment node.
ii. Repeat the process for Modules, Subsystems, IODevices, and LogicalElements. Note
that each content standard metadata set defines only the node types that it affects.
iii. Apply the elements for the common MaterialLocation nodes to similar types of
MaterialLocation nodes (i.e., for Substrates or Carriers).
5. After combining the various standards' metadata, add any equipment-specific metadata elements to
complete the equipment metadata.
9.3.2.6.6.1 All GetEquipmentStructure and GetEquipmentNodeDescription files include comments that contain
additional instructions to help with the merge and edit process.
9.3.2.7 Example Equipment Metadata Sets
9.3.2.7.1 Also included with the attached XML files are examples of complete E125 equipment metadata sets. The
TrackSysFixedBuffer example is a fixed buffer equipment. The TrackSysInternalBuffer example is an internal
buffer equipment.
9.3.2.7.1.1 These files are found in the zip file under the folder \EDA 0710 Common Metadata\TrackSys.
9.3.2.7.1.2 Neither example is intended to represent any particular commercial process equipment.
9.3.2.7.2 These examples combine the required representations of the content standards and additional equipment
specific detail necessary to complete the metadata set.
9.3.2.7.3 The number of process parameters and exceptions included in these examples is far lower than would be
expected for a commercial implementation. This helps make review of the examples easier.
This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline.
Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document
development) activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.
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9.3.3 SEMI E30 Generic Equipment Model
[Esss.00-RQ-00036-00] Equipment which implement SEMI E30 shall conform to the requirements in this section,
entitled SEMI E30 Generic Equipment Model. [/RQ]
[Esss.00-RQ-00037-00] Implementers shall represent the metadata constructs relating to SEMI E30 with the content
of the E30 Common Metadata files listed in Table 6. The content of the files listed in Table 6 shall be modified:
a) According to the instructions embedded as comments in those files, and
b) According to the additional instructions in Appendix 2 for adapting the files to the specific version of SEMI E30
implemented on the equipment. [/RQ]
Table 6 XML Files For SEMI E30
RequirementID
[Esss.00-RQ-00038-00]
[Esss.00-RQ-00039-00]
[Esss.00-RQ-00040-00]
[Esss.00-RQ-00041-00]
File Name
File Location Within Collection
E30GetEquipmentNodeDescriptions.xml
E30GetEquipmentStructure.xml
E30GetStateMachines.xml
E30GetTypeDefinitions.xml
\EDA 0710 Common Metadata\E30-0307
\EDA 0710 Common Metadata\E30-0307
\EDA 0710 Common Metadata\E30-0307
\EDA 0710 Common Metadata\E30-0307
9.3.3.1 Note that some content standards do not require specific content for all seven service responses (listed here
as files). In the case of SEMI E30, there is no required content for GetExceptions, GetSEMIObjTypes, or GetUnits.
9.3.3.2 The E30 metadata files need the following entries from the CommonGetTypeDefinitions.xml file: int,
String32, String80, String128, and String255.
[Esss.00-RQ-00042-00] Where the equipment supports E30-0307, the Parameters for the
EquipmentNodeDescription representing the Equipment shall conform to Table 7. In the case where a different
version is supported, the Table 7 contents shall be modified by the appropriate instructions in APPENDIX 2, if any.
[/RQ]
9.3.3.3 Table 7 and other Parameter tables in Section 9.3 list the SECS Data Variables from the content standards
that have been included in the Common Metadata XML files.
9.3.3.3.1 In some cases, the content standards define multiple Data Variables that hold the same information. These
Data Variable pairs which have duplicate content may have the same or different names. The required Parameter
lists in this standard specify only one EDA Parameter to represent such duplicate-content Data Variables.
9.3.3.3.2 The implementer of this specification is not prohibited from providing the excluded Data Variable as an
additional Parameter.
Table 7 Equipment Node Parameters from SEMI E30
Requirement ID
EDA Parameter
Req
isTransient
SECS Variable
Type
[Esss.00-RQ-00043-00]
ProcessState
C
Unrestricted
ProcessState
SV
[Esss.00-RQ-00044-00]
PreviousProcess
State
C
Unrestricted
PreviousProcessS
tate
SV
[Esss.00-RQ-00045-00]
ControlState
Y
Unrestricted
ControlState
SV
[Esss.00-RQ-00046-00]
Clock
C
Unrestricted
Clock
SV
[Esss.00-RQ-00047-00]
PPChangeName
C
Transient
PPChangeName
DVVAL
Explanation
See E30-0307, ¶5.2.
Required only if the
ProcessingStateChange
simple event is defined
See E30-0307, ¶5.2.
Required only if the
ProcessingStateChange
simple event is defined
See E30-0307, ¶5.2
See E30-0307, ¶5.2.
Required only if
equipment supports E30
Clock capability
See E30-0307, ¶5.2.
Required only on
equipment supporting
process programs
This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline.
Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document
development) activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.
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EDA Parameter
Req
isTransient
SECS Variable
PPChangeStatus
Type
[Esss.00-RQ-00048-00]
PPChangeStatus
C
Transient
DVVAL
[Esss.00-RQ-00049-00]
PPExecName
C
Unrestricted
PPExecName
SV
[Esss.00-RQ-00050-00]
PPFormat
C
Unrestricted
PPFormat
SV
[Esss.00-RQ-00051-00]
PPError
C
Transient or
Unrestricted
PPError
DVVAL
[Esss.00-RQ-00052-00]
Operator
Command
C
Transient
Operator
Command
DVVAL
[Esss.00-RQ-00053-00]
Equipment
Constant
C
Transient
ECID
[Esss.00-RQ-00054-00]
DataSetName
C
Transient
DataSetName
[Esss.00-RQ-00055-00]
Establish
Communications
Timeout
C
Unrestricted
Establish
Communications
Timeout
ECV
[Esss.00-RQ-00056-00]
TimeFormat
C
Unrestricted
TimeFormat
ECV
[Esss.00-RQ-00057-00]
[Esss.00-RQ-00058-00]
ControlCurrState
ControlPrevState
Y
N
Unrestricted
Unrestricted
n/a
n/a
n/s
DVVAL
n/a
n/a
Explanation
See E30-0307, ¶5.2.
Required only on
equipment supporting
process programs
See E30-0307, ¶5.2.
Required only on
equipment supporting
process programs
See E30-0307, ¶5.2.
Required only if
equipment supports E30
Process Recipe
Management capability
See E30-0307, ¶4.6.2.5,
¶5.2. Required only on
equipment supporting
process programs; it shall
be defined as Transient if
an event is provided for
recipe verification or
recipe verification failure;
otherwise it shall be
defined as Unrestricted
See E30-0307, Table 8.
Required only if the
OperatorCommandIssued
event is supported
See E30-0307, ¶4.5.4 3rd
Bullet; ¶6.0 Table 8.
Required only if Operator
EquipmentConstantChan
ge event is supported.
See E30-0307, Table 8.
Required only on
equipment supporting
uploading of large
process programs or
execution recipes
See E30-0307, ¶5.2.
Required only if
equipment supports E30
Establish
Communications
capability
See E30-0307, ¶5.2.
Required only if
equipment supports E30
Clock capability, E90 (for
TimeIn/TimeOut), or
E116 (for
TransitionTimestamp)
See ¶9.3.2.5.7
See ¶9.3.2.5.7
[Esss.00-RQ-00059-00] The equipment metadata shall include a representation of the SEMI E30 Control state
model associated with the Equipment node. [/RQ]
[Esss.00-RQ-00060-00] The equipment metadata shall include a representation of a Processing StateMachine in
accordance with SEMI E30 and associated with the Equipment node. [/RQ]
This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline.
Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document
development) activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.
Page 19
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9.3.3.4 No Processing StateMachine or StateMachineInstance is provided in the SEMI E30 metadata files. Note
that SEMI E30 requires these for the implementation. Examples are provided in the TrackSys metadata sets. The
Processing state Parameters (ProcessState and PreviousProcessState) are provided in the SEMI E30 metadata files.
9.3.4 SEMI E40 Processing Management
[Esss.00-RQ-00061-00] Equipment which implement SEMI E40 shall conform to the requirements in this section,
entitled SEMI E40 Processing Management. [/RQ]
[Esss.00-RQ-00062-00] Implementers shall represent the metadata constructs relating to SEMI E40 with the content
of the E40 Common Metadata files listed in Table 8. The content of the files listed in Table 8 shall be modified:
a) According to the instructions embedded as comments in those files, and
b) According to the additional instructions in Appendix 2 for adapting the files to the specific version of SEMI E40
implemented on the equipment. [/RQ]
Table 8 XML Files For SEMI E40
RequirementID
[Esss.00-RQ-00063-00]
[Esss.00-RQ-00064-00]
[Esss.00-RQ-00065-00]
[Esss.00-RQ-00066-00]
[Esss.00-RQ-00067-00]
File Name
File Location Within Collection
E40GetEquipmentNodeDescriptions.xml
E40GetEquipmentStructure.xml
E40GetSEMIObjTypes.xml
E40GetStateMachines.xml
E40GetTypeDefinitions.xml
\EDA 0710 Common Metadata\E40-0709
\EDA 0710 Common Metadata\E40-0709
\EDA 0710 Common Metadata\E40-0709
\EDA 0710 Common Metadata\E40-0709
\EDA 0710 Common Metadata\E40-0709
9.3.4.1 In the case of SEMI E40, there is no unique required content for GetExceptions or GetUnits.
9.3.4.2 The E40 metadata files need the following entries from the CommonGetTypeDefinitions.xml file: boolean,
long, String80, String128, String255, PauseEventArray, RecipeVariable, RecipeVariableArray, SlotArray, and
CarrierSlotList.
9.3.4.3 The E40 metadata files need the following entries from the CommonGetUnits.xml file: non-dimensional
quantity.
[Esss.00-RQ-00068-00] The SEMI E40 ProcessJob object shall be modeled in the equipment metadata as a SEMI
Object associated with the EquipmentNodeDescription representing the JobManager LogicalElement. [/RQ]
[Esss.00-RQ-00069-00] Where the equipment supports E40-0709, the Parameters for the ProcessJob SEMIObjType
shall conform to Table 9 and Table 10. In the case where a different version is supported, the Table 9 and Table 10
contents shall be modified by the appropriate instructions in APPENDIX 2, if any. [/RQ]
Table 9 ProcessJob Object Attribute Parameters from SEMI E40
Requirement ID
EDA Parameter
Req
isTransient
SECS Variable
Type
[Esss.00-RQ-00070-00]
ObjID
Y
Unrestricted
ObjID
Attr
[Esss.00-RQ-00071-00]
ObjType
Y
Unrestricted
ObjType
Attr
[Esss.00-RQ-00072-00]
PauseEvent
N
Unrestricted
PauseEvent
Attr
[Esss.00-RQ-00073-00]
PRJobState
Y
Unrestricted
PRJobState
Attr
[Esss.00-RQ-00074-00]
PRMtlNameList
Y
Unrestricted
PRMtlNameList
Attr
Explanation
See E40-0709, Table 2,
¶8.2.2.4, ¶11.2, E40.1 ¶7.1.
PRJobID DVVAL is not
needed in EDA.
See E40-0709, Table 2,
¶11.2, E40.1 ¶7.1
See E40-0709, Table 2,
¶11.2, E40.1, ¶7.1.
PauseEvent DVVAL is not
needed in EDA.
See E40-0709, Table 2,
¶8.2.2.4, ¶11.2, E40.1 ¶7.1.
PRJobState DVVAL is not
needed in EDA.
See E40-0709, Table 2,
¶11.2, E40.1, ¶7.1.
PRMtlNameList DVVAL is
not needed in EDA.
This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline.
Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document
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Phone: 408.943.6900, Fax: 408.943.7943
EDA Parameter
Req
isTransient
SECS Variable
Type
[Esss.00-RQ-00075-00]
PRMtlType
Y
Unrestricted
PRMtlType
Attr
[Esss.00-RQ-00076-00]
PRProcessStart
N
Unrestricted
PRProcessStart
Attr
[Esss.00-RQ-00077-00]
PRRecipeMethod
Y
Unrestricted
PRRecipeMethod
Attr
[Esss.00-RQ-00078-00]
RecID
Y
Unrestricted
RecID
Attr
[Esss.00-RQ-00079-00]
RecVariableList
N
Unrestricted
RecVariableList
Attr
Explanation
See E40-0709, Table 2,
¶11.2, E40.1, ¶7.1.
PRMtlType DVVAL is not
needed in EDA.
See E40-0709, Table 2,
¶11.2, E40.1, ¶7.1.
PRProcessStart DVVAL is
not needed in EDA.
See E40-0709, Table 2,
¶11.2, E40.1, ¶7.1.
PRRecipeMethod DVVAL
is not needed in EDA.
See E40-0709, Table 2,
¶11.2, E40.1, ¶7.1. RecID
DVVAL is not needed in
EDA.
See E40-0709, Table 2,
¶11.2, E40.1, ¶7.1.
RecVariableList DVVAL is
not needed in EDA.
Table 10 ProcessJob Object EventData Parameters from SEMI E40
Requirement ID
EDA Parameter
Req
isTransient
[Esss.00-RQ-00080-00]
[Esss.00-RQ-00081-00]
ProcessJobCurrState
ProcessJobPrevState
Y
N
Unrestricted
Unrestricted
SECS
Variable
n/a
n/a
Type
n/a
n/a
Explanation
See ¶9.3.2.5.7
See ¶9.3.2.5.7
[Esss.00-RQ-00082-00] The ProcessJob SEMI Object shall include a StateMachineInstance of a StateMachine that
models the SEMI E40 Process Job State Model. [/RQ]
9.3.5 SEMI E87 Carrier Management
[Esss.00-RQ-00083-00] Equipment which implement SEMI E87 shall conform to the requirements in this section,
entitled SEMI E87 Carrier Management. [/RQ]
[Esss.00-RQ-00084-00] Implementers shall represent the metadata constructs relating to SEMI E87 with the content
of the E87 Common Metadata files listed in Table 11. The content of the files listed in Table 11 shall be modified:
a) According to the instructions embedded as comments in those files, and
b) According to the additional instructions in Appendix 2 for adapting the files to the specific version of SEMI E87
implemented on the equipment. [/RQ]
Table 11 XML Files For SEMI E87
RequirementID
[Esss.00-RQ-00085-00]
[Esss.00-RQ-00086-00]
[Esss.00-RQ-00087-00]
[Esss.00-RQ-00088-00]
[Esss.00-RQ-00089-00]
[Esss.00-RQ-00090-00]
File Name
File Location Within Collection
E87GetEquipmentNodeDescriptions.xml
E87GetEquipmentStructure.xml
E87GetExceptions.xml
E87GetSEMIObjTypes.xml
E87GetStateMachines.xml
E87GetTypeDefinitions.xml
\EDA 0710 Common Metadata\E87-0709
\EDA 0710 Common Metadata\E87-0709
\EDA 0710 Common Metadata\E87-0709
\EDA 0710 Common Metadata\E87-0709
\EDA 0710 Common Metadata\E87-0709
\EDA 0710 Common Metadata\E87-0709
9.3.5.1 In the case of SEMI E87, there is no unique required content for GetUnits.
9.3.5.2 The E87 metadata files need the following entries from the CommonGetTypeDefinitions.xml file: boolean,
short, String80, String128, and LocationStateEnum.
9.3.5.3 The E87 metadata files need the following entries from the CommonGetUnits.xml file: Non-dimensional
quantity.
This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline.
Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document
development) activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.
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9.3.5.4 SEMI E87 Equipment Node
[Esss.00-RQ-00091-00] Where the equipment supports E87-0709, the Parameters of the EquipmentNodeDescription
representing the Equipment shall conform to Table 12. In the case where a different version is supported, the Table
12 contents shall be modified by the appropriate instructions in APPENDIX 2, if any. [/RQ]
Table 12 Equipment Node Parameters from SEMI E87
Requirement ID
[Esss.00-RQ-00092-00]
[Esss.00-RQ-00093-00]
[Esss.00-RQ-00094-00]
EDA
Parameter
BypassReadID
CarrierHold
Trigger
Unclamp
ControlTrigger
Req
isTransient
C
Unrestricted
Y
Unrestricted
Y
Unrestricted
SECS Variable
BypassReadID
CarrierHold
Trigger
Unclamp
ControlTrigger
Type
Explanation
ECV
See E87-0709, ¶19.2.1
Table 37; Must be included
at Equipment or at Load
Port level, but not both.
ECV
See E87-0709, ¶15.2
ECV
See E87-0709, ¶15.4
9.3.5.4.1 The BypassReadID is listed as a conditional parameter for the Equipment node and for each Load Port
node. Since SEMI E87-0709 requires that BypassReadID exist in SECS, it must be included at one level or the
other in the metadata. See also SEMI E87-0709, ¶10.7.7.
9.3.5.5 SEMI E87 Carrier Object
[Esss.00-RQ-00095-00] The SEMI E87 Carrier object shall be modeled in the equipment metadata as a SEMI
Object associated with the MaterialManager LogicalElement. [/RQ]
[Esss.00-RQ-00096-00] Where the equipment supports E87-0709, the Parameters for the Carrier SEMIObjType
shall conform to Table 13 and Table 14. In the case where a different version is supported, the Table 13 and Table
14 contents shall be modified by the appropriate instructions in APPENDIX 2, if any. [/RQ]
This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline.
Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document
development) activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.
Page 22
Doc. 5002B  SEMI
LETTER (YELLOW) BALLOT
DRAFT
Document Number: 5002B
Date: 3/9/2016
Semiconductor Equipment and Materials International
3081 Zanker Road
San Jose, CA 95134-2127
Phone: 408.943.6900, Fax: 408.943.7943
Table 13 Carrier Object Attribute Parameters from SEMI E87
Requirement ID
EDA Parameter
Req
isTransient
SECS Variable
Type
Explanation
See E87-0709, Table 6
See E87-0709, Table 6,
Table 37, E87.1, Table 4.
CarrierIDStatus DVVAL is
not needed in EDA.
See E87-0709, Table 6,
Table 37, E87.1, Table 4.
CarrierAccessingStatus
DVVAL is not needed in
EDA.
See E87-0709, Table 6
See E87-0709, Table 6,
Table 37, E87.1, Table 4.
LocationID DVVAL is not
needed in EDA.
See E87-0709, Table 6
See E87-0709, Table 6,
Table 37, E87.1, Table 4.
CarrierID DVVAL is not
needed in EDA.
See E87-0709, Table 6,
Table 37, E87.1, Table 4.
SlotMap DVVAL is not
needed in EDA.
See E87-0709, Table 6,
Table 37, E87.1, Table 4.
SlotMapStatus DVVAL is
not needed in EDA.
See E87-0709, Table 6
See E87-0709, Table 6
[Esss.00-RQ-00097-00]
Capacity
Y
Unrestricted
Capacity
Attr
[Esss.00-RQ-00098-00]
CarrierIDStatus
Y
Unrestricted
CarrierIDStatus
Attr
[Esss.00-RQ-00099-00]
CarrierAccessing
Status
Y
Unrestricted
CarrierAccessing
Status
Attr
[Esss.00-RQ-00100-00]
ContentMap
Y
Unrestricted
ContentMap
Attr
[Esss.00-RQ-00101-00]
LocationID
Y
Unrestricted
LocationID
Attr
[Esss.00-RQ-00102-00]
ObjType
Y
Unrestricted
ObjType
Attr
[Esss.00-RQ-00103-00]
ObjID
Y
Unrestricted
ObjID
Attr
[Esss.00-RQ-00104-00]
SlotMap
Y
Unrestricted
SlotMap
Attr
[Esss.00-RQ-00105-00]
SlotMapStatus
Y
Unrestricted
SlotMapStatus
Attr
[Esss.00-RQ-00106-00]
[Esss.00-RQ-00107-00]
SubstrateCount
Usage
Y
Y
Unrestricted
Unrestricted
SubstrateCount
Usage
Attr
Attr
Table 14 Carrier Object EventData Parameters from SEMI E87
Requirement ID
EDA Parameter
Req
isTransient
SECS Variable
Type
Explanation
See E87-0709, Table 37,
E87.1, Table 4
See E87-0709, Table 37,
E87.1, Table 4
[Esss.00-RQ-00108-00]
PortID
Y
Transient
PortID
DVVAL
[Esss.00-RQ-00109-00]
Reason
Y
Transient
Reason
DVVAL
Y
Unrestricted
n/a
n/a
See ¶9.3.2.5.7
N
Unrestricted
n/a
n/a
See ¶9.3.2.5.7
Y
Unrestricted
n/a
n/a
See ¶9.3.2.5.7
N
Unrestricted
n/a
n/a
See ¶9.3.2.5.7
Y
Unrestricted
n/a
n/a
See ¶9.3.2.5.7
N
Unrestricted
n/a
n/a
See ¶9.3.2.5.7
[Esss.00-RQ-00110-00]
[Esss.00-RQ-00111-00]
[Esss.00-RQ-00112-00]
[Esss.00-RQ-00113-00]
[Esss.00-RQ-00114-00]
[Esss.00-RQ-00115-00]
CarrierAccessing
StatusCurrState
CarrierAccessing
StatusPrevState
CarrierIDStatus
CurrState
CarrierIDStatus
PrevState
CarrierSlotMap
StatusCurrState
CarrierSlotMap
StatusPrevState
[Esss.00-RQ-00116-00] The Carrier SEMI Object shall include a StateMachineInstance of a StateMachine that
models the SEMI E87 Carrier State Model. [/RQ]
This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline.
Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document
development) activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.
Page 23
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DRAFT
Document Number: 5002B
Date: 3/9/2016
Semiconductor Equipment and Materials International
3081 Zanker Road
San Jose, CA 95134-2127
Phone: 408.943.6900, Fax: 408.943.7943
9.3.5.6 SEMI E87 EFEM Node
[Esss.00-RQ-00117-00] Each equipment metadata set shall include a Subsystem with ElementType = "EFEM" that
is a child node of the Equipment and that is the parent of the equipment's Load Ports and associated mechanisms.
