Dr. Eui-Hyeok Yang
Department of Mechanical Engineering
Charles V. Schaefer, Jr. School of Engineering
Stevens Institute of Technology
Castle Point on the Hudson
Hoboken, NJ 07030
TEL: 201-216-5574
FAX: 201-216-8315
eyang@stevens.edu
http://personal.stevens.edu/~eyang
EDUCATION
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Ph.D: Control and Instrumentation Engineering, Ajou University, Korea (1996).
o Dissertation entitled “A Study on the Stress Determination of p+ Silicon Films and Its Application to
Microelectromechanical Systems”
M.S: Control and Instrumentation Engineering, Ajou University, Korea (1992).
o Thesis entitled “A Study on a Silicon Resonator for Piezoresistive Accelerometers”
B.S: Control and Instrumentation Engineering, Ajou University, Korea (1990)
AWARDS AND RECOGNITION
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NASA ICB Space Act Award (2005), JPL
o Recognized for developing piezoelectric microvalve for high-pressure applications.
Lew Allen Award for Excellence (2004), JPL
o Recognized for his excellence in advancing the use of Micro Electro Mechanical Systems–based
actuators for space applications. Developed several significant areas of research in MEMS-based
actuators for space applications, utilizing MEMS actuators for the development of high-pressure,
low leak-rate microvalves, continuous membrane deformable mirrors and inchworm devices for
segmented mirror assembly and control for large aperture, space-based telescopes.
Level C Award (2003), JPL
o Recognized for technical accomplishments on 1) demonstrating a piezoelectric microvalve, 2)
leading the design of the MEMS inchworm actuator, 3) leading two postdoctoral researchers and
one contractor. ,
NASA ICB Space Act Award (2003), JPL
o Recognized for developing a wafer-level membrane transfer technique.
Level B Bonus Award (2001), JPL
o Recognized for technical accomplishments on developing MEMS-based deformable mirror
technology using thin-film PZT actuators and electrostatic actuators.
Class 1 NASA Tech Brief Awards (2001-Present), JPL
o Recognized for inventions on several microactuator-based components for space applications.
Research Fellowship of the Japan Society for the Promotion of Science (1996-1998), The University of
Tokyo, Japan
Scholarship: B.S, M.S and Ph.D courses (1986-1995), Ajou University, Korea
Summa Cum Laude Honor (1990), Ajou University, Korea
RESEARCH EXPERIENCE
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Associate Professor: Stevens Institute of Technology: Aug. 2006 – Present.
 Nano and micro technologies for energy conversion and biomedical applications: 2006~Present
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Senior Member of Engineering Staff, Task Manager: Jet Propulsion Laboratory: Oct. 2002 – Aug. 2006.
 Inchworm microactuator (Sponsors: National Reconnaissance Office, Spontaneous Concept
Research and Technology Development, Research and Technology Development, National
Reconnaissance Office Director’s Innovation Initiatives): 2002~Present
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Initiated the MEMS-based actuator thrust at JPL, and demonstrated the inchworm actuation for
microactuators. The task was aimed at demonstrating a robust actuation mechanism that could
trigger the creation of a significantly larger, NRO-sponsored program.
MEMS Adaptive optics (Sponsors: Center for Adaptive Optics, Xinetics, Inc., JPL Director’s
Research and Development Fund for 3 years, Spontaneous Concept Research and Technology
Development, DARPA/LASSO, Phase I,): 2001~Present
Initiated the MEMS-based adaptive optics thrust at JPL, and developed a piezoelectric unimorphbased deformable mirror with a continuous single-crystal silicon deformable membrane.
Piezoelectric microvalve (NASA Code R Enabling Technology Thrust for 2 years): 2002~2004
Developed liquid-compatible microvalves and successfully delivered the microvalves for
microspacecraft test bed.
Actuated membrane development (Sponsors: National Reconnaissance Office Director’s Innovation
Initiatives): 2003~2004
Developed a novel re-configurable mirror concept to the NRO-DII program. Designed grafted
elastomer (G-elastomer) membrane structure, and fabricated G-elastomer membranes.
Demonstrated the actuation of active silicon membrane mirrors.
Intra Ocular Pressure (IOP) sensor (JPL Spontaneous Concept Research and Technology
Development, Caltech President Funding): 2003
Worked, as a major contributor, in generating successful proposals as well as during the
development of the pressure switch concept. Successfully demonstrated the breadboard-version of
the IOP sensor.
Member of Engineering Staff, Task Manager: Jet Propulsion Laboratory: March 2001 – Sept. 2002
 MEMS microvalve development (NASA Code R Cross Enterprise Technology Development
Program): 2001~2002
Developed a first-of-its-kind piezoelectric microvalve technology for high-pressure applications.
Demonstrated a “Helium leak detector level” leak performance of a microvalve at high inlet
pressures for micropropulsion applications.
 Piezoelectric material development (NASA Code R Cross Enterprise Technology Development
Program): 2001~2002
Developed lithographically patterned process for MOCVD-deposited PZT thin films using RIE
processes for adaptive optics applications.
 Microactuator development (Gossamer Space Telescope Technology NRA Phase I) : 2001~2002
Developed inchworm actuator concept resulting in a funded proposal (ranked as ‘excellent’).
Developed a design for a large working distance, precision MEMS-based inchworm actuator.
Caltech Postdoctoral Scholar at JPL: Jet Propulsion Laboratory: Jan. 1999 – Feb. 2001
 Meso-gyroscope development (Hughes Space and Communications Company / DARPA-DSO):
2000~2001
Fabricated and tested a precision mesogyro resonator structure and demonstrated the resonator
with a Q of 100,000 in vacuum (1e-5 torr) with a frequency split at the measurement resolution
limit of 100mHz.
 Microactuator design (JPL Technology Development Agreement) : 1999~2000
Developed several MEMS actuation concepts for the alignment mechanism of segmented silicon
mirrors in Space. MEMS deformable mirror: 1999
Designed, modeled and fabricated electrostatic deformable mirror structures. Developed the
membrane transfer process for the fabrication of the deformable mirror devices.
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Postdoctoral Research Staff: Electronics and Telecommunications Research Institute (ETRI), Korea: Nov.
1998 – Dec.1998
Designed a surface micromachined thermopneumetic micropump, modeled its actuation/pumping
performance for liquid delivery instruments, and successfully transferred the layout and
fabrication process to the fabrication team.
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Visiting Postdoctoral Fellow: Institute of Industrial Science (IIS), University of Tokyo, Japan: June 1996 –
July 1998
Investigated mechanical properties and applications of the poly-crystal and single-crystal silicon
films. Fabricated and tested microactuators for deforming other microstructures into threedimensional shapes using Joule-heating. Designed and fabricated sputtered thin-film TiNi shape
memory alloy (SMA) based micromachined optical switches.
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Senior Researcher: Ajou Univ., Korea: March 1996 -June 1996
Developed a novel quantitative method to determine the residual stress along the depth of the p+
silicon films. Fabricated the p+ silicon film structures and determined their stress profiles.
Fabricated and tested electrostatic microactuators and microvalves, consisting of the p+ silicon
films.
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Graduate Research Assistant: Ajou University, Korea: June 1991 - Feb. 1996
Designed, fabricated and characterized a micromachined piezoresistive accelerometer. Set up
several process equipments including anodic bonder, emulsion mask processor, and wet benches
for anisotropic etchants.
