Wisconsin Center for Applied Microelectronics
1550 Engineering Drive
Madison, WI 53706
Phone: 608/262-6877
Fax: 608/265-2614
LITHOGRAPHY 1165 SOLVENT BENCH
Equipment Description:
The 1165 chemical bench has two temperature-controlled
tanks and one sink. The heated tanks contain Rohm-Haas
1165 Remover and are dedicated to removing photoresist.
One tank is for wafers and the other is for lithography
masks. There are low-level sensors in each tank that when
activated prevent heating of the solvent. The tank
temperatures are controlled via a closed-loop control
system with redundant over-temperature safety interlocks.
The bench is also equipped with two solvent carboys with
full-level sensors. The two tanks and the bench deck basin
drain into the carboys.
Approved Materials for use in this equipment:
Check the APPROVED MATERIALS for this equipment on http://mywebscape.wisc.edu under WCAM in the
group directories.
Date last modified: 2/17/2016
Date created: 9/22/2008
Content by: Rebecca Bauer