Part 1: Semiconductor Physics 1. If the lattice constant of silicon is 5.43Å, calculate (a) the distance from the center of one silicon atom to the center of its nearest neighbor, (b) the number density of silicon atoms (#/cm3), and (c) the mass density (grams/cm3) of silicon. 2. Assume that each atom is a hard sphere with the surface of each atom in contact with the surface of its nearest neighbor. Determine the percentage of total unit cell volume that is occupied in (a) a simple cubic lattice, (b) a face-centered cubic lattice, (c) a body-centered cubic lattice, and (d) a diamond lattice. 3. A one-dimensional infinite potential well with a width of 12 Å contains an electron. (a)Calculate the first two energy levels that the electron may occupy. (b)If an electron drops from the second energy level to the first, what is the wavelength of a photon that might be emitted? 4. Consider a three-dimensional infinite potential well. The potential function is given by V( x ) 0 for 0 x a , 0 y a , 0 z a , and V( x ) elsewhere. Start with Schrödinger’s wave equation, use the separation of variables technique, and show that the energy is quantized and is given by E nx n y nz 2 2 2 (n x n y2 n z2 ) 2 2ma Where n x = 1,2,3…, n y = 1,2,3…., n z = 1,2,3… (a) Estimate the tunneling probability of particle with an effective mass of 0.067mo (an electron in gallium arsenide), where mo is the mass of an electron, tunneling through a rectangular potential barrier of height V0 0.8eV and width 15Å. The particle kinetic energy is 0.2eV . (b) Repeat part (a) if the effective mass of the particle is 1.08mo (an electron in silicon). 5. Show that the probability of an energy state being occupied by E above the Fermi energy is the same as the probability of a state being empty E below the Fermi level. 6. Assume the Fermi energy level is exactly in the center of the bandgap energy of a semiconductor at T 300K . (a) Calculate the probability that energy state at E Ec kT 2 is occupied by an electron for Si, Ge, and GaAs. (b) Calculate the probability that an energy state at E Ev kT 2 is empty for Si, Ge, and GaAs. 7. As show in the following figure, what type of this semiconductor? (a) Relative Ec and Ev, write the equations of n0 and p0. (b) Relative EFi, write the equations of n0 and p0. Write the equations of (c) the mass action law, (d) the charge neutrality condition, and (e) the position of intrinsic Fermi-energy (EFi). 2m p kT 3 / 2 2mn*kT 3 / 2 ) , N v 2( ) ) (given N c 2( 2 h h2 * 8. If the density of states function in the conduction band of a particular semiconductor is a constant equals to K, derive the expression for the thermal-equilibrium concentration of electrons in the conduction band, assuming Fermi-Dirac statistics and assuming the Boltzmann approximation is valid. 9. (a) Consider silicon at T = 300K. Determine p o if E Fi E F 0.325eV . (b)Assuming that p o from part (a) remains constant, determine the value of E Fi E F when T 400K . (c)Find the value of n o in both parts (a) and (b). 10. For the Boltzmann approximation to be valid for a semiconductor, the Fermi level must be at least 3kT below the donor level in an n-type material and at least 3kT above the acceptor level in a p-type material. If T 300K , determine the maximum electron concentration in a n-type semiconductor and maximum hole concentration in p-type semiconductor for the Boltzmann approximation to be valid in (a) silicon and (b) gallium arsenide. 11. A sample of silicon at T 450K is doped with boron at a concentration of 1.5 1015 cm 3 and with arsenic at a concentration of 8 1014 cm 3 . (a) Is the material n or p type? (b) Determine the electron and hole concentrations. (c) Calculate the total ionized impurity concentration. 12. As show in the following figure, explain why the intrinsic Fermi-energy is located closely to the midgap. If the electron effective mass is higher than that of hole, the intrinsic Fermi-energy will shift to above or below the midgap, explain your reason. 13. Determine the carrier density gradient to produce a given diffusion current density. The hole concentration in silicon at T 300K varies linearly from x 0 to x 0.01cm . The hole diffusion current density is J dif 20 A cm 2 , and the hole concentration at x 0 is p 4 1017 cm 3 . Determine the hole concentration at x 0.01cm . 14. A silicon semiconductor at T 300K is homogenously doped with N d 5 1015 cm 3 and N a 0 . (a) Determine the thermal equilibrium concentration of free electrons and free holes. (b) Calculate the drift current density for an applied ε-field of 30 V/cm. (c) Repeat parts (a) and (b) for N d 0 and N a 5 1016 cm 3 . 