TEACHING EXPERIENCE
Guest Lecturer: Stevens Institute of Technology, Nano 600 Series
MEMS and NEMS
Lecturer: Ajou University, Korea: Sept. 1993 - Dec. 1995
Engineering Calculation
MEMS instruments (short course)
Teaching Assistant: Ajou University, Korea: March 1990 - Dec. 1992
Electronic Circuits Laboratory
Advanced Electronic Circuits Laboratory
PROFESSIONAL SOCIETY
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Senior Member: The Institute of Electronics and Electrical Engineers (IEEE): Conference Committee,
Session Chair
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American Society of Mechanical Engineers (ASME): Conference Committee, Session Chair
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The International Society for Optical Engineering (SPIE) : Conference Committee, Session Chair
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Member: Materials Research Society (MRS)
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Member: Korean Institute of Electrical Engineering (KIEE)
PROFESSIONAL SERVICES
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Technical Program Committee, 2006, IEEE Sensors Conference, Daegu, Korea, Oct. 2006.
Technical Program Committee, 2005, IEEE Sensors Conference, Irvine, CA, Oct. 2005.
Program Committee, 2005, SPIE MEMS/MOEMS Components and Their Applications Conference,
San Jose, California, USA, January 2005.
Technical Program Committee, 2004, IEEE Sensors Conference, Vienna, Austria, Oct. 2004.
Program Committee, 2004, SPIE MEMS/MOEMS Components and Their Applications Conference,
San Jose, California, USA, January 2004.
Program Committee, 2003, SPIE MEMS/MOEMS Components and Their Applications Conference,
San Jose, California, USA, January 2003.
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Organizer, 2006 Micro and Nano Devices Topic within MEMS Division of the ASME International
Mechanical Engineering Congress and Exposition, Chicago, IL, Nov. 2006.
Co-Organizer, 2005 Micro and Nano Devices Topic within MEMS Division of the ASME International
Mechanical Engineering Congress and Exposition, Orlando, FL, November 2005.
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Session Chair, ASME International Mechanical Engineering Congress and Exposition, Chicago, IL,
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Nov. 2006.
Session Chair, 2006, IEEE Sensors Conference, Daegu, Korea, Oct. 2006.
Session Chair, 2005, IEEE Sensors Conference, Irvine, CA, Oct. 2005.
Session Chair, 2005 ASME International Mechanical Engineering Congress and Exposition, Orlando,
FL, November 2005.
Session Chair, 2005, SPIE MEMS/MOEMS Components and Their Applications Conference, San Jose,
California, USA, January 2005.
Session Chair, 2004, SPIE MEMS/MOEMS Components and Their Applications Conference, San Jose,
California, USA, January 2004.
Reviewer of
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Journals and Conference Papers:
IEEE Sensors Journal, 2004, 2006
IEEE/ASME Journal of Microelectromechanical Systems, 2003
IEEE EDS Electron Device Letters, 2005
IOP Journal of Physics: Condensed Matter, 2006
IOP Journal of Micromechanics and Microengineering, 2004, 2005, 2006
IOP Nanotechnology, 2005, 2006
IOP Journal of Optics A: Pure and Applied Optics, 2005
Sensors and Actuators A, 2003
Journal of Micromechatronics, 2006
IEEE Sensors Conference, 2004, 2005, 2006
ASME International Mechanical Engineering Congress and Exposition, 2004, 2005, 2006
SPIE MOEMS and MEMS Conference, 2004, 2005
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Proposals:
NASA SBIR Phase I and II, 2000, 2001, 2002, 2003, 2004, 2005
JPL Research and Technology Development, 2005
Ireland Science Foundation, 2005
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Projects:
Multi Object Spectrometer (MOS) for NASA’s James Webb Space Telescope (JWST)
RESEARCH ADVISEMENT
Name
Title
Project
Mr. Eric Jones
Process Engineer
Microgyro, microvalve
Mr. Nishant Rohatgi Academic Part Time Microvalve
Mr. Larry Wild
Process Engineer
Microvalve, PZT film development
Mr. Toshiro Hatake Packaging Engineer Microvalve, microactuator
Dr. Choonsup Lee
Postdoctoral Scholar Microvalve, nanochannel
Dr. Yoshikazu Hishinuma
Postdoctoral Scholar Deformable mirror, active membrane
Dr. Risaku Toda
Technical Staff
Microactuator
Mr. Matthew Wright Summer Student
PZT actuator testing
Ms. Viola Fucsko
Summer Student
Cu Nanowire fabrication
RESEARCH COLLABORATION
Name
Prof. Hongjun Wang
Prof Nosang Myung
Prof. Jay Khodadadi
Prof. Susan Trolier-McKinstry
Prof. Thomas Kenny
Prof. Junseok Chae
Dr. Ji Su
Affiliation
Project
Stevens Inst. Tech. Nanobiotechnology
UC Riverside
Electrochemistry/nanowire
Auburn University CFD modeling
Penn State University
PZT film
Standford University Micro and nano technology
Arizona State University
Extreme environment
NASA LaRC
EAP actuator
Dr. Xiaoning Jiang
Dr. Richard Dekany
Dr. Ranga-Ram Chary
Dr. Yoseph Bar-Cohen
Dr. Dave Redding
Dr. Gaj Birur
Dr. Christopher Shelton
Dr. B. Martin Levine
Dr. Eric Bloemhof
Dr. Juergen Mueller
Dr. Gregory Agnes
Dr. Rhonda Morgan
Dr. Kirill Shcheglov
Dr. Daniel Choi
Dr. Zensheu Zhang
Dr. W. Keats Willkie
Dr. Rajeshuni Ramesham
Dr. Yijiang Chen
TRS Technologies, Inc.
