MECH9650
Introduction to Micro
Electromechanical Systems
(MEMS)
CONTENTS
Page
1.
STAFF CONTACT DETAILS
3
2.
COURSE DETAILS
3
3.
5
4.
RATIONALE FOR INCLUSION OF CONTENT AND TEACHING
APPROACH
TEACHING STRATEGIES
5.
ASSESSMENT
6
6.
ACADEMIC HONESTY AND PLAGIARISM
8
7.
COURSE SCHEDULE
9
8.
RESOURCES FOR STUDENTS
9
9.
COURSE EVALUATION AND DEVELOPMENT
10. ADMINISTRATIVE MATTERS
5
10
10
MECH9650 INTRODUCTION TO MEMS
COURSE OUTLINE
1.
STAFF CONTACT DETAILS
Contact details for course convener
Dr Majid Ebrahimi Warkiani
Room 464E, Building G17
Tel: (02) 9385 7580
Email: m.warkiani@unsw.edu.au
All consultations are by appointment only
2.
COURSE DETAILS
Location and Times

Thursday 1800-2100, Room EE G25, Wks 1-13
Units of credit
This is a 6 unit-of-credit (UoC) course, and involves 3 hours per week (h/w) of faceto-face contact.
The UNSW website states “The normal workload expectations of a student are
approximately 25 hours per semester for each UoC, including class contact hours,
other learning activities, preparation and time spent on all assessable work.”
For a standard 24 UoC in the session, this means 600 hours, spread over an
effective 15 weeks of the session (thirteen weeks plus stuvac plus one effective
exam week), or 40 hours per week, for an average student aiming for a credit grade
Various factors, such as your own ability, your target grade, etc., will influence the
time needed in your case. Some students spend much more than 40 h/w, but you
should aim for not less than 40 h/w on coursework for 24 UoC.
This means that you should aim to spend not less than about 10 h/w on this course,
i.e. an additional 4 h/w of your own time. This should be spent in making sure that
you understand the lecture material, completing the set assignments, further reading
about the course material, and revising and learning for the examination.
Aims of the course
This course introduces the fundamentals of Micro Electromechanical systems
(MEMS) and its applications in a wide range of devices and systems, as well as the
design and simulation of these systems. MEMS is an enabling technology which has
been penetrated into and begun to change the way major discipline do things,
including biotechnology, storage technology, instrumentation, optical
communications, telecommunications, MEMS device packaging, etc.
This course provides an interdisciplinary overview of MEMS including the micro
machining and fabrication technology, electromagnetic, thermal actuation,
microfluidic basics and devices, BioMEMS and etc. Students will have a hands-on
experience in modeling and designing of MEMS devices through group projects.
Students are expected to complete a significant modeling application within the
ANSYS environment
The School has unlimited site licenses for ANSYS.
Student learning outcomes
At the conclusion of this course, it is expected that you will have:
 Exposure to the world of Micro Electromechanical systems and devices.
 Understand a range of technologies used in micro-machining and microfabrication.
 The ability to execute a successful analysis of the MEMS problems of
sufficient complexity to give insight into practical applications of the methods.
 The ability to interpret results and write a report conveying the results of the
analysis.
 Hands-on experience in modeling using commercial package - ANSYS,
COMSOL
Graduate attributes
UNSW’s graduate attributes are shown at
https://my.unsw.edu.au/student/atoz/GraduateAttributes.html
UNSW aspires to develop graduate who are rigorous scholars, capable of leadership
and professional practice in a global community. The university has, thus, articulated
the following Graduate Attributes as desired learning outcomes for ALL UNSW
students.
UNSW graduates will have
1.
2.
3.
Scholars who are:
(a)
understanding of their discipline in its interdisciplinary context
(b)
capable of independent and collaborative enquiry
(c)
rigorous in their analysis, critique, and reflection
(d)
able to apply their knowledge and skills to solving problems
(e)
ethical practitioners
(f)
capable of effective communication
(g)
information literate
(h)
digitally literate




Leaders who are:
(a)
enterprising, innovative and creative
(b)
capable of initiating as well as embracing change
(c)
collaborative team workers

Professionals who are:
(a)
capable of independent, self-directed practice

(b)
(c)
4.
capable of lifelong learning
capable of operating within an agreed Code of Practice
Global Citizens who are:
(a)
capable of applying their discipline in local, national and international
contexts

