IEE5561 Semiconductor Physics and Device (I) Spring 2009 Mon: AM 9:10-10:00 ED103; Fri: PM 1:30-3:20 ED301 Instructor: 侯拓宏 email: thhou@mail.nctu.edu.tw office: ED-409 phone: x54261 office hour: Monday AM 10:00-11:00 (ED-409) Friday PM 3:30-4:30 (ED-409) or by appointment TA: 林冠良 email: gwenliang.ee95g@nctu.edu.tw office: ED-309C phone: x54219 office hour: by appointment Course Description: The course teaches fundamental principles on using band diagrams and carrier transport to analyze bipolar diodes, Schottky diodes, photodiodes, BJT, MOS capacitor, MOSFET and Flash memories. Emphasis is put on the MOSFET designs for aggressively scaled VLSI technology. The economical, environmental and social impacts of the semiconductor technology will be illustrated from the past industrial data and the future prediction. The goal for this course is to train circuit, device and process engineers for semiconductor technology research and development. Prerequisites: Modern Physics (DEE2311 or equivalent) Microelectronics (I) (DEE2320 or equivalent) Exam and Grade Policy: 6 problem sets counting towards 30% of the final grade. Problem sets will be due in the Friday’s class and the due dates will be firm. Late problem sets will not be accepted. The only exception is if you obtain my prior consent (not the TA’s), or in unusual circumstances. Plagiarism is not tolerated and will result in automatic failure of the course!! DON”T lend your homework to others. You will get yourself into trouble too. Because the homework exercise is one very important part of learning in this course, I will strictly enforce this policy. 3 exams, 2 prelims (wk6 & wk12) and final (wk 18), counting toward 60% of the final grade. Class participation counting toward 10% of the final grade. Textbook: 1. S. M. Sze, and Kwok K. Ng, Physics of Semiconductor Devices, 3rd Ed, Wiley, (2007) Reference Books: 1. 2. 3. 4. Y. Taur and T. H. Ning, Fundamentals of Modern VLSI Devices, Cambridge, (1998) R. F. Pierret, Advanced Semiconductor Fundamentals, vol. 6, 2nd Ed., Prentice Hall (2003) C. Kittel, Introduction to Solid State Physics, 8nd Ed., Wiley, (2004) R.F. Pierret, Semiconductor Device Fundamentals, Addison-Wesley (1996) Course Website: http://www.cc.nctu.edu.tw/~thhou/teaching.html Course Schedule: Week 01 (2/22) Semiconductor properties and Band theory Week 02 (3/1) Semiconductor properties and Band theory Week 03 (3/8) Carrier transport and perturbation from equilibrium Week 04 (3/15) P-N junction theory: electrostatics, ideal IV Week 05 (3/22) P-N junction theory: non-ideal effect and AC response Week 06 (3/29) Prelim I Week 07 (4/5) Schottky, heterojunction and photo diodes Week 08 (4/12) MOSC theory Week 09 (4/19) MOSC theory Week 10 (4/26) Ideal Long-channel MOSFET Theory Week 11 (5/3) MOSFET Theory for Submicron Technology Week 12 (5/10) Prelim II Week 13 (5/17) MOSFET Theory for Submicron Technology Week 14 (5/24) MOSFET Scaling and Design Considerations Week 15 (5/31) MOSFET Scaling and Design Considerations Week 16 (6/7) Theory and Design of BJT Week 17 (6/14) Theory and Design of BJT Week 18 (6/21) Final exam week