Caltech
Caltech
JPL
JPL
JPL
JPL
JPL
JPL
JPL
JPL
JPL
JPL
JPL
JPL
JPL
JPL
JPL
PMN-PT actuator
Astronomy
Astronomy
EAP actuation
Wavefront control
Spacecraft cooling technology
Adaptive Optics
Large aperture
Nulling interferometer
Micropropulsion technology
Large mechanical structure
Optics/metrology
Modeling and characterization
Nanofabrication
Mechanical modeling
Antenna
Reliability testing
Large optical structures
FUNDED PROJECTS
Principle Investigator: Total funding of 3.62 million dollars was raised during 2000~2005 period
- JPL Research and Technology Development FY06, (Principle Investigator), Title: Cryogenic,
Large-Travel, Latching-Type Microactuator for Re-Configurable, Ultra-Large, Ultra-Lightweight
Space Telescopes: $193.1K / 1 yr (Oct. 2005~Sept. 2006)
- JPL Spontaneous Concepts, Director's Research and Development Fund FY05, (Principle
Investigator), Title: Piezoelectric Nanowire Resonator Sensor Arrays for Biochemical Detection:
$30K / 3 months (March 2005~May 2006)
- National Reconnaissance Office, Director’s Innovation Initiatives FY05, (Principle Investigator),
Title: Miniaturized, Lightweight, Latching-Type Inchworm Actuator for Active Shape Correction of
Ultra-Large Space Telescope Mirrors: $350K / 1.5 yr (Oct. 2004~March 2005)
- JPL Research and Technology Development 05, (Principle Investigator),Title: Cryogenic, LargeTravel, Latching-Type Microactuator for Re-Configurable, Ultra-Large, Ultra-Lightweight Space
Telescopes: $150K / 1 yr (Oct. 2004~ Sept. 2005)
- JPL Spontaneous Concepts, Research and Technology Development FY04, (Principle
Investigator),Title: Inchworm Actuator for Future Ultra-Large Space Telescopes: $30K / 3 months
(July 2004~Sept. 2004)
- Reimbursable from POC, (Principle Investigator),Title: Fabrication of Membrane Arrays for
Differencing Electrostatic Optical Sensors: $103K / 8 months (Oct. 2004~May 2005)
- JPL Director's Research and Development Fund FY04 (Co-Principle Investigator), Title: LargeStroke, Large-Area, Continuous Membrane MEMS Deformable Mirror for Ultra-Large, UltraLightweight Telescopes: $200K / 1.5 yr (Oct. 2003~ March 2005)
- National Reconnaissance Office, Director’s Innovation Initiatives FY04, (Principle
Investigator),Title: Deployment and Shape Control for Configurable Large Aperture Telescopes:
$350K / 1 yr (Oct. 2003~ Sept. 2004)
- NASA Code R Enabling Concepts and Technologies (ECT) Program, (Principle Investigator of
the microvalve subtask), Title: Integrated Piezoelectric MEMS Microvalve for LCAM: $250K / 1 yr
(Oct. 2003~ Sept. 2004)
- National Reconnaissance Office direct funding, (Principle Investigator),Title: Vertical Inchworm
Microactuator: $150K / 1 yr (Oct. 2003~ Sept. 2004)
- Reimbursable from IOCC, (Principle Investigator),Title: Assessment and Preliminary Design of
MEMS-actuated Optical Waveguide Device: $25K / 1 month (January 2003)
- NASA Code R Enabling Concepts and Technologies (ECT) Program, (Principle
Investigator),Title: Integrated Piezoelectric MEMS Microvalve for Microspacecraft Test Bed:
$300K / 1 yr (Oct. 2002~ Sept. 2003)
- JPL Director's Research and Development Fund FY03 (Co-Principle Investigator), Title: LargeStroke, Continuous Membrane Deformable Mirror: $200K / 1.5 yr (Oct. 2002~March 2004)
- NASA Gossamer Space Telescope Technology NRA (Co-I), Title: Advanced Segmented Silicon
Space Telescope: $187K / 1 yr (Feb. 2002~ Jan. 2003)
- JPL Director's Research and Development Fund FY02, (Principle Investigator), Title:
Membrane Transfer Technology for Continuous Membrane Deformable Mirrors: $120K / 1 yr (Oct.
2001~ Sept. 2002)
- Reimbursable from Center for Adaptive Optics Y3, (Principle Investigator), Title: Development
of the Fabrication Process for Deformable Mirrors: $25K / 1 yr (Oct. 2001~ Sept. 2002)
- NASA Cross Enterprise Technology Development Program, (Principle Investigator), Title:
MEMS Microvalve for Space Applications: $200K / 1 yr (Oct. 2001~ Sept. 2002)
- NASA Cross Enterprise Technology Development Program, (Principle Investigator), Title: Thin
film PZT Microactuators: $120K / 1 yr (Oct. 2001~ Sept. 2002)
- NASA Gossamer Space Telescope Technology NRA (Co-Principle Investigator), Title: Advanced
Segmented Silicon Space Telescope: $187K / 9 months (Feb. 2001~ Nov. 2002)
- Reimbursable from Xinetics, (Principle Investigator), Title: Mirror Wafer Transfer Process: $50K
/ 1 yr (Dec. 2001~ Nov. 2002)
- NASA Cross Enterprise Technology Development Program, (Principle Investigator), Title:
MEMS Microvalve: $250K / 1 yr (Oct. 2000~ Sept. 2001)
- NASA Cross Enterprise Technology Development Program, (Principle Investigator), Title: Thin
film PZT Microactuators: $150K / 1 yr (Oct. 2000~ Sept. 2001)
Co-Investigator
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DARPA TTO, Large Aperture Space Surveillance (Optical) (LASSO) Phase I, BAA04-36 (PI:
John Hong), Title: In-space Optics Manufacturing and Precision Deployment for Large Aperture
Space Surveillance, $500K / 6 months (2005)
NASA NRA, Astrobiology Science and Technology Instrument Development, Bio/nano
Technology Program, FY03 (PI: Thomas George), Title: Ultra-small Force-Detected Nuclear
Magnetic Resonance Spectrometer system for Biological/Astrobiological Investigations, $500K / yr
for 3 years (2004)
Caltech President Funding, FY03 (PI: Wolfgang Fink), Title: Wireless IOP sensor: $120K/ 1 yr
(Oct. 2003~ Sept. 2004), JPL Spontaneous Concepts, Director's Research and Development
Fund, FY03 (PI: Wolfgang Fink), Title: Wireless IOP sensor: $50K / 6 months (May 2003~ Sept.
2004)
Hughes Space and Communications Company (PI: Roman Gutierez), Title: Mesogyro, $457K /
1 yr (2000~2001)
JPL Technology Development Agreement (PI: Dean Wiberg), Title: Segmented Silicon Mirrors
(1999~2000)
TECHNICAL SKILLS
 Task management, cost and schedule management
 Stress analysis, modeling of microactuation
 Image processing (Matlab)
 Modeling (Coventor)
 Microfabrication, design and characterization:
- Microfabrication: photolithography, etching (TMAH, KOH, EDP, RIE and DRIE), LPCVD, PECVD,
oxidation and diffusion, evaporation, sputtering, YAG laser, dicing saw, ion milling, wafer bonding
(anodic, compression, eutectic, solder bump), etc.
- Characterization: SEM, optical profiler, Michelson Interferometer, vibration test and etc.
- Mask Design: L-Edit
COURSES TAKEN AT JPL
System Engineering / Science
 Science 101: Seeing Beneath the Surface 2005
 System Engineering for In-Situ Instrument
Scientists & Technology
 Radiation Effects in Electronics
2002
Proposal / Project Management
 The JPL Project Element Manager
 Medium Technology Proposal Preparation 2003
 The JPL Task Manager
 JPL Proposal Preparation
2005
2005
2002
2001
PUBLICATION LIST
PEER REVIEWED JOURNALS
1. C. M. Hangarter, Y. Rheem, B. Yoo, E. H. Yang, and N. V. Myung, “Hierarchical Magnetic Assembly of
Nanowires,” IOP Nanotechnology 2007. in-press
2. E. H. Yang, C. Lee and J. Khodadadi, Invited Paper “Development of MEMS-Based Piezoelectric
Microvalve Technologies – Fabrication, Characterization and Modeling,” Journal of Sensors and Materials,
Special Issue on Microvalve, 2007. in-press
3. C. A. Johnson, J. M. Khodadadi and E. H. Yang, “Modeling of Frictional Gas Flow Effects in a
Piezoelectrically Actuated High-pressure Microvalve under Low Leak-rate Conditions,” Journal
of Micromechanics and Microengineering, vol. 16, pp. 2771-2782, 2006.
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E. H. Yang, Y. Hishinuma, J.-G. Cheng, S. Trolier-McKinstry, E. Bloemhof, and B. M. Levine, “Thin-Film
Piezoelectric Unimorph Actuator-based Deformable Mirror with a Transferred Silicon Membrane,”
IEEE/ASME Journal of Microelectromechanical Systems,Vol. 15, No. 5, pp. 1214-1225, Oct. 2006.
C. Lee, E. H. Yang, S. M. Saeidi and J. Khodadadi, “Fabrication, Characterization and Computational
Modeling of a Piezoelectrically Actuated Microvalve for Liquid Flow Control,” IEEE/ASME Journal of
Microelectromechanical Systems, Vol. 15, No.3, pp.686-696, June 2006.