[/RQ]
9.3.5.6.1 See ¶5.1.2 for a list of the components that should be included in an EFEM.
[Esss.00-RQ-00118-00] Where the equipment supports E87-0709, the Parameters of the EquipmentNodeDescription
representing the EFEM shall conform to Table 15. In the case where a different version is supported, the Table 15
contents shall be modified by the appropriate instructions in APPENDIX 2, if any. [/RQ]
Table 15 EFEM Node Parameters from SEMI E87
Requirement ID
EDA Parameter
Req
isTransient
SECS Variable
Type
[Esss.00-RQ-00119-00]
PortStateInfoList
Y
Unrestricted
PortStateInfoList
N/S
[Esss.00-RQ-00120-00]
PortTransferStateList
Y
Unrestricted
PortTransferStateList
N/S
[Esss.00-RQ-00121-00]
LoadPortReservation
StateList
Y
Unrestricted
LoadPortReservation
StateList
N/S
[Esss.00-RQ-00122-00]
PortAssociation
StateList
Y
Unrestricted
PortAssociationState
List
N/S
Explanation
See E87-0709,
¶19.2.1 Table
37
See E87-0709,
¶19.2.1 Table
37
See E87-0709,
¶19.2.1 Table
37
See E87-0709,
¶19.2.1 Table
37
9.3.5.7 SEMI E87 Carrier Location
[Esss.00-RQ-00123-00] Each SEMI E87 Carrier Location shall be represented in the metadata as a MaterialLocation
with MaterialType = Carrier. [/RQ]
[Esss.00-RQ-00124-00] Where the equipment supports E87-0709, the Parameters for MaterialLocations with
MaterialType = Carrier shall conform to Table 16. In the case where a different version is supported, the Table 16
contents shall be modified by the appropriate instructions in APPENDIX 2, if any. [/RQ]
Table 16 MaterialLocation Parameters from SEMI E87 Carrier Locations
Req
isTransient
Type
Explanation
[Esss.00-RQ-00125-00]
Requirement ID
LocationID
EDA Parameter
Y
Unrestricted
LocationIDi
SECS Variable
SV
[Esss.00-RQ-00126-00]
MaterialID
Y
Unrestricted
CarrierIDi
SV
See E87-0709, Table 37
See E87-0709, ¶10.3.6 and
Table 37
[Esss.00-RQ-00127-00] All Carrier Locations (i.e., MaterialLocations) used for transferring Carriers into or out of
an Equipment shall be modeled as child nodes of a Load Port. [/RQ]
9.3.5.8 MaterialManager Node Parameters from SEMI E87
[Esss.00-RQ-00128-00] Where the equipment supports E87-0709, the Parameters for the MaterialManager
LogicalElement shall conform to Table 17. In the case where a different version is supported, the Table 17 contents
shall be modified by the appropriate instructions in APPENDIX 2, if any. [/RQ]
Table 17 MaterialManager Node Parameters from SEMI E87
Requirement ID
EDA Parameter
Req
isTransient
[Esss.00-RQ-00129-00]
CarrierID
Y
Transient
[Esss.00-RQ-00130-00]
CarrierLocation
Matrix
Y
Unrestricted
SECS Variable
CarrierID
CarrierLocation
Matrix
Type
DVVAL
SV
Explanation
See E87-0709, Table 37,
E87.1, Table 4
See E87-0709, Table 37,
E87.1, Table 4
This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline.
Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document
development) activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.
Page 24
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Document Number: 5002B
Date: 3/9/2016
Semiconductor Equipment and Materials International
3081 Zanker Road
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Phone: 408.943.6900, Fax: 408.943.7943
9.3.5.9 SEMI E87 Load Port
9.3.5.9.1 According to SEMI E87, there are two types of Load Ports.
9.3.5.9.1.1 A Load Port for a fixed buffer equipment "has two different Carrier Locations." These two Carrier
Locations are the FIMS location and the undocked location.
9.3.5.9.1.2 The other type of Load Port is for an internal buffer equipment. This type of Load Port typically has one
Carrier Location, however, the number is not formally specified in SEMI E87.
9.3.5.9.1.3 These Carrier Locations are modeled in the EDA Common Metadata as MaterialLocations with
MaterialType = "Carrier".
[Esss.00-RQ-00131-00] The SEMI E87 Load Port object shall be modeled as an equipment Subsystem
(ElementType = “Load Port”) and shall contain at least one MaterialLocation with MaterialType = “Carrier”. [/RQ]
9.3.5.9.2 The E87 CarrierIDReader has been modeled as an undifferentiated part of the load port. Because it tends
to be a simple device, it is not represented as a separate IODevice or Subsystem. It shows up in the metadata only as
a StateMachine and a StateMachineInstance.
[Esss.00-RQ-00132-00] Where the equipment supports E87-0709, the Parameters for the
EquipmentNodeDescription representing the Load Port Subsystem shall conform to Table 18. In the case where a
different version is supported, the Table 18 contents shall be modified by the appropriate instructions in
APPENDIX 2, if any. [/RQ]
Table 18 Load Port Parameters from SEMI E87
Requirement ID
EDA Parameter
Req
isTransient
SECS Variable
Type
[Esss.00-RQ-00133-00]
PortTransferState
Y
Unrestricted
PortTransferStatei
SV
[Esss.00-RQ-00134-00]
LoadPort
ReservationState
Y
Unrestricted
LoadPort
ReservationStatei
SV
[Esss.00-RQ-00135-00]
PortAssociation
State
Y
Unrestricted
PortAssociation
Statei
SV
[Esss.00-RQ-00136-00]
AccessMode
Y
Unrestricted
AccessModei
SV
[Esss.00-RQ-00137-00]
PortStateInfo
Y
Unrestricted
PortStateInfoi
SV
[Esss.00-RQ-00138-00]
PortID
Y
Unrestricted
PortIDi
SV
[Esss.00-RQ-00139-00]
LocationID
Y
Transient
[Esss.00-RQ-00140-00]
BypassReadID
C
Unrestricted
BypassReadID
SV
Y
Unrestricted
n/a
n/a
See ¶9.3.2.5.7
N
Unrestricted
n/a
n/a
See ¶9.3.2.5.7
Y
Unrestricted
n/a
n/a
See ¶9.3.2.5.7
Y
Unrestricted
n/a
n/a
See ¶9.3.2.5.7
Y
Unrestricted
n/a
n/a
See ¶9.3.2.5.7
[Esss.00-RQ-00141-00]
[Esss.00-RQ-00142-00]
[Esss.00-RQ-00143-00]
[Esss.00-RQ-00144-00]
[Esss.00-RQ-00145-00]
LoadPortTransfer
CurrState
LoadPortTransfer
PrevState
LoadPortReservat
ionCurrState
LoadPortCarrier
AssociationCurr
State
AccessModeCurr
State
LocationID
DVVAL
Explanation
See E87-0709, Table 37;
PortTransferState DVVAL is
not needed in EDA.
See E87-0709, Table 37;
LoadPortReservationState
DVVAL is not needed in
EDA.
See E87-0709, Table 37;
PortAssociationState DVVAL
is not needed in EDA.
See E87-0709, Table 37;
AccessMode DVVAL is not
needed in EDA.
See E87-0709, Table 37;
PortStateInfo DVVAL is not
needed in EDA.
See E87-0709, Table 37;
PortID DVVAL is not needed
in EDA.
See E87-0709, Table 37
See E87-0709, Table 37;
Must be included at
Equipment or at Load Port
level, but not both.
This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline.
Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document
development) activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.
Page 25
Doc. 5002B  SEMI
LETTER (YELLOW) BALLOT
DRAFT
Document Number: 5002B
Date: 3/9/2016
Semiconductor Equipment and Materials International
3081 Zanker Road
San Jose, CA 95134-2127
Phone: 408.943.6900, Fax: 408.943.7943
[Esss.00-RQ-00146-00] Each Load Port Subsystem shall include a StateMachineInstance of a StateMachine that
models the SEMI E87 Load Port Transfer state model. [/RQ]
[Esss.00-RQ-00147-00] Each Load Port Subsystem shall include a StateMachineInstance of a StateMachine that
models the SEMI E87 Access Mode state model. [/RQ ]
[Esss.00-RQ-00148-00] Each Load Port Subsystem shall include a StateMachineInstance of a StateMachine that
models the SEMI E87 Reservation state model. [/RQ ]
[Esss.00-RQ-00149-00] Each Load Port Subsystem shall include a StateMachineInstance of a StateMachine that
models the SEMI E87 Carrier Association state model. [/RQ ]
9.3.5.10 SEMI E87 Internal Buffer
9.3.5.10.1 Internal buffer equipment can store Carriers in locations other than those in the Load Ports. These
storage locations are collectively called the internal buffer.
[Esss.00-RQ-00150-00] Where the equipment supports the E87 internal buffer, the internal buffer shall be modeled
as a Subsystem named “InternalBuffer” with ElementType set to “Carrier Buffer”. [/RQ]
9.3.5.10.2 SEMI E120-0310 defines the “Carrier Buffer” ElementType value.
[Esss.00-RQ-00151-00] Where the equipment supports E87-0709, and an internal buffer Subsystem is implemented,
the Parameters for the EquipmentNodeDescription representing the internal buffer Subsystem shall conform to
Table 19. In the case where a different version is supported, the Table 19 contents shall be modified by the
appropriate instructions in APPENDIX 2, if any. [/RQ]
Table 19 InternalBuffer Parameters from SEMI E87
Requirement ID
EDA Parameter
Req
isTransient
SECS Variable
Type
Explanation
[Esss.00-RQ-00152-00]
BufferPartitionInfo
Y
Transient
BufferPartitionInfo
DVVAL
See E87-0709, Table 37
[Esss.00-RQ-00153-00]
BufferCapacityList
Y
Unrestricted
BufferCapacityList
SV
See E87-0709, Table 37
9.3.5.11 SEMI E87 BufferPartition
9.3.5.11.1 Internal buffers may contain one or more buffer partitions.
[Esss.00-RQ-00154-00] Any buffer partition that is implemented shall be modeled as a LogicalElement within the
InternalBuffer Subsystem and with ElementType value equal to “Buffer Partition”. [/RQ]
[Esss.00-RQ-00155-00] Where the equipment supports E87-0709, and a buffer partition LogicalElement is
implemented, the Parameters for the EquipmentNodeDescription representing the buffer partition LogicalElement
shall conform to Table 20. In the case where a different version is supported, the Table 20 contents shall be
modified by the appropriate instructions in APPENDIX 2, if any. [/RQ]
This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline.
Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document
development) activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.
Page 26
Doc. 5002B  SEMI
LETTER (YELLOW) BALLOT
DRAFT
Document Number: 5002B
Date: 3/9/2016
Semiconductor Equipment and Materials International
3081 Zanker Road
San Jose, CA 95134-2127
Phone: 408.943.6900, Fax: 408.943.7943
Table 20 BufferPartition Parameters from SEMI E87
Requirement ID
EDA Parameter
Req
isTransient
SECS Variable
Type
[Esss.00-RQ-00156-00]
BufferPartition
Info
Y
Unrestricted
BufferPartition
Infoi
SV
[Esss.00-RQ-00157-00]
PartitionID
N
Unrestricted
PartitionIDi
SV
[Esss.00-RQ-00158-00]
PartitionType
N
Unrestricted
PartitionTypei
SV
[Esss.00-RQ-00159-00]
AvailPartition
Capacity
N
Unrestricted
AvailPartition
Capacityi
SV
[Esss.00-RQ-00160-00]
PartitionCapacity
N
Unrestricted
PartitionCapacityi
SV
[Esss.00-RQ-00161-00]
Unallocated
PartitionCapacity
N
Unrestricted
Unallocated
PartitionCapacityi
SV
Explanation
See E87-0709, Table 37
See E87-0709, Table 37;
contained in
BufferPartitionInfo
See E87-0709, Table 37;
contained in
BufferPartitionInfo
See E87-0709, Table 37;
contained in
BufferPartitionInfo
See E87-0709, Table 37;
contained in
BufferPartitionInfo
See E87-0709, Table 37;
contained in
BufferPartitionInfo
9.3.6 SEMI E90 Substrate Tracking
[Esss.00-RQ-00162-00] Equipment which implement SEMI E90 shall conform to the requirements in this section,
entitled SEMI E90 Substrate Tracking. [/RQ]
[Esss.00-RQ-00163-00] Implementers shall represent the metadata constructs relating to SEMI E90 with the content
of the E90 Common Metadata files listed in Table 21. The content of the files listed in Table 21 shall be modified:
a) According to the instructions embedded as comments in those files, and
b) According to the additional instructions in Appendix 2 for adapting the files to the specific version of SEMI E90
implemented on the equipment. [/RQ]
Table 21 XML Files For SEMI E90
RequirementID
[Esss.00-RQ-00164-00]
[Esss.00-RQ-00165-00]
[Esss.00-RQ-00166-00]
[Esss.00-RQ-00167-00]
[Esss.00-RQ-00168-00]
File Name
File Location Within Collection
E90GetEquipmentNodeDescriptions.xml
E90GetEquipmentStructure.xml
E90GetSEMIObjTypes.xml
E90GetStateMachines.xml
E90GetTypeDefinitions.xml
\EDA 0710 Common Metadata\E90-0707
\EDA 0710 Common Metadata\E90-0707
\EDA 0710 Common Metadata\E90-0707
\EDA 0710 Common Metadata\E90-0707
\EDA 0710 Common Metadata\E90-0707
9.3.6.1 In the case of SEMI E90, there is no unique required content for GetExceptions or GetUnits.
9.3.6.2 The E90 metadata files need the following entries from the CommonGetTypeDefinitions.xml file: boolean,
String32, String80, String128, LocationStateEnum.
9.3.6.3 SEMI E90 Equipment Node
[Esss.00-RQ-00169-00] Where the equipment supports E90-0707, the Parameters for the
EquipmentNodeDescription representing the Equipment shall conform to Table 22. In the case where a different
version is supported, the Table 22 contents shall be modified by the appropriate instructions in APPENDIX 2, if any.
[/RQ]
Table 22 Equipment Node Parameters from SEMI E90
Requirement ID
[Esss.00-RQ-00170-00]
EDA Parameter
SubstrateReader
Enabled
Req
isTransient
SECS Variable
Type
Explanation
C
Unrestricted
SubstrateReader
Enabled
ECV
See E90-0707, 8.3; E90.1,
5.1 Table 5. Required only
if the equipment provides a
Substrate Reader.
This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline.
Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document
development) activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.
Page 27
Doc. 5002B  SEMI
LETTER (YELLOW) BALLOT
DRAFT
Document Number: 5002B
Date: 3/9/2016
Semiconductor Equipment and Materials International
3081 Zanker Road
San Jose, CA 95134-2127
Phone: 408.943.6900, Fax: 408.943.7943
9.3.6.4 SEMI E90 Substrate Object
[Esss.00-RQ-00171-00] The SEMI E90 Substrate object shall be represented in the equipment metadata as a SEMI
Object associated with the EquipmentNodeDescription representing the MaterialManager LogicalElement. [/RQ]
[Esss.00-RQ-00172-00] Where the equipment supports E90-0707, the Parameters for the Substrate SEMIObjType
shall conform to Table 23 and Table 24. In the case where a different version is supported, the Table 23 and Table
24 contents shall be modified by the appropriate instructions in APPENDIX 2, if any. [/RQ]
Table 23 Substrate Object Attribute Parameters from SEMI E90
Requirement ID
EDA Parameter
Req
isTransient
SECS Variable
Typ
e
[Esss.00-RQ-00173-00]
[Esss.00-RQ-00174-00]
ObjID
ObjType
Y
Y
Unrestricted
Unrestricted
ObjID
ObjType
Attr
Attr
[Esss.00-RQ-00175-00]
AcquiredID
C
Unrestricted
AcquiredID
Attr
[Esss.00-RQ-00176-00]
BatchLocID
C
Unrestricted
BatchLocID
Attr
[Esss.00-RQ-00177-00]
LotID
Y
Unrestricted
LotID
Attr
[Esss.00-RQ-00178-00]
MaterialStatus
Y
Unrestricted
MaterialStatus
Attr
[Esss.00-RQ-00179-00]
SubstDestination
Y
Unrestricted
SubstDestination
Attr
[Esss.00-RQ-00180-00]
SubstHistory
Y
Unrestricted
SubstHistory
Attr
[Esss.00-RQ-00181-00]
SubstIDStatus
C
Unrestricted
SubstIDStatus
Attr
[Esss.00-RQ-00182-00]
SubstLocID
Y
Unrestricted
SubstLocID
Attr
[Esss.00-RQ-00183-00]
SubstPosInBatch
C
Unrestricted
SubstPosInBatch
Attr
[Esss.00-RQ-00184-00]
SubstProcState
Y
Unrestricted
SubstProcState
Attr
[Esss.00-RQ-00185-00]
SubstSource
Y
Unrestricted
SubstSource
Attr
[Esss.00-RQ-00186-00]
SubstState
Y
Unrestricted
SubstState
Attr
Explanation
See E90-0707, Table 2
See E90-0707, Table 2
See E90-0707, Table 2, ¶8.5.1,
and Table 15. Required only on
equipment with Substrate ID
readers. AcquiredID DVVAL is
not needed in EDA.
See E90-0707, Table 2, ¶8.5.1,
and Table 15. Required on batch
process equipment only.
SubstBatchLocID DVVAL is
not needed in EDA.
See E90-0707, Table 2, ¶8.5.1,
and Table 15. SubstLotID
DVVAL is not needed in EDA.
See E90-0707, Table 2, ¶8.5.1,
and Table 15. SubstMtrlStatus
DVVAL is not needed in EDA.
See E90-0707, Table 2, ¶8.5.1,
and Table 15. SubstDestination
DVVAL is not needed in EDA.
See E90-0707, Table 2, ¶8.5.1,
and Table 15. SubstHistory
DVVAL is not needed in EDA.
See E90-0707, Table 2, ¶8.5.1,
and Table 15. Required only
on equipment with Substrate
ID readers. SubstIDStatus
DVVAL is not needed in EDA.
See E90-0707, Table 2, ¶8.5.1,
and Table 15. SubstSubstLocID
DVVAL is not needed in EDA.
See E90-0707, Table 2, ¶8.5.1,
and Table 15. Required only on
equipment with Batch Locations.
SubstPosInBatch DVVAL is not
needed in EDA.
See E90-0707, Table 2, ¶8.5.1,
and Table 15. SubstProcState
DVVAL is not needed in EDA.
See E90-0707, Table 2, ¶8.5.1,
and Table 15. SubstSource
DVVAL is not needed in EDA.
See E90-0707, Table 2, ¶8.5.1,
and Table 15. SubstState
DVVAL is not needed in EDA.
This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline.
Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document
development) activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.
Page 28
Doc. 5002B  SEMI
LETTER (YELLOW) BALLOT
DRAFT
Document Number: 5002B
Date: 3/9/2016
Semiconductor Equipment and Materials International
3081 Zanker Road
San Jose, CA 95134-2127
Phone: 408.943.6900, Fax: 408.943.7943
EDA Parameter
Req
isTransient
SECS Variable
Typ
e
[Esss.00-RQ-00187-00]
SubstType
N
Unrestricted
SubstType
Attr
[Esss.00-RQ-00188-00]
SubstUsage
N
Unrestricted
SubstUsage
Attr
Explanation
See E90-0707, Table 2, ¶8.5.1,
and Table 15. SubstType
DVVAL is not needed in EDA.
See E90-0707, Table 2, ¶8.5.1,
and Table 15. SubstUsage
DVVAL is not needed in EDA.
Table 24 Substrate Object EventData Parameters from SEMI E90
Requirement ID
EDA Parameter
Req
isTransient
SECS Variable
Type
[Esss.00-RQ-00189-00]
AcquiredIDList
C
Transient
AcquiredIDList
DVVAL
[Esss.00-RQ-00190-00]
SubstBatchLocID
List
C
Transient
SubstBatchLocID
List
DVVAL
[Esss.00-RQ-00191-00]
SubstDestination
List
C
Transient
SubstDestination
List
DVVAL
[Esss.00-RQ-00192-00]
SubstHistoryList
C
Transient
SubstHistoryList
DVVAL
[Esss.00-RQ-00193-00]
SubstID
Y
Transient
SubstID
DVVAL
[Esss.00-RQ-00194-00]
SubstIDList
C
Transient
SubstIDList
DVVAL
[Esss.00-RQ-00195-00]
SubstIDStatusList
C
Transient
SubstIDStatusList
DVVAL
[Esss.00-RQ-00196-00]
SubstLocIDList
C
Transient
SubstLocIDList
DVVAL
[Esss.00-RQ-00197-00]
SubstLotIDList
C
Transient
SubstLotIDList
DVVAL
[Esss.00-RQ-00198-00]
SubstMtrlStatus
List
C
Transient
SubstMtrlStatus
List
DVVAL
[Esss.00-RQ-00199-00]
SubstPosInBatch
List
C
Transient
SubstPosInBatch
List
DVVAL
Explanation
See E90-0707, ¶8.4.1,
8.5.2, and Table 15.
Required only on internal
buffer equipment with
Substrate ID readers
See E90-0707, ¶8.4.1,
8.5.2, and Table 15.
Required only on internal
buffer equipment with
Batch Locations
See E90-0707, ¶8.4.1,
8.5.2, and Table 15.
Required only on internal
buffer equipment
See E90-0707, ¶8.4.1,
8.5.2, and Table 15.
Required only on internal
buffer equipment
See E90-0707, ¶8.5.1,
and Table 15
See E90-0707, ¶8.4.1,
8.5.2, and Table 15.
Required only on internal
buffer equipment
See E90-0707, ¶8.5.2,
and Table 15. Required
only on internal buffer
equipment with Substrate
ID readers
See E90-0707, ¶8.4.1,
8.5.2, and Table 15.
Required only on internal
buffer equipment
See E90-0707, ¶8.4.1,
8.5.2, and Table 15.
Required only on internal
buffer equipment
See E90-0707, ¶8.4.1,
8.5.2, and Table 15.
Required only on internal
buffer equipment
See E90-0707, ¶8.5.2,
and Table 15; Required
only on internal buffer
equipment with batch
locations
This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline.
Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document
development) activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.
Page 29
Doc. 5002B  SEMI
LETTER (YELLOW) BALLOT
Requirement ID
DRAFT
Document Number: 5002B
Date: 3/9/2016
Semiconductor Equipment and Materials International
3081 Zanker Road
San Jose, CA 95134-2127
Phone: 408.943.6900, Fax: 408.943.7943
EDA Parameter
Req
[Esss.00-RQ-00200-00]
SubstProcState
List
C
[Esss.00-RQ-00201-00]
SubstSourceList
[Esss.00-RQ-00202-00]
isTransient
SECS Variable
Type
Explanation
See E90-0707, ¶8.5.2,
and Table 15. Required
only on internal buffer
equipment
See E90-0707, ¶8.4.1,
8.5.2, and Table 15.
Required only on internal
buffer equipment
See E90-0707, ¶8.4.1,
8.5.2, and Table 15.
Required only on internal
buffer equipment
See E90-0707, ¶8.4.1,
8.5.2, and Table 15.
Required only on internal
buffer equipment where
SubstType attribute is
implemented
See E90-0707, ¶8.5.2,
and Table 15. Required
only on internal buffer
equipment where
SubstUsage attribute is
implemented
Transient
SubstProcState
List
DVVAL
C
Transient
SubstSourceList
DVVAL
SubstStateList
C
Transient
SubstStateList
DVVAL
[Esss.00-RQ-00203-00]
SubstTypeList
C
Transient
SubstTypeList
DVVAL
[Esss.00-RQ-00204-00]
SubstUsageList
C
Transient
SubstUsageList
DVVAL
Y
Unrestricted
n/a
n/a
See ¶9.3.2.5.7
N
Unrestricted
n/a
n/a
See ¶9.3.2.5.7
Y
Unrestricted
n/a
n/a
See ¶9.3.2.5.7
N
Unrestricted
n/a
n/a
See ¶9.3.2.5.7
Y
Unrestricted
n/a
n/a
See ¶9.3.2.5.7
N
Unrestricted
n/a
n/a
See ¶9.3.2.5.7
[Esss.00-RQ-00205-00]
[Esss.00-RQ-00206-00]
[Esss.00-RQ-00207-00]
[Esss.00-RQ-00208-00]
[Esss.00-RQ-00209-00]
[Esss.00-RQ-00210-00]
Substrate
Processing
CurrState
Substrate
Processing
PrevState
SubstrateReading
StatusCurrState
SubstrateReading
StatusPrevState
Substrate
Transport
CurrState
Substrate
Transport
PrevState
[Esss.00-RQ-00211-00] The Substrate SEMI Object shall include a StateMachineInstance of a StateMachine that
models the SEMI E90 Substrate Object State Model. [/RQ]
9.3.6.5 SEMI E90 Substrate Location
[Esss.00-RQ-00212-00] Each fixed substrate location within the equipment (in SEMI E90 called equipment
substrate location) shall be represented in the metadata as a MaterialLocation with MaterialType = Substrate. [/RQ]
9.3.6.5.1 This specification differentiates between fixed substrate locations and dynamic ones. The fixed locations
exist at all times. Dynamic locations are created and deleted as appropriate. The only dynamic locations specified
in the content standards are the individual locations (slots) within a Carrier. All others are fixed locations.
