Center for Integrated Electronics
Micro and Nano Fabrication Clean Room
Safety Policy
1.0
Purpose
1.1
To provide for the safety and well being of all users of the Micro and
Nano Fabrication Clean Room (MNCR) and all other occupants of the
Low Center for Industrial Innovation.
1.2
To supplement the Rensselaer Laboratory Chemical Hygiene Plan
(LCHP) and any other current or future safety plan or policy instituted
by Rensselaer or by the Office of the Vice President for Research.
1.3
The MNCR Safety Policy is needed due to the unique variety of potential
hazards which may be present in the MNCR.
2.0
Scope
2.1
The Rensselaer LCHP and the MNCR Safety Policy apply to any person
who enters the MNCR for any purpose. Any reference to an “employee”
in the Rensselaer LCHP or other documents shall also refer to any
student, whether employed or undertaking an educational program in
the MNCR.
2.2
Provisions herein are in addition to, and do not exclude, any provisions
specified in the Rensselaer LCHP and/or any other safety documents
produced by Rensselaer or by the Office of the Vice President for
Research.
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3.0
Responsibilities
3.1
It is the responsibility of the MNCR staff to provide training in the
specific safety rules and protocols required in the MNCR, including, but
not limited to, alarm response and other emergency procedures. This
training may be given by lecture, written materials or videotaped
presentation.
3.2
It is the responsibility of all who enter the MNCR to observe and enforce
all safety rules.
3.3
Any instance of refusal to observe safety rules will be referred to the
MNCR Manager.
4.0
Access Requirements
4.1
All persons working in the MNCR, whether taking part in research or
educational activities or working as staff members, must do the
following at least annually in order to obtain, renew or extend the period
of MNCR access:
a. Successfully complete a written exam on the material covered in the
training referred to in Section 3.1 (above).
b. Sign the MNCR Safety and Security Agreement.
c. Submit a completed MNCR Account Information form.
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5.0
Protective Apparel and Other Clothing
5.1
In addition to requirements listed in the Rensselaer LCHP, the following
apply in the MNCR:
a. Eye protection must be worn when proceeding beyond the gowning
area in the MNCR.
b. Contact lenses must not be worn in the MNCR.
c. Neither soft nor open-toed shoes (including woven-topped sneakers
and sandals of any kind) are permitted in the MNCR. High-heeled
shoes are also prohibited.
d. Athletic and summer shorts are not permitted in the MNCR. Skirts
are also prohibited.
e. Additional safety apparel is required in wet chemistry areas.
f. Pregnant women may not enter the MNCR unless express permission
is obtained from the MNCR Manager and the Director of
Environmental Health and Safety. If permission is granted, the user
may be required to wear additional respiratory protection while in the
MNCR.
6.0
Occupancy Rules
6.1
All persons who enter the MNCR must “log in” by swiping their access
card through the card reader outside the gowning room. All users must
“log out” when leaving the MNCR by swiping their card through the
card reader inside the gowning room.
6.2
In the event of an emergency evacuation, all persons in the MNCR at the
time of the evacuation shall leave via the closest exit and either proceed
to the main building lobby on the 3000 level, or proceed outside to the
south end of the building (near the Biotechnology Center), so that all can
be accounted for.
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6.3
Persons working alone in the MNCR are only permitted to perform
certain tasks, as follows:
a. Between 8:30AM and 4:30PM, Monday through Friday (excluding
Institute holidays), a person working alone ...
... may not handle or use hazardous chemicals.
... may not perform “live” maintenance (i.e., working with gas
feeds or sources of energy turned on anywhere in the tool).
... may operate any tool on which they are a qualified user.
... may perform “non-live” maintenance (i.e., working with all
gas feeds and sources of energy turned off and locked out).
b. At all other times, a person working alone ...
... may not handle or use hazardous chemicals.
... may not perform “live” maintenance (i.e., working with gas
feeds or sources of energy turned on anywhere in the tool).
... may operate tools on which they are a qualified user, but only
if operating the tool does not involve using high voltage or
hazardous materials, or being exposed to other hazards.
... may perform “non-live” maintenance (i.e., working with all
gas feeds and sources of energy turned off and locked out).
6.4
Before leaving the MNCR, users must check to see whether they are
leaving another user alone in the lab. A user who is being left alone in
the lab should be informed that this is occurring.
6.5
A user who is informed that they are being left alone in the MNCR must
cease any activities which are not permitted under Section 6.3 (above).
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7.0
Unattended Experiments and Processing
7.1
No experiment or process should be left unattended unless absolutely
necessary.
7.2
Whenever an experiment or process is left unattended, a notice must be
posted indicating the nature of the process, the expected completion
time, and the name of the process owner and how they can be contacted.
8.0
New Materials in the MNCR
8.1
Anyone desiring to bring a new material into the MNCR must complete
a Request to Introduce a New Material and obtain all required
approvals.
8.2
Three copies of the appropriate Materials Safety Data Sheet (MSDS) must
be submitted with the request.
9.0
Equipment Changes in the MNCR
9.1
Procurement, construction, installation and modification of tools to be
housed in the MNCR may only be done under the supervision of the
MNCR staff and with the permission of the MNCR Manager.
9.2
Procurement, construction, installation, modification, adjustment and
maintenance of hazardous gas distribution and monitoring systems
(including cylinders and regulators) may only be done by members of
the MNCR staff.
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