Y. Hishinuma and E. H. Yang, "Piezoelectric Unimorph Microactuator Arrays for Single-Crystal Silicon
Continuous Membrane Deformable Mirror," IEEE/ASME Journal of Microelectromechanical Systems, Vol.
15, No. 2, pp. 370-379, April 2006.
E. H. Yang, C. S. Lee, J. Mueller and T. George, "Leak-Tight Piezoelectric Microvalve for High-Pressure
Gas Micropropulsion," IEEE/ASME Journal of Microelectromechanical Systems, Vol. 13, No. 5, pp. 799807, Oct. 2004.
E. H. Yang and D. V. Wiberg "A Wafer-Scale Membrane Transfer Process for the Fabrication of Optical
Quality, Large Continuous Membranes," IEEE/ASME Journal of Microelectromechanical Systems, Vol. 12,
No. 6, pp. 804-815, Dec. 2003.
C. Lee, E. H. Yang, N.V. Myung, and T. George, “A Nanochannel Fabrication Technology without
Nanolithography,” American Chemical Society NanoLetters, Vol. 3, No. 10, pp. 1339-1340, Oct. 2003.
J. Mueller, J. Polk, E. H. Yang, A. Green, V. White, D. Bame, I. Chakraborty, S. Vargo, and R. Reinicke,
Invited Paper “An Overview of MEMS-Based Micropropulsion Developments at JPL,” Acta Astronautica,
Vol. 52, No. 9~12, pp. 881-895, 2003.
E. H. Yang and H. Fujita, "Reshaping of Single Crystal Silicon Microstructures," Japanese Journal of
Applied Physics, Part 1, Vol. 38, No 3A, pp. 1580-1583, March 1999
E. H. Yang and H. Fujita, "Determination of the Modification of Young's Modulus due to Joule Heating of
Microstructures Using U-Shaped Beams," Sensors and Actuators A, Vol. 70, pp.185-190, 1998.
E. H. Yang, S. S. Yang and O. C. Jeong, "Fabrication and Electrostatic Actuation of Thin Diaphragms,"
KSME International Journal, Vol. 12, pp. 161-169, April 1998.
E. H. Yang, S. W. Han and S. S. Yang, "Fabrication and Testing of a Pair of Passive Bivalvular Microvalves
Composed of p+ Silicon Diaphragms," Sensors and Actuators A, Vol. 57, pp.75-78, 1996.
E. H. Yang and S. S. Yang, "The Quantitative Determination of the Residual Stress Profile in Oxidized p+
Silicon Films," Sensors and Actuators A, vol. 54, pp. 684-686, June 1996.
E. H. Yang, S. S. Yang, E. J. Park and S. H. Yoo, "Optimal Valve Design and Fabrication of an Electrostatic
Micropump with p+ Diaphragms," Journal of KIEE, Vol. 9, No. 4, pp. 236-242, Dec. 1996.
E. H. Yang, S. S. Yang, S. W. Han and S. Y. Kim, "Fabrication and Dynamic Testing of Electrostatic
Microactuators with p+ Diaphragms," Sensors and Actuators A, vol. 50, pp. 151-156, Dec. 1995.
E. H. Yang, S. S. Yang and S. H. Yoo, "A Technique for Quantitative Determination of the Profile of the
Residual Stress along the Depth of p+ Silicon Films," Appl. Phys. Lett., vol. 67 (7), 14, pp. 912-914, August
1995.
PEER REVIEWD CONFERENCES
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Ji Su, E.-H. Yang, T.-B. Xu, R. Morgan, Z. Chang, “Active Membrane Using Electrostrictive Graft
Elastomer for Deployable and Lightweight Mirrors,” SPIE Smart Structures and Materials Confererence,
San Diego, CA, 18–22 March 2007
B. Yoo, Y. Rheem, C. Hangarter, E. H. Yang, and N. V. Myung, “Site-Specific Magnetic Assembly of
Nanostructures for Sensor Arrays,” Proceedings of 2006 IEEE Sensors Conference, Daegu, Korea, October,
2006.
R. Toda and E. H. Yang, “Zero-Power Latching, Large-stroke, High-precision Linear Microactuator for
Lightweight Structures in Space,” IEEE Micro Electro Mechanical Systems (MEMS) Conference, Istanbul,
Turkey, January 2006.
R. Toda and E. H. Yang, “Development of Latching Type Large Vertical Travel Microactuator,”
ASME/Pacific Rim Technical Conference and Exhibition on Integration and Packaging of MEMS, NEMS
and Electronic Systems (InterPACK ’05), San Francisco, USA, July 17-22, 2005.
Y. Hishinuma and E. H. Yang, “Large Aperture Deformable Mirror with a Transferred Single-Crystal
Silicon Membrane Actuated Using Large-Stroke PZT Unimorph Actuators,” IEEE Int. Conf. Solid-State
Sensors and Actuators (Transducers '05), Seoul, Korea, June 2005.
S.M. Saeidi, J.M. Khodadadi, C.A. Johnson, C. Lee and E. H. Yang, “Computational Modeling of a
Piezoelectrically Actuated Microvalve for the Control of Liquid Flowrate”, 2005 NSTI Nanotechnology
Conference and Trade Show, Nanotech 2005, May 8-12, 2005, Anaheim, California, U.S.A.
R. Toda and E. H. Yang, “Fabrication and Characterization of Vertical Travel Linear Microactuator,” SPIE
Photonics West, MOEMS-MEMS Conference, San Jose, California, USA, January 2005.
Y. Hishinuma, E. H. Yang, Eric Bloemhof, and B. Martin Levine, “Piezoelectric Unimorph MEMS
Deformable Mirror for Ultra-Large Telescopes,” SPIE Photonics West, MOEMS-MEMS Conference, San
Jose, California, USA, January 2005.
R. Toda and E. H. Yang, “Fabrication and Characterization of Vertical Inchworm Microactuator,”
Proceedings of 2004 ASME International Mechanical Engineering Congress and Exposition, Anaheim,
California, November 13-19, 2004.
Y. Hishinuma, E. H. Yang, J. –G. Cheng, and Susan Trolier-McKinstry, “Optimized Design, Fabrication and
Characterization of PZT Unimorph Microactuators for Large-Stroke, Continuous Membrane Deformable
Mirrors,” Proceedings of 2004 ASME International Mechanical Engineering Congress and Exposition,
Anaheim, California, November 13-19, 2004.
Y. Hishinuma and E. H. Yang, “Single-Crystal Silicon Continuous Membrane Deformable Mirror with PZT
Unimorph Microactuator Arrays,” Solid State Sensor, Actuator and Microsystems Workshop (Hilton Head
2004), Hilton Head Island, South Carolina, June 6-10, 2004.
C. Lee and E. H. Yang, “Piezoelectric Liquid-Compatible Microvalve for Integrated Micropropulsion,”
Solid State Sensor, Actuator and Microsystems Workshop (Hilton Head 2004), Hilton Head Island, South
Carolina, June 6-10, 2004.
C. Lee, E. H. Yang, N.V. Myung, and T. George, “A Nanochannel Fabrication Technology without
Nanolithography,” Micro-TAS Conference, Lake Tahoe, CA, USA, Oct. 5-9, 2003.
C. Lee, E. H. Yang, N.V. Myung, and T. George, “A Nanochannel Fabrication Technique Using ChemicalMechanical Polishing (CMP) and Thermal Oxidation,” IEEE-Nano 2003, San Francisco, CA, USA, August
12-14, 2003.
