中国科学院深圳先进技术研究院导师简况表
导师姓名
俞挺
专业名称
微电子学与固体电子学
所在单元
性别
集成电子研究中心
男
职称
副研究员
导师类别
□博导 □硕导
是否兼职
□是
□否
□物理化学（含化学物理）□生物化学与分子生物学□信号
招生专业
与信息处理□模式识别与智能系统□计算机应用技术□材料
工程□电子与通信工程□控制工程□计算机技术□生物工程
研究方向
微电子、MEMS 传感器
“面向物联网应用的硅微加工电容式超声传感器的关键技术研究”，深圳市基
础研究计划重点项目
在研课题
“基于标准 CMOS 工艺的电容式微加工超声传感器的关键技术研究”，深圳市基
础研究计划项目
“深圳市物联网公共技术平台”，深圳市生物、互联网、新能源产业发展专项
个人简历
主要科研
成果及所
资金项目
2005 年获得新加坡南洋理工大学微电子学专业博士学位。硕、博士期间参与多
项科研项目，具有丰富的薄膜制备，集成电路制作和 MEMS 工艺经验。博士期
间 主要 从事纳米 CMOS 器 件中 介电薄 膜应 用研究 ，参 加了新 加坡 教育部
“Pyroelectric Thin Film Micro-IR Sensors/Array and Piezoelectric
Micro-Actuators Using Surface Micro-Machining and Laser-MBE
Technology”课题的研究；2005 年至 2006 年，在香港理工大学应用物理系任
职 research fellow 期间，参加了香港科技创新基金项目“Piezoelectric
materials application for medical and industrial device”的研究；2006
年底进入中国科学院深圳先进技术研究院后，主要从事 MEMS 微传感器的研究
工作。现主持承担国家 863 基金项目、深圳市基础研究计划项目等，并以科研
骨干参与国家科技 03 重大专项、多项深圳市基础研究计划项目、深港创新圈
项目等。
发表 SCI/EI 收录学术论文将近 40 篇，论文被引用近 200 次，同时申请发明
专利 5 项，已获得授权发明专利 3 项。
获荣誉
其他
邮箱
联系方式
电话
个人主页
备注
Ting.yu@siat.ac.cn
Name
Academic
title
Ting Yu
Positions
Associate professor
E-mail
Ting.yu@siat.ac.cn
Personal
Phone
Website
Dr Ting Yu received his Ph.D degree from Nanyang Technological University
(Singapore) at 2005. From 2005 to 2006, he joined the Hong Kong ITF fund
Resume
“Piezoelectric materials application for medical and industrial device” as research
fellow. After entered SIAT at 2006, his major research interesting including
MEMS sensor, microelectronics.
Direction
Achievements
MEMS sensor, microelectronics
Dr Yu has been published for 33 SCI/EI articles. These articles are indexed about
200 times. He also has acquired 3 invention patents.
[1] Ting Yu, Wenchao Zhou, Peng Xu, Fengqi Yu and ;“Theoretical
investigation on the dynamic performance of CMUT for design
optimization ”, accepted by Acta Mechanica Solida Sinica, 2012.
[2] Ting Yu, Xingqiang.Lu, and Fengqi Yu,“Dual-bottom-electrode CMUT
Based on Standard CMOS Process”, accepted by 6th IEEE International
Conference on Nano/Micro Engineered and Molecular Systems，NEMS
2011, 18-23 Feb 2011.
[3] Benxian Peng, Ting Yu, and Fengqi Yu; “Spice Model on High Frequency
Vibration for CMUT Application”, accepted by 3rd International Conference
on Mechanical and Electrical Technology (ICMET ) 2011, 2 6-27, August.
[4] Peng.Xu, Ting Yu, and Fengqi Yu, “Investigation of Residual Stress
Article
Influence on CMUT in Standard CMOS Process”, International Conference
on Electric Information and Control Engineering (ICEICE2011), 2011, pp.
495-498.
[5] Peng.Xu, Ting Yu, Fengqi Yu, “Study on Fatigue of CMUT in Standard
CMOS Process”, accepted by IEEE International Conference on Computer
Science and Information Technology (ICCSIT2011), Chengdu, 2011, China.
[6] T. Yu, K.W. Kwok, and H.L.W. Chan, “Preparation and properties of
sol–gel-derived Bi0.5Na0.5TiO3 lead-free ferroelectric thin film”, Thin
Solid Films, Vol. 515, Issues 7-8, 26 February 2007, pp. 3563-3566.
[7] T. Yu, K.W. Kwok, and H.L.W. Chan, “The synthesis of lead-free
ferroelectric Bi0.5Na0.5TiO3–Bi0.5K0.5TiO3 thin films by sol–gel
method”, Materials Letters, Vol.61, no.10, April 2007, pp. 2117-2120.
[8] T. Yu, C.H.Chen, Y. K. Lu, X.F.Chen, W. Zhu, and R.G.Krishnan,
“Preparation of sol-gel-derived Ca1-xSrxZrO3 perovskite dielectric thin
films”, J. Electroceram, Vol 18, no. 1-2, April 2007,pp.149-154.