(b)
culturally aware and capable of respecting diversity and acting in
socially just/responsible ways
(c)
capable of environmental responsibility
 =
Developed in this course
In this course, you will be encouraged to develop Graduate Attributes 1(a), 1(b), 1(d),
1(f), 2(c), and 4(a) by undertaking the selected activities and knowledge content.
These attributes will be assessed within the prescribed assessment tasks, as shown
in the assessment table on Page 7.
You will be supported in developing the above attributes through:
(i)
the design of academic programs;
(ii)
course planning and documentation;
(iii)
learning and teaching strategies; and
(iv)
assessment strategies.
3.
RATIONALE FOR INCLUSION OF CONTENT AND TEACHING APPROACH
This course is designed for final year undergraduate and postgraduate students to
develop an understanding of the interdisciplinary technologies that are brought
together in the Micro Electromechanical Systems.
Effective learning is supported when you are actively engaged in the learning
process and by a climate of enquiry, and these are both an integral part of the
lectures, problem solving classes and seminars.
You become more engaged in the learning process if you can see the relevance of
your studies to professional, disciplinary and/or personal contexts, and the relevance
is shown in the lectures and assignments by way of practical examples.
This will hopefully enable students to be creative and innovative in providing
solutions to challenging engineering problems of the future. The inclusion of group
project would highlight typical design trade-offs often encountered in the real world.
It is expected that problem solving sessions will be marked and handed back in the
week following submission. You will be given feedback and opportunity for discussion
to improve the learning experience.
4.
TEACHING STRATEGIES
Ideas and skills are first introduced and demonstrated in lectures, and then students
develop these skills by applying them to specific tasks in laboratory work and
assessments. Computing skills are developed and practiced in regular computer
laboratory sessions. This will give students proficiency in using the commercial
packages such as ANSYS, COMSOL and FLUENT.
This course has a major focus on research, inquiry and analytical thinking as well as
information literacy. We will also explore capacity and motivation for intellectual
development through the solution of both simple and complex mathematical models
of problems arising in engineering, and the interpretation and communication of the
results.
5.
ASSESSMENT
General
Many practical problems in Engineering require use of a computer software package,
and student skills in software use applied to relevant problems are rewarded by the
laboratory participation component of the overall grade. The final exam will assess
student mastery of the material covered in the lectures and laboratory classes.
Final grades may be adjusted by scaling with the approval of the appropriate
departmental meeting.
Homework # 1
5%
due Week 6 (Friday, 5 September)
Homework # 2
5%
due Week 9 (Friday, 26 September)
Homework # 3
5%
due Week 13 (Friday, 31 October)
Preliminary project report
10%
due week 4 (Friday, 22 August)
Group project
25%
due week 10 (Friday, 10 October)
Project presentation
10%
due week 12 (Friday, 24 October)
Examination
40%
TBA
Total
100%
Homework
During the semester, home works will be handed out and will be available on the
UNSW Moodle website.
Project Presentation
All submissions should have a standard School cover sheet available on the School
website at www.engineering.unsw.edu.au/mechanical-engineering/forms-andguidelines. All submissions are expected to be neat, and clearly set out. All
calculations should be shown as, in the event of incorrect answers, marks are
awarded for method and understanding.
The preferred set-out of any numerical calculation is similar to the following:
 = 
(Equation in symbols)
= 1.025  200
(Numbers substituted)
= 205 t
(Answer with units)
Submission
Group projects and paper are due on the schedule depicted above. They are to be
submitted in assignments boxes.
Late submission of assignments attracts a penalty of ten percent per day, unless
prior dispensation has been given; i.e. see the lecturer before the due date to avoid
penalty. It is always worth submitting as, in the event of difficulty making a final grade
(either to pass or higher), any penalties for late submission may be removed.
For more information on submission of assignments, see Administrative Matters for
All Courses available on the School website.
Criteria
Grading of group project and home works will be based on the following criteria:
For report-style assignments:




Identification of key facts and integration of those facts in a logical
development
Clarity of communication – development of clear and orderly structure and
highlighting of core arguments
Sentences in clear, plain and concise English – correct grammar, spelling and
punctuation
Correct referencing in accordance with prescribed citation and style guide
For group project that involve numerical calculations:





Accuracy of numerical answers
All working needs to be shown
Use of diagrams to support or illustrate the calculations
Use of graphs to support or illustrate the calculations
Use of tables to support or illustrate the calculations
Examination
There will be one two-hour examination at the end of the session.
You will need to provide your own calculator, of a make and model approved by
UNSW, for the examination. The list of approved calculators is shown at
https://student.unsw.edu.au/exam-approved-calculators-and-computers
It is your responsibility to ensure that your calculator is of an approved make and
model, and to obtain an “Approved” sticker for it from the School Office or the
Engineering Student Centre prior to the examination. Calculators not bearing an
“Approved” sticker will not be allowed into the examination room.
6.
ACADEMIC HONESTY AND PLAGIARISM
Plagiarism is using the words or ideas of others and presenting them as your own.
Plagiarism is a type of intellectual theft. It can take many forms, from deliberate
cheating to accidentally copying from a source without acknowledgement. UNSW
has produced a booklet which provides essential information for avoiding plagiarism:
https://my.unsw.edu.au/student/academiclife/Plagiarism.pdf
There is a range of resources to support students to avoid plagiarism. The Learning
Centre assists students with understanding academic integrity and how not to
plagiarise. They also hold workshops and can help students one-on-one. Information
is available on the dedicated website Plagiarism and Academic Integrity website:
http://www.lc.unsw.edu.au/plagiarism/index.html
You are also reminded that careful time management is an important part of study
and one of the identified causes of plagiarism is poor time management. Students
should allow sufficient time for research, drafting and the proper referencing of
sources in preparing all assessment tasks.
If plagiarism is found in your work when you are in first year, your lecturer will offer
you assistance to improve your academic skills. They may ask you to look at some
online resources, attend the Learning Centre, or sometimes resubmit your work with
the problem fixed. However more serious instances in first year, such as stealing
another student’s work or paying someone to do your work, may be investigated
under the Student Misconduct Procedures.
Repeated plagiarism (even in first year), plagiarism after first year, or serious
instances, may also be investigated under the Student Misconduct Procedures. The
penalties under the procedures can include a reduction in marks, failing a course or
for the most serious matters (like plagiarism in a honours thesis) even suspension
from the university. The Student Misconduct Procedures are available here:
http://www.gs.unsw.edu.au/policy/documents/studentmisconductprocedures.pdf
Further information on School policy and procedures in the event of plagiarism is
presented in a School handout, Administrative Matters for All Courses, available on
the School website.
7.
COURSE SCHEDULE
MECH9650 Introduction to Micro Electromechanical
Systems (MEMS)
Week
Lecture (2 Hr.)
7
 Introduction to MEMS/NEMS,
BioMEMS and Biotechnology
 Fundamental of MEMS fabrication
I (Surface/Bulk micromachining,
Soft-lithography, Process
integration, LIGA, etc.)
 Fundamental of MEMS fabrication
II (Packaging, characterization,
Automation, etc.)
 Microscale physics I
 Microscale physics II
 Microfluidics (Fundamental, Micropumps, micro-valves, Microseparators, micro-mixers, etc.)
 In-class design problem
8
 Mechanics properties of materials
9
 Sensors and transducers
10
 BioMEMS
1
2
3
4
5
6
11
12
 Revision
13

Q&A (before final exam)
Problem solving (1 Hr.)
Case studies
Modeling exercise
homework # 1 to be released
Exercise I
Exercise II
Microfluidics exercise
homework # 1 submission due
by Friday, 5 Sept 2014
Project discussion and feedback
homework # 2 to be released
Structural analysis exercise
Sensors and transducers
exercise
homework # 2 submission due
on Friday, 26 Sep 2014
homework # problem 3 to be
released
Group project presentation
Group project presentation
Feedback on Group assignment
home work # 3 submission due
on Friday, 31 Oct 2014
The schedule shown may be subject to change at short notice to suit exigencies
8.
RESOURCES FOR STUDENTS
Resources and Course schedule for Computational Fluid Dynamics Strand
Main Text:
Lecture notes will be provided
Additional Reading:
9.

SD Senturia, Microsystems Design Book

Marc Madou, Fundamentals of Microfabrication: The Science of Book
Miniturization.

Nguyen N.T., Wereley S., 2006, Fundamentals and Applications of
Microfluidics, Second Edition, Artech House, Boston, London.
COURSE EVALUATION AND DEVELOPMENT
Feedback on the course is gathered periodically using various means, including the
Course and Teaching Evaluation and Improvement (CATEI) process, informal
discussion in the final problem solving class for the course, and the School’s
Student/Staff meetings. Your feedback is taken seriously, and continual
improvements are made to the course based, in part, on such feedback.
10.
ADMINISTRATIVE MATTERS
You are expected to have read and be familiar with Administrative Matters for All
Courses, available on the School website. This document contains important
information on student responsibilities and support, including special consideration,
assessment, health and safety, and student equity and diversity.
M.E. Warkiani
July 2014