S. N. Gullapalli, E. H. Yang and S. –S. Lih, “New Technologies for the Actuation and Control of Large
Aperture Lightweight Optical Quality Mirrors,” IEEE Aerospace Conference, Big Sky, Montana, USA,
2003.
D. S. Choi and E. H. Yang, “Fabrication of 20 nm Embedded Longitudinal Nanochannels by Etching
Sacrificial Nanowires,” Nanotechnology Conference and Trade Show, San Francisco, California, USA,
February 23-27, 2003.
E. H. Yang, C. Lee and J. Mueller, “Normally-Closed, Leak-Tight Piezoelectric Microvalve with UltraHigh Pressure Upstream Flow Control for Integrated Micropropulsion,” IEEE International Conference on
Microelectromechanical Systems (MEMS ’03) Conference, Kyoto, Japan, Jan. 2003, pp. 80-83.
E. H. Yang, R. Dekany and S. Padin, “Design and Fabrication of a Large Vertical Travel Silicon Inchworm
Microactuator for Advanced Segmented Silicon Space Telescope (ASSiST),” SPIE Photonics West,
Micromachining and Microfabrication Conference, San Jose, California, USA, January 2003.
E. H. Yang, K. Shcheglov and Susan Trolier-McKinstry, “Concept, Modeling and Fabrication Techniques
for Large-Stroke Piezoelectric Unimorph Deformable Mirrors,” SPIE Photonics West, Micromachining and
Microfabrication Conference, San Jose, California, USA, January 2003.
E. H. Yang and C. Lee, "Piezoelectric Microvalves for Micropropulsion," ASME International Mechanical
Engineering Congress and Exposition, Orlando, FL, November 2002.
21. E. H. Yang, N. Rohatgi and L. Wild, "A Piezoelectric Microvalve for Micropropulsion," AIAA Conference
on Nanotech 2002 - "At the Edge of Revolution", Houston, Texas, 9 - 12 Sep. 2002.
22. J. Mueller, C. Marrese, J. Ziemer, A. Green, M. Mojarradi, T. Johnson, E. H. Yang, V. White, D. Bame, R.
Wirz, M. Tajmar, J. Schein, R. Reinicke, and V. Hruby "JPL Micro-Thrust Propulsion Activities," AIAA
Conference on Nanotech 2002 - "At the Edge of Revolution", Houston, Texas, 9 - 12 Sep. 2002.
23. E. H. Yang, and K. Shcheglov, "A Piezoelectric Bimorph Deformable Mirror Concept by Wafer Transfer
for Ultra Large Space Telescopes," SPIE International symposium on Astronomical Telescopes and
Instrumentation, Adaptive Optical System Technologies II, Waikoloa, Hawaii, USA, 22-28 August 2002.
24. R. Dekany, D. McMartin, S. Padin, E. H. Yang and M. Troy, "Advanced Segmented Silicon Space
Telescopes (ASSiST)," SPIE International symposium on Astronomical Telescopes and Instrumentation,
Adaptive Optical System Technologies II, Waikoloa, Hawaii, USA, 22-28 August 2002.
25. E. H. Yang and D. V. Wiberg, "A Wafer Transfer Technology for MEMS Adaptive Optics," ASME
International Mechanical Engineering Congress and Exposition, Novel Micromachining Processes and Pac
kaging for MEMS, New York, New York, November 2001.
26. E. H. Yang and D. V. Wiberg, "A New Wafer-Level Membrane Transfer Technique for MEMS Deformable
Mirrors," IEEE International Conference on Microelectromechanical Systems (MEMS ’01) Conference,
Interlaken, Switzerland, Jan. 2000, pp. 80-83.
27. E. H. Yang, D. V. Wiberg, and Richard G Dekany, "Design and Fabrication of Electrostatic Actuators with
Corrugated Membranes for MEMS Deformable Mirror in Space," SPIE Int’l Symp. Optical Science and
Technology, Vol. 4091, San Diego, July 30 - Aug. 4, 2000, pp. 83-89.
28. P. Surbled, B. Le Pioufle, E. H. Yang, H. Fujita, "Shape Memory Alloys for Micromembranes Actuation",
Europto Series (EOS/SPIE symposia), Munich (D), 14-18 June 1999, pp. 63-70.
29. E. H. Yang and H. Fujita, “Fabrication of Thin Film TiNi Shape Memory Alloy Microactuators for Optical
Switching Applications," SPIE Micromachining and Microfabrication Conference, Microlectronic
Structures and MEMS for Optical Processing IV, Vol. 3513, September 21-22, 1998.
30. E. H. Yang and H. Fujita, "Reshaping of Single Crystalline Silicon Microstructures for 3D MEMS," Micro
Mechanics Europe 97 (MME 97), Southampton, England, Sept. 1997, pp. 67-70.
31. E. H. Yang and H. Fujita, "Fabrication and Characterization of U-shaped Beams for the Determination of
the Modification of Young's Modulus after Joule Heating of Polysilicon Microstructures," IEEE Int. Conf.
Solid-State Sensors and Actuators (Transducers '97), Chicago, USA, June 1997, pp. 603-606.
32. E. H. Yang and H. Fujita, "Plastic Deformation of Single Crystalline Silicon Microstructures by Joule
Heating," Sensor Symposium, Late News, Kawasaki, Japan, June 1997, p.L73.
33. Y. Fukuta, D. Collard, T. Akiyama, E. H. Yang and H. Fujita," Microactuated Self-Assembling of 3D
Polysilicon Structures with Reshaping Technology," IEEE International Conference on
Microelectromechanical Systems (MEMS '97), Nagoya, Japan, Jan. 1997, pp. 477-481.
34. E. H. Yang and H. Fujita, "Modification of Young's Modulus due to the Joule Heating of Polysilicon Ushaped Beams," IEEJ Annual Conference, Vol. 3, Kyoto, Japan, March, 1997, pp. 247-248.
35. E. H. Yang, S. S. Yang, E. J. Park and S. H. Yoo, "Dynamic Characteristics of the Corrugated and the Flat
p+ Diaphragms Actuated Electrostatically under Residual Stress)," International Mechanical Engineering
Congress and Exposition (96 Winter Annual Meeting), Atlanta, U.S.A., DSC-Vol. 59, Nov. 1996, pp. 441445.
36. E. H. Yang, S. S. Yang and S. H. Yoo, "Design and Fabrication of Electrostatic Microactuators with Silicon
Diaphragms," Int. Workshop on Advanced Mechatronics, Cheju, Korea, Dec. 1995, pp. 247-256.
37. E. H. Yang, S. S. Yang, S. W. Han, and S. Y. Kim, "Fabrication and Dynamic Testing of Electrostatic
Microactuators with p+ Diaphragms," IEEE Region 10 Conference on Microelectronics and VLSI, Hong
Kong, Nov. 1995, pp. 28-31.
38. E. H. Yang and S. S. Yang, "Fabrication of an Electrostatic Micropump with p+ Diaphragms," Int. Symp. on
Microsystems, Intelligent Materials and Robots, Sendai, Japan, Sept. 1995, pp. 106-109.
39. E. H. Yang and S. S. Yang, "A New Technique for Quantitative Determination of the Stress Profile along
the Depth of p+ Silicon Films," IEEE Int. Conf. Solid-State Sensors and Actuators, (Transducers ’95),
Stockholm, Sweden, June 1995, pp. 68-71.
40. S. S. Yang, E. H. Yang, S. Y. Kim, J. D. Seo, and S. H. Yoo, "Fabrication of an Electrostatic Actuator and
Passive Valves with p+ Diaphragms for Micropumps," ASME Winter Annual Meeting, DSC-vol. 55-2,
Chicago, U.S.A., Nov. 1994, pp. 733-740.