15. A silicon crystal having a cross-sectional area of 0.001cm 2 and a length of 10 -3 cm is connected at its ends to a 10-volt battery. At T 300K , we want a current of 100mA in the silicon. Calculate: (a) the required resistance R , (b) the required conductivity, (c)the density of donor atoms to be added to achieve this conductivity, and (d) the concentration of acceptor atoms to be added to form a compensated p-type material with the conductivity given from part(b) if the initial concentration of donor atom is N d 1015 cm 3 . 16. Consider a sample of p-type silicon at T = 300 K. Assume the hole concentration varies linearly dropped from x = 0 to x = 50 m. The hole concentration at x = 0 is p(0) = 1015 cm-3. The diffusion current density is found to be Jp = 0.25 A/cm2. If the hole diffusion coefficient is Dp = 10 cm2/s, find the hole concentration at x = 50 m. 17. As show in the following figure, for a semiconductor in thermal equilibrium with a nonuniform donor impurity concentration N d (x) . Please prove the induced kT 1 dN d ( x) electric field ( x) . e N d ( x) dx 18. If a p-n junction has the charge density as shown in fig. (a), please explain (a) the reason that the built-in electric field () is as shown in fig. (b), and derive the peak e ( N d xn2 N a x 2p ) , and (d) prove value of electric field, (c) prove Vbi 2 s 1/ 2 2 V N Nd W s bi ( a ) Na Nd e Fig. (a) . Fig. (b) 19. A silicon Hall device at T 300K . A Hall Effect device is fabricated with the following geometry: d 10 3 cm , W 10 2 cm and L 10 1 cm . The following parameters are measured: BZ 1000 I x 0.75mA , V x 15V , VH 5.8mV and gauss 10 -1 tesla. Determine (a) the conductivity type (b) the majority carrier concentration, and (c) the majority carrier mobility. 20. As show in the following figure, a p-type semiconductor is contact with an n-type semiconductor to form a p-n junction, please draw the space charge region and explain (a) what is the meaning of space charge, and (b) where is the direction of internal built-in electric field. (c) Where is the maximum electric field? Part 2: PN junction Sze, Chap 4, problem 1,3, 4,5, 7, 17 example 5 Neamen, Chap 5, problem 2,4, 5, 14, 18,21, 37,40 Chap 9, problem 1,8, 9, 17, 28,31,49, 52 Part 3: MOS capacitor and MOSFET [1]、An Introduction to Semiconductor Devices, Donald Neamen 1. Chap 6, review questions 2. A. Sketch the energy band diagrams in an MOS capacitor with an n-type substrate in accumulation, depletion, and inversion modes. B. Describe what is meant by an inversion layer of charge. Describe how an inversion layer of change can be formed in an MOS capacitor with a p-type substrate. C. Why does the space charge region in the semiconductor of an MOS capacitor essentially reach a maximum width once the inversion layer is formed? 2. Chap 6, review questions 7. A. What is a channel stop in an NMOS transistor? B. What is meant by self-aligned source and drain contacts? C. Sketch the p-well configuration in the CMOS structure. 3. Chap 6, problems 6.37 The experimental characteristics of an ideal n-channel MOSFET biased in the saturation region are show in Figure P6.37. IF (W L) 10 and t ox 425 Å, determine VT and n . 4. Chap 6, problems 6.46 Consider an ideal n-channel MOSFET with a width-to-length ratio of 2 (W L) 10 , an electron mobility of n 400 cm V - s , an oxide thickness of t ox 475 Å, and a threshold voltage of VT 0.65V . (a) Determine the maximum value of source resistance so that the saturation transconductance g ms is reduced by no more than 20 percent from its ideal value when VGS = 5V. (b) Using the value of rs calculated in part (a), how much is g ms reduced from its ideal when VGS = 3V ? 5. Chap 7, review questions 3 A. Discuss the effect of charge sharing on the threshold voltage as the channel length decreases. B. Discuss the effect of charge sharing on the threshold voltage as the channel width decreases. 6. Chap 7, problems 7.14 16 3 Consider an n-channel MOSFET with N a 10 cm and t ox 450 Å, If rj 0.3m and L 1m , determine the threshold shift due to the short channel effect. [2]、Semiconductor Devices physics and technology, S.M. Sze 1. Chap 6, problems 14 Derive the I-V characteristics of a MOSFET with the drain and gate connected together and the source and substrate grounded. Can one obtain the threshold voltage from these characteristics? 