[Esss.00-RQ-00213-00] Where the equipment supports E90-0707, the Parameters of each
EquipmentNodeDescription that represents a MaterialLocation with MaterialType = Substrate shall conform to
Table 25. In the case where a different version is supported, the Table 25 contents shall be modified by the
appropriate instructions in APPENDIX 2, if any. [/RQ]
This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline.
Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document
development) activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.
Page 30
Doc. 5002B  SEMI
LETTER (YELLOW) BALLOT
Requirement ID
DRAFT
Document Number: 5002B
Date: 3/9/2016
Semiconductor Equipment and Materials International
3081 Zanker Road
San Jose, CA 95134-2127
Phone: 408.943.6900, Fax: 408.943.7943
Table 25 MaterialLocation Parameters from SEMI E90 SubstLoc Object
Requirement ID
EDA Parameter
Req
isTransient
SECS Variable
Type
Explanation
[Esss.00-RQ-00214-00]
SubstLocID
Y
Unrestricted
ObjID or
SubstLocIDi
[Esss.00-RQ-00215-00]
DisableEvents
Y
Unrestricted
DisableEvents
Attr
[Esss.00-RQ-00216-00]
SubstID
Y
Unrestricted
SubstID or
SubstrLocSubstrIDi
Attr
SV
[Esss.00-RQ-00217-00]
SubstLocState
Y
Unrestricted
SubstLocState or
SubstLocStatei
Attr
SV
[Esss.00-RQ-00218-00]
MaterialID
SubstrateLocation
CurrState
Y
Unrestricted
SubstID
Attr
See E90-0707, Table 5,
and Table 18.
SubstLocID DVVAL is
not needed in EDA.
See E90-0707, Table 5;
Configuration parameter
See E90-0707, Table 5
and Table 18.
SubstrLocSubstrID
DVVAL is not needed in
EDA.
See E90-0707, Table 5
and Table 18.
SubstLocState DVVAL
is not needed in EDA.
See E90-0707, Table 5.
Y
Unrestricted
n/a
n/a
See ¶9.3.2.5.7
[Esss.00-RQ-00219-00]
Attr
SV
9.3.6.5.2 Table 25 shows some EDA Parameters representing both a status variable and an attribute from the E90
SubstLoc object. This is because each pair provides the same values through different SECS mechanisms. The
attributes are accessed through E39 object services. The SVs are accessed via Stream 1 queries and Stream 6 event
reports. The EDA Parameters listed in the tables provide those same values through EDA messaging.
[Esss.00-RQ-00220-00] Each slot in a carrier (in SEMI E90 called carrier substrate location) shall be represented in
the metadata as a SEMIObjType (ObjType = “SubstLoc”) associated with the EquipmentNodeDescription
representing the MaterialManager LogicalElement. [/RQ]
9.3.6.5.3 For internal buffer equipment, the carrier, and thus the slots, may move around the equipment. Therefore,
the SubstLoc objects were associated with an equipment-level LogicalElement, the MaterialManager.
[Esss.00-RQ-00221-00] Where the equipment supports E90-0707, the Parameters for the SubstLoc SEMIObjType
shall conform to Table 26 and Table 27. In the case where a different version is supported, the Table 26 and Table
27 contents shall be modified by the appropriate instructions in APPENDIX 2, if any. [/RQ]
Table 26 SubstLoc Object Attribute Parameters from SEMI E90
Requirement ID
EDA Parameter
Req
isTransient
SECS Variable
Type
[Esss.00-RQ-00222-00]
ObjID
Y
Unrestricted
ObjID
Attr
[Esss.00-RQ-00223-00]
ObjType
Y
Unrestricted
ObjType
Attr
[Esss.00-RQ-00224-00]
DisableEvents
Y
Unrestricted
DisableEvents
Attr
[Esss.00-RQ-00225-00]
SubstID
Y
Unrestricted
SubstID
Attr
[Esss.00-RQ-00226-00]
SubstLocState
Y
Unrestricted
SubstLocState
Attr
Explanation
See E90-0707, Table 5.
SubstLocID DVVAL is not
needed in EDA.
See E90-0707, Table 5
See E90-0707, Table 5;
Configuration parameter
See E90-0707, Table 5.
SubstrLocSubstrID DVVAL
is not needed in EDA.
See E90-0707, Table 5.
SubstLocState DVVAL is not
needed in EDA.
Table 27 SubstLoc Object EventData Parameters from SEMI E90
Requirement ID
EDA Parameter
Req
isTransient
SECS Variable
Type
Explanation
[Esss.00-RQ-00227-00]
MaterialID
Y
Unrestricted
SubstID
Attr
See E90-0707, Table 5 and
Table 16.
[Esss.00-RQ-00228-00]
SubstrateLocation
CurrState
Y
Unrestricted
n/a
n/a
See ¶9.3.2.5.7
This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline.
Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document
development) activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.
Page 31
Doc. 5002B  SEMI
LETTER (YELLOW) BALLOT
DRAFT
Document Number: 5002B
Date: 3/9/2016
Semiconductor Equipment and Materials International
3081 Zanker Road
San Jose, CA 95134-2127
Phone: 408.943.6900, Fax: 408.943.7943
[Esss.00-RQ-00229-00] A StateMachineInstance of the SEMI E90 Substrate Location State Model shall be attached
to each EquipmentNodeDescription representing a MaterialLocation with MaterialType = Substrate and to the
SEMIObjType with ObjType = “SubstLoc”. [/RQ]
9.3.6.6 SEMI E90 Batch Location
[Esss.00-RQ-00230-00] Equipment which implement SEMI E90 Batch Locations shall conform to the requirements
in this section, entitled SEMI E90 Batch Location. [/RQ]
[Esss.00-RQ-00231-00] Implementers shall represent the metadata constructs relating to SEMI E90 Batch Locations
with the content of the E90 Batch Location Common Metadata files listed in Table 28. The content of the files listed
in Table 28 shall be modified:
a) According to the instructions embedded as comments in those files, and
b) According to the additional instructions in Appendix 2 for adapting the files to the specific version of SEMI E90
implemented on the equipment. [/RQ]
Table 28 XML Files For SEMI E90 Batch Location
RequirementID
[Esss.00-RQ-00232-00]
[Esss.00-RQ-00233-00]
[Esss.00-RQ-00234-00]
[Esss.00-RQ-00235-00]
File Name
File Location Within Collection
E90BatchGetEquipmentNodeDescriptions.xml
E90BatchGetEquipmentStructure.xml
E90BatchGetStateMachines.xml
E90BatchGetTypeDefinitions.xml
\EDA 0710 Common Metadata\E90-0707\Batch
\EDA 0710 Common Metadata\E90-0707\Batch
\EDA 0710 Common Metadata\E90-0707\Batch
\EDA 0710 Common Metadata\E90-0707\Batch
9.3.6.6.1 In the case of SEMI E90 Batch Location, there is no required content for GetExceptions or GetUnits.
[Esss.00-RQ-00236-00] The SEMI E90 Batch Location shall be represented in the metadata as a MaterialLocation.
[/RQ]
[Esss.00-RQ-00237-00] Where the equipment supports E90-0707, the Parameters for an EquipmentNodeDescription
representing a Batch Location shall conform to Table 29. In the case where a different version is supported, the
Table 29 contents shall be modified by the appropriate instructions in APPENDIX 2, if any. [/RQ]
Table 29 MaterialLocation Parameters for Batch Locations from SEMI E90
Requirement ID
EDA Parameter
Req
isTransient
SECS Variable
Type
Explanation
[Esss.00-RQ-00238-00]
DisableEvents
Y
Unrestricted
DisableEvents
Attr
[Esss.00-RQ-00239-00]
BatchSubstIDMap
Y
Unrestricted
BatchSubstIDMap
Attr
[Esss.00-RQ-00240-00]
BatchLocState
Y
Unrestricted
BatchLocState
Attr
[Esss.00-RQ-00241-00]
BatchLocID
Y
Unrestricted
BatchLocID
Attr
[Esss.00-RQ-00242-00]
MaterialID
BatchLocation
CurrState
N
Unrestricted
n/a
n/a
See E90-0707, Table 7;
Configuration parameter
See E90-0707, Table 7
and Table 17
See E90-0707, Table 7
and Table 17
See E90-0707, Table 7
and Table 17
See ¶9.2.3.8.5
Y
Unrestricted
n/a
n/a
See ¶9.3.2.5.7
[Esss.00-RQ-00243-00]
[Esss.00-RQ-00244-00] A StateMachineInstance of the SEMI E90 Batch Location State Model shall be attached to
each MaterialLocation representing a Batch Location. [/RQ]
9.3.7 SEMI E94 Control Job Management
[Esss.00-RQ-00245-00] Equipment which implement SEMI E94 shall conform to the requirements in this section,
entitled SEMI E94 Control Job Management. [/RQ]
This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline.
Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document
development) activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.
Page 32
Doc. 5002B  SEMI
LETTER (YELLOW) BALLOT
DRAFT
Document Number: 5002B
Date: 3/9/2016
Semiconductor Equipment and Materials International
3081 Zanker Road
San Jose, CA 95134-2127
Phone: 408.943.6900, Fax: 408.943.7943
[Esss.00-RQ-00246-00] Implementers shall represent the metadata constructs relating to SEMI E94 with the content
of the E94 Common Metadata files listed in Table 30. The content of the files listed in Table 30 shall be modified:
a) According to the instructions embedded as comments in those files, and
b) According to the additional instructions in Appendix 2 for adapting the files to the specific version of SEMI E94
implemented on the equipment. [/RQ]
Table 30 XML Files For SEMI E94
RequirementID
[Esss.00-RQ-00247-00]
[Esss.00-RQ-00248-00]
[Esss.00-RQ-00249-00]
[Esss.00-RQ-00250-00]
[Esss.00-RQ-00251-00]
[Esss.00-RQ-00252-00]
File Name
File Location Within Collection
E94GetEquipmentNodeDescriptions.xml
E94GetEquipmentStructure.xml
E94GetExceptions.xml
E94GetSEMIObjTypes.xml
E94GetStateMachines.xml
E94GetTypeDefinitions.xml
\EDA 0710 Common Metadata\E94-0309
\EDA 0710 Common Metadata\E94-0309
\EDA 0710 Common Metadata\E94-0309
\EDA 0710 Common Metadata\E94-0309
\EDA 0710 Common Metadata\E94-0309
\EDA 0710 Common Metadata\E94-0309
9.3.7.1 In the case of SEMI E94, there is no unique required content for GetUnits.
9.3.7.2 The E94 metadata files need the following entries from the CommonGetTypeDefinitions.xml file: boolean,
int, long, String80, String128, SlotArray, PauseEventArray, and CarrierSlotList.
9.3.7.3 The E94 metadata files need the following entries from the CommonGetUnits.xml file: non-dimensional
quantity.
9.3.7.4 ControlJob
[Esss.00-RQ-00253-00] The SEMI E94 ControlJob object shall be modeled in the equipment metadata as a SEMI
Object associated with the EquipmentNodeDescription representing the JobManager LogicalElement. [/RQ]
[Esss.00-RQ-00254-00] Where the equipment supports E94-0709, the Parameters for the ControlJob SEMIObjType
shall conform to Table 31 and Table 32. In the case where a different version is supported, the Table 31 and Table
32 contents shall be modified by the appropriate instructions in APPENDIX 2, if any. [/RQ]
Table 31 ControlJob Object Attribute Parameters from SEMI E94
Requirement ID
EDA Parameter
Req
isTransient
SECS Variable
Type
[Esss.00-RQ-00255-00]
ObjID
Y
Unrestricted
ObjID
Attr
[Esss.00-RQ-00256-00]
ObjType
Y
Unrestricted
ObjType
Attr
[Esss.00-RQ-00257-00]
CurrentPRJob
Y
Unrestricted
CurrentPRJob
Attr
[Esss.00-RQ-00258-00]
DataCollectionPlan
N
Unrestricted
DataCollectionPlan
Attr
[Esss.00-RQ-00259-00]
CarrierInputSpec
Y
Unrestricted
CarrierInputSpec
Attr
[Esss.00-RQ-00260-00]
MtrlOutSpec
Y
Unrestricted
MtrlOutSpec
Attr
Explanation
See E94-0709, Table 1,
¶13.1.1, and Table 15.
CtrlJobID DVVAL is not
needed in EDA.
See E94-0709, Table 1
See E94-0709, Table 1
and ¶13.1.1.
CurrentPRJob DVVAL
is not needed in EDA.
See E94-0709, Table 1
and ¶13.1.1.
DataCollectionPlan
DVVAL is not needed in
EDA.
See E94-0709, Table 1
and ¶13.1.1.
CarrierInputSpec
DVVAL is not needed in
EDA.
See E94-0709, Table 1
and ¶13.1.1.
MtrlOutSpec DVVAL is
not needed in EDA.
This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline.
Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document
development) activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.
Page 33
Doc. 5002B  SEMI
LETTER (YELLOW) BALLOT
DRAFT
Document Number: 5002B
Date: 3/9/2016
Semiconductor Equipment and Materials International
3081 Zanker Road
San Jose, CA 95134-2127
Phone: 408.943.6900, Fax: 408.943.7943
EDA Parameter
Req
isTransient
SECS Variable
Type
[Esss.00-RQ-00261-00]
MtrlOutByStatus
N
Unrestricted
MtrlOutByStatus
Attr
[Esss.00-RQ-00262-00]
PauseEvent
N
Unrestricted
PauseEvent
Attr
[Esss.00-RQ-00263-00]
PRJobStatusList
Y
Unrestricted
PRJobStatusList
Attr
[Esss.00-RQ-00264-00]
ProcessingCtrlSpec
Y
Unrestricted
ProcessingCtrlSpec
Attr
[Esss.00-RQ-00265-00]
ProcessOrderMgmt
Y
Unrestricted
ProcessOrderMgmt
Attr
[Esss.00-RQ-00266-00]
StartMethod
Y
Unrestricted
StartMethod
Attr
[Esss.00-RQ-00267-00]
State
Y
Unrestricted
State
Attr
Explanation
See E94-0709, Table 1
and ¶13.1.1.
MtrlOutByStatus
DVVAL is not needed in
EDA.
See E94-0709, Table 1
and ¶13.1.1. PauseEvent
DVVAL is not needed in
EDA.
See E94-0709, Table 1
and ¶13.1.1.
PRJobStatusList
DVVAL is not needed in
EDA.
See E94-0709, Table 1
and ¶13.1.1.
ProcessingCtrlSpec
DVVAL is not needed in
EDA.
See E94-0709, Table 1
and ¶13.1.1.
ProcessOrderMgmt
DVVAL is not needed in
EDA.
See E94-0709, Table 1
and ¶13.1.1. StartMethod
DVVAL is not needed in
EDA.
See E94-0709, Table 1
and ¶13.1.1. State
DVVAL is not needed in
EDA.
Table 32 ControlJob Object EventData Parameters from SEMI E94
Requirement ID
[Esss.00-RQ-00268-00]
[Esss.00-RQ-00269-00]
EDA Parameter
Req
isTransient
ControlJobCurrState
ControlJobPrevState
Y
N
Unrestricted
Unrestricted
SECS Variable
n/a
n/a
Type
n/a
n/a
Explanation
See ¶9.3.2.5.7
See ¶9.3.2.5.7
[Esss.00-RQ-00270-00] The ControlJob SEMI Object shall include a StateMachineInstance of a StateMachine that
models the SEMI E94 Control Job State Model. [/RQ]
9.3.7.5 JobManager
9.3.7.5.1 Some Parameters associated with the JobManager come from SEMI E94.
[Esss.00-RQ-00271-00] Where the equipment supports E94-0709, the Parameters for the
EquipmentNodeDescription representing the JobManager LogicalElement shall conform to Table 33. In the case
where a different version is supported, the Table 33 contents shall be modified by the appropriate instructions in
APPENDIX 2, if any. [/RQ]
This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline.
Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document
development) activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.
Page 34
Doc. 5002B  SEMI
LETTER (YELLOW) BALLOT
Requirement ID
DRAFT
Document Number: 5002B
Date: 3/9/2016
Semiconductor Equipment and Materials International
3081 Zanker Road
San Jose, CA 95134-2127
Phone: 408.943.6900, Fax: 408.943.7943
Table 33 JobManager Parameters from SEMI E94
Requirement ID
EDA Parameter
Req
isTransient
[Esss.00-RQ-00272-00]
CtrlJobID
N
Transient
[Esss.00-RQ-00273-00]
QueuedCJobs
QueueAvailable
Space
SetUpName
Y
Unrestricted
Y
Unrestricted
Y
Unrestricted
[Esss.00-RQ-00274-00]
[Esss.00-RQ-00275-00]
SECS Variable
CtrlJobID
the
Explanation
SV
See E94-0709, Table 15 and
E94.1, Table 5; This
parameter should be
included only on equipment
supporting Material
Redirection Mode.
See E94-0709, Table 15
SV
See E94-0709, Table 15
ECV
See E94-0709, Table 15
DVVAL
QueuedCJobs
QueueAvailable
Space
SetUpName
9.3.7.5.2 The CtrlJobID Parameter was created to support
SubstrateDestinationNotAccessible Exceptions (see also ¶9.2.6.4 ).
9.3.8 SEMI E116 Equipment Performance Tracking
Type
SubstrateDestinationUnknown
and
[Esss.00-RQ-00276-00] Equipment which implement SEMI E116 shall conform to the requirements in this section,
entitled SEMI E116 Equipment Performance Tracking. [/RQ]
[Esss.00-RQ-00277-00] Implementers shall represent the metadata constructs relating to SEMI E116 with the
content of the E116 Common Metadata files listed in Table 34. The content of the files listed in Table 34 shall be
modified
a) According to the instructions embedded as comments in those files, and
b) According to the additional instructions in Appendix 2 for adapting the files to the specific version of SEMI E116
implemented on the equipment. [/RQ]
Table 34 XML Files For SEMI E116
RequirementID
[Esss.00-RQ-00278-00]
[Esss.00-RQ-00279-00]
[Esss.00-RQ-00280-00]
[Esss.00-RQ-00281-00]
File Name
File Location Within Collection
E116GetEquipmentNodeDescriptions.xml
E116GetEquipmentStructure.xml
E116GetStateMachines.xml
E116GetTypeDefinitions.xml
\EDA 0710 Common Metadata\E116-0707
\EDA 0710 Common Metadata\E116-0707
\EDA 0710 Common Metadata\E116-0707
\EDA 0710 Common Metadata\E116-0707
9.3.8.1 In the case of SEMI E116, there is no unique required content for GetExceptions, GetSEMIObjTypes, or
GetUnits.
9.3.8.2 The E116 metadata files need the following entries from the CommonGetTypeDefinitions.xml file: boolean,
short, long, String32, String80, and String128.
9.3.8.3 The E116 metadata files need the following entries from the CommonGetUnits.xml file: non-dimensional
quantity and second.
9.3.8.4 SEMI E116 defines the EPTTracker object. The EPTTracker is a persistent object, and is thus represented
as a LogicalElement in the EDA Common Metadata.
[Esss.00-RQ-00282-00] The equipment metadata shall model each SEMI E116 EPTTracker object as a
LogicalElement with the value for the ElementType attribute equal to "EPTTracker". [/RQ]
9.3.8.4.1 Note that the E116 EPTTracker object ObjType value of “EPTTracker” is contained in the ElementType
attribute.
[Esss.00-RQ-00283-00] Where the equipment supports E116-0707, the Parameters for the
EquipmentNodeDescription representing each EPTTracker LogicalElement shall conform to Table 35. In the case
where a different version is supported, the Table 35 contents shall be modified by the appropriate instructions in
APPENDIX 2, if any. [/RQ]
This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline.
Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document
development) activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.
Page 35
Doc. 5002B  SEMI
LETTER (YELLOW) BALLOT
DRAFT
Document Number: 5002B
Date: 3/9/2016
Semiconductor Equipment and Materials International
3081 Zanker Road
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Phone: 408.943.6900, Fax: 408.943.7943
Table 35 EPTTracker Node Parameters from SEMI E116
Requirement ID
EDA Parameter
Req
isTransient
SECS Variable
Type
[Esss.00-RQ-00284-00]
BlockedReason
Y
Unrestricted
BlockedReason
Attr
[Esss.00-RQ-00285-00]
BlockedReasonText
Y
Unrestricted
BlockedReasonText
Attr
Y
Unrestricted
Y
Unrestricted
DisableEventOn
Transition
EPTElementType
[Esss.00-RQ-00287-00]
DisableEventOn
Transition
EPTElementType
[Esss.00-RQ-00288-00]
EPTState
Y
Unrestricted
EPTState
Attr
[Esss.00-RQ-00289-00]
EPTStateTime
Y
Unrestricted
EPTStateTime
Attr
[Esss.00-RQ-00290-00]
EPTElementName
Y
Unrestricted
EPTElementName
Attr
[Esss.00-RQ-00291-00]
PreviousEPTState
Y
Unrestricted
PreviousEPTState
Attr
[Esss.00-RQ-00292-00]
PreviousTaskName
Y
Unrestricted
PreviousTaskName
Attr
[Esss.00-RQ-00293-00]
PreviousTaskType
Y
Unrestricted
PreviousTaskType
Attr
[Esss.00-RQ-00294-00]
TaskName
Y
Unrestricted
TaskName
Attr
[Esss.00-RQ-00295-00]
TaskType
Y
Unrestricted
TaskType
Attr
Y
Unrestricted
Y
Y
Unrestricted
Unrestricted
Transition
Timestamp
Transition
TrackerEventID
[Esss.00-RQ-00286-00]
[Esss.00-RQ-00296-00]
[Esss.00-RQ-00297-00]
[Esss.00-RQ-00298-00]
Transition
Timestamp
Transition
TrackerEventID
Explanation
See E116-0707, Table 3
and Table 4.
BlockedReason DVVAL is
not needed in EDA.
See E116-0707, Table 3
and Table 4.
BlockedReasonText
DVVAL is not needed in
EDA.
Attr
See E116-0707, Table 3
Attr
See E116-0707, Table 3
See E116-0707, Table 3
and Table 4. EPTState
DVVAL is not needed in
EDA.
See E116-0707, Table 3
and Table 4.
EPTStateTime DVVAL is
not needed in EDA.
See E116-0707, Table 3
See E116-0707, Table 3
and Table 4.
PreviousEPTState DVVAL
is not needed in EDA.
See E116-0707, Table 3
and Table 4.
PreviousTaskName
DVVAL is not needed in
EDA.
See E116-0707, Table 3
and Table 4.
PreviousTaskType
DVVAL is not needed in
EDA.
See E116-0707, Table 3
and Table 4. TaskName
DVVAL is not needed in
EDA.
See E116-0707, Table 3
and Table 4. TaskType
DVVAL is not needed in
EDA.
Attr
See E116-0707, Table 3
Attr
Attr
See E116-0707, Table 3
See E116-0707, Table 3
See ¶9.3.2.5.7 . Required if
EPTTracker is Equipment
level
See ¶9.3.2.5.7 . Required if
EPTTracker is Equipment
level
See ¶9.3.2.5.7 . Required if
EPTTracker is Module
level
[Esss.00-RQ-00299-00]
EPTEquipment
CurrState
C
Unrestricted
n/a
n/a
[Esss.00-RQ-00300-00]
EPTEquipment
PrevState
C
Unrestricted
n/a
n/a
[Esss.00-RQ-00301-00]
EPTModule
CurrState
C
Unrestricted
n/a
n/a
This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline.
Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document
development) activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.
Page 36
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DRAFT
Document Number: 5002B
Date: 3/9/2016
Semiconductor Equipment and Materials International
3081 Zanker Road
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Phone: 408.943.6900, Fax: 408.943.7943
[Esss.00-RQ-00302-00]
EDA Parameter
EPTModule
PrevState
Req
isTransient
C
Unrestricted
SECS Variable
n/a
Type
Explanation
n/a
See ¶9.3.2.5.7 . Required if
EPTTracker is Module
level
[Esss.00-RQ-00303-00] Each EPTTracker LogicalElement shall be associated with the SEMI E120 structural node
that it tracks. [RQ]
9.3.8.5 SEMI E116 specifies two variations of the EPTTracker object – equipment level and module level. These
are differentiated by the EPT state model, which contains the same states for each, but provides two different
transition tables- one for the equipment level and one for the module level. In EDA, this requires two separate
StateMachines: EPTEquipment and EPTModule.
9.3.8.5.1 Note that SEMI E116 EPT defines "Module" slightly differently than SEMI E120. In SEMI E116,
“Module” may refer to E120 Modules, Subsystems, or groups including multiple Modules and/or Subsystems.
9.3.8.6 The module level and equipment level EPTTrackers are differentiated by the node where they are defined.
An EPTTracker in the Equipment node is equipment level and will have an EPTEquipment StateMachine. All
others are module level EPTTrackers.
[Esss.00-RQ-00304-00] Each EPTTracker LogicalElement that tracks the Equipment node shall include a
StateMachineInstance of a StateMachine that models the SEMI E116 EPT state model with Equipment level
transitions. [/RQ]
[Esss.00-RQ-00305-00] Each EPTTracker LogicalElement that tracks components below the Equipment level in the
equipment structure shall include a StateMachineInstance of a StateMachine that models the SEMI E116 EPT state
model with Module level transitions. [/RQ]
9.3.9 SEMI E148 Time Synchronization
[Esss.00-RQ-00306-00] Equipment which implement SEMI E148 shall conform to the requirements in this section,
entitled SEMI E148 Time Synchronization. [/RQ]
[Esss.00-RQ-00307-00] Implementers shall represent the metadata constructs relating to SEMI E148 with the
content of the E148 Common Metadata files listed in Table 36. The content of the files listed in Table 36 shall be
modified:
a) According to the instructions embedded as comments in those files, and
b) According to the additional instructions in Appendix 2 for adapting the files to the specific version of SEMI
E148 implemented on the equipment. [/RQ]
Table 36 XML Files For SEMI E148
RequirementID
[Esss.00-RQ-00308-00]
[Esss.00-RQ-00309-00]
[Esss.00-RQ-00310-00]
File Name
File Location Within Collection
E148GetEquipmentNodeDescriptions.xml
E148GetEquipmentStructure.xml
E148GetTypeDefinitions.xml
\EDA 0710 Common Metadata\E148-1109
\EDA 0710 Common Metadata\E148-1109
\EDA 0710 Common Metadata\E148-1109
9.3.9.1 In the case of SEMI E148, there is no unique required content for GetExceptions, GetSEMIObjTypes,
GetStateMachines, or GetUnits.
9.3.9.2 The E148 metadata files need the following entries from the CommonGetTypeDefinitions.xml file: boolean,
int, float, String80, and dateTime.
9.3.9.3 The E148 metadata files need the following entries from the CommonGetUnits.xml file: second.
[Esss.00-RQ-00311-00] The equipment metadata shall define a LogicalElement associated with the Equipment
representing the SEMI E148 TS-Clock object. This LogicalElement shall have an ElementType attribute equal to
"TS-Clock". [/RQ]
This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline.
Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document
development) activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.
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Requirement ID
DRAFT
Document Number: 5002B
Date: 3/9/2016
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3081 Zanker Road
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Phone: 408.943.6900, Fax: 408.943.7943
9.3.9.3.1 Note that the E148 TS-Clock object ObjType value of “TS-Clock” is contained in the ElementType
attribute.
[Esss.00-RQ-00312-00] Where the equipment supports E148-1109, the Parameters for the
EquipmentNodeDescription representing the TS-Clock LogicalElement shall conform to Table 37. In the case
where a different version is supported, the Table 37 contents shall be modified by the appropriate instructions in
APPENDIX 2, if any. [/RQ]
Table 37 TS-Clock Object Attribute Parameters from SEMI E148
Req
isTransient
SECS Variable
Type
Explanation
[Esss.00-RQ-00313-00]
Requirement ID
DateTime
EDA Parameter
Y
Unrestricted
n/a
Attr
[Esss.00-RQ-00314-00]
UseTimeSync
Y
Unrestricted
n/a
Attr
[Esss.00-RQ-00315-00]
Offset
N
Unrestricted
n/a
Attr
[Esss.00-RQ-00316-00]
TimeServers
Y
Unrestricted
n/a
Attr
[Esss.00-RQ-00317-00]
[Esss.00-RQ-00318-00]
[Esss.00-RQ-00319-00]
[Esss.00-RQ-00320-00]
TimeSyncInterval
LastSyncTime
LastSyncTimeServer
Status
Y
N
N
N
Unrestricted
Unrestricted
Unrestricted
Unrestricted
n/a
n/a
n/a
n/a
Attr
Attr
Attr
Attr
See 148-1109, Table 2
See 148-1109, Table 2;
Configuration Parameter
See 148-1109, Table 2
See 148-1109, Table 2;
Configuration Parameter
See 148-1109, Table 2
See 148-1109, Table 2
See 148-1109, Table 2
See 148-1109, Table 2
9.3.9.4 SEMI E148 does not specify SECS data variables but does specify object attributes. The EDA Parameters
listed in Table 37 match the E148 TS-Clock attribute names.
9.3.10 SEMI E157 Module Process Tracking
[Esss.00-RQ-00321-00] Equipment which implement SEMI E157 shall conform to the requirements in this section,
entitled SEMI E157 Module Process Tracking. [/RQ]
[Esss.00-RQ-00322-00] Implementers shall represent the metadata constructs relating to SEMI E157 with the
content of the E157 Common Metadata files listed in Table 38. The content of the files listed in Table 38 shall be
modified:
a) According to the instructions embedded as comments in those files, and
b) According to the additional instructions in Appendix 2 for adapting the files to the specific version of SEMI E157
implemented on the equipment. [/RQ]
Table 38 XML Files For SEMI E157
RequirementID
[Esss.00-RQ-00323-00]
[Esss.00-RQ-00324-00]
[Esss.00-RQ-00325-00]
[Esss.00-RQ-00326-00]
File Name
File Location Within Collection
E157GetEquipmentNodeDescriptions.xml
E157GetEquipmentStructure.xml
E157GetStateMachines.xml
E157GetTypeDefinitions.xml
\EDA 0710 Common Metadata\E157-0710
\EDA 0710 Common Metadata\E157-0710
\EDA 0710 Common Metadata\E157-0710
\EDA 0710 Common Metadata\E157-0710
9.3.10.1 In the case of SEMI E157, there is no unique required content for GetExceptions, GetSEMIObjTypes, or
GetUnits.
9.3.10.2 The E157 metadata files need the following entries from the CommonGetTypeDefinitions.xml file: int,
String80, String 128, String255, and RecipeVariableArray.
[Esss.00-RQ-00327-00] Where the equipment supports E157-0710, the Parameters for the
EquipmentNodeDescription representing each Module shall conform to Table 39. In the case where a different
version is supported, the Table 39 contents shall be modified by the appropriate instructions in APPENDIX 2, if any.
[/RQ]
This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline.
Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document
development) activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.
Page 38
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Document Number: 5002B
Date: 3/9/2016
Semiconductor Equipment and Materials International
3081 Zanker Road
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Phone: 408.943.6900, Fax: 408.943.7943
Table 39 Module Node Parameters from SEMI E157
Requirement ID
EDA Parameter
Req
isTransient
SECS Variable
Type
Explanation
See E157-0710, Table 3
See E157-0710, Table 3
See E157-0710, Table 3
See E157-0710, Table 3.
Required if only one
Substrate is processed at a
time.
See E157-0710, Table 3.
Required if multiple
Substrates are processed at
a time.
See E157-0710, Table 3.
Required if one ProcessJob
at a time is supported for
this Module.
See E157-0710, Table 3.
Required if multiple
ProcessJobs can affect this
Module simultaneously.
See E157-0710, Table 3
See E157-0710, Table 4.
Required if recipe steps are
supported.
See E157-0710, Table 4.
Required if recipe steps are
supported.
[Esss.00-RQ-00328-00]
[Esss.00-RQ-00329-00]
[Esss.00-RQ-00330-00]
RCID
RecID
ModuleID
Y
Y
Y
Transient
Transient
Transient
RCID
RecID
ModuleID
DVVAL
DVVAL
DVVAL
[Esss.00-RQ-00331-00]
SubstrateID
C
Transient
SubstrateID
DVVAL
[Esss.00-RQ-00332-00]
SubstrateIDList
C
Transient
SubstrateIDList
DVVAL
[Esss.00-RQ-00333-00]
ProcessJobID
C
Transient
ProcessJobID
DVVAL
[Esss.00-RQ-00334-00]
ProcessJobIDList
C
Transient
ProcessJobIDList
DVVAL
[Esss.00-RQ-00335-00]
RecipeParameters
Y
Transient
RecipeParameters
DVVAL
[Esss.00-RQ-00336-00]
StepID
C
Transient
StepID
DVVAL
[Esss.00-RQ-00337-00]
StepCount
C
Transient
StepCount
DVVAL
Y
Unrestricted
n/a
n/a
See ¶9.3.2.5.7 ;
N
Unrestricted
n/a
n/a
See ¶9.3.2.5.7 ;
[Esss.00-RQ-00338-00]
[Esss.00-RQ-00339-00]
ModuleProcess
CurrState
ModuleProcess
PrevState
[Esss.00-RQ-00340-00] The EquipmentNodeDescription representing each Module in the equipment structure shall
include a StateMachineInstance of a StateMachine that models the SEMI E157 Module Process State Model. [/RQ]
This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline.
Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document
development) activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.
Page 39
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LETTER (YELLOW) BALLOT
DRAFT
Document Number: 5002B
Date: 3/9/2016
Semiconductor Equipment and Materials International
3081 Zanker Road
San Jose, CA 95134-2127
Phone: 408.943.6900, Fax: 408.943.7943
APPENDIX 1
STATEMENT OF COMPLIANCE
NOTICE: The material in this appendix is an official part of SEMI [insert designation, without publication date
(month-year) code] and was approved by full letter ballot procedures on [insert date of approval by responsible
regional standards committee].
A1-1 Statement of Compliance
[Esss.00-RQ-90001-00] A supplier shall submit a completed Capability Requirements Compliance Table per Table
A1-1, Esss.ss Capability Requirements, when reporting on compliance of equipment or an application to this
specification to a customer. [/RQ]
A1-2 Compliance Table: Capability Requirements
[Esss.00-RQ-90002-00] Each supplier shall document compliance to Esss.ss capabilities requirements per Table
A1-1, Esss.ss Capability Requirements, with the following values: C – Comply, NC – Not Comply, WC – Will
Comply, NA – Not Applicable. [/RQ]
[Esss.00-RQ-90003-00] The NA code for Not Applicable shall be used only in the case where a requirement is
conditional and the condition evaluates to render the requirement not applicable for the current implementation.
[/RQ]
A1-2.1 Child requirements inherit the conditional status of the parent requirement. Where a parent requirement is
marked NA, the child requirements should also be marked NA.
[Esss.00-RQ-90004-00] An explanation for NC shall be provided by the supplier. [/RQ]
A1-2.2 If WC is assigned, supplier should provide a date for implementation.
Table A1-1 Esss.ss Capability Requirements
Section
Requirement ID
Parent Requirement ID
Condition / Selection Criteria
Compliance
(C/NC/WC/NA)
Capability: Statement of Compliance
A.1-1
Esss.00-RQ-90001-00
Esss.00-RQ-00002-00
-
A.1-2
Esss.00-RQ-90002-00
Esss.00-RQ-90001-00
-
A.1-2
Esss.00-RQ-9000300
Esss.00-RQ-90002-00
-
A.1-2
Esss.00-RQ-90004-00
Esss.00-RQ-90002-00
-
A1-3
Esss.00-RQ-90005-00
Esss.00-RQ-90002-00
-
Esss.00-RQ-00002-00
-
Capability: 8 Prerequisites
8.1
Esss.00-RQ-00001-00
This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline.
Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document
development) activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.
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Phone: 408.943.6900, Fax: 408.943.7943
Requirement ID
Parent Requirement ID
Condition / Selection Criteria
Compliance
(C/NC/WC/NA)
Capability: 9 Requirements
SECSParameter =
9
Esss.00-RQ-00002-00
None
*Must be answered per Parameter
Capability: 9.2 General Metadata Requirements
9.2.1.1
Esss.00-RQ-00003-00
Esss.00-RQ-00002-00
-
9.2.1.1
Esss.00-RQ-00004-00
Esss.00-RQ-00002-00
-
9.2.3.3.1
Esss.00-RQ-00005-00
Esss.00-RQ-00002-00
-
9.2.3.3.1
Esss.00-RQ-00006-00
Esss.00-RQ-00002-00
-
9.2.3.4
Esss.00-RQ-00007-00
Esss.00-RQ-00002-00
-
9.2.3.5.2
Esss.00-RQ-00008-00
Esss.00-RQ-00002-00
-
9.2.3.5.3
Esss.00-RQ-00009-00
Esss.00-RQ-00002-00
-
9.2.3.7
Esss.00-RQ-00010-00
Esss.00-RQ-00002-00
-
9.2.3.8
Esss.00-RQ-00011-00
Esss.00-RQ-00002-00
-
9.2.3.8
Esss.00-RQ-00012-00
Esss.00-RQ-00011-00
-
9.2.4
Esss.00-RQ-00013-00
Esss.00-RQ-00002-00
-
9.2.5
Esss.00-RQ-00014-00
Esss.00-RQ-00002-00
-
9.2.5.4
Esss.00-RQ-00015-00
Esss.00-RQ-00002-00
-
9.2.5.4.3
Esss.00-RQ-00016-00
Esss.00-RQ-00002-00
-
9.2.5.4.3
Esss.00-RQ-00017-00
Esss.00-RQ-00002-00
-
9.2.5.4.4
Esss.00-RQ-00018-00
Esss.00-RQ-00002-00
-
9.2.5.5
Esss.00-RQ-00019-00
Esss.00-RQ-00002-00
-
9.2.5.5
Esss.00-RQ-00020-00
Esss.00-RQ-00019-00
-
9.2.5.5
Esss.00-RQ-00021-00
Esss.00-RQ-00019-00
-
9.2.5.6
Esss.00-RQ-00022-00
Esss.00-RQ-00002-00
-
9.2.5.7
Esss.00-RQ-00023-00
Esss.00-RQ-00002-00
-
9.2.5.8
Esss.00-RQ-00024-00
Esss.00-RQ-00002-00
StandardDiscreteEvent =
This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline.
Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document
development) activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.
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Section
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Requirement ID
Parent Requirement ID
Condition / Selection Criteria
9.2.5.8
Esss.00-RQ-00025-00
Esss.00-RQ-00002-00
-
9.2.7.2
Esss.00-RQ-00026-00
Esss.00-RQ-00002-00
-
9.2.7.3
Esss.00-RQ-00027-00
Esss.00-RQ-00002-00
-
9.2.7.3
Esss.00-RQ-00028-00
Esss.00-RQ-00002-00
NumericParameter =
9.2.7.3
Esss.00-RQ-00029-00
Esss.00-RQ-00002-00
-
9.2.7.3
Esss.00-RQ-00030-00
Esss.00-RQ-00002-00
-
9.2.7.4
Esss.00-RQ-00031-00
Esss.00-RQ-00002-00
-
9.2.7.4
Esss.00-RQ-00032-00
Esss.00-RQ-00031-00
-
Compliance
(C/NC/WC/NA)
Capability: 9.3 Content Standards Requirements
9.3.2
Esss.00-RQ-00033-00
Esss.00-RQ-00002-00
-
9.3.2
Esss.00-RQ-00034-00
Esss.00-RQ-00033-00
-
9.3.2
Esss.00-RQ-00035-00
Esss.00-RQ-00033-00
-
Capability: 9.3.3 SEMI E30 Generic Equipment Model
9.3.3
Esss.00-RQ-00036-00
Esss.00-RQ-00002-00
E30Support =
9.3.3
Esss.00-RQ-00037-00
Esss.00-RQ-00036-00
-
9.3.3
Esss.00-RQ-00038-00
Esss.00-RQ-00037-00
-
9.3.3
Esss.00-RQ-00039-00
Esss.00-RQ-00037-00
-
9.3.3
Esss.00-RQ-00040-00
Esss.00-RQ-00037-00
-
9.3.3
Esss.00-RQ-00041-00
Esss.00-RQ-00037-00
-
9.3.3
Esss.00-RQ-00042-00
Esss.00-RQ-00036-00
E30-0307 =
9.3.3
Esss.00-RQ-00043-00
Esss.00-RQ-00042-00
ProcessingStateChange =
9.3.3
Esss.00-RQ-00044-00
Esss.00-RQ-00042-00
ProcessingStateChange =
9.3.3
Esss.00-RQ-00045-00
Esss.00-RQ-00042-00
-
9.3.3
Esss.00-RQ-00046-00
Esss.00-RQ-00042-00
Clock =
9.3.3
Esss.00-RQ-00047-00
Esss.00-RQ-00042-00
ProcessPrograms =
9.3.3
Esss.00-RQ-00048-00
Esss.00-RQ-00042-00
ProcessPrograms =
This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline.
Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document
development) activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.
Page 42
Doc. 5002B  SEMI
LETTER (YELLOW) BALLOT
Section
DRAFT
Document Number: 5002B
Date: 3/9/2016
Semiconductor Equipment and Materials International
3081 Zanker Road
San Jose, CA 95134-2127
Phone: 408.943.6900, Fax: 408.943.7943
Requirement ID
Parent Requirement ID
Condition / Selection Criteria
9.3.3
Esss.00-RQ-00049-00
Esss.00-RQ-00042-00
ProcessPrograms =
9.3.3
Esss.00-RQ-00050-00
Esss.00-RQ-00042-00
E30ProcessRecipeMgt =
9.3.3
Esss.00-RQ-00051-00
Esss.00-RQ-00042-00
Compliance
(C/NC/WC/NA)
ProcessPrograms =
RecipeVerEvent =
9.3.3
Esss.00-RQ-00052-00
Esss.00-RQ-00042-00
OperatorCommandIssued =
9.3.3
Esss.00-RQ-00053-00
Esss.00-RQ-00042-00
OperatorEqpConstChange =
9.3.3
Esss.00-RQ-00054-00
Esss.00-RQ-00042-00
LargeRecipe =
9.3.3
Esss.00-RQ-00055-00
Esss.00-RQ-00042-00
E30EstablishComm =
Clock =
9.3.3
Esss.00-RQ-00056-00
Esss.00-RQ-00042-00
E90Support =
E116Support =
9.3.3
Esss.00-RQ-00057-00
Esss.00-RQ-00042-00
-
9.3.3
Esss.00-RQ-00058-00
Esss.00-RQ-00042-00
PrevState =
9.3.3
Esss.00-RQ-00059-00
Esss.00-RQ-00036-00
-
9.3.3
Esss.00-RQ-00060-00
Esss.00-RQ-00036-00
-
Capability: 9.3.4 SEMI E40 Processing Management
9.3.4
Esss.00-RQ-00061-00
Esss.00-RQ-00002-00
E40Support =
9.3.4
Esss.00-RQ-00062-00
Esss.00-RQ-00061-00
-
9.3.4
Esss.00-RQ-00063-00
Esss.00-RQ-00061-00
-
9.3.4
Esss.00-RQ-00064-00
Esss.00-RQ-00061-00
-
9.3.4
Esss.00-RQ-00065-00
Esss.00-RQ-00061-00
-
9.3.4
Esss.00-RQ-00066-00
Esss.00-RQ-00061-00
-
9.3.4
Esss.00-RQ-00067-00
Esss.00-RQ-00061-00
-
9.3.4
Esss.00-RQ-00068-00
Esss.00-RQ-00061-00
-
9.3.4
Esss.00-RQ-00069-00
Esss.00-RQ-00068-00
E40-0709 =
9.3.4
Esss.00-RQ-00070-00
Esss.00-RQ-00069-00
-
9.3.4
Esss.00-RQ-00071-00
Esss.00-RQ-00069-00
-
This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline.
Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document
development) activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.
Page 43
Doc. 5002B  SEMI
LETTER (YELLOW) BALLOT
Section
DRAFT
Document Number: 5002B
Date: 3/9/2016
Semiconductor Equipment and Materials International
3081 Zanker Road
San Jose, CA 95134-2127
Phone: 408.943.6900, Fax: 408.943.7943
Requirement ID
Parent Requirement ID
Condition / Selection Criteria
9.3.4
Esss.00-RQ-00072-00
Esss.00-RQ-00069-00
PauseEvent =
9.3.4
Esss.00-RQ-00073-00
Esss.00-RQ-00069-00
-
9.3.4
Esss.00-RQ-00074-00
Esss.00-RQ-00069-00
-
9.3.4
Esss.00-RQ-00075-00
Esss.00-RQ-00069-00
-
9.3.4
Esss.00-RQ-00076-00
Esss.00-RQ-00069-00
PRProcessStart =
9.3.4
Esss.00-RQ-00077-00
Esss.00-RQ-00069-00
-
9.3.4
Esss.00-RQ-00078-00
Esss.00-RQ-00069-00
-
9.3.4
Esss.00-RQ-00079-00
Esss.00-RQ-00069-00
RecVariableList =
9.3.4
Esss.00-RQ-00080-00
Esss.00-RQ-00069-00
-
9.3.4
Esss.00-RQ-00081-00
Esss.00-RQ-00069-00
PrevState =
9.3.4
Esss.00-RQ-00082-00
Esss.00-RQ-00061-00
-
Compliance
(C/NC/WC/NA)
Capability: 9.3.5 SEMI E87 Carrier Management
9.3.5
Esss.00-RQ-00083-00
Esss.00-RQ-00002-00
E87Support =
9.3.5
Esss.00-RQ-00084-00
Esss.00-RQ-00083-00
-
9.3.5
Esss.00-RQ-00085-00
Esss.00-RQ-00083-00
-
9.3.5
Esss.00-RQ-00086-00
Esss.00-RQ-00083-00
-
9.3.5
Esss.00-RQ-00087-00
Esss.00-RQ-00083-00
-
9.3.5
Esss.00-RQ-00088-00
Esss.00-RQ-00083-00
-
9.3.5
Esss.00-RQ-00089-00
Esss.00-RQ-00083-00
-
9.3.5
Esss.00-RQ-00090-00
Esss.00-RQ-00083-00
-
9.3.5.4
Esss.00-RQ-00091-00
Esss.00-RQ-00083-00
E87-0709 =
9.3.5.4
Esss.00-RQ-00092-00
Esss.00-RQ-00091-00
BypassReadID =
9.3.5.4
Esss.00-RQ-00093-00
Esss.00-RQ-00091-00
-
9.3.5.4
Esss.00-RQ-00094-00
Esss.00-RQ-00091-00
-
9.3.5.5
Esss.00-RQ-00095-00
Esss.00-RQ-00083-00
-
9.3.5.5
Esss.00-RQ-00096-00
Esss.00-RQ-00095-00
E87-0709 =
This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline.
Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document
development) activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.