INVITED CONFERENCE PAPERS
1.
E. H. Yang, "Microactuators for Wavefront Correction in Space,” Invited Paper, SPIE Defense and
Security Symposium, Micro and Nanotechnologies for Defense and Security, Proceeding of SPIE, Vol. 6556,
2.
3.
4.
5.
6.
7.
Orlando, FL, April 2007.
P. Krulevitch, P. Bierden, T. Bifano, E. Carr, C. Dimas, H. Dyson, M. Helmbrecht, P. Kurczynski, R. Muller,
S. Olivier, Y. Peter, B. Sadoulet, O. Solgaard, and E. H. Yang, “MOEMS Spatial Light Modulator
Development at the Center for Adaptive Optics,” Invited Paper, SPIE Photonics West, Micromachining and
Microfabrication Conference, San Jose, California, USA, January 2003.
J. Mueller, E. H. Yang, A. Green, V. White, I. Chakraborty and R. Reinicke, "Design and Fabrication of
MEMS-Based Micropropulsion Devices at JPL", Invited Paper, Reliability, Testing, and Characterization
of MEMS/MOEMS, Proceedings of SPIE Vol. 4558, San Francisco, October (2001), pp. 57-71.
J. Mueller, J. Polk, E. H. Yang, A. Green, V. White, D. Bame, I. Chakraborty, S. Vargo, and R. Reinicke,
“An Overview of MEMS-Based Micropropulsion Developments at JPL,” Invited Paper IAA-B3-1004, 3rd
International Symposium of the International Academy of Astronautics (IAA) for Small Satellites for Earth
Observation, Berlin, Germany, April 2-6, 2001.
T. George, Y. Bae, I. Chakraborty, H. Cherry, C. Evans, F. Eyre, A. Hui, K.King, L.Kim, R.Lawtona, G. Lin,
C.Marreseb, J.Mueller, J.Podosek, K.Shcheglov, T.Tang, T.VanZandt, S.Vargo, J.Wellmana, V.White,
D.Wiberg and E. H. Yang, "MEMS Technology at NASA's Jet Propulsion Laboratory," Invited Paper,
SPIE Int’l Symp. Optical Science and Technology, San Diego, July 30 - Aug. 4, 2000.
E. H. Yang, “Microsystems Research of Fujita laboratory at the University of Tokyo,” Invited Paper
Korean Society of Electronic Materials, Vol. 11, No. 4, pp. 323-328, 1998.) (in Korean)
S. S. Yang, E. H. Yang, "Research Trends in Fabrication and Applications of Micropumps," Invited Paper,
Journal of KSME, Vol. 33, No. 6, pp. 529-551, 1993. (in Korean)
INVITED PRESENTATIONS
1.
2.
3.
4.
5.
6.
7.
8.
9.
10.
11.
12.
13.
14.
15.
16.
17.
E. H. Yang, “Piezoelectric Microactuator Technologies for Space Applications,” NJIT, Feb. 2007.
E. H. Yang, “Piezoelectric Microactuator Technologies for Space Applications,” Picatinny Arsenal, NJ, Feb.
2007.E. H. Yang, “Piezoelectric Microactuators Technologies for Space Applications,” Columbia
University, Nov. 2006.
E. H. Yang, “Microactuators Technologies for Wavefront Correction in Space,” Rutgers University, Oct.
2006.
E. H. Yang, “Development of Microactuators Technologies for Space Applications,” Seoul National
University, Seoul, Korea, July 2006.
E. H. Yang, “Development of Microactuators Technologies for Space Applications,” Ihwa Woman’s
University, Seoul, Korea, July 2006.
E. H. Yang, “Development of Microactuators Technologies for Space Applications,” Ajou University,
Suwon, Korea, July 2006.
E. H. Yang, “Development of Microactuators Technologies for Space Applications,” IEEE Metropolitan LA
Section General Membership Dinner Meeting, California Institute of Technology, Pasadena, CA, April,
2006.
E. H. Yang, “Development of Microactuators Technologies for Space Applications,” Mechanical
Engineering Seminar Series, Stevens Institute of Technology, Hoboken, NJ, March, 2006.
E. H. Yang, “Development of Microactuators Technologies for Space Applications,” BSAC Lunch Time
Seminar Series, University of California, Berkeley, November, 2005.
E. H. Yang, “Development of Microactuators Technologies for Space Applications,” WIMS Center
Seminar Series, NSF Engineering Research Center for Wireless Integrated MicroSystems at the University
of Michigan, Ann Arbor, September 2005.
E. H. Yang, “Development of Microactuators Technologies for Space Applications,” Lunch Time Seminar
Series, Northrop Grumman Corporation, Woodland Hills, CA, August 2005.
E. H. Yang, “Development of Wavefront Corrector Technologies for Space Applications,” NASA Mirror
Tech Days 2005, Huntsville, Alabama, August 2005.
E. H. Yang, “Deployable Optical Mirror with Controlled Deformation,” DARPA MTO Polymer MEMS
Workshop, Washington DC, March 2~3, 2005.
E. H. Yang, “Adaptive Optics – MEMS Deformable Mirror Development at JPL,” JPL Advanced Planning
and Integration (APIO), Jet Propulsion Laboratory, Nov. 4, 2004.
E. H. Yang, “Development of Microactuators Technologies for Space Applications,” Korea Advanced
Institute of Science and Technology, June 1, 2005.
E. H. Yang, “Development of Microactuators Technologies for Space Applications,” Guwangju Institute of
Science and Technology, May 31, 2005.
E. H. Yang, “MEMS Actuators for Space Applications,” JPL Division 32-38 Joint Seminar, Jet Propulsion
Laboratory, April 2004.
18. E. H. Yang, “MEMS Actuators for Space Applications,” Ajou University, August 2004.
19. E. H. Yang, “Large-Stroke Continuous Membrane Deformable Mirror for Medical Diagnosis,” NASA
Medical Technology Summit, Pasadena, Feb. 11-13, 2003.
20. E. H. Yang, “Variable Control MEMS Valve for Gas/Liquid Systems,” EXPLORER WORKSHOP,
Washington, DC, March 12, 2002.
21. E. H. Yang, “MEMS Adaptive Optics,” EXPLORER WORKSHOP, Washington, DC, March 12, 2002.
22. E. H. Yang, “A Wafer Transfer Technology for MEMS Adaptive Optics,” CfAO MEMS Workshop, CfAO,
UC Berkeley, Feb. 2002.
23. E. H. Yang, “A Wafer Transfer Technique for MEMS Deformable Mirrors,” MEMS Workshop for Adaptive
Optics, CfAO, UC Berkeley, Nov. 2000.
24. E. H. Yang, “Electrostatic Actuators and Micropumps,” Electronics and Telecommunication Research
Institute, Oct. 1998.
25. E. H. Yang, “Reshaping-based Polysilicon and Single-Crystal Silicon Microactuator Technology,” Korea
Advanced Institute of Science and Technology, June, 1997.
26. E. H. Yang, “A Quantitative Determination of Stress Profiles along the Depth of Boron Doped Silicon
Films,” Samsung Electronics, March, 1996.
TECHNICAL PRESENTATIONS
1.
J. Su, E. H. Yang, T. Xu, R. M. Morgan, Z. Chang, “Active membrane using electrostrictive graft
elastomer for deployable and lightweight mirrors,” SPIE Smart Structures and Materials and NDE for
Health Monitoring and Diagonostics, San Diego, California USA, 18 – 22 March 2007.
