Please be prepared with the following information:
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6.
Requestor's name: Hiroyuki Sanda
Phone number: 650-725-8566
email address: hsanda@stanford.edu
Requestor’s PI (Advisor) or Company: Prof. Nishi
The name of the new Chemical (give all names commonly used): Potassium Dichromate(k2Cr2O7)
If there are secondary new chemicals that must be used with this material, such as a developer for a new
resist, list each of them here and supply MSDSs for each of them.
7. Name of vendor/manufacturer that you are planning to obtain this material from: J.T. Baker
8. URL for vendor’s website where info on the proposed chemical can be found:
http://www.jtbaker.com/asp/ProdPage.asp?sku=3090&marketname=research&searchdata=3090&s
tartnum=0&language=
9. Vendor’s address and phone number:
Alameda Chemical & Scientific
Oakland, CA 94621
510-568-7338
Fax: 510-633-1171
10. What is your reason for wanting to bring this material into the lab:
I am going to use this chemical to make Secco etchant with HF and evaluate defects of
epitaxial silicon layers.
11. Make a strong case why you can not use an already approved chemical/material for this purpose:
I am transfering a special epitaxial process from a company. That company uses Secco etchant
as a chemical and to compare our result I need to use Secco etchant.
12. List all the lab equipment and wet benches that you propose to use with this chemical:
Webgeneral, webgaas
13. Proposed quantity of the chemical that you want to bring into lab (give both raw and mixed quantities):
raw 30g, mixed 3l (K2Cr2O7:H2O:HF(49%)=30g:1l:2l)
14. State the form that the proposed chemical is in.
K2Cr2O7 is powder and I am going to mix it with DIW outside the cleanroom and
bring it into the cleanroom.
After that, I will mix it with HF.
15. State whether the chemical needed to be mixed to use it:
K2Cr2O7:H2O:HF(49%)=30g:1l:2l
16. From manufacturer, vendor or the Stanford safety site, obtain a legible Material Safety Data Sheet
(MSDS) for all the proposed chemicals. Send these to the person listed below.
MSDS has sent to Jim MacCvittie
17. If the chemical/material is to be used in any the "clean" equipment, purity specifications will be needed.
This is most important for chemicals/material that are not normally used for VLSI device fabrication. To be
allowed into a "clean" tool, the material should MOS grade or better.
18. Read the MSDSs as well as the Stanford Chemical Storage Groups and the Stanford Chemical Safety
Data Base sections on this website to determine the Storage Group Identifier and Main Hazard Class of
your chemical/material.
C Compatible Inorganic Bases, Oxidizers, and Poisons.
19. Determine whether there is enough room to store your material in the designed lab storage areas.
Storage groups A,B,D and L are stored in the yellow solvent cabinet in the furnace support area, while
storage groups C, E, F and G are stored on top of one of the Pass-through Carts. Ensure your chemical
container or material is properly labeled. If there is no available room, it must be stored by in the bulk
storage area. You will then need to obtain it from receiving area personnel each time you want to use it
and return it to them when you are finished using it (or each time you leave the lab). Note that there is no
storage of chemicals/materials in the processing lab or at any wet bench.
I am going to use 1galon container.
There is enough room.
20. In your discussions with vendors, try to determine the best way to dispose of your spent chemicals and
by-products. The lab has acid/base, HF and solvent drains. The acid/base drains go to a neutralization
system before going the city waste water system. The city of Palo Alto has tight limits on the amount of
heavy metals that be disposed of through the waste water system. If your chemical contains any metals,
there is a good chance that you will have to collect all your waste and dispose of it in labeled containers
which are picked up the Health and Safety Department. The HF drains go to a central tank which is
pumped out by a HF disposal service at considerable expense on a regular basis. The solvent drains in
the solvent benches are collected under the benches and disposed of by Heath and Safety as needed.
I am going to collect my waste and dispose of it in labeled containers.
21. Put together a detailed process flow description on how you proposed to use this chemical. This should
include: Any chemical mixing, all lab equipment and wet benched to be used, all containers to be used,
where chemical is to be stored and how chemical and by-products are to be deposed of. This should be in
a Word file attached to your e-mail request. In reviewing your procedure, we will be most interested in
how the safety and contamination issues are to be dealt with.
mixing outside cleanroom: K2Cr2O7:H2O=30g:1L
bringing it into cleanroom and store it in the cabinet C
just before using it, mixing it with HF(49%):2L
using it at webgeneral or webgaas (putting si wafers into this acid)
after experiments, collecting waste and and disposing it in labeled containers