Process Chamber Schematic Reading Exercise 60min
Documents to handout to students:
1. This document on line and 1 copy per group;
2. Images of Upper Electrode Parts 4520.doc on line;
3. Exercise #2 one copy per student.
Key to reading of cross-sectional schematics:
Step1: Using boundaries in the drawing to discern discrete parts from each other.
Step2: Imagine the shape of the parts in 3-D from the 2-D drawing.
Step3: Judge the spatial relation of the parts from the 2-D drawing.
Exercise 1: (Instructor Demo) Given the Upper electrode assembly part schematic (a section of Drawing 800-140483-001 sheet13/14),
discern the various rings and plates and their spatial relation. Instructor to use this exercise to demonstrate the above key steps in the
reading of cross-section schematics.
Over
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Exercise 2: (Student exercise) Given upper electrode parts images. (Lecture Notes/Ch2 Process Chamber /Schematics/Parts Images of
UpperElectrode 4520.doc) Correlate the photos with the parts in the Upper electrode assembly part schematic with index below.
Associate part index in the drawing with the part letter label given in the photo captions. (Turn in for grade! This is an individual
assignment) (skip part 6, 7)
Parts Index
1(not a ring)
2
3(not a screw)
4
5
6
7
8(not a screw)
Part letter label in the photo document (fill in a, b, c … etc)
skip
skip
Over
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Exercise 3: (Student exercise) Given Upper chamber housing schematic (Drawing 800-140483-001 sheet13/14), and the upper process
chamber of the actual etcher, correlate actual parts with parts in the drawing for the labeled parts. Report to the instructor by pointing
various labeled parts in the schematic below to the instructor. In this exercise, it is very important that you utilize the spatial relation
of parts in the schematic to help you to locate the parts on the actual etcher. For example, let say you already establish where part X is
on the etcher and you want to find out where part Y is. You may see on the schematic that Y is above Z, on the left of W, to the right
of V and below T. So you go to that spot on the etcher to find Y. Note, not all parts are visible. Some may be hidden behind other
parts. This is a group exercise.
Safety: This exercise requires opening of the upper chamber housing cover. There is 90V DC gap drive electric power inside. There
is also RF present. Etcher main AC lockout tag out is required. Mounting back of the cover to ensure RF shield integrity should be
discussed.
OVER
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Exercise 3: Upper Chamber Housing Schematic
H
A
G
F
E
D
C
B
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Exercise 4: take upper electrode assembly apart verify your conclusions in Exercise 3. (this is the upper electrode removal and
replacement PM to be covered next)
How to read exploded view diagrams: Use the ELL arm housing assembly exploded view diagram (853-012100-003) as an example.
Homework: Given lower electrode exploded view and cross section view, can you correlate parts in each to each other.
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