US PATENTS
1.
2.
3.
4.
5.
6.
7.
W. Fink, E.H. Yang, C. Lee, M. Humayun, and G. Y. Fujii, “Wireless Intraocular Pressure Sensor (WIPS),”
US 7,131,945 B2 US Patent
E.H. Yang and D. Wiberg, “A Wafer-Level Transfer of Membranes in Semiconductor Processing,” US
6,777,312 B2 US Patent
N.V. Myung, E.H. Yang, B.–Y. Yoo, Y. Rheem, and D.S. Choi, “Magnetically Assembled Nanowires,” CIT4566-P, filed for provisional patent application on 2/15/06.
R. Toda and E.H. Yang, “Four Point Latching Microactuator,” CIT-4481-P, filed for provisional patent
application on 9/07/05.
E.H. Yang, L. Wild, N. Rohatgi and D. Bame, “A Piezoelectric Microvalve under Ultra-High Upstream
Pressure for Integrated Micropropulsion and Method for Operating the Same”, CIT-3889, US Patent
Pending, 10/853,072.
E.H. Yang, “Wafer Level Transfer of Membranes with Gas-Phase Etching and Wet Etching Methods,” CIT3325, US Patent Pending, 10/678,359.
E.H. Yang, “A PZT Bimorph based, High Stroke MEMS Deformable Mirror with a Continuous Membrane
for Active Optical Systems” CIT-3475, US Patent Pending, 10/474,978.
NANO TECH BRIEFS
1.
“Fabrication of Channels for Nanobiotechnological Devices”, Nanotech Briefs vol. 1, No. 1, page 15, Jan.
2004.
NASA TECH BRIEFS
1.
2.
3.
N.V. Myung, E.H. Yang, B.–Y. Yoo, Y. Rheem, and D.S. Choi, “Magnetically Assembled Nanowires,”
(NPO-42952)
D.S. Choi, Y. Bae, C. Ramsey, E.H. Yang, “Fabricating an Ordered Array of Nanometer-Scale Dots by
Lift-off using a Thin Alumina Nanopore Template,” (NPO-42271)
D.S. Choi, Y. Bae, C. Ramsey, E.H. Yang, “Fabrication of Copper Nanotubes by Electrodeposition,”
(NPO-42261)
4.
5.
6.
7.
8.
9.
10.
11.
12.
13.
14.
15.
16.
17.
18.
19.
20.
21.
22.
23.
24.
25.
26.
27.
28.
E.H. Yang, “Re-Configurable, Segmented Silicon Telescope,” (NPO-42106)
E.H. Yang, Y. Hishinuma, D. S. Choi, K. Shcheglov, “Amplification of Thermoionic Cooling Power Using
Precision Metal Nanowire Arrays,” (NPO-42101)
R. Toda and E. H Yang, “Four Point Latching Microactuator,” (NPO-42041)
Y. Hishinuma and E. H Yang, “Large-Stroke Piezoelectric Unimorph Actuator” (NPO-41617)
R. Toda and E. H Yang, “Latching-Type, Large Vertical Travel Inchworm Microactuator Array for Space
Applications” (NPO-40749)
R. Toda and E. H Yang, “Improved Design for a Vertical Inchworm Microactuator” (NPO-40480)
E.H. Yang, B. M. Levine, R. Morgan, and Y. Bar-Cohen, “Re-Configurable Large Optical Mirror in Space,
” (NPO-40453)
E.H. Yang, “Stress-Free Membrane Transfer Technique using XeFe2 Etching” (NPO-40276)
E.H. Yang, K. Shcheglov, A. Ksendzov, and D. Wiberg, “MEMS Actuation for Optical Waveguide Switch”
(NPO-40200)
W. Fink, E.H. Yang, C. Lee, M. Humayun, and G. Y. Fujii, “Wireless Intraocular Pressure Sensor (WIPS)”
(NPO-30861)
D. S. Choi and E.H. Yang, “Embedded Longitudinal Nanochannels Transferred from Metal Nanowire
Patterns” (NPO-30839)
C. Lee and E.H. Yang, “Fabrication of Channels for Nanobiotechnological Devices” (NPO-30678) NASA
Tech Briefs, vol. 28, No. 2, p. 52.
E.H. Yang, “A MEMS-based Large Travel Inchworm Actuator with Nanometer Step Motion” (NPO-30672)
NASA Tech Briefs, vol. 27, No. 6, p. 68.
E.H. Yang, “A High Stroke Microvalve Actuated by Miniaturized Piezoelectric Bender Actuator for
Miniaturized Liquid Systems with Particulates” (NPO-30563) NASA Tech Briefs, vol. 27, No. 12, p. 54.
E.H. Yang, “An Improved Design of Microvalve Actuated by Miniaturized Piezoelectric Stack for High
Pressure Liquid System Applications “(NPO-30562) NASA Tech Briefs, vol. 27, No. 12, p. 53.
E.H. Yang, “Back actuators for segmented mirrors and other applications” (NPO-30550)
E.H. Yang, “Micro-Ball-Lens Optical Switch Driven by SMA Actuator” (NPO-30434) NASA Tech Briefs,
vol. 27, No. 1, p. 20a.
E.H. Yang, “Making Precise Resonators for Mesoscale Vibratory Gyroscopes” (NPO-30431) NASA Tech
Briefs, vol. 28, No. 6, p. 56.
E.H. Yang, “Miniature Inchworm Actuators Fabricated by Use of LIGA” (NPO-30429) NASA Tech Briefs,
vol. 27, No. 2, p. 9a.
E.H. Yang and Larry Wild, “A Reactive Ion Etch Process for the High Selective Patterning of PZT
Capacitor Films” (NPO-30349) NASA Tech Briefs, vol. 27, No. 1, p. 61.
E.H. Yang, “Membrane Mirrors with Bimorph Shape Actuators” (NPO-30230) NASA Tech Briefs, vol. 27,
No. 5, p. 10a.
E.H. Yang and Larry Wild and Nishant Rohatgi, “Improvements in a Piezoelectrically Actuated
Microvalve” (NPO-30338), NASA Tech Briefs, vol. 26, No. 3, p. 75.
E.H. Yang and D. Bame, “Improved Piezoelectrically Actuated Microvalve” (NPO-30158), NASA Tech
Briefs, vol. 26, No. 1, p. 29.
E.H. Yang and D. Wiberg, “Silicon Membrane Mirrors with Electrostatic Shape Actuators” (NPO-21120)
NASA Tech Briefs, vol. 27, No. 1, p. 62.
E.H. Yang and D. Wiberg, “A Wafer-Level Membrane-Transfer Process for Fabricating MEMS” (NPO21088) NASA Tech Briefs, vol. 27, No. 1, p. 58.
PRESS RELEASES
1.
2.
3.
Forging Nanochannels Without Nanolithography,
(http://nanotechweb.org/articles/news/2/10/2/1)
http://tainano.com/TNN%20Vol.%20II%20%20No.%2019.htm
The Taiwan Nanotechnology Newsletters, Vol. II, No. 19, 10/16/2003
MISCELLENEOUS PUBLICATIONS AND PRESENTATIONS
1.
2.
E. H. Yang and S. S. Yang, "An Accelerometer with Polysilicon Piezoresistors Bulk-Micromachined using
p+ Silicon Etch Stop Layer," Trans. KIEE, vol. 45, pp.1509-1511, Oct. 1996.