2. Chap 6, problems 17 For the devices stated in Prob. 16, find the transconductance. Consider a N a 1017 cm 3 submicron MOSFET with L 0.25m , Z 5m , 7 2 2 , n 500 cm V - s , C O 3.45 10 F cm , and VT = 0.5 V. Find the channel conductance for VG=1V and VD=0.1V 3. Chap 6, problems 23 A field transistor with a structure similar to Fig.21 in the text has N a 1017 cm 3 , Q f q 1011 cm 2 , and an n polysilicon local interconnect as the gate electrode. If the requirement for sufficient isolation between device and well is VT > 20 V, calculate the minimum field oxide thickness. 4. Chap 6, problems 30 For an n-channel SOI device with n -polysilicon gate having N a 5 1017 cm 3 , d 4nm , and d Si 30nm , calculate the threshold voltage. Assume that Q f , Qot , and Qm are all zero. MOSC 1. (a) Calculate the maximum space charge width x dT and maximum ' (max) in p-type Silicon, gallium arsenide, space charge density QSD and germanium semiconductors of an MOS structure. Let T=300K and assume N a 1016 cm 3 . (b) Repeat part (a) if T=200K 2. (a) Consider n-type silicon in an MOS structure. Let T=300K. Determine the semiconductor doping so that ' Q SD (max) 7.5 10 9 C cm 2 . (b) Determine the surface potential that results in the maximum space charge width. 3. A 400Å oxide is grown on p-type silicon substrate with N a 5 1015 cm 3 . The flat-band voltage is -0.9V. Calculate the surface potential at the threshold inversion point as well as the threshold voltage assuming negligible oxide charge. Also find the maximum space charge width for the device. 4. Consider an aluminum gated NMOS capacitor with substrate doping concentration of N d 5 1015 cm 3 . Please plot VT versus t ox over the range 20Å t ox 500Å . 5. Consider an aluminum gated NMOS capacitor with substrate doping concentration of N d 5 1015 cm 3 . Assume the t ox 500Å . Please plot VT versus temperature over the range 100K t ox 450K . 6. Consider a MOS capacitor structure on n-type Si substrate with t ox 100Å by using Aluminum gate with work function of 4.1eV. (a) Please plot the band diagram at accumulation, inversion and depletion. (b) Assuming the N d 1016 cm 3 . Please calculate the flat band voltage and the threshold voltage. 7. Consider an aluminum gate-silicon dioxide-p-type silicon MOS structure with t ox 450Å . the silicon doping is N a 2 1016 cm 3 and the flat band voltage is VFB=-1.0V. Determine the fixed oxide charge ' Q SS . 8. An ideal MOS capacitor with an aluminum gate has a silicon dioxide thickness of t ox 400Å on a p-type silicon substrate doped with an acceptor concentration of N a 1016 cm 3 . Determine the capacitances ' ' ' C ox , C FB , C min and C inv at (a) f = 1 Hz and (b) f = 1MHz. (c) Determine the VFB and VT . 9. Determine the metal-semiconductor work function difference MS in an MOS structure with p-type silicon for the case when the gate is (a) aluminum, (b) n+ polysilicon, and (c) p+ polysilicon. Let N a 6 1015 cm 3 . (6.4) 10. An ideal MOS capacitor is fabricated by using intrinsic silicon and n+ polysilicon gate. (a) Sketch the energy band diagram through the MOS structure under flat-band conditions. (b) Sketch the low-frequency C-V characteristics from negative to positive gate voltage. (6.24) Part 4: Bipolar Transistor and Related Devices [1]、An Introduction to Semiconductor Devices, Donald Neamen 1. Find β for a bipolar junction transistor with a nondegenerate emitter. Assume that emitter, base, and collector are noncompensated and that NE=2x1018cm-3, NB=1016cm-3 NC=1015 cm-3 WE=0.2um, WB=0.1um 2. Fromthe equation, α=γαTM,, Where M is the carrier multiplication factor in the base-collector junction. For small base-collector voltage, M=1 and α=γαT and β=α/(1-α). Show that for avalanche breakdown, M=1+1/β. 3. For a uniformly doped n p n bipolar transistor in thermal equilibrium, (a) sketch the energy-band diagram, (b) sketch the electric field through the device, and (c) repeat parts (a) and (b) for the transistor biased in the forward-active region. 8. A uniformly doped silicon npn transistor is to be biased in the forward-active region with the B-C junction reverse biased by 3V. The metallurgical base width is 1.10m . The transistor dopings are N E 1017 cm 3 , N B 1016 cm 3 , and N C 1015 cm 3 . (a) For T 300K , calculate the B-E voltage at which the minority-carrier electron concentration at x 0 is 10 percent of the majority-carrier hole concentration. (b) At this bias, determine the minority-carrier hole concentration at x ' 0 . (c) Determine the neutral base width for this bias. 13. Derive the expression for the excess minority-carrier hole concentration in the bias region of a uniformly doped pnp bipolar transistor operating in the forward-active region. 18. A uniformly doped silicon pnp bipolar transistor at T 300K with doping of N E 5 1017 cm 3 , N B 1016 cm 3 , and N C 5 1014 cm 3 is based in the inverse-active region. What is the maximum B-C voltage so that the low-injection condition applies? 