Page 44
Doc. 5002B  SEMI
LETTER (YELLOW) BALLOT
Section
DRAFT
Document Number: 5002B
Date: 3/9/2016
Semiconductor Equipment and Materials International
3081 Zanker Road
San Jose, CA 95134-2127
Phone: 408.943.6900, Fax: 408.943.7943
Requirement ID
Parent Requirement ID
Condition / Selection Criteria
9.3.5.5
Esss.00-RQ-00097-00
Esss.00-RQ-00096-00
-
9.3.5.5
Esss.00-RQ-00098-00
Esss.00-RQ-00096-00
-
9.3.5.5
Esss.00-RQ-00099-00
Esss.00-RQ-00096-00
-
9.3.5.5
Esss.00-RQ-00100-00
Esss.00-RQ-00096-00
-
9.3.5.5
Esss.00-RQ-00101-00
Esss.00-RQ-00096-00
-
9.3.5.5
Esss.00-RQ-00102-00
Esss.00-RQ-00096-00
-
9.3.5.5
Esss.00-RQ-00103-00
Esss.00-RQ-00096-00
-
9.3.5.5
Esss.00-RQ-00104-00
Esss.00-RQ-00096-00
-
9.3.5.5
Esss.00-RQ-00105-00
Esss.00-RQ-00096-00
-
9.3.5.5
Esss.00-RQ-00106-00
Esss.00-RQ-00096-00
-
9.3.5.5
Esss.00-RQ-00107-00
Esss.00-RQ-00096-00
-
9.3.5.5
Esss.00-RQ-00108-00
Esss.00-RQ-00096-00
-
9.3.5.5
Esss.00-RQ-00109-00
Esss.00-RQ-00096-00
-
9.3.5.5
Esss.00-RQ-00110-00
Esss.00-RQ-00096-00
-
9.3.5.5
Esss.00-RQ-00111-00
Esss.00-RQ-00096-00
PrevState =
9.3.5.5
Esss.00-RQ-00112-00
Esss.00-RQ-00096-00
-
9.3.5.5
Esss.00-RQ-00113-00
Esss.00-RQ-00096-00
PrevState =
9.3.5.5
Esss.00-RQ-00114-00
Esss.00-RQ-00096-00
-
9.3.5.5
Esss.00-RQ-00115-00
Esss.00-RQ-00096-00
PrevState =
9.3.5.5
Esss.00-RQ-00116-00
Esss.00-RQ-00083-00
-
9.3.5.6
Esss.00-RQ-00117-00
Esss.00-RQ-00083-00
-
9.3.5.6
Esss.00-RQ-00118-00
Esss.00-RQ-00117-00
E87-0709 =
9.3.5.6
Esss.00-RQ-00119-00
Esss.00-RQ-00118-00
-
9.3.5.6
Esss.00-RQ-00120-00
Esss.00-RQ-00118-00
-
9.3.5.6
Esss.00-RQ-00121-00
Esss.00-RQ-00118-00
-
9.3.5.6
Esss.00-RQ-00122-00
Esss.00-RQ-00118-00
-
Compliance
(C/NC/WC/NA)
This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline.
Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document
development) activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.
Page 45
Doc. 5002B  SEMI
LETTER (YELLOW) BALLOT
Section
DRAFT
Document Number: 5002B
Date: 3/9/2016
Semiconductor Equipment and Materials International
3081 Zanker Road
San Jose, CA 95134-2127
Phone: 408.943.6900, Fax: 408.943.7943
Requirement ID
Parent Requirement ID
Condition / Selection Criteria
9.3.5.7
Esss.00-RQ-00123-00
Esss.00-RQ-00083-00
-
9.3.5.7
Esss.00-RQ-00124-00
Esss.00-RQ-00123-00
E87-0709 =
9.3.5.7
Esss.00-RQ-00125-00
Esss.00-RQ-00124-00
-
9.3.5.7
Esss.00-RQ-00126-00
Esss.00-RQ-00124-00
-
9.3.5.7
Esss.00-RQ-00127-00
Esss.00-RQ-00123-00
-
9.3.5.8
Esss.00-RQ-00128-00
Esss.00-RQ-00123-00
E87-0709 =
9.3.5.8
Esss.00-RQ-00129-00
Esss.00-RQ-00128-00
-
9.3.5.8
Esss.00-RQ-00130-00
Esss.00-RQ-00119-00
-
9.3.5.9
Esss.00-RQ-00131-00
Esss.00-RQ-00083-00
-
9.3.5.9
Esss.00-RQ-00132-00
Esss.00-RQ-00131-00
E87-0709 =
9.3.5.9
Esss.00-RQ-00133-00
Esss.00-RQ-00132-00
-
9.3.5.9
Esss.00-RQ-00134-00
Esss.00-RQ-00132-00
-
9.3.5.9
Esss.00-RQ-00135-00
Esss.00-RQ-00132-00
-
9.3.5.9
Esss.00-RQ-00136-00
Esss.00-RQ-00132-00
-
9.3.5.9
Esss.00-RQ-00137-00
Esss.00-RQ-00132-00
-
9.3.5.9
Esss.00-RQ-00138-00
Esss.00-RQ-00132-00
-
9.3.5.9
Esss.00-RQ-00139-00
Esss.00-RQ-00132-00
-
9.3.5.9
Esss.00-RQ-00140-00
Esss.00-RQ-00132-00
BypassReadID =
9.3.5.9
Esss.00-RQ-00141-00
Esss.00-RQ-00132-00
-
9.3.5.9
Esss.00-RQ-00142-00
Esss.00-RQ-00132-00
PrevState =
9.3.5.9
Esss.00-RQ-00143-00
Esss.00-RQ-00132-00
-
9.3.5.9
Esss.00-RQ-00144-00
Esss.00-RQ-00132-00
-
9.3.5.9
Esss.00-RQ-00145-00
Esss.00-RQ-00132-00
-
9.3.5.9
Esss.00-RQ-00146-00
Esss.00-RQ-00131-00
-
9.3.5.9
Esss.00-RQ-00147-00
Esss.00-RQ-00131-00
-
9.3.5.9
Esss.00-RQ-00148-00
Esss.00-RQ-00131-00
-
Compliance
(C/NC/WC/NA)
This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline.
Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document
development) activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.
Page 46
Doc. 5002B  SEMI
LETTER (YELLOW) BALLOT
Section
DRAFT
Document Number: 5002B
Date: 3/9/2016
Semiconductor Equipment and Materials International
3081 Zanker Road
San Jose, CA 95134-2127
Phone: 408.943.6900, Fax: 408.943.7943
Requirement ID
Parent Requirement ID
Condition / Selection Criteria
9.3.5.9
Esss.00-RQ-00149-00
Esss.00-RQ-00131-00
-
9.3.5.10
Esss.00-RQ-00150-00
Esss.00-RQ-00083-00
E87InternalBuffer =
9.3.5.10
Esss.00-RQ-00151-00
Esss.00-RQ-00150-00
Compliance
(C/NC/WC/NA)
E87-0709 =
E87InternalBuffer =
9.3.5.10
Esss.00-RQ-00152-00
Esss.00-RQ-00151-00
-
9.3.5.10
Esss.00-RQ-00153-00
Esss.00-RQ-00151-00
-
9.3.5.11
Esss.00-RQ-00154-00
Esss.00-RQ-00150-00
-
9.3.5.11
Esss.00-RQ-00155-00
Esss.00-RQ-00154-00
E87-0709 =
E87BufferPartition =
9.3.5.11
Esss.00-RQ-00156-00
Esss.00-RQ-00155-00
-
9.3.5.11
Esss.00-RQ-00157-00
Esss.00-RQ-00155-00
BufferPartitionDetail =
9.3.5.11
Esss.00-RQ-00158-00
Esss.00-RQ-00155-00
BufferPartitionDetail =
9.3.5.11
Esss.00-RQ-00159-00
Esss.00-RQ-00155-00
BufferPartitionDetail =
9.3.5.11
Esss.00-RQ-00160-00
Esss.00-RQ-00155-00
BufferPartitionDetail =
9.3.5.11
Esss.00-RQ-00161-00
Esss.00-RQ-00155-00
BufferPartitionDetail =
Capability: 9.3.6 SEMI E90 Substrate Tracking
9.3.6
Esss.00-RQ-00162-00
Esss.00-RQ-00002-00
E90Support =
9.3.6
Esss.00-RQ-00163-00
Esss.00-RQ-00162-00
-
9.3.6
Esss.00-RQ-00164-00
Esss.00-RQ-00162-00
-
9.3.6
Esss.00-RQ-00165-00
Esss.00-RQ-00162-00
-
9.3.6
Esss.00-RQ-00166-00
Esss.00-RQ-00162-00
-
9.3.6
Esss.00-RQ-00167-00
Esss.00-RQ-00162-00
-
9.3.6
Esss.00-RQ-00168-00
Esss.00-RQ-00162-00
-
9.3.6.3
Esss.00-RQ-00169-00
Esss.00-RQ-00162-00
E90-0707 =
9.3.6.3
Esss.00-RQ-00170-00
Esss.00-RQ-00169-00
SubstrateIDReader =
9.3.6.4
Esss.00-RQ-00171-00
Esss.00-RQ-00162-00
-
9.3.6.4
Esss.00-RQ-00172-00
Esss.00-RQ-00171-00
E90-0707 =
This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline.
Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document
development) activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.
Page 47
Doc. 5002B  SEMI
LETTER (YELLOW) BALLOT
Section
DRAFT
Document Number: 5002B
Date: 3/9/2016
Semiconductor Equipment and Materials International
3081 Zanker Road
San Jose, CA 95134-2127
Phone: 408.943.6900, Fax: 408.943.7943
Requirement ID
Parent Requirement ID
Condition / Selection Criteria
9.3.6.4
Esss.00-RQ-00173-00
Esss.00-RQ-00172-00
-
9.3.6.4
Esss.00-RQ-00174-00
Esss.00-RQ-00172-00
-
9.3.6.4
Esss.00-RQ-00175-00
Esss.00-RQ-00172-00
SubstrateIDReader =
9.3.6.4
Esss.00-RQ-00176-00
Esss.00-RQ-00172-00
BatchProcess =
9.3.6.4
Esss.00-RQ-00177-00
Esss.00-RQ-00172-00
-
9.3.6.4
Esss.00-RQ-00178-00
Esss.00-RQ-00172-00
-
9.3.6.4
Esss.00-RQ-00179-00
Esss.00-RQ-00172-00
-
9.3.6.4
Esss.00-RQ-00180-00
Esss.00-RQ-00172-00
-
9.3.6.4
Esss.00-RQ-00181-00
Esss.00-RQ-00172-00
SubstrateIDReader =
9.3.6.4
Esss.00-RQ-00182-00
Esss.00-RQ-00172-00
-
9.3.6.4
Esss.00-RQ-00183-00
Esss.00-RQ-00172-00
BatchLocations =
9.3.6.4
Esss.00-RQ-00184-00
Esss.00-RQ-00172-00
-
9.3.6.4
Esss.00-RQ-00185-00
Esss.00-RQ-00172-00
-
9.3.6.4
Esss.00-RQ-00186-00
Esss.00-RQ-00172-00
-
9.3.6.4
Esss.00-RQ-00187-00
Esss.00-RQ-00172-00
SubstType =
9.3.6.4
Esss.00-RQ-00188-00
Esss.00-RQ-00172-00
SubstUsage =
9.3.6.4
Esss.00-RQ-00189-00
Esss.00-RQ-00172-00
Compliance
(C/NC/WC/NA)
InternalBuffer =
SubstrateIDReader =
InternalBuffer =
9.3.6.4
Esss.00-RQ-00190-00
Esss.00-RQ-00172-00
BatchLocations =
9.3.6.4
Esss.00-RQ-00191-00
Esss.00-RQ-00172-00
InternalBuffer =
9.3.6.4
Esss.00-RQ-00192-00
Esss.00-RQ-00172-00
InternalBuffer =
9.3.6.4
Esss.00-RQ-00193-00
Esss.00-RQ-00172-00
-
9.3.6.4
Esss.00-RQ-00194-00
Esss.00-RQ-00172-00
InternalBuffer =
9.3.6.4
Esss.00-RQ-00195-00
Esss.00-RQ-00172-00
InternalBuffer =
SubstrateIDReader =
9.3.6.4
Esss.00-RQ-00196-00
Esss.00-RQ-00172-00
InternalBuffer =
This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline.
Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document
development) activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.
Page 48
Doc. 5002B  SEMI
LETTER (YELLOW) BALLOT
Section
DRAFT
Document Number: 5002B
Date: 3/9/2016
Semiconductor Equipment and Materials International
3081 Zanker Road
San Jose, CA 95134-2127
Phone: 408.943.6900, Fax: 408.943.7943
Requirement ID
Parent Requirement ID
Condition / Selection Criteria
9.3.6.4
Esss.00-RQ-00197-00
Esss.00-RQ-00172-00
InternalBuffer =
9.3.6.4
Esss.00-RQ-00198-00
Esss.00-RQ-00172-00
InternalBuffer =
9.3.6.4
Esss.00-RQ-00199-00
Esss.00-RQ-00172-00
Compliance
(C/NC/WC/NA)
InternalBuffer =
BatchLocations =
9.3.6.4
Esss.00-RQ-00200-00
Esss.00-RQ-00172-00
InternalBuffer =
9.3.6.4
Esss.00-RQ-00201-00
Esss.00-RQ-00172-00
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Esss.00-RQ-00202-00
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Esss.00-RQ-00204-00
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PrevState =
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Esss.00-RQ-00211-00
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9.3.6.5
Esss.00-RQ-00212-00
Esss.00-RQ-00162-00
-
9.3.6.5
Esss.00-RQ-00213-00
Esss.00-RQ-00212-00
E90-0707 =
9.3.6.5
Esss.00-RQ-00214-00
Esss.00-RQ-00213-00
-
9.3.6.5
Esss.00-RQ-00215-00
Esss.00-RQ-00213-00
-
9.3.6.5
Esss.00-RQ-00216-00
Esss.00-RQ-00213-00
-
9.3.6.5
Esss.00-RQ-00217-00
Esss.00-RQ-00213-00
-
9.3.6.5
Esss.00-RQ-00218-00
Esss.00-RQ-00213-00
-
9.3.6.5
Esss.00-RQ-00219-00
Esss.00-RQ-00213-00
-
9.3.6.5
Esss.00-RQ-00220-00
Esss.00-RQ-00162-00
-
This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline.
Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document
development) activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.
Page 49
Doc. 5002B  SEMI
LETTER (YELLOW) BALLOT
Section
DRAFT
Document Number: 5002B
Date: 3/9/2016
Semiconductor Equipment and Materials International
3081 Zanker Road
San Jose, CA 95134-2127
Phone: 408.943.6900, Fax: 408.943.7943
Requirement ID
Parent Requirement ID
Condition / Selection Criteria
9.3.6.5
Esss.00-RQ-00221-00
Esss.00-RQ-00220-00
E90-0707 =
9.3.6.5
Esss.00-RQ-00222-00
Esss.00-RQ-00221-00
-
9.3.6.5
Esss.00-RQ-00223-00
Esss.00-RQ-00221-00
9.3.6.5
Esss.00-RQ-00224-00
Esss.00-RQ-00221-00
-
9.3.6.5
Esss.00-RQ-00225-00
Esss.00-RQ-00221-00
-
9.3.6.5
Esss.00-RQ-00226-00
Esss.00-RQ-00221-00
-
9.3.6.5
Esss.00-RQ-00227-00
Esss.00-RQ-00221-00
-
9.3.6.5
Esss.00-RQ-00228-00
Esss.00-RQ-00221-00
-
9.3.6.5
Esss.00-RQ-00229-00
Esss.00-RQ-00162-00
-
9.3.6.6
Esss.00-RQ-00230-00
Esss.00-RQ-00162-00
-
9.3.6.6
Esss.00-RQ-00231-00
Esss.00-RQ-00230-00
-
9.3.6.6
Esss.00-RQ-00232-00
Esss.00-RQ-00231-00
-
9.3.6.6
Esss.00-RQ-00233-00
Esss.00-RQ-00231-00
-
9.3.6.6
Esss.00-RQ-00234-00
Esss.00-RQ-00231-00
-
9.3.6.6
Esss.00-RQ-00235-00
Esss.00-RQ-00231-00
-
9.3.6.6
Esss.00-RQ-00236-00
Esss.00-RQ-00230-00
-
9.3.6.6
Esss.00-RQ-00237-00
Esss.00-RQ-00230-00
E90-0707
9.3.6.6
Esss.00-RQ-00238-00
Esss.00-RQ-00237-00
-
9.3.6.6
Esss.00-RQ-00239-00
Esss.00-RQ-00237-00
9.3.6.6
Esss.00-RQ-00240-00
Esss.00-RQ-00237-00
9.3.6.6
Esss.00-RQ-00241-00
Esss.00-RQ-00237-00
9.3.6.6
Esss.00-RQ-00242-00
Esss.00-RQ-00237-00
9.3.6.6
Esss.00-RQ-00243-00
Esss.00-RQ-00237-00
9.3.6.6
Esss.00-RQ-00244-00
Esss.00-RQ-00230-00
Compliance
(C/NC/WC/NA)
This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline.
Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document
development) activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.
Page 50
Doc. 5002B  SEMI
LETTER (YELLOW) BALLOT
Section
DRAFT
Document Number: 5002B
Date: 3/9/2016
Semiconductor Equipment and Materials International
3081 Zanker Road
San Jose, CA 95134-2127
Phone: 408.943.6900, Fax: 408.943.7943
Requirement ID
Parent Requirement ID
Condition / Selection Criteria
Compliance
(C/NC/WC/NA)
Capability: 9.3.7 SEMI E94 Control Job Management
9.3.7
Esss.00-RQ-00245-00
Esss.00-RQ-00002-00
E94Support =
9.3.7
Esss.00-RQ-00246-00
Esss.00-RQ-00245-00
-
9.3.7
Esss.00-RQ-00247-00
Esss.00-RQ-00246-00
-
9.3.7
Esss.00-RQ-00248-00
Esss.00-RQ-00246-00
-
9.3.7
Esss.00-RQ-00249-00
Esss.00-RQ-00246-00
-
9.3.7
Esss.00-RQ-00250-00
Esss.00-RQ-00246-00
-
9.3.7
Esss.00-RQ-00251-00
Esss.00-RQ-00246-00
-
9.3.7
Esss.00-RQ-00252-00
Esss.00-RQ-00246-00
-
9.3.7.4
Esss.00-RQ-00253-00
Esss.00-RQ-00245-00
-
9.3.7.4
Esss.00-RQ-00254-00
Esss.00-RQ-00253-00
E94-0709 =
9.3.7.4
Esss.00-RQ-00255-00
Esss.00-RQ-00254-00
-
9.3.7.4
Esss.00-RQ-00256-00
Esss.00-RQ-00254-00
-
9.3.7.4
Esss.00-RQ-00257-00
Esss.00-RQ-00254-00
-
9.3.7.4
Esss.00-RQ-00258-00
Esss.00-RQ-00254-00
DataCollectionPlan =
9.3.7.4
Esss.00-RQ-00259-00
Esss.00-RQ-00254-00
-
9.3.7.4
Esss.00-RQ-00260-00
Esss.00-RQ-00254-00
-
9.3.7.4
Esss.00-RQ-00261-00
Esss.00-RQ-00254-00
-
9.3.7.4
Esss.00-RQ-00262-00
Esss.00-RQ-00254-00
PauseEvent =
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9.3.7.4
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9.3.7.4
Esss.00-RQ-00265-00
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9.3.7.4
Esss.00-RQ-00266-00
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-
9.3.7.4
Esss.00-RQ-00267-00
Esss.00-RQ-00254-00
-
9.3.7.4
Esss.00-RQ-00268-00
Esss.00-RQ-00254-00
-
9.3.7.4
Esss.00-RQ-00269-00
Esss.00-RQ-00254-00
PrevState =
This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline.
Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document
development) activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.
Page 51
Doc. 5002B  SEMI
LETTER (YELLOW) BALLOT
Section
DRAFT
Document Number: 5002B
Date: 3/9/2016
Semiconductor Equipment and Materials International
3081 Zanker Road
San Jose, CA 95134-2127
Phone: 408.943.6900, Fax: 408.943.7943
Requirement ID
Parent Requirement ID
Condition / Selection Criteria
9.3.7.4
Esss.00-RQ-00270-00
Esss.00-RQ-00245-00
-
9.3.7.5
Esss.00-RQ-00271-00
Esss.00-RQ-00245-00
E94-0709 =
9.3.7.5
Esss.00-RQ-00272-00
Esss.00-RQ-00271-00
MaterialRedirectionMode =
9.3.7.5 e
Esss.00-RQ-00273-00
Esss.00-RQ-00271-00
-
9.3.7.5
Esss.00-RQ-00274-00
Esss.00-RQ-00271-00
-
9.3.7.5
Esss.00-RQ-00275-00
Esss.00-RQ-00271-00
-
Compliance
(C/NC/WC/NA)
Capability: 9.3.8 SEMI E116 Equipment Performance Tracking
9.3.8
Esss.00-RQ-00276-00
Esss.00-RQ-00002-00
E116Support =
9.3.8
Esss.00-RQ-00277-00
Esss.00-RQ-00276-00
-
9.3.8
Esss.00-RQ-00278-00
Esss.00-RQ-00277-00
-
9.3.8
Esss.00-RQ-00279-00
Esss.00-RQ-00277-00
-
9.3.8
Esss.00-RQ-00280-00
Esss.00-RQ-00277-00
-
9.3.8
Esss.00-RQ-00281-00
Esss.00-RQ-00277-00
-
9.3.8
Esss.00-RQ-00282-00
Esss.00-RQ-00276-00
-
9.3.8
Esss.00-RQ-00283-00
Esss.00-RQ-00282-00
E116-0707 =
9.3.8
Esss.00-RQ-00284-00
Esss.00-RQ-00283-00
-
9.3.8
Esss.00-RQ-00285-00
Esss.00-RQ-00283-00
-
9.3.8
Esss.00-RQ-00286-00
Esss.00-RQ-00283-00
-
9.3.8
Esss.00-RQ-00287-00
Esss.00-RQ-00283-00
-
9.3.8
Esss.00-RQ-00288-00
Esss.00-RQ-00283-00
-
9.3.8
Esss.00-RQ-00289-00
Esss.00-RQ-00283-00
-
9.3.8
Esss.00-RQ-00290-00
Esss.00-RQ-00283-00
-
9.3.8
Esss.00-RQ-00291-00
Esss.00-RQ-00283-00
-
9.3.8
Esss.00-RQ-00292-00
Esss.00-RQ-00283-00
-
9.3.8
Esss.00-RQ-00293-00
Esss.00-RQ-00283-00
-
9.3.8
Esss.00-RQ-00294-00
Esss.00-RQ-00283-00
-
This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline.
Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document
development) activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.
