Micromechanical Resonator Publications:
[1] J. Wang, J. E. Butler, T. Feygelson, and C. T.-C. Nguyen, “1.51-GHz polydiamond micromechanical
disk resonator with impedance-mismatched isolating support,” Proceedings, 17th Int. IEEE Micro
Electro Mechanical Systems Conf., Maastricht, The Netherlands, Jan. 25-29, 2004, pp. 641-644.
[2] S.-S. Li, Y.-W. Lin, Y. Xie, Z. Ren, and Clark T.-C. Nguyen, “Micromechanical Hollow-Disk Ring
Resonators,” Proceedings, 17th Int. IEEE Micro Electro Mechanical Systems Conf., Maastricht, The
Netherlands, Jan. 25-29, 2004, pp. 821-824.
[3] Y. Xie, S.-S. Li, Y.-W. Lin, Z. Ren, and C. T.-C. Nguyen, “UHF Micromechanical Extensional WineGlass Mode Ring Resonators” Technical Digest, 2003 IEEE International Electron Devices Meeting,
Washington, DC, Dec. 8-10, 2003, pp. 953-956. (best paper award winner)
[4] J. Wang, Z. Ren, and C. T.-C. Nguyen, “Self-aligned 1.14-GHz vibrating radial-mode disk
resonators,” Dig. of Tech. Papers, the 12th Int. Conf. on Solid-State Sensors & Actuators
(Transducers’03), Boston, Massachusetts, June 8-12, 2003, pp. 947-950.
[5] M. U. Demirci, M. A. Abdelmoneum, and C. T.-C. Nguyen, “Mechanically corner-coupled square
microresonator array for reduced series motional resistance,” Dig. of Tech. Papers, the 12th Int. Conf.
on Solid-State Sensors & Actuators (Transducers’03), Boston, Massachusetts, June 8-12, 2003,
pp. 955-958.
[6] J. Wang, Z. Ren, and C. T.-C. Nguyen, “1.14-GHz self-aligned vibrating micromechanical disk
resonator,” Tech. Digest, 2003 Radio Frequency Integrated Circuits Symposium, Philadelphia,
Pennsylvania, June 8-10, 2003, pp. 335-338.
[7] M. U. Demirci and C. T.-C. Nguyen, “Higher-mode free-free beam micromechanical resonators,”
Proceedings, 2003 IEEE Int. Frequency Control Symposium, Tampa, Florida, May 5-8, 2003,
pp. 810-818.
[8] J. R. Clark, M. A. Abdelmoneum, C. T.-C. Nguyen, “UHF high-order radial-contour mode disk
resonators,” Proceedings, 2003 IEEE Int. Frequency Control Symposium, Tampa, Florida, May 5-8,
2003, pp. 802-809.
[9] M. A. Abdelmoneum, M. U. Demirci, and C. T.-C. Nguyen, “Stemless wine-glass-mode disk
micromechanical resonators,” Proceedings, 16th Int. IEEE Micro Electro Mechanical Systems Conf.,
Kyoto, Japan, Jan. 19.-23, 2003, pp. 698-701.
[10] J. Wang, J. E. Butler, D. S. Y. Hsu, and C. T.-C. Nguyen, “High-Q micromechanical resonators in
CH4-reactant-optimized high acoustic velocity CVD polydiamond,” Tech. Digest, 2002 Solid-State
Sensor, Actuator, and Microsystems Workshop, Hilton Head, South Carolina, June 2-6, 2002, pp. 6162.
[11] W. -T. Hsu and C. T. -C. Nguyen, “Stiffness-compensated temperature-insensitive micromechanical
resonators,” Tech. Digest, 2002 IEEE Int. Micro Electro Mechanical Systems Conf., Las Vegas,
Nevada, Jan. 20-24, 2002, pp. 731-734.
[12] J. Wang, J. E. Butler, D. S. Y. Hsu, and C. T.-C. Nguyen, “CVD polycrystalline diamond high-Q
micromechanical resonators” Tech. Digest, 2002 IEEE Int. Micro Electro Mechanical Systems Conf.,
Las Vegas, Jan. 20-24, 2002, pp. 657-660.
[13] W. -T. Hsu, J. R. Clark, and C. T. -C. Nguyen, “Q-optimized lateral free-free beam micromechanical
resonators,” Digest of Technical Papers, the 11th Int. Conf. on Solid-State Sensors & Actuators
(Transducers’01), Munich, Germany, June 10-14, 2001, pp. 1110-1113.
[14] J. R. Clark, W.-T. Hsu, and C. T.-C. Nguyen, “Measurement techniques for capacitively-transduced
VHF-to-UHF micromechanical resonators,” Digest of Technical Papers, the 11th Int. Conf. on SolidState Sensors & Actuators (Transducers’01), Munich, Germany, June 10-14, 2001, pp. 1118-1121.
