UPPER ELECTRODE REMOVAL AND REPLACEMENT PROCEDURE - 4520 SYSTEMS
Reference Documentation:
1.
Procedure. Chamber Vent - Automatic 4520 Systems
2.
Procedure. Lower Clamp Removal 4520 Systems
2. Procedure. Confinement Ring Change - 4520 Systems.
3. Procedure Plunger Attachment Plate Removal,
4. Procedure, Process Chamber Cleaning - 4520 System
5. Procedure. Electrode Parallelism,
6. Procedure. Gap Calibration.
7. Drawing, 852-11595-003, 4400 Upper Reaction Chamber Assembly
Equipment Required
1. Full solvent gear - arm guards, apron, self-contained breathing apparatus goggles, and solvent
compatible gloves.
2. Allen wrench set.
3. Precision torque wrench.
4. Dl water.
5. Isopropyl alcohol.
Preparation:
Wear gloves and other appropriate solvent gear when working in the chamber. Do not breathe the chamber gases.
1. Vent and open the process chamber. Refer to the Chamber Vent - Automatic 4520 Systems Procedure
2. Perform the Removal section of the Lower Clamp Removal 4520 Systems Procedure
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3. Perform the Removal portion of the Confinement Ring Change - 4520 Confinement Ring Change System Procedure
3. Perform the Removal portion of the Plunger Attachment Plate Removal Procedure
Procedure:
Removal
1.
Remove the bolts in the electrode retaining ring being careful to keep the electrode from falling out.
2. Remove the retaining ring and the upper electrode.
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3.
Remove the gas baffles from the electrode and inspect for pitting and/or wear. Replace as necessary.
Note: Use lint free cloth to wrap around your steel screw driver tip when working with the aluminum screws of the
baffles.
This o-ring
4. Remove the 0-ring from around the baffles. (see figure above) Clean the 0-ring with the Dl water and isopropyl
alcohol mixture. Replace if necessary.
NOTE: Do not grease the baffle 0-ring.
5. Wipe the baffles off with isopropyl alcohol.
6. Reinstall the 0-ring around the baffles.
Replacement
1. Install the gas baffles. The bottom plate should have its inscription face 6:00 position. Inscriptions on the plates
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describe which plate is placed on top of which one, and which side of the plate faces up or down. Use the single
protruding pins at the back side of the plates as a mark for rotational orientation.
2. Place the new electrode back. It should slide in. If you experience resistance, rotate the electrode somewhat and
try again.
3. Place the retaining ring into the upper housing. Hand tighten two opposing retaining bolts until they are snug.
NOTE: For proper alignment of the retaining ring see Figure 8 in the appendix. The bolt directly at the 12’ o
clock position, is larger than the other bolts that hold the Upper Electrode Retaining Ring
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4. Place the ceramic plunger attachment plate without the plunger springs plus the confinement ring over the electrode
to verify centering. Rotate the plunger attachment plate around in either direction. If the plate does not fit in or does
not rotate smoothly, it means that the electrode is not centered. Loosen the electrode retainer bolts and recenter the
electrode. This is the upper electrode centering step.
5. Repeat steps 3 and 4 until the ceramic spring retaining ring rotates smoothly.
6. Tighten the remaining bolts for the electrode retaining ring finger tight using a star pattern for tightening.
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7. Use a precision torque wrench to tighten the electrode retaining ring bolts to 20 inch-lbs. torque again using a Star
pattern for tightening.
8. Repeat step 7 this time tightening the retaining ring bolts to 40 inch-lbs. torque.
Calibration
1. Perform the Electrode Parallelism Procedure.
2. Perform the Gap Spacing Calibration Procedure.
3. When the electrodes are parallel and the gap has been calibrated, proceed to Completion
Completion
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1. Perform the appropriate Process Chamber Cleaning Procedure.
2. Perform the Replacement section of the Plunger Attachment Plate Removal Procedure.
4.
Perform the Completion section of the Confinement Ring Change – 4520 Clamped Systems Procedure.
5.
Perform the steps 1 through 3 of the Lower Clamp Removal Procedure
6.
Perform the Completion section of the Chamber Vent – Automatic 4520 Systems Procedure.
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