O. C. Jeong, E. H. Yang and S. S. Yang, "An Experimental Study on Electrochemical Discharge Machining
Technique for Micromachining of Pyrex Glasses," Trans. KIEE, vol. 45, pp. 1374-1379, Sep. 1996. (in
3.
4.
5.
6.
7.
8.
9.
10.
11.
12.
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16.
17.
18.
19.
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23.
24.
25.
Korean)
O. C. Jeong, E. H. Yang and S. S. Yang, "A Study on EDM Techniques for Micromachining of Glass
Plates," Journal of Research Institute of Engineering, Ajou University, vol. 19, pp. 309-314, 1996. (in
Korean)
K. N. Kim, E. H. Yang and S. S. Yang, "Fabrication of a Silicon Piezoresistive Accelerometer with
Reduced-Lateral Sensitivity," Journal of Research Institute of Science and Engineering, Ajou University,
vol. 17, pp. 163-168, 1995. (in Korean)
E. H. Yang and S. S. Yang, "A Silicon Piezoresistive Accelerometer with Silicon-On-Insulator Structure,"
Trans. KIEE, vol. 43, pp 1036-1038, June 1994.
S. S. Yang, E. H. Yang, S. Y. Kim and J. D. Seo, "Development of Design and Process Technique for the
Fabrication of Micropumps," Trans. KIEE, vol. 43, pp 1891-1907, Nov. 1994. (in Korean)
W. Han, E. H. Yang and S. S. Yang, "Fabrication of an Electrostatic Actuator with p+ Silicon Diaphragms,"
Journal of Research Institute of Science and Engineering, Ajou University, vol. 17, pp. 169-174, 1994. (in
Korean)
E. H. Yang and S. S. Yang, "A Study on a Silicon Resonator for Piezoresistive Accelerometers," Trans.
KIEE, vol. 41, pp. 1164-1171, Oct. 1992. (in Korean)
E. H. Yang, Y. Fukuta, T. Akiyama, D. Collard and H. Fujita, "Three-Dimensional Microstructures
Fabricated by Reshaping of Silicon Thin Films," KIEE MEMS '98 Conference, Taejun, Korea, April 1998,
pp. 235-244.
E. H. Yang, F. Benoit, D. Collard and H. Fujita, "Realization and Determination of Reshaping Technology
for 3 Dimensional MEMS," KIEE MEMS '97 Conference, Seoul, Korea, April 1997, pp. 33-48.
E. H. Yang, S. S. Yang, E. J. Park and S. H. Yoo, "A Study on the Dynamic Characteristics of the
Corrugated and Flat Diaphragms under Residual Stress and Air Damping," KIEE MEMS '96 Conference,
Suwon, Korea, April, 1996, pp.67-74.
E. H. Yang, O. C. Jeong and S. S. Yang, "Fabrication and Testing of a Polysilicon Piezoresistive
Accelerometer using the p+ Silicon Diaphragm," KIEE 96 Annual Summer Conference, Yong Pyong, Korea,
July, 1996, pp. 1994-1996.(in Korean)
Y. S. Kim, Y. H. Ji, E. H. Yang and S. S. Yang, "Fabrication of a Thermopneumatic Actuator using
Microheater," KIEE MEMS '96 Conference, Suwon, Korea, April, 1996, pp. 13-19. (in Korean)
E. H. Yang and S. S. Yang, "Effect of Process Parameters on the Residual Stress Distribution in p+ Silicon
Diaphragms," KIEE 95 Annual Summer Conference, vol. 1, Daejun, Korea, July, 1995, pp. 1437-1439.
E. H. Yang and S. S. Yang, "Design and Fabrication of an Electrostatic Micropump with p+ Diaphragms,"
KIEE MEMS '95 Conference, Seoul, Korea, April 1995, pp.79-92.
O. C. Jeong, E. H. Yang and S. S. Yang, "Determination of the Residual Stress along the Depth of p+
Silicon using X-Ray Diffraction Method," KIEE 95 Annual Autumn Conference, Seoul, Korea, July, 1995,
pp. 593-596. (in Korean)
O. C. Jeong, E. H. Yang and S. S. Yang, "Micromachining of Pyrex Glass using Electric Discharge
Machining Technique," KIEE 95 Annual Summer Conference, vol. 1, Daejun, Korea, July, 1995, pp. 14221424. (in Korean)
E. H. Yang, S. S. Yang, E. J. Park and S. H. Yoo, "Estimation of the Stress Profile of p+ Silicon
Diaphragms, KIEE 94 Annual Autumn Conference, Seoul, Korea, July, 1994, pp. 413-415.
E. H. Yang, S. S. Yang. S. H. Hwang and H. S. Kim, "Fabrication of a Silicon Piezoresistive Accelerometer
with Silicon-On-Insulator Structure," KSME 94 Annual Spring Conference, vol.1, Daejun, Korea, April
1994, pp.684-686.
Y. H. Ji, E. H. Yang and S. S. Yang, "Fabrication of a Polysilicon Piezoresistive Accelerometer using p+
Cantilever Beams," KIEE 94 Annual Autumn Conference, Seoul, Korea, July, 1994, pp. 416-418. (in
Korean)
E. H. Yang, S. S. Yang and Y. H. Ji, "An Experimental Study on the Deformation of Highly Boron Doped
Silicon Diaphragms due to Residual Stresses," KIEE 94 Annual Summer Conference, vol. A, Kyungju,
Korea, July 1994, pp. 72-75. (in Korean)
S. W. Han, E. H. Yang and S. S. Yang, "Fabrication of an Electrostatic Microactuator with p+ Diaphragms
as an Electrode," KIEE 94 Annual Summer Conference, vol. A, Kyungju, Korea, July 1994, pp. 141-143. (in
Korean)
S. S. Yang, E. H. Yang, S. Y. Kim and J. D. Seo, "Fabrication of an Electrostatic Actuator and Passive
Valves for Micropumps," KSME 94 Annual Spring Conference, vol.1, Daejun, Korea, April, 1994, pp.632635. (in Korean)
E. H. Yang, S. S. Yang and S. W. Han, "Design and Fabrication of a Silicon Piezoresistive Accelerometer
using SOI Structure," KIEE 93 Annual Autumn Conference, Ansan, Korea, July, 1993, pp. 192-194. (in
Korean)
J. D. Seo, E. H. Yang and S. S. Yang, "Fabrication of Two One-Way Silicon Passive Microvalves using
26.
27.
28.
29.
Boron Etch-Stop Layers," KIEE 93 Annual Autumn Conference, Ansan, Korea, July, 1993, pp. 210-212. (in
Korean)
S. Y. Kim, E. H. Yang and S. S. Yang, "Fabrication of an Electrostatic Microactuator with a Corrugated
Diaphragm as an Electrode," KIEE 93 Annual Autumn Conference, Ansan, Korea, July 1993, pp.207-209.
(in Korean)
S. S. Yang and E. H. Yang, "A Study on a Silicon Resonator for Piezoresistive Accelerometers," KSME 92
Annual Spring Conference, vol.1, Daejun, Korea, April, 1992, pp.697-700. (in Korean)
K. N. Kim, E. H. Yang and S. S. Yang, "Fabrication of a Silicon Piezoresistive Accelerometer with
Reduced-Lateral Sensitivity," KIEE 92 Annual Autumn Conference, Seoul, Korea, July 1992, pp.271-273.
(in Korean)
E. H. Yang and S. S. Yang, "Study on a Silicon Resonator for Piezoresistive Accelerometers," KIEE 91
Annual Autumn Conference, Seoul, Korea, July 1991, pp.274-277. (in Korean)