Page 52
Doc. 5002B  SEMI
LETTER (YELLOW) BALLOT
Section
DRAFT
Document Number: 5002B
Date: 3/9/2016
Semiconductor Equipment and Materials International
3081 Zanker Road
San Jose, CA 95134-2127
Phone: 408.943.6900, Fax: 408.943.7943
Requirement ID
Parent Requirement ID
Condition / Selection Criteria
9.3.8
Esss.00-RQ-00295-00
Esss.00-RQ-00283-00
-
9.3.8
Esss.00-RQ-00296-00
Esss.00-RQ-00283-00
-
9.3.8
Esss.00-RQ-00297-00
Esss.00-RQ-00283-00
-
9.3.8
Esss.00-RQ-00298-00
Esss.00-RQ-00283-00
-
9.3.8
Esss.00-RQ-00299-00
Esss.00-RQ-00283-00
EPTTrackerLevel =
9.3.8
Esss.00-RQ-00300-00
Esss.00-RQ-00283-00
Compliance
(C/NC/WC/NA)
PrevState =
EPTTrackerLevel =
9.3.8
Esss.00-RQ-00301-00
Esss.00-RQ-00283-00
9.3.8
Esss.00-RQ-00302-00
Esss.00-RQ-00283-00
EPTTrackerLevel =
PrevState =
EPTTrackerLevel =
9.3.8
Esss.00-RQ-00303-00
Esss.00-RQ-00276-00
-
9.3.8
Esss.00-RQ-00304-00
Esss.00-RQ-00303-00
EPTTrackerLevel =
9.3.8
Esss.00-RQ-00305-00
Esss.00-RQ-00303-00
EPTTrackerLevel =
Capability: 9.3.9 SEMI E148 Time Synchronization
9.3.9
Esss.00-RQ-00306-00
Esss.00-RQ-00002-00
E148Support =
9.3.9
Esss.00-RQ-00307-00
Esss.00-RQ-00306-00
-
9.3.9
Esss.00-RQ-00308-00
Esss.00-RQ-00307-00
-
9.3.9
Esss.00-RQ-00309-00
Esss.00-RQ-00307-00
-
9.3.9
Esss.00-RQ-00310-00
Esss.00-RQ-00307-00
-
9.3.9
Esss.00-RQ-00311-00
Esss.00-RQ-00306-00
9.3.9
Esss.00-RQ-00312-00
Esss.00-RQ-00311-00
E148-1109 =
9.3.9
Esss.00-RQ-00313-00
Esss.00-RQ-00312-00
-
9.3.9
Esss.00-RQ-00314-00
Esss.00-RQ-00312-00
-
9.3.9
Esss.00-RQ-00315-00
Esss.00-RQ-00312-00
Offset =
9.3.9
Esss.00-RQ-00316-00
Esss.00-RQ-00312-00
-
9.3.9
Esss.00-RQ-00317-00
Esss.00-RQ-00312-00
-
9.3.9
Esss.00-RQ-00318-00
Esss.00-RQ-00312-00
LastSyncTime =
This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline.
Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document
development) activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.
Page 53
Doc. 5002B  SEMI
LETTER (YELLOW) BALLOT
Section
DRAFT
Document Number: 5002B
Date: 3/9/2016
Semiconductor Equipment and Materials International
3081 Zanker Road
San Jose, CA 95134-2127
Phone: 408.943.6900, Fax: 408.943.7943
Requirement ID
Parent Requirement ID
Condition / Selection Criteria
9.3.9
Esss.00-RQ-00319-00
Esss.00-RQ-00312-00
LastSynchTimeServer =
9.3.9
Esss.00-RQ-00320-00
Esss.00-RQ-00312-00
Status =
Compliance
(C/NC/WC/NA)
Capability: 9.3.10 SEMI E157 Module Process Tracking
9.3.10
Esss.00-RQ-00321-00
Esss.00-RQ-00002-00
E157Support =
9.3.10
Esss.00-RQ-00322-00
Esss.00-RQ-00321-00
-
9.3.10
Esss.00-RQ-00323-00
Esss.00-RQ-00322-00
-
9.3.10
Esss.00-RQ-00324-00
Esss.00-RQ-00322-00
-
9.3.10
Esss.00-RQ-00325-00
Esss.00-RQ-00322-00
-
9.3.10
Esss.00-RQ-00326-00
Esss.00-RQ-00322-00
-
9.3.10
Esss.00-RQ-00327-00
Esss.00-RQ-00321-00
E157-0710 =
9.3.10
Esss.00-RQ-00328-00
Esss.00-RQ-00327-00
-
9.3.10
Esss.00-RQ-00329-00
Esss.00-RQ-00327-00
-
9.3.10
Esss.00-RQ-00330-00
Esss.00-RQ-00327-00
-
9.3.10
Esss.00-RQ-00331-00
Esss.00-RQ-00327-00
MultipleSubstrates =
*Must be answered per Module
9.3.10
Esss.00-RQ-00332-00
Esss.00-RQ-00327-00
MultipleSubstrates =
*Must be answered per Module
9.3.10
Esss.00-RQ-00333-00
Esss.00-RQ-00327-00
MultipleJobs =
*Must be answered per Module
9.3.10
Esss.00-RQ-00334-00
Esss.00-RQ-00327-00
MultipleJobs =
*Must be answered per Module
9.3.10
Esss.00-RQ-00335-00
Esss.00-RQ-00327-00
-
9.3.10
Esss.00-RQ-00336-00
Esss.00-RQ-00327-00
RecipeSteps =
*Must be answered per Module
9.3.10
Esss.00-RQ-00337-00
Esss.00-RQ-00327-00
RecipeSteps =
*Must be answered per Module
9.3.10
Esss.00-RQ-00338-00
Esss.00-RQ-00327-00
-
9.3.10
Esss.00-RQ-00339-00
Esss.00-RQ-00327-00
PrevState =
9.3.10
Esss.00-RQ-00340-00
Esss.00-RQ-00322-00
-
This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline.
Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document
development) activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.
Page 54
Doc. 5002B  SEMI
LETTER (YELLOW) BALLOT
Section
DRAFT
Document Number: 5002B
Date: 3/9/2016
Semiconductor Equipment and Materials International
3081 Zanker Road
San Jose, CA 95134-2127
Phone: 408.943.6900, Fax: 408.943.7943
Requirement ID
Parent Requirement ID
Condition / Selection Criteria
Compliance
(C/NC/WC/NA)
Capability: Appendix 2 Adapting to Different Standards Versions
A2-1
Esss.00-RQ-00341-00
Esss.00-RQ-00002-00
ChangeVersion =
A2-2
Esss.00-RQ-00342-00
Esss.00-RQ-00037-00
E30-0303OrEarlier =
A2-2
Esss.00-RQ-00343-00
Esss.00-RQ-00342-00
-
A2-3
Esss.00-RQ-00344-00
Esss.00-RQ-00062-00
E40-0304OrEarlier =
A2-3
Esss.00-RQ-00345-00
Esss.00-RQ-00344-00
-
A2-3
Esss.00-RQ-00346-00
Esss.00-RQ-00344-00
-
A2-4
Esss.00-RQ-00347-00
Esss.00-RQ-00084-00
E87-0707OrEarlier =
A2-4
Esss.00-RQ-00348-00
Esss.00-RQ-00347-00
-
A2-4
Esss.00-RQ-00349-00
Esss.00-RQ-00347-00
E87-0706OrEarlier =
A2-4
Esss.00-RQ-00350-00
Esss.00-RQ-00349-00
-
A2-4
Esss.00-RQ-00351-00
Esss.00-RQ-00349-00
E87-1105OrEarlier =
A2-4
Esss.00-RQ-00352-00
Esss.00-RQ-00351-00
-
A2-4
Esss.00-RQ-00353-00
Esss.00-RQ-00351-00
-
A2-4
Esss.00-RQ-00354-00
Esss.00-RQ-00351-00
-
A2-4
Esss.00-RQ-00355-00
Esss.00-RQ-00351-00
E87-0703OrEarlier =
A2-4
Esss.00-RQ-00356-00
Esss.00-RQ-00355-00
-
A2-5
Esss.00-RQ-00357-00
Esss.00-RQ-00163-00
E90-0706OrEarlier =
A2-5
Esss.00-RQ-00358-00
Esss.00-RQ-00357-00
-
A2-5
Esss.00-RQ-00359-00
Esss.00-RQ-00357-00
E90-0306OrEarlier =
A2-5
Esss.00-RQ-00360-00
Esss.00-RQ-00359-00
-
A2-5
Esss.00-RQ-00361-00
Esss.00-RQ-00359-00
-
A2-5
Esss.00-RQ-00362-00
Esss.00-RQ-00359-00
-
A2-5
Esss.00-RQ-00363-00
Esss.00-RQ-00359-00
-
A2-5
Esss.00-RQ-00364-00
Esss.00-RQ-00359-00
E90-1104OrEarlier =
A2-5
Esss.00-RQ-00365-00
Esss.00-RQ-00364-00
-
This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline.
Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document
development) activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.
Page 55
Doc. 5002B  SEMI
LETTER (YELLOW) BALLOT
Section
DRAFT
Document Number: 5002B
Date: 3/9/2016
Semiconductor Equipment and Materials International
3081 Zanker Road
San Jose, CA 95134-2127
Phone: 408.943.6900, Fax: 408.943.7943
Requirement ID
Parent Requirement ID
Condition / Selection Criteria
A2-5
Esss.00-RQ-00366-00
Esss.00-RQ-00364-00
-
A2-5
Esss.00-RQ-00367-00
Esss.00-RQ-00364-00
E90-0304OrEarlier =
A2-5
Esss.00-RQ-00368-00
Esss.00-RQ-00367-00
-
A2-5
Esss.00-RQ-00369-00
Esss.00-RQ-00367-00
-
A2-5
Esss.00-RQ-00370-00
Esss.00-RQ-00367-00
-
A2-5
Esss.00-RQ-00371-00
Esss.00-RQ-00367-00
-
A2-5
Esss.00-RQ-00372-00
Esss.00-RQ-00367-00
-
A2-6
Esss.00-RQ-00373-00
Esss.00-RQ-00254-00
E94-1108OrEarlier =
A2-6
Esss.00-RQ-00374-00
Esss.00-RQ-00373-00
-
A2-6
Esss.00-RQ-00375-00
Esss.00-RQ-00373-00
E94-1106OrEarlier =
A2-6
Esss.00-RQ-00376-00
Esss.00-RQ-00375-00
-
A2-6
Esss.00-RQ-00377-00
Esss.00-RQ-00375-00
-
A2-6
Esss.00-RQ-00378-00
Esss.00-RQ-00375-00
-
A2-6
Esss.00-RQ-00379-00
Esss.00-RQ-00375-00
E94-0705OrEarlier =
A2-6
Esss.00-RQ-00380-00
Esss.00-RQ-00379-00
-
A2-6
Esss.00-RQ-00381-00
Esss.00-RQ-00379-00
E94-1104OrEarlier =
A2-6
Esss.00-RQ-00382-00
Esss.00-RQ-00381-00
-
A2-7
Esss.00-RQ-00383-00
Esss.00-RQ-00381-00
E116-0705OrEarlier =
A2-7
Esss.00-RQ-00384-00
Esss.00-RQ-00383-00
-
Compliance
(C/NC/WC/NA)
This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline.
Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document
development) activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.
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Section
DRAFT
Document Number: 5002B
Date: 3/9/2016
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A1-3 Compliance Table: Equipment Conditional Criteria
[Esss.00-RQ-90005-00] Each equipment supplier shall document Esss.ss specific conditional criteria per Table A12, Equipment Conditional Criteria. [/RQ]
A1-3.1 Conditional criteria are used to identify when Conditional requirements are to be implemented on the
equipment.
Table A1-2 Conditional Criteria
Name
Values
Description
Section
True
True – Batch process equipment
False
False – Not a batch process equipment
True
True – The equipment has Batch Locations
False
False – The equipment has no Batch Locations
True
True – The equipment has implemented the detailed buffer partition
parameters
False
False – The equipment has not implemented the detailed buffer
partition parameters
Equipment
Equipment – BypassReadID is supported at the Equipment level
LoadPort
LoadPort – BypassReadID is supported at each Load Port
True
True – The E30 Clock capability implemented on the equipment.
False
False – The Clock parameter is not defined
True
True – The equipment supports the E94 DataCollectionPlan
attribute of the ControlJob object
BatchProcess
BatchLocations
BufferPartitionDetail
BypassReadID
Clock
DataCollectionPlan
False
True
E116-0705OrEarlier
9.3.6.4
9.3.6.4
9.3.5.11
9.3.3
9.3.7.4
False – The equipment does not support the E94
DataCollectionPlan attribute of the ControlJob object
True – Equipment supports E116 version 0705 or an earlier version
False
False – Equipment does not support E116 version 0705 or an earlier
version
True
True – The equipment supports the 0707 version of SEMI E116
False
False – The equipment supports a different version of SEMI E116
True
True – The equipment supports SEMI E116
False
False – The equipment does not support SEMI E116
True
True – The equipment supports the 1109 version of SEMI E148
False
False – The equipment supports a different version of SEMI E148
True
True – The equipment supports the E148 Offset attribute of the
TS-Clock object
E116-0707
E116Support
E148-1109
E148Offset
False
9.3.5.4 and
9.3.5.9
A2-7
9.3.8
9.3.8
False – The equipment does not support the E148 Offset attribute
of the TS-Clock object
9.3.9
9.3.9
This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline.
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Values
True
E148Status
Description
Section
True – The equipment supports the E148 Status attribute of the
TS-Clock object
False
False – The equipment does not support the E148 Status attribute of
the TS-Clock object
True
True – The equipment supports SEMI E148
False
False – The equipment does not support SEMI E148
True
True – The equipment supports the 0710 version of SEMI E157
False
False – The equipment supports a different version of SEMI E157
True
True – The equipment supports SEMI E157
False
False – The equipment does not support SEMI E157
E148Support
E157-0710
E157Support
True
E30-0303OrEarlier
9.3.9
9.3.9
9.3.9
True – Equipment supports E30, version 0303 or an earlier version
False
False – Equipment does not support E30 version 0303 or an earlier
version
True
True – The equipment supports the 0307 version of SEMI E30
False
False – The equipment supports a different version of SEMI E30
True
True – The equipment implements the E30 Establish
Communications capability
False
False - The equipment does not implement the E30 Establish
Communications capability
E30-0307
9.3.9
E30EstablishComm
A2-2
9.3.3
9.3.3
True
True – E30 Process Recipe Management capability is implemented
on the equipment.
E30ProcessRecipeMgt
9.3.3
False
False - E30 Process Recipe Management capability is not
implemented on the equipment.
True
True – The equipment supports SEMI E30
False
False – The equipment does not support SEMI E30
E30Support
True
E40-0304OrEarlier
9.3.3
True – Equipment supports E40, version 0304 or an earlier version
False
False – Equipment does not support E40 version 0304 or an earlier
version
True
True – The equipment supports the 0709 version of SEMI E40
False
False – The equipment supports a different version of SEMI E40
True
True – The equipment supports the E40 PauseEvent attribute of
ProcessJob
E40-0709
E40PauseEvent
False
False – The equipment does not support the E40 PauseEvent
attribute of ProcessJob
True
True – The equipment supports SEMI E40
False
False – The equipment does not support SEMI E40
E40Support
A2-3
9.3.4
9.3.4
9.3.4
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Values
True
E87-0703OrEarlier
False
True
E87-0706OrEarlier
False
True
E87-0707OrEarlier
Description
Section
True – Equipment supports E87, version 0703 or an earlier version
False – Equipment does not support E87 version 0703 or an earlier
version
True – Equipment supports E87, version 0706 or an earlier version
False – Equipment does not support E87 version 0706 or an earlier
version
False – Equipment does not support E87 version 0707 or an earlier
version
True
True – The equipment supports the 0709 version of SEMI E87
False
False – The equipment supports a different version of SEMI E87
True
E87-1105OrEarlier
False – Equipment does not support E87 version 1105 or an earlier
version
True
True – Equipment implements an E87 buffer partition
False
False – Equipment does not implement an E87 buffer partition
True
True – Equipment supports E87 internal buffer
False
False – Equipment does not support E87 internal buffer
True
True – The equipment supports SEMI E87
False
False – The equipment does not support SEMI E87
E87InternalBuffer
E87Support
True
E90-0304OrEarlier
False
True
E90-0306OrEarlier
False
True
E90-0706OrEarlier
9.3.5
True – Equipment supports E90 version 0304 or an earlier version
False – Equipment does not support E90 version 0304 or an earlier
version
False – Equipment does not support E90 version 0306 or an earlier
version
A2-5
True – Equipment supports E90, version 0706 or an earlier version
True – The equipment supports the 0707 version of SEMI E90
False
False – The equipment supports a different version of SEMI E90
False
A2-5
True – Equipment supports E90, version 0306 or an earlier version
True
True
A2-4
9.3.5.10
False – Equipment does not support E90 version 0706 or an earlier
version
E90-1104OrEarlier
9.3.5.5 ,
9.3.5.6 ,
9.3.5.7 ,
9.3.5.8 , and
9.3.5.9
9.3.5.10
False
E90-0707
A2-4
True – Equipment supports E87, version 1105 or an earlier version
False
E87BufferPartition
A2-4
True – Equipment supports E87, version 0707 or an earlier version
False
E87-0709
A2-4
A2-5
9.3.6.3 and
0
True – Equipment supports E90, version 1104 or an earlier version
False – Equipment does not support E90 version 1104 or an earlier
version
A2-5
This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline.
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Values
Description
True
True – The equipment supports SEMI E90
False
False – The equipment does not support SEMI E90
E90Support
True
E94-0705OrEarlier
Section
9.3.6
True – Equipment supports E94 version 0705 or an earlier version
False
False – Equipment does not support E94 version 0705 or an earlier
version
True
True – The equipment supports the 0709 version of SEMI E94
False
False – The equipment supports a different version of SEMI E94
E94-0709
True
E94-1104OrEarlier
False
True
E94-1106OrEarlier
False
True
E94-1108OrEarlier
False – Equipment does not support E94 version 1104 or an earlier
version
A2-6
True – Equipment supports E94 version 1106 or an earlier version
False – Equipment does not support E94 version 1106 or an earlier
version
A2-6
True – Equipment supports E94 version 1108 or an earlier version
False – Equipment does not support E94 version 1108 or an earlier
version
True
True – The equipment supports SEMI E94
False
False – The equipment does not support SEMI E94
Equipment
Equipment – EPTTracker is Equipment level
Module
Module – EPTTracker is Module level
EPTTrackerLevel
9.3.7.4 and
9.3.7.5
True – Equipment supports E94 version 1104 or an earlier version
False
E94Support
A2-6
A2-6
9.3.7
9.3.8
True – Internal buffer equipment
InternalBuffer
True
True
LargeRecipe
False
True
LastSynchTimeServer
False
True
LastSyncTime
9.3.6.4
False – Not an internal buffer equipment
True – The equipment supports uploading of large process
programs or execution recipes
False – The equipment does not support uploading of large process
programs or execution recipes
True – The equipment supports the E148 LastSyncTimeServer
attribute of the TS-Clock object
0
False – The equipment does not support the E148
LastSyncTimeServer attribute of the TS-Clock object
True – The equipment supports the E148 LastSyncTime attribute of
the TS-Clock object
False
False – The equipment does not support the E148 LastSyncTime
attribute of the TS-Clock object
True
True – The equipment supports Material Redirection Mode.
False
False – The equipment does not support Material Redirection Mode.
MaterialRedirectionMode
9.3.3
0
9.3.7.5
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Date: 3/9/2016
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Phone: 408.943.6900, Fax: 408.943.7943
Values
Description
Section
True
True – Multiple ProcessJobs can affect this Module simultaneously
False
False – One ProcessJob at a time is supported for this Module
True
True – Equipment can process multiple substrates simultaneously in
this Module
MultipleJobs
MultipleSubstrates
9.3.10
False
False – The equipment can process only one Substrate at a time in
this Module
True
True – The Parameter reports numeric data
False
False – The Parameter does not report numeric data
NumericParameter
True
OperatorCommandIssued
9.2.7.3
True – The SEMI E30 OperatorCommandIssued event is supported
False
False – The SEMI E30 OperatorCommandIssued event is not
supported
True
E30 operator equipment constant change event supported
False
E30 operator equipment constant change event not supported
True
True – The equipment supports the E94 PauseEvent attribute of
ControlJob
9.3.3
OperatorEqpConstChange
9.3.3
PauseEvent
9.3.7.4
False
False – The equipment does not support the E94 PauseEvent
attribute of ControlJob
True
True – The ProcessingStateChange event is defined
False
False - The ProcessingStateChange event is not defined
True
PreviousState parameter implemented for this StateMachine
False
PreviousState parameter not implemented for this StateMachine
True
True - The equipment supports ProcessPrograms
False
False – The equipment does not support ProcessPrograms
True
True – The equipment supports the PRProcessStart attribute of
ProcessJob
ProcessingStateChange
9.3.3
Various2
PrevState
ProcessPrograms
PRProcessStart
False
True
RecipeSteps
False
True
RecVariableList
False
2
9.3.10
9.3.3
9.3.4
False – The equipment does not support the PRProcessStart
attribute of ProcessJob
True – Equipment supports individual recipe steps for this Module.
False – Equipment does not support individual recipe steps for this
Module.
9.3.10
True – The equipment supports the RecVariableList attribute of
ProcessJob
False – The equipment does not support the RecVariableList
attribute of ProcessJob
9.3.4
This criteria is used for each instance of a PreviousState parameter specified in this document.
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development) activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.
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RecipeVerEvent
Values
Description
Section
True
Recipe verification or recipe verification failure event implemented
False
Recipe verification of recipe verification failure event not
implemented
True
9.3.3
True = The variable data item or object attribute that corresponds to
the parameter is implemented in SECS
SECSParameter
9
False
True
StandardDiscreteEvent
True = The variable data item or object attribute that corresponds to
the parameter is not implemented in SECS
True – A SEMI standard supported by the equipment specifies the
discrete event
False
False – The discrete event is not specified by a supported SEMI
standard.
True
True – The equipment has a Substrate ID reader
False
False – The equipment does not have a Substrate ID reader
True
True – The equipment supports the E90 SubstType attribute of the
Substrate object
SubstrateIDReader
SubstType
False
True
SubstUsage
False
9.2.5.8
9.3.6.4
9.3.6.4
False – The equipment does not support the E90 SubstType
attribute of the Substrate object
True – The equipment supports the E90 SubstUsage attribute of the
Substrate object
False – The equipment does not support the E90 SubstUsage
attribute of the Substrate object
9.3.6.4
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Document Number: 5002B
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APPENDIX 2
ADAPTING TO DIFFERENT STANDARDS VERSIONS
NOTICE: The material in this appendix is an official part of SEMI [insert designation, without publication date
(month-year) code] and was approved by full letter ballot procedures on [insert date of approval by responsible
regional standards committee].
A2-1 Metadata Modifications
A2-1.1 The EDA Common Metadata XML files contain representations of each content standard current in July,
2010 (the 0710 SEMI publication date).
A2-1.2 For implementations that are not based on these versions of the content standards, adjustments can be made
on a per-standard basis to the XML files to conform to earlier versions of those standards. This Appendix provides
the information needed to adjust for previous versions of the content standards as early as those current in of March
2003. Adjustments needed for earlier versions are left to the implementer to determine.
A2-1.3 For each release of each standard, instructions are provided to adjust the metadata backward version-byversion. When moving back more than one version, the changes described must be accumulated.
A2-1.4 In every case, the version of the standard must be changed within the metadata.
[Esss.00-RQ-00341-00] When changing a metadata set provided with this specification to represent a different
version of a content standard, all references to the version provided with this specification shall be updated to
reference the needed version of that content standard. [/RQ]
A2-2 SEMI E30 Metadata Modifications For Versions Prior To E30-0307
A2-2.1 The equipment metadata for SEMI E30 has been implemented on the following version:
 E30-0307 (latest release as of July 2010)
A2-2.2 E30-1103 (from E30-0307)
A2-2.2.1 The changes in this revision do not impact the metadata. However, all references to E30-0307 within the
metadata must be updated to E30-1103.
A2-2.3 E30-0703 (from E30-1103)
A2-2.3.1 The changes in this revision do not impact the metadata. However, all references to E30-1103 within the
metadata must be updated to E30-0703.