21. A silicon npn transistor at T 300K has an area of 10 -3 cm 2 , neutral base width of 1.m , and doping concentrations of N E 1018 cm 3 , N B 1017 cm 3 , and N C 1016 cm 3 . Other semiconductor parameters are DB 20 cm 2 s , E 0 B 0 10 7 s , and C 0 10 6 s . Assuming the transistor is biased in the active region and the recombination factor is unity, calculate the collector current for (a) VBE 0.5V , (b) I E 1.5mA , and (c) I B 2A . 28. Consider an npn silicon bipolar transistor at T 300K with the following parameters: DB 20 cm 2 s DE 10 cm 2 s B 0 10 7 s E 0 5 10 8 s N B 1016 cm 3 xE 0.5m The recombination factor, , has been determined to be 0.998 . We need a common-emitter current gain of 120 . Assuming that T , determine the maximum base width, x B , and the minimum emitter doping , N E , to achieve this specification. 34. A silicon pnp bipolar transistor at T 300K has uniform dopings of N E 1018 cm 3 , N B 1016 cm 3 , and N C 1015 cm 3 . The metallurgical base width is 1.2m . Let DB 10 cm 2 s and B 0 5 10 7 s . Assume that the minority-carrier hole concentration in the base can be approximated by a linear distribution. Let VEB 0.625V . (a) Determine the hole diffusion current density in the base for VBC 5V , VBC 10V , and VBC 15V . (b) Estimate the Early voltage. 49. Assume the base transit time of a BJT is 100ps and carries cross the 1.2m B-C space charge region at a speed of 1017 cm 3 . The emitter-base junction charging time is 25ps and the collector capacitance and resistance are 0.1Pf and 10 , respectively. Determine the cutoff frequency. 49. 考慮葉柏仕-摩爾模型,並且令基極端點為開路,因此 IB = 0。證 明當外加 一個集極-射極電壓時,我們得到 I C I CEO I CS 1 F R 1 F [2]、Semiconductor Devices physics and technology, S.M. Sze ex1 For an ideal p n p transistor, the current components are given by I Ep 3mA , I En 0.01mA , I Cp 2.99mA , and I Cn 0.001mA . Determine (a) the emitter efficiency , (b) the base transport factor T , (c) the common-base current gain 0 , (d) I CBO , (e) the common-emitter current gain 0 , (f) I CEO . ex2 An ideal p n p transistor has impurity concentrations of 1019 , 1017 , and 5 1015 cm 3 in the emitter, base, and collector regions, respectively; the corresponding lifetimes are 10 -8 , 10 -7 , and 10 -6 s . Assume that an effective cross section area A is 0.05 mm 2 and the emitter-base junction is forward-biased to 0.6V. Find the common-base current gain of the transistor. Note that the other device parameters are DE 1cm 2 s , D p 10 cm 2 s , Dc 2 cm 2 s , and W 0.5m . ex4 A HBT has a bandgap of 1.62eV for the emitter, and a bandgap of 1.42eV for the base. A BJT has a bandgap of 1.42eV for both the emitter and base materials; it has an emitter doping of 1018 cm 3 and a base doping 1015 cm 3 . (a) If the HBT has the same doping and the same 0 . (b) If the HBT has the same emitter doping and the same 0 as the BJT, how much can we increase the base doping of the HBT? Assume that all other device parameters are the same. ex5 Consider a thyristor in which the leakage currents I 1 and I 2 are 0.4 and 0.6mA, respectively. Explain the forward-backing characteristics when ( 1 2 ) is 0.01 and 0.9999. 1. An n p n transistor has a base transport factor T of 0.998, an emitter efficiency of 0.997, and an I Cp of 10 nA. (a) Calculate 0 and 0 for the device. (b) If I B 0 , what is the emitter current? 3. A silicon p n p transistor has impurity concentrations of 5 1018 , 2 1017 , and 1016 cm 3 in the emitter , base, and collector, respectively. The base width is 1.0m , and the device cross-sectional area is 0.2 mm 2 . When the emitter-base junction is forward biased to 0.5V and the base-collector junction is reverse biased to 5V, calculate (a) the neutral base width and (b) the minority carrier concentration at the emitter-base junction. 10. Show that the base transport factor T can be simplified to 1 (W 2 L2p ) . 2. Given that an ideal transistor has an emitter efficiency of 0.999 and the collector-base leakage current is 10A , calculate the active region emitter current due to holes if I B 0 . 23. A Si transistor has D p of 10 cm 2 s and W of 0.5m . Find the cutoff frequencies for the transistor with a common-base current gain 0 of 0.998. Neglect the emitter and collector delays. 25. Consider a Si1-x Gex Si HBT with x 10% in the base region (and 0% in emitter and collector region). The bandgap of the base region is 9.8% smaller than that of Si. If the base current is due to emitter injection efficiency only, what is the expected change in the common-emitter current gain between 0 and 100 C ?