[15] R. Navid, J. R. Clark, M. Demirci, and C. T.-C. Nguyen, “Third-order intermodulation distortion in
capacitively-driven CC-beam micromechanical resonators,” Technical Digest, 14th Int. IEEE Micro
Electro Mechanical Systems Conference, Interlaken, Switzerland, Jan. 21-25, 2001, pp. 228-231.
[16] J. R. Clark, W.-T. Hsu, and C. T.-C. Nguyen, “High-Q VHF micromechanical contour-mode disk
resonators,” Technical Digest, IEEE Int. Electron Devices Meeting, San Francisco, California, Dec.
11-13, 2000, pp. 399-402.
[17] W.-T. Hsu, J. R. Clark, and C. T.-C. Nguyen, “Mechanically temperature compensated flexural-mode
micromechanical resonators,” Technical Digest, IEEE Int. Electron Devices Meeting, San Francisco,
California, Dec. 11-13, 2000, pp. 493-496.
[18] W.-T. Hsu, S. Lee, and C. T.-C. Nguyen, “In situ localized annealing for contamination resistance and
enhanced stability in nickel micromechanical resonators,” Digest of Technical Papers, 10th
International Conference on Solid-State Sensors and Actuators, Sendai, Japan, June 7-10, 1999, pp.
932-935.
[19] J. Cao and C. T.-C. Nguyen, “Drive amplitude dependence of micromechanical resonator series
motional resistance,” Digest of Technical Papers, 10th International Conference on Solid-State
Sensors and Actuators, Sendai, Japan, June 7-10, 1999, pp. 1826-1829.
[20] K. Wang, Y. Yu, A.-C. Wong, and C. T.-C. Nguyen, “VHF free-free beam high-Q micromechanical
resonators,” Technical Digest, 12th International IEEE Micro Electro Mechanical Systems
Conference, Orlando, Florida, Jan. 17-21, 1999, pp. 453-458.
[21] Wan-Thai Hsu and C. T.-C. Nguyen, “Geometric stress compensation for enhanced thermal stability
in micromechanical resonators,” Proceedings, 1998 IEEE International Ultrasonics Symposium,
Sendai, Japan, Oct. 5-8, 1998, pp. 945-948
[22] K. Wang, A.-C. Wong, W.-T. Hsu, and C. T.-C. Nguyen, “Frequency-trimming and Q-factor
enhancement of micromechanical resonators via localized filament annealing,” Digest of Technical
Papers, 1997 International Conference on Solid-State Sensors and Actuators, Chicago, Illinois, June
16-19, 1997, pp. 109-112.
[23] C. T.-C. Nguyen, “Micromechanical Signal Processors,” Ph.D. Dissertation, Dept. of Electrical
Engineering and Computer Sciences, University of California at Berkeley, December 1994.
[24] C. T.-C. Nguyen and R. T. Howe, “Polysilicon microresonators for signal processing,” Digest of
Papers, Government Microcircuit and Applications Conference, San Diego, CA, Aug. 15, 1994, pp.
195-198.
[25] C. T.-C. Nguyen and R. T. Howe, “Microresonator frequency control and stabilization using an
integrated micro oven,” Digest of Technical Papers, the 7th International Conference on Solid-State
Sensors and Actuators (Transducers’93), Yokohama, Japan, pp. 1040-1043, June 7-10, 1993.
[26] C. T.-C. Nguyen and R. T. Howe, “Quality factor control for micromechanical resonators,” Technical
Digest, IEEE International Electron Devices Meeting, San Francisco, California, December 14-16,
1992, pp. 505-508.
[27] C. T.-C. Nguyen, “Electromechanical Characterization of Microresonators for Circuit Applications,”
M. S. Report, Dept. of Electrical Engineering and Computer Sciences, University of California at
Berkeley, April 1991.
[28] W. C. Tang, T.-C. H. Nguyen, M. W. Judy, and R. T. Howe, “Electrostatic-comb drive of lateral
polysilicon resonators,” Sensors and Actuators, vol. A21-23, pp. 328-331. 1990.
[29] W. C. Tang, T.-C. H. Nguyen, and R. T. Howe, “Laterally driven polysilicon resonant
microstructures,” Sensors and Actuators, 20, 25-32, 1989.
[30] W. C. Tang, T.-C. H. Nguyen, and R. T. Howe, “Laterally driven polysilicon resonant
microstructures,” Proceedings, IEEE Micro Electromechanical Systems Workshop, Salt Lake City,
Utah, pp. 53-59, February 1989.