A2-2.4 E30-0303 (from E30-0703)
[Esss.00-RQ-00342-00] In order to change the E30 metadata set from any of versions E30-0307, E30-1103, or E300703 to support E30-0303, perform the changes outlined in this section. [/RQ]
A2-2.4.1 All references to E30-0703 within the metadata must be updated to E30-0303.
[Esss.00-RQ-00343-00] In the PPFormatEnum TypeDefinition, remove the Integer Enumeration elements for the
values 5 through 16. [/RQ]
A2-2.4.1.1 Only values 1, 2, 3, and 4 should exist.
A2-3 SEMI E40 Metadata Modifications For Versions Prior To E40-0709
A2-3.1 The equipment metadata for SEMI E40 has been implemented on the following version:
 E40-0709 (latest release as of July 2010)
A2-3.2 E40-1107 (from E40-0709)
A2-3.2.1 The changes in this revision do not impact the metadata. However, all references to E40-0709 in the
metadata must be updated to E40-1107.
A2-3.3 E40-0307 (from E40-1107)
A2-3.3.1 The changes in this revision do not impact the metadata. However, all references to E40-1107 in the
metadata must be updated to E40-0307.
A2-3.4 E40-1106 (from E40-0307)
This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline.
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Document Number: 5002B
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A2-3.4.1 The changes in this revision do not impact the metadata. However, all references to E40-0307 in the
metadata must be updated to E40-1106.
A2-3.5 E40-0705 (from E40-1106)
A2-3.5.1 The changes in this revision do not impact the metadata. However, all references to E40-1106 in the
metadata must be updated to E40-0705.
A2-3.6 E40-0304 (from E30-0705)
[Esss.00-RQ-00344-00] In order to change the E40 metadata set from any of versions E40-0709, E40-1107, E400307, E40-1106, or E40-0705 to support E40-0304, perform the changes outlined in this section. [/RQ]
A2-3.6.1 All references to E40-0705 in the metadata must be updated to E40-0304.
[Esss.00-RQ-00345-00] In the PRJobStateEnum TypeDefinition, remove the enumerated strings for values 10 and
11. [/RQ]
[Esss.00-RQ-00346-00] In the ProcessJob StateMachine, make the following changes:
o In the ProcessJob state, remove the PostActive state and all children.
o In the Executing state, add a new state for ProcessComplete. Create the state with id “ProcessComplete”, name
“Active.Executing.ProcessComplete”, and the description: "The processing resource has completed processing all
material specified by the PR Job".
o Remove the transitions with the transitionId 6, 7, 16, and 17.
o Remove the events “ProcessJob:16:Aborting-Aborted” and “ProcessJob:17:Stopping-Stopped.”
o Create a new transition 6 for the Processing to Process Complete transition. Set the transition id to “6”, the
transition name is “Processing-ProcessComplete”, the source state is “Processing”, the target state is
“ProcessComplete”, and the description is: "Material processing complete".
o Create a new transition 7 for Process Complete to No State. Set the transition id to “7”, the transition name is
“ProcessComplete-NoState”, the source state is “ProcessComplete”, the target state is “NoState”, and the description
is "Job material departs from the equipment and post processing is complete, or the process job is replaced by
another process job that specifies the same material when no control job is used. Process Job is deleted."
o Create a new transition 16 for Aborting to No State. Set the transition id to “16”, the transition name is
“Aborting-NoState,”, the source state is “Aborting”, the target state is “NoState”, and the description is "Processing
resource abort procedure is complete and for some processing equipment the related substrates are moved out as part
of the error recovery. Process Job is deleted".
o Create a new transition 17 for Stopping to No State. Set the transition id to “17”, the transition name is
“Stopping-NoState”, the source state is “Stopping”, the target state is “NoState”, and the description is "Processing
resource stop procedure is complete. Process Job is deleted."
o Change the description for the event “ProcessJob:7:PostActive-NoState” from
"Job material departs from the equipment or the process job becomes extinct because the process job is replaced by
another process job that specifies the same material when no control job is used."
to
"Job material departed the processing resource AND resource post-conditioning completed, OR superseded by
another process job on the same material."
o Create the event for transition 16 from Aborting to No State. The event id is “ProcessJob:16:Aborting-NoState”,
the event name is “Aborting-NoState”, the transition reference is “16”, and the description is "Processing resource
abort procedure is complete and for some processing equipment the related substrates are moved out as part of the
error recovery."
This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline.
Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document
development) activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.
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o Create the event for transition 17 from Stopping to No State. The event id is “ProcessJob:17:Stopping-NoState”,
the event name is “Stopping-NoState”, the transition reference is “17”, and the description is "The stop procedure is
completed." [/RQ]
A2-3.7 E40-0703 (from E30-0304)
A2-3.7.1 The changes in this revision do not impact the metadata. However, all references to E40-0304 in the
metadata must be updated to E40-0703.
A2-3.8 E40-1102 (from E40-0703)
A2-3.8.1 All references to E40-0703 in the metadata must be updated to E40-1102.
A2-3.8.2 Parameter Type Definitions
A2-3.8.2.1 PRJobState
A2-3.8.2.1.1 The 1102 standard defined an enumerated value for Pause rather than Paused on the PRJobState
attribute. It was defined correctly for the PRJobState data variable. The intent was for it to match the Paused state.
The Pause state is a parent state and is never a legal value for the enumeration. Since GEM uses numbers, there was
no significant change. However, EDA is using strings. No change should be made in the equipment metadata.
A2-3.8.2.1.2 The 1102 standard defined an enumerated value for the Executing state. This state is a parent state
and can never be reported in the PRJobState attribute. No change should be made in the equipment metadata.
A2-4 SEMI E87 Metadata Modifications For Versions Prior To E87-0709
A2-4.1 The equipment metadata for SEMI E87 has been implemented on the following version:
 E87-0709 (latest release as of July 2010)
A2-4.2 E87-0707 (from E87-0709)
[Esss.00-RQ-00347-00] In order to change the E87 metadata set from version E87-0709 to support E87-0707,
perform the changes outlined in this section. [/RQ]
A2-4.2.1 All references to E87-0709 in the metadata must be updated to E87-0707.
[Esss.00-RQ-00348-00] Make the following changes to the AccessMode StateMachine
o Change the description of transition 2 on the Access Mode state machine. The description changes from
"Host or operator has executed a Change Access service with the value of Auto"
to
"Host or operator has executed a Change Access service with the value of Auto. Manual deliveries are not allowed."
o Change the description of transition 3 on the Access Mode state machine. The description changes from
"Host or operator has executed a Change Access service with the value of Manual"
to
"Host or operator has executed a Change Access service with the value of Manual. Automated transfers are not
allowed." [/RQ]
A2-4.3 E87-0706 (from E87-0707)
[Esss.00-RQ-00349-00] In order to change the E87 metadata set from version E87-0707 to support E87-0706,
perform the changes outlined in this section. [/RQ]
A2-4.3.1 All references to E87-0707 in the metadata must be updated to E87-0706.
[Esss.00-RQ-00350-00] Remove the simple event “DuplicateCarrierInProcess” and all children elements. [/RQ]
A2-4.4 E87-1105 (from E87-0706)
[Esss.00-RQ-00351-00] In order to change the E87 metadata set from version E87-0706 to support E87-1105,
perform the changes outlined in this section. [/RQ]
A2-4.4.1 All references to E87-0706 in the metadata must be updated to E87-1105.
This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline.
Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document
development) activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.
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Document Number: 5002B
Date: 3/9/2016
Semiconductor Equipment and Materials International
3081 Zanker Road
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Phone: 408.943.6900, Fax: 408.943.7943
[Esss.00-RQ-00352-00] Change the description on the CarrierVerificationFailure exception. The description
changes from
"Equipment verification of Carrier Id failed"
to
"Verification of Carrier Id failed". [/RQ]
[Esss.00-RQ-00353-00] Change the description on the SlotMapVerificationFailure exception. The description
changes from
"Equipment verification of Carrier Slot Map failed"
to
"Verification of Carrier Slot Map failed". [/RQ]
[Esss.00-RQ-00354-00] Change the Carrier StateMachine as follows:
o Change the description of transition 6 on the Carrier / Carrier ID Status state machine. The description changes
from
"Carrier ID is read successfully and the equipment has verified the carrier ID successfully; or carrier was
instantiated via a CarrierNotification service and upon carrier placement the equipment sent a Carrier ID Read Fail
Event or UnknownCarrierID, and the host issued a ProceedWithCarrier"
to
"Carrier ID is read successfully and the equipment has verified the carrier ID successfully"
o Change the description of event “CarrierIDStatus:6:IDNotRead-IDVerificationOk” on the Carrier Object Carrier
ID Status state machine. The description changes from
"Carrier ID is read successfully and the equipment has verified the carrier ID successfully; or carrier was
instantiated via a CarrierNotification service and upon carrier placement the equipment sent a Carrier ID Read Fail
Event or UnknownCarrierID, and the host issued a ProceedWithCarrier"
to
"Carrier ID is read successfully and the equipment has verified the carrier ID successfully". [/RQ]
A2-4.5 E87-0705 (from E87-1105)
A2-4.5.1 The changes in this revision do not impact the metadata. However, all references to E87-1105 in the
metadata must be updated to E87-0705.
A2-4.6 E87-0304 (from E87-0705)
A2-4.6.1 The changes in this revision do not impact the metadata. However, all references to E87-0705 in the
metadata must be updated to E87-0304.
A2-4.7 E87-0703 (from E87-0304)
[Esss.00-RQ-00355-00] In order to change the E87 metadata set from any of versions E87-1105, E87-0705, or E870304 to support E87-0703, perform the changes outlined in this section. [/RQ]
A2-4.7.1 All references to E87-0304 in the metadata must be updated to E87-0703.
[Esss.00-RQ-00356-00] Change the description of transition 7 on the Load Port Transfer State Machine. The
description changes from
"Equipment recognizes the logical indication of the start of a manual unload transfer, an automated PIO unload
transfer is beginning and the PIO Ready signal is active, a CarrierIn service is started for this load port, or a
CarrierRecreate service has been issued by the host or operator".
to
"Equipment recognizes the logical indication of the start of a manual unload transfer, an automated PIO unload
transfer is beginning and the PIO Ready signal is active, a CarrierIn service is started for this load port, or a
CarrierRecreate service has been issued by the host or operator on a Carrier in the CarrierComplete or
CarrierStopped state". [/RQ]
A2-4.8 E87-0303 (from E87-0703)
This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline.
Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document
development) activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.
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Document Number: 5002B
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Phone: 408.943.6900, Fax: 408.943.7943
A2-4.8.1 The changes in this revision do not impact the metadata. However, all references to E87-0703 in the
metadata must be updated to E87-0303.
A2-5 E90 Metadata Modifications For Versions Prior To E90-0707
A2-5.1 The equipment metadata for SEMI E90 has been implemented on the following version:
 E90-0707 (latest release as of July 2010)
A2-5.2 E90-0706 (from E90-0707)
[Esss.00-RQ-00357-00] In order to change the E90 metadata set from version E90-0707 to support E90-0706,
perform the changes outlined in this section. [/RQ]
A2-5.2.1 All references to E90-0707 in the metadata must be updated to E90-0706.
[Esss.00-RQ-00358-00] In the BatchLocation StateMachine, make the following changes:
o Change the transition 1 description from
"All substrates of the group have moved onto the batch location. A record is created in the SubstHistory for the
Substrates placed in the batch location."
to
"A group (batch) of substrates, even if they are a part of group, moves onto the batch location. A record is created in
the SubstHistory for the Substrates placed in the batch location."
o Change the event “BatchLocation:1:Unoccupied-Occupied” description from
"All substrates of the group have moved onto the batch location"
to
"A group (batch) of substrates, even if they are a part of group, moves onto the batch location". [/RQ]
A2-5.3 E90-0306 (from E90-0706)
[Esss.00-RQ-00359-00] In order to change the E90 metadata set from version E90-0706 to support E90-0306,
perform the changes outlined in this section. [/RQ]
A2-5.3.1 All references to E90-0706 in the metadata must be updated to E90-0306.
[Esss.00-RQ-00360-00] In the Substrate object, change the description of the attribute SubstLocID from
"Identifier for current equipment substrate location or carrier substrate location that the substrate occupies. This
parameter merges the E90 Substrate SubstLocID attribute and the SubstSubstLocID DV (since EDA allows
attributes in reports)"
to
"Identifier for current equipment substrate location. This parameter merges the E90 Substrate SubstLocID attribute
and the SubstSubstLocID DV (since EDA allows attributes in reports)". [/RQ]
[Esss.00-RQ-00361-00] In the SubstHistoryEntry TypeDefinition, change the description of the TimeOut field from
"Time the substrate exited the location; empty until the substrate departs the location. This parameter is reported in
the standard EDA time format, not the GEM selected format"
to
"Time the substrate exited the location. This parameter is reported in the standard EDA time format, not the GEM
selected format". [/RQ]
This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline.
Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document
development) activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.
Page 67
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Document Number: 5002B
Date: 3/9/2016
Semiconductor Equipment and Materials International
3081 Zanker Road
San Jose, CA 95134-2127
Phone: 408.943.6900, Fax: 408.943.7943
[Esss.00-RQ-00362-00] In the SubstrateLocation StateMachine, make the following changes:
o Change the transition 1 description from
"Substrate moves into the substrate location. A record is created in the SubstHistory for the Substrate placed in the
location."
to
"Substrate moves into the substrate location"
o Change the transition 2 description from
"Substrate moves off the location. TimeOut in SubstHistory is updated."
to
"Substrate moves off the location". [/RQ]
[Esss.00-RQ-00363-00] In the BatchLocation StateMachine, make the following changes:
o Change the transition 1 description from
"A group (batch) of substrates, even if they are a part of group, moves onto the batch location. A record is created in
the SubstHistory for the Substrates placed in the batch location."
to
"A group (batch) of substrates, even if they are a part of group, moves onto the batch location"
o Change the transition 2 description from
"All substrates of the group (batch) moves off the location. The Substrate TimeOut in SubstHistory is updated."
to
"All substrates of the group (batch) moves off the location". [/RQ]
A2-5.4 E90-1105 (from E90-0306)
A2-5.4.1 The changes in this revision do not impact the metadata. However, all references to E90-0306 in the
metadata must be updated to E90-1105.
A2-5.5 E90-0705 (from E90-1105)
A2-5.5.1 All references to E90-1105 in the metadata must be updated to E90-0705.
A2-5.5.2 Equipment Node Definitions
A2-5.5.2.1 BatchLocation
A2-5.5.2.1.1 The Substrate Batch Location attribute named ObjType is optional in the standard. This does not
affect the E125 equipment metadata because E39 requires the presence of ObjType.
A2-5.5.2.1.2 The Substrate Batch Location attribute BatchLocState is optional in the standard. This does not
change anything within the equipment metadata because the status variable and data variable for the BatchLocState
were already required by the standard.
A2-5.5.2.1.3 The Substrate Batch Location attribute BatchSubstIDMap is optional in the standard. This does not
change anything within the equipment metadata because the status variable and data variable for the BatchLocState
were already required by the standard.
A2-5.6 E90-1104 (from E90-0705)
[Esss.00-RQ-00364-00] In order to change the E90 metadata set from any of versions E90-0306, E90-1105, or E900705 to support E90-1104, perform the changes outlined in this section. [/RQ]
A2-5.6.1 All references to E90-0705 in the metadata must be updated to E90-1104.
[Esss.00-RQ-00365-00] For the Substrate object definition, make the following changes:
o The AcquiredIDList data variable was not defined by the E90-1104 specification. It shall be an optional
Parameter for this version of the standard.
o The SubstIDStatusList data variable was not defined by the E90-1104 specification. It shall be an optional
Parameter for this version of the standard. [/RQ]
This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline.
Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document
development) activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.
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Document Number: 5002B
Date: 3/9/2016
Semiconductor Equipment and Materials International
3081 Zanker Road
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Phone: 408.943.6900, Fax: 408.943.7943
[Esss.00-RQ-00366-00] In each MaterialLocation with MaterialType = "Substrate", remove the Parameter
DisableEvents. [/RQ]
A2-5.7 E90-0304 (from E90-1104)
[Esss.00-RQ-00367-00] In order to change the E90 metadata set from any of versions E90-1104 to support E900304, perform the changes outlined in this section. [/RQ]
A2-5.7.1 All references to E90-1104 in the metadata must be updated to E90-0304.
[Esss.00-RQ-00368-00] Remove the SubstIDStatusEnum TypeDefinition and all child elements. [/RQ]
[Esss.00-RQ-00369-00] Remove the SubstIDStatusArray TypeDefinition and all child elements. [/RQ]
[Esss.00-RQ-00370-00] Remove the state machine definition for SubstrateReadingStatus within the existing
SubstrateObject state machine definition. [/RQ]
A2-5.7.2 This is the StateMachine element with the id “E90:SubstrateReadingStatus” within the “SubstrateObject”
state machine.
[Esss.00-RQ-00371-00] In the Substrate object definition, make the following changes:
o Remove the following Parameters: SubstIDStatus, AcquiredID, AcquiredIDList, SubstIDStatusList,
SubstrateReadingCurrState, and SubstrateReadingPrevState.
o The following variables are not defined by the E90-1104 specification: SubstProcState, SubstDestinationList,
SubstHistoryList, SubstPosInBatchList, SubstTypeList, and SubstUsageList. These shall be optional Parameters for
this version of the standard.
o In the Substrate state machine instance, remove the nested state machine for SubstrateReadingStatus.
o In the Substrate state machine instance, including all nested state machines, remove the available parameters for
AcquiredIDList. [/RQ]
[Esss.00-RQ-00372-00] The E90-0304 specification does not define the substrate ID reader. Locate all components
in the equipment structure that represent substrate readers and delete them. Locate all the corresponding
EquipmentNodeDescription definitions and delete them. [/RQ]
A2-5.8 E90-0703 (from E90-0304)
A2-5.8.1 The changes in this revision do not impact the metadata. However, all references to E90-0304 in the
metadata must be updated to E90-0703.
A2-5.9 E90-0303 (from E90-0703)
A2-5.9.1 The changes in this revision do not impact the metadata. However, all references to E90-0703 in the
metadata must be updated to E90-0303.
A2-6 E94 Metadata Modifications For Versions Prior To E94-0309
A2-6.1 The equipment metadata for SEMI E94 has been implemented on the following version:
 E94-0309 (latest release as of July 2010)
A2-6.2 E94-1108 (from E94-0309)
[Esss.00-RQ-00373-00] In order to change the E94 metadata set from version E94-0309 to support E94-1108,
perform the changes outlined in this section. [/RQ]
This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline.
Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document
development) activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.
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Document Number: 5002B
Date: 3/9/2016
Semiconductor Equipment and Materials International
3081 Zanker Road
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Phone: 408.943.6900, Fax: 408.943.7943
A2-6.2.1 All references to E94-0309 in the metadata must be updated to E94-1108.
[Esss.00-RQ-00374-00] In the ControlJob StateMachine make the following changes:
o Change the transition 11 description from
"Equipment received a CJStop command from the host or operator or generated a CJStop internally, and all process
jobs under the control job that were Active when the CJStop command was received have entered the PostActive
state"
to
"Receive CJStop command from host or operator through operator console and all process jobs under the control job
have been stopped and material processing is stopped"
o Change the transition 12 description from
"Equipment received a CJAbort command from the host or operator or generated a CJAbort internally, and all
process jobs under the control job that were Active when the CJAbort command was received have entered the
PostActive state"
to
"Receive CJAbort command from host or operator through operator console and all process jobs under the control
job have been aborted and material processing is aborted"
o Change the event “ControlJob:11:Active-Completed” description from
"Equipment received a CJStop command from the host or operator or generated a CJStop internally, and all process
jobs under the control job that were Active when the CJStop command was received have entered the PostActive
state"
to
"Receive CJStop command from host or operator through operator console and all process jobs under the control job
have been stopped and material processing is stopped"
o Change the event “ControlJob:12:Active-Completed” description from
"Equipment received a CJAbort command from the host or operator or generated a CJAbort internally, and all
process jobs under the control job that were Active when the CJAbort command was received have entered the
PostActive state"
to
"Receive CJAbort command from host or operator through operator console and all process jobs under the control
job have been aborted and material processing is aborted". [/RQ]
A2-6.3 E94-0308 (from E94-1108)
A2-6.3.1 The changes in this revision do not impact the metadata. However, all references to E94-1108 in the
metadata must be updated to E94-0308.
A2-6.4 E94-1107 (from E94-0308)
A2-6.4.1 The changes in this revision do not impact the metadata. However, all references to E94-0308 in the
metadata must be updated to E94-1107.
A2-6.5 E94-1106 (from E94-1107)
[Esss.00-RQ-00375-00] In order to change the E94 metadata set from any of versions E94-1108, E94-0308, or E941107 to support E90-1106, perform the changes outlined in this section. [/RQ]
A2-6.5.1 All references to E94-1107 in the metadata must be updated to E94-1106.
[Esss.00-RQ-00376-00] In the ControlJob object definition, change the MtrlOutSpec attribute parameter description
from
"Maps material from source to destination after processing. In slot integrity mode the list shall be empty. This
parameter merges the E94 ControlJob MtrlOutSpec attribute and the MtrlOutSpec DV (since EDA allows attributes
in reports)"
to
"Maps material from source to destination after processing. This parameter merges the E94 ControlJob
MtrlOutSpec attribute and the MtrlOutSpec DV (since EDA allows attributes in reports)". [/RQ]
This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline.
Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document
development) activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.
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Document Number: 5002B
Date: 3/9/2016
Semiconductor Equipment and Materials International
3081 Zanker Road
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Phone: 408.943.6900, Fax: 408.943.7943
[Esss.00-RQ-00377-00] In the TypeDefinition SourceDestinationMap, change the DestinationMap field description
from
"Describes carrier positions into which finished material is placed. Sequential order is followed when the list of
substrate locations is empty"
to
"Destination carrier information for the source carrier information". [/RQ]
[Esss.00-RQ-00378-00] Remove the Exceptions SubstrateDestinationNotAccessible and
SubstrateDestinationUnknown. Remove the ExceptionRefs of these two exceptions from the
EquipmentNodeDescription for JobManager [/RQ]
A2-6.6 E94-0306 (from E94-1106)
A2-6.6.1 The changes in this revision do not impact the metadata. However, all references to E94-1106 in the
metadata must be updated to E94-0306.
A2-6.7 E94-0705 (from E94-0306)
[Esss.00-RQ-00379-00] In order to change the E94 metadata set from version E94-1106 or E94-0306 to support
E90-0705, perform the changes outlined in this section. [/RQ]
A2-6.7.1 All references to E94-0306 in the metadata must be updated to E94-0705.
[Esss.00-RQ-00380-00] In the ControlJob StateMachine definition, make the following changes:
o Change the description of transition 13 from
"All material associated with this control job has been removed from the equipment, the control job completed and
had no material associated with it, or the host requested the deletion of the control job. Control job is deleted"
to
"Control Job is deleted"
o Change the description of event “ControlJob:13:Completed-NoState” from
"All material associated with this control job has been removed from the equipment, the control job completed and
had no material associated with it, or the host requested the deletion of the control job. Control job is deleted"
to
"Control Job is deleted". [/RQ]
A2-6.8 E94-1104 (from E94-0705)
[Esss.00-RQ-00381-00] In order to change the E94 metadata set from version E94-0705 to support E90-1104,
perform the changes outlined in this section. [/RQ]
A2-6.8.1 All references to E94-0705 in the metadata must be updated to E94-1104.
[Esss.00-RQ-00382-00] In the ControlJob StateMachine definition, make the following changes:
o Change the description of transition 11 from
"Receive CJStop command from host or operator through operator console and all process jobs under the control job
have been stopped and material processing is stopped"
to
"Receive CJStop command from host or operator through operator console or all process jobs under the control job
have been stopped and material processing is stopped"
o Change description of transition 12 from
"Receive CJAbort command from host or operator through operator console and all process jobs under the control
job have been aborted and material processing is aborted"
to
"Receive CJAbort command from host or operator through operator console or all process jobs under the control job
have been aborted and material processing is aborted"
This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline.
Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document
development) activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.
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Document Number: 5002B
Date: 3/9/2016
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Phone: 408.943.6900, Fax: 408.943.7943
o Change the description of the event “ControlJob:11:Active-Completed” from
"Equipment received a CJStop command from the host or operator or generated a CJStop internally, and all
ProcessJobs under the ControlJob that were Active when the CJStop command was received have entered the
PostActive state"
to
"Equipment received a CJStop command from the host or operator or generated a CJStop internally, or all
ProcessJobs under the ControlJob that were Active when the CJStop command was received have entered the
PostActive state"
o Change the description of the event “ControlJob:12:Active-Completed” from
"Equipment received a CJAbort command from the host or operator or generated a CJAbort internally, and all
ProcessJobs under the ControlJob that were Active when the CJAbort command was received have entered the
PostActive state"
to
"Equipment received a CJAbort command from the host or operator or generated a CJAbort internally, or all
ProcessJobs under the ControlJob that were Active when the CJAbort command was received have entered the
PostActive state". [/RQ]
A2-6.9 E94-0702 (from E94-1104)
A2-6.9.1 The changes in this revision do not impact the metadata. However, all references to E94-1104 in the
metadata must be updated to E94-0702.
A2-7 E116 Metadata Modifications For Versions Prior To E116-0709
A2-7.1 The equipment metadata for SEMI E116 has been implemented on the following version:
 E116-0707 (latest release as of July 2010)
A2-7.2 E116-0706 (from E116-0707)
A2-7.2.1 The changes in this revision do not impact the metadata. However, all references to E116-0707 in the
metadata must be updated to E116-0706.
A2-7.3 E116-0306 (from E116-0706)
A2-7.3.1 The changes in this revision do not impact the metadata. However, all references to E116-0706 in the
metadata must be updated to E116-0306.
A2-7.4 E116-0705 (from E116-0306)
[Esss.00-RQ-00383-00] In order to change the E116 metadata set from version E116-0306 to support E116-0705,
perform the changes outlined in this section. [/RQ]
A2-7.4.1 All references to E116-0306 in the metadata must be updated to E116-0705.
[Esss.00-RQ-00384-00] In the EPTModule StateMachine definition, make the following changes:
o Change the transition 1b description from
"EPT Module initialization complete, a fault exists, or the EPT module cannot be initialized"
to
"EPT Module initialization complete, a fault exists, the EPT module cannot be initialized, or material is present"
o Remove the initialization state transition with transition id “1c” from the EPTModule state machine.
o On the event “EPTModule:EPTStateChange,” remove the transition reference “1c". [/RQ]
A2-8 SEMI E148 metadata modifications for versions prior to E148-1109
A2-8.1 The equipment metadata for SEMI E148 has been implemented on the following versions:
 E148-1109 (latest release as of July 2010)
A2-8.2 No earlier versions of SEMI E148 are supported. Thus, no instructions for such changes are included in this
appendix.
This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline.
Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document
development) activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.
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A2-9 SEMI E157 metadata modifications for versions prior to E157-0710
A2-9.1 The equipment metadata for SEMI E157 has been implemented on the following version:
 E157-0710 (latest release as of July 2010)
No earlier versions of SEMI E157 exist. However, a newer version exists. It is considered in this section.
A2-9.2 E157-0211 (from E157-0710)
A2-9.2.1 The changes in this revision do not impact the metadata. However, all references to E157-0710 within the
metadata must be updated to E157-0211.
This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline.
Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document
development) activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.
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Document Number: 5002B
Date: 3/9/2016
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Phone: 408.943.6900, Fax: 408.943.7943
RELATED INFORMATION 1
RECOMMENDED PRACTICES FOR E125 EQUIPMENT METADATA
CONSTRUCTION
NOTICE: This related information is not an official part of SEMI [insert designation, without publication date
(month-year) code] and was derived from [insert origin of the information]. This related information was approved
for publication by [insert the method by which publication was authorized, Regulations, ¶12.2] on [insert date of
approval].
R1-1 Introduction
R1-1.1 This Related Information contains recommended practices for improving an equipment's metadata. Follow
these recommendations to improve an equipment metadata’s quality and the uniformity of the metadata from one
equipment to another.
R1-1.2 These suggestions are appropriate in most cases, but might not apply in some situations. The implementer
should consider the implications of each suggestion listed and act appropriately for the specific equipment to which
it would be applied.
R1-2 General
R1-2.1 The name field of metadata elements should contain brief text that conveys the nature of the element to a
user who is familiar with the equipment. If no name field is provided, this approach should apply to the ID field.
R1-2.1.1 The Name and the ID attributes of a metadata element should not embed information about the object that
owns it. (e.g., Etch1ExhaustPumpSubsystem).
R1-2.1.2 The implementer is encouraged to use descriptive or functional Name attribute values such as “CF4” and
“NH2” or “VentValve” and “BleedValve.” Use of generic Name attribute values, such as “Valve” or “Pump” or
hardware-specific information such as Make or Model is discouraged.
R1-2.2 The name and ID fields of all metadata elements should be formatted in CamelCase notation except where
otherwise specified in this document or in the EDA standards.
R1-2.2.1 The CamelCase format provides the best option for both Computer interpretation and human readability
R1-2.3 The Description field of each metadata element (equipment component, parameter, event, exception, etc.)
should provide a clear statement of the purpose of the element it describes that is understandable to a user who has a
general knowledge of that type of equipment.
R1-2.4 The metadata from identical equipment should be identical except for the Uid and ImmutableID attributes of
the SEMI E120 components of the equipment and for the Name attribute of the Equipment.
R1-2.4.1 Equipment are considered identical when they are of the same make and model, have the same software
version(s), and the same options installed.
R1-2.5 Where identical Modules, Subsystems, or IODevices appear multiple times within the equipment model, the
metadata from those duplicate equipment components should be identical except for their Uid, Name, and
ImmutableID attributes.
R1-2.5.1 Pairs of Modules, Subsystems, and IODevices are considered identical when they are of the same make
and model, have the same software version(s), and the same options installed.
R1-2.6 Equipment that can support multiple versions of the content standards should report in the metadata only the
constructs related to the version active at the time. If the active version changes, the metadata should be changed
and reported via the MetadataRevised message as required in SEMI E125. Subsequent requests for metadata should
report constructs related to the newly active standard version.
R1-2.6.1 Equipment that can support multiple versions of EDA simultaneously should return metadata conformant
to the version of EDA used for the EDA client’s current connection.
R1-3 Equipment Structure
R1-3.1 The metadata model should include the fewest hierarchical levels necessary to present an accurate
representation of the equipment. A maximum of five levels in the hierarchy should be sufficient for most production
equipment.
This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline.
Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document
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R1-3.2 The metadata model should represent equipment components from a functional viewpoint, rather than
explicit representations of the control computers and infrastructure (sensor bus, I/O cards, computer racks, etc.).
R1-3.2.1 For example, if an I/O card has a sensor for chamber temperature wired into one of its input ports, the
Parameter representing that temperature should be related to the chamber, not to the I/O card. However, the I/O
card might be included in the metadata model if there were a Parameter for monitoring the status of the I/O board
itself.
R1-3.3 Any equipment node (Nameable) that has child nodes should have at least two child nodes. Those that do
not should be combined with the parent node in the equipment structure.
R1-3.3.1 In modeling the equipment in metadata choices must be made about the level of detail to reveal. For
example, the individual nuts and bolts are not typically modeled. It is recommended that the implementer not reveal
components that have little or no useful information. The modeling of such components obscures needed data at the
end of deep, sparse structural hierarchies. Thus, in the case of a Module that has a Subsystem with only one
Parameter, that subsystem could be left out of the model and the Parameter assigned to the parent Module. This is a
valid representation of the equipment structure.
R1-3.4 Equipment, Modules, Subsystems, and LogicalElements defined in the metadata should have two or more
total elements from among the following: Parameters, Exceptions, Events, SimpleEvents, StateMachineInstances,
and references to SEMIObjTypes.
R1-3.4.1 IODevices should also have two or more total elements from the list shown above wherever practical.
R1-3.5 The preferred metadata model configuration has all major equipment components defined as child nodes of
the Equipment. Major equipment components include all Modules and the EFEM. Major equipment components
also include any Subsystems which are not contained within the EFEM component and function as Substrate
Handlers, Carrier Handlers, and Load Locks.
R1-3.6 The number of Modules in the equipment metadata should equal the number of independent processing,
measurement, and inspection locations on the equipment.
R1-3.6.1 Only components that actively change or measure the substrate should be classified as Modules. Any
equipment component designated as a Module should be directed in its processing by instructions or settings
contained in a recipe that can be managed by the factory system.
R1-3.6.2 See also SEMI E157 for further discussion on the nature of Modules (referred to there as process modules).
R1-3.7 The EDA implementer is encouraged to model collections of closely related parameters as IODevices where
it improves the clarity of the metadata. An approach that assigns one Parameter to each IODevice can yield an
unmanageable number of IODevices for no benefit.
R1-3.7.1 Individual sensors can be modeled as parameters attached directly to the equipment component that they
measure.
R1-3.8 Any EquipmentElement that does not fit the definition of Equipment, Module, or IODevice should be
modeled as a Subsystem.
R1-3.9 The E120 Extension class should not be used in E125 equipment metadata in most cases.
R1-3.10 The Uid of the Equipment component should be unique among all the equipment in the factory. To ensure
this uniqueness, the implementer should ensure that the Uid attribute of each Equipment is a separately generated
uuid value.
R1-3.10.1 Proper application of the uuid concept to the Uid attribute value for all equipment components is
encouraged where feasible. This includes use of the correct uuid string format as defined in ISO/IEC 11578 and
generation of a unique uuid value for each Uid represented in the metadata.
R1-3.11 The implementer should provide Function attribute values that describe specifically the purpose of the
EquipmentElement within the equipment. That is, it should describe what it does, not what it is.
R1-3.12 The Supplier and Make attributes should be filled in for EquipmentElement derivatives (Equipment,
Module, Subsystem, and IODevice) wherever possible.
R1-3.13 Any equipment component that has a model number designated by the supplier should have a
corresponding EquipmentElement defined in the metadata including accurate values for the Supplier, Make, and
Model attributes.
This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline.
Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document
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R1-3.14 Any equipment component that has a serial number designated by the supplier should have a
corresponding EquipmentElement defined in the metadata including accurate values for the Supplier, Make, Model,
and ImmutableID attributes.
R1-4 SEMI Objects
R1-4.1 Each SEMIObjType should be referenced by at least one EquipmentNodeDescription.
R1-4.1.1 Dead references and unused artifacts are an indication of underlying problems in the equipment interface.
They should not be allowed or ignored.
R1-4.2 There should be no Parameter with the name ObjType under the Attributes list of a SEMIObjType.
R1-4.2.1 ObjType is already an XML attribute of the SEMIObjType.
R1-5 StateMachines
R1-5.1 Each StateMachine should be referenced by at least one StateMachineInstance.
R1-5.1.1 Dead references and unused artifacts are an indication of underlying problems in the equipment interface.
They should not be allowed or ignored.
R1-5.1.2 A Transition’s Description attribute should describe the trigger for the transition. In the metadata defined
for the content standards, the text from the “Trigger” column of the transition table, supplemented with any
important text from the “Action” and “Comment” columns was included in the Description.
R1-5.2 State Accessibility - To be functionally useful, each State in a StateMachine needs to have a path in and a
path out. These pathways are defined as transitions.
R1-5.2.1 NoState is the current state during creation of the StateMachine and so does not need a transition in. The
Top State is entered upon creation and exited upon destruction of the StateMachine.
R1-5.2.2 For each State in a StateMachine that is neither a NoState nor a Top State, the StateMachine should
contain at least one Transition into that State.
R1-5.2.2.1 A Transition into a State is one with a targetStateId value that corresponds to that State or to one of its
substates and with a sourceStateId value that does not correspond to the State or one of its substates.
R1-5.2.3 For each State in a StateMachine that is not a Top State, the StateMachine should contain at least one
Transition out of that state.
R1-5.2.3.1 A Transition out of a State is one with a sourceStateId value that corresponds to that State, one of its
substates, or one of its super-states and with a targetStateId value that does not correspond to the State or one of its
substates.
R1-5.2.4 Note that not all transitions must be reportable. Some transitions will have no corresponding event.
R1-5.2.5 Where a StateMachine contains more than two States (excluding the Top State and NoState), a referencing
StateMachineInstance’s CurrentState attribute should reference a non-transient Parameter formatted as a String that
holds the id attribute of the current State for this StateMachineInstance.
R1-5.2.6 Where a StateMachine contains more than three States (excluding the Top State and NoState), a
referencing StateMachineInstance’s PreviousState attribute should reference a non-transient Parameter formatted as
a string that holds the id attribute of the previous State (before the most recent Transition) for this
StateMachineInstance.
R1-5.2.7 The names for the Parameters referenced by a StateMachineInstance’s CurrentState and PreviousState
attributes should be of the form <StateMachine>CurrState and <StateMachine>PrevState, respectively, where
<StateMachine> is the name of the state machine as it appears in the originating standard.
R1-5.2.8 Any Parameter referenced in a PreviousStateName or a CurrentStateName should not be referenced by
any other PreviousStateName or CurrentStateName defined in the metadata.
R1-6 Exceptions
R1-6.1 Each Exception in the GetExceptions() response should be referenced by at least one
EquipmentNodeDescription.
R1-6.1.1 Dead references and unused artifacts are an indication of underlying problems in the equipment interface.
They should not be allowed or ignored.
This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline.
Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document
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R1-6.2 Since the Description is not provided with the ExceptionReport, the ID attribute should be human
interpretable to indicate the nature of the problem.
R1-6.3 The EDA implementer should not define events corresponding to EDA Exceptions.
R1-6.3.1 Since Exceptions provide for parameter reporting, this is redundant in a well-designed EDA
implementation.
R1-7 Parameters
R1-7.1 Each parameter that is defined in an EquipmentNodeDescription or in a SEMIObjType and which is defined
as Transient should be referenced by at least one AvailableParameter construct or Exception definition.
R1-7.2 Any Parameter that is defined as a Configuration or Control type should have its isTransient attribute set to
Unrestricted.
R1-7.2.1 Configuration and Control type Parameters are defined in SEMI E125 as ReadWrite. That is, the user
(external entity) can set these values. It is not appropriate for ReadWrite Parameters to be transient.
R1-7.3 The implementer should not define more than one non-transient parameter to hold or report the same value.
R1-7.4 The implementer should not define more than one transient parameter to hold or report the same value.
R1-7.5 Each Parameter TypeDefinition should be referenced by at least one Parameter.
R1-7.5.1 This may be directly from a Parameter (including Arrays or Structures) or in a TypeHint of a
TypeDefinition that is a VariableType.
R1-7.5.2 Dead references and unused artifacts are an indication of underlying problems in the equipment interface.
They should not be allowed or ignored.
R1-7.6 Each AssociatedParameter definition (if any) should reference a Parameter defined in the metadata.
R1-7.6.1 Parameters definitions can be found in SEMIObjTypes and in EquipmentNodeDescriptions.
R1-7.7 All appropriate context information should be defined as individual Parameters and made available for
inclusion in the EventReport for each Event defined in the metadata.
R1-7.8 Implementations should avoid the use of constraints with Parameters that have been specified with multiple
AvailableUnits. There is no provision for the conversion of the constraint value when the unit of the Parameter is
changed.
R1-8 Sensor Data
R1-8.1 Numeric sensor data should be specified as floating point values with defined units.
R1-8.2 All sensor data available on the equipment should be made available as Parameters using EDA. This
includes all data available to supplier personnel.
R1-8.3 Equipment suppliers should document the time interval at which the equipment reads each sensor’s value
(update interval) and makes it available for data collection.
R1-9 Type Definitions and Units
R1-9.1 Each Unit from the GetUnits() response should be referenced by at least one Parameter.
R1-9.1.1 TypeDefinitions defined by the supplier should be kept to a minimum.
R1-9.1.2 Dead references and unused artifacts are an indication of underlying problems in the equipment interface.
They should not be allowed or ignored.
R1-9.2 The equipment metadata should employ only basic data types, such as integer, real, string, Boolean, binary,
dateTime, and enumeration for Parameters wherever possible.
R1-9.3 Units of measure should be consistent for sensors of the same type within an equipment.
R1-9.4 UnitConfigs in a set should refer to units that apply to the same characteristic, such as temperature, not for a
mix of characteristics, such as temperature and pressure.
R1-10 SECS Mapping
R1-10.1 Where SECS data items exist that do not map directly to E125 equipment metadata items, the implementer
should document which SECS data items do not match and explain why a mapping is not possible.
This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline.
Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document
development) activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.
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R1-11 Implementation
R1-11.1 Existing SECS data should not be changed for the purpose of matching or otherwise accommodating EDA
data.
This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline.
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RELATED INFORMATION 2
FILE FORMAT FOR OFFLINE-REVIEW OF E125 EQUIPMENT
METADATA
R2-1 Equipment Metadata File Templates
R2-1.1.1 The metadata file format recommends that equipment metadata be presented in a common file format.
Seven separate files are specified, one for each E125-0710 metadata service response. Separation into the seven
files allows the reviewer to analyze each type of metadata separately.
R2-1.1.2 These tables are created by cutting and pasting the appropriate metadata service response text into the
appropriate file templates. These templates are provided in Table R2-1.
R2-1.1.3 The headers provided for the file templates assume that the following schema files are placed in the same
directory. When this is done, XML validation can be performed using common tools, including most XML editors.

E120-1-V0310-Schema.xsd

E125-1-V0710-Schema.xsd

E128-V0706-Schema.xsd

E138-1-V0709-Schema.xsd
Table R2-1 Equipment Metadata File Templates
E125 Service
GetEquipmentNodeDescriptions
Notes: In the messaging log file,
cut and paste all the text between
“<NodeDescriptionResults>” and
“</NodeDescriptionResults>” into
the “add content here” space.
GetEquipmentStructure
Notes: In the messaging log file,
cut and paste all the text between
“<Equipment” and
“</Equipment>” into the “add
content here” space.
Metadata File Template Contents
GetEquipmentNodeDescriptionsResponse.xml
Contents:
<?xml version="1.0" encoding="utf-8"?>
<esd:GetEquipmentNodeDescriptionsResponse xmlns:esd="urn:semiorg:xsd.E125.V0710.esd" xmlns:xsi="http://www.w3.org/2001/XMLSchemainstance" xsi:schemaLocation="urn:semi-org:xsd.E125.V0710.esd E125-1V0710-Schema.xsd">
add content here 
</GetEquipmentNodeDescriptionsResponse>
GetEquipmentStructureResponse.xml
Contents:
<?xml version="1.0" encoding="utf-8"?>
<esd:GetEquipmentStructureResponse xmlns:esd="urn:semiorg:xsd.E125.V0710.esd" xmlns:cem="urn:semi-org:xsd.E1201.V0310.CommonEquipmentModel"
xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance"
xsi:schemaLocation="urn:semi-org:xsd.E125.V0710.esd E125-1-V0710Schema.xsd">
add content here 
</GetEquipmentStructureResponse>
This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline.
Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document
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GetExceptions
Notes: In the messaging log file,
cut and paste all text between the
first “<Exception” and the last
</Exception> into the “add
content here” space.
GetSEMIObjTypes
Notes: In the messaging log file,
cut and paste all text between the
first “<ObjType” and the last
“</ObjType>” into the “add
content here” space.
GetStateMachines
Notes: In the messaging log file,
cut and paste all the text between
the first “<StateMachine” and the
last “</StateMachine>” into the
“add content here” space.
GetTypeDefinitions
Notes: In the messaging log file,
cut and paste all the text between
the first “<TypeDefinition” and the
last “</TypeDefinition>” into the
“add content here” space.
Metadata File Template Contents
GetExceptionsResponse.xml
Contents:
<?xml version="1.0" encoding="utf-8"?>
<esd:GetExceptionsResponse xmlns:esd="urn:semi-org:xsd.E125.V0710.esd"
xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance"
xsi:schemaLocation="urn:semi-org:xsd.E125.V0710.esd E125-1-V0710Schema.xsd">
add content here 
</GetExceptionsResponse>
GetSEMIObjTypesResponse.xml
Contents:
<?xml version="1.0" encoding="utf-8"?>
<esd:GetSEMIObjTypesResponse xmlns:esd="urn:semiorg:xsd.E125.V0710.esd" xmlns:xsi="http://www.w3.org/2001/XMLSchemainstance" xsi:schemaLocation="urn:semi-org:xsd.E125.V0710.esd E125-1V0710-Schema.xsd">
add content here 
</GetSEMIObjTypesResponse>
GetStateMachinesResponse.xml
Contents:
<?xml version="1.0" encoding="utf-8"?>
<esd:GetStateMachinesResponse xmlns:esd="urn:semiorg:xsd.E125.V0710.esd" xmlns:xsi="http://www.w3.org/2001/XMLSchemainstance" xsi:schemaLocation="urn:semi-org:xsd.E125.V0710.esd E125-1V0710-Schema.xsd">
add content here 
</GetStateMachinesResponse>
GetTypeDefinitionsResponse.xml
Contents:
<?xml version="1.0" encoding="utf-8"?>
<esd:GetTypeDefinitionsResponse xmlns:esd="urn:semiorg:xsd.E125.V0710.esd" xmlns:ccs="urn:semi-org:xsd.E138.V0709.ccs"
xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance"
xsi:schemaLocation="urn:semi-org:xsd.E125.V0710.esd E125-1-V0710Schema.xsd">
add content here 
</GetTypeDefinitionsResponse>
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GetUnits
Notes: In the messaging log file,
cut and paste all the text between
the first “<Unit” and the last
“</Unit>” into the “add content
here” space.
Metadata File Template Contents
GetUnitsResponse.xml
Contents:
<?xml version="1.0" encoding="utf-8"?>
<esd:GetUnitsResponse xmlns:esd="urn:semi-org:xsd.E125.V0710.esd"
xmlns:ccs="urn:semi-org:xsd.E138.V0709.ccs"
xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance"
xsi:schemaLocation="urn:semi-org:xsd.E125.V0710.esd E125-1-V0710Schema.xsd">
add content here 
</GetUnitsResponse>
NOTICE: Semiconductor Equipment and Materials International (SEMI) makes no warranties or representations as
to the suitability of the Standards and Safety Guidelines set forth herein for any particular application. The
determination of the suitability of the Standard or Safety Guideline is solely the responsibility of the user. Users are
cautioned to refer to manufacturer’s instructions, product labels, product data sheets, and other relevant literature,
respecting any materials or equipment mentioned herein. Standards and Safety Guidelines are subject to change
without notice.
By publication of this Standard or Safety Guideline, SEMI takes no position respecting the validity of any patent
rights or copyrights asserted in connection with any items mentioned in this Standard or Safety Guideline. Users of
this Standard or Safety Guideline are expressly advised that determination of any such patent rights or copyrights,
and the risk of infringement of such rights are entirely their own responsibility.
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