[9] T. Yu, K.W. Kwok, and H.L.W. Chan, “Sol-gel derived lead-free
piezoelectric Bi1/2Na1/2TiO3 thin film for MEMS applications”, IEEE
International Symposium on the Applications of Ferroelectrics, ISAF '06, 30
July.2006, pp.1-3.
[10] T. Yu, W. G. Zhu, C. H. Chen, X. F. Chen, and R. G. Krishnan, “Fabrication
and characterization of perovskite CaZrO3 oxide thin films”, Ceramics
International, Vol.30, 2004, 1279.
[11] T. Yu, W. G. Zhu, C. H. Chen, X. F. Chen, and R. G. Krishnan, “Preparation
and characterization of sol-gel derived CaZrO3 dielectric thin films for
high-k applications”, Physica B, 348 (2004) 440.
[12] W. Zhu, T. Yu, C. H. Chen, X. F. Chen and R. G. Krishnan, “Preparation and
characterizations of high-k (Ca,Sr)ZrO3 gate dielectric thin films by sol-gel
technology”，Integrated Ferroelectrics, 61 (2004) 25.
[13] C. H. Chen, W. Zhu, T. Yu, X. F. Chen, and X. Yao, “Preparation and
characteristic study of MOD derived dielectric SrZrO3 thin films”,
Ferroelectrics, 292 (2003) 29.
[14] C.L.Yuan, T.Yu et al., “The effect of Fe doping on the magnetoresistive
behavior of layered perovskites La1.4Ca1.6Mn2O7”，Phys.Stat.Sol.(a) 178,
771 (2000).
[15] Ting Yu, Wenhai Song et al., “Insulator-Metal Transition and Colossal
Magnetoresistance
in
Granular
Layered
Perovskites
La2-2x
Ca1+2xMn2O7”，Phys.Stat.Sol.(a) 172, 451(1999).
[16] C.L.Yuan, S.G.Wang, W.H.Song, T.Yu et al.,“Enhanced intergrain tunneling
magnetoresistance in double perovskite Sr2FeMoO6 polycrystals with
nanometer-scale particles”，Appl.Phys.Lett 75, 3853(1999).
[17] T. Yu, W. G. Zhu, X. F. Chen and Y. K. Lu, “Leakage current behavior in
CaZrO3 thin films for high-k applications”, 2004 MRS spring meeting, San
Francisco, USA, April 2004.
[18] T. Yu, C. H. Chen, X. F. Chen, W.G. Zhu, and R. G. Krishnan, “Preparation
and characterizations of high-k gate dielectric CaZrO3 thin films by sol-gel
technology”, Characterization and Metrology for ULSI Technology 2003
International Conference, Austin, TX, USA, March 2003.
[19] Yundong Wu, Rong Chen, Wenjian Jiang, Ting Yu, Fengqi Yu; “A Novel
Infrared Sensor Structure compatible to Standard CMOS Process”,
International Conference on Modeling, Simulation and Visualization
Methods, WMSVM 2010, May 15-16,2010, Sanya, China, pp. 254-257.
[20] Rong Chen, Ting Yu, Fengqi Yu, and Yuchun Feng; “Thermal Design and
Analysis of Uncooled Infrared Senor in Standard CMOS”, 5th IEEE
International Conference on Nano/Micro Engineered and Molecular
Systems，NEMS 2010, 20-23 Jan, pp. 475-478.
[21] Benxian Peng, Ting Yu, Fengqi Yu, and Yuchun Feng; “A Compact Force
Sensor with Low Temperature Drift Design Using a Standard CMOS
Process”, 5th IEEE International Conference on Nano/Micro Engineered and
Molecular Systems，NEMS 2010, 20-23 Jan, pp. 806-809.
[22] Dasong Peng, Ting Yu, Fengqi Yu; “An improved 2-D ANSYS simulation
model for SAW”, 4th IEEE Conference on Industrial Electronics and
Applications, ICIEA 2009, 25-27 May 2009, pp.332-335.
[23] Dasong Peng, Ting Yu, Fengqi Yu; “A design methodology for RFID SAW
tag”, International Colloquium on Computing, Communication, Control, and
Management, CCCM 2009, 8-9 Aug. 2009,Vol 2, pp. 266-269.
[24] Benxian Peng, Ting Yu, Fengqi Yu, and Yuchun Feng; “A high performance
vibration sensor with extended floating gate”, International Conference on
Information and Automation, ICIA '09, 22-24 June 2009, pp.1608-1612.
[25] Xingqiang Lu; Ting Yu, Fengqi Yu; Yuchun Feng; “Investigation of thermal
stress influence on CMUT in standard CMOS process”, International
Conference on Information and Automation, ICIA '09, 22-24 June 2009,
pp.1447-1451.
[26] Benxian Peng, Ting Yu, and Fengqi Yu; “Design of temperature controlled
micro-hotplate for CMOS CO sensor”, 3rd IEEE International Conference
on Nano/Micro Engineered and Molecular Systems, NEMS 2008., 6-9 Jan.
2008, pp.895 -898.
[27] Benxian Peng, Ting Yu, and Fengqi Yu; “High Performance SON-LDMOS
for RF Power Amplifier Application”, Circuits and Systems for
Communications, 2008. ICCSC 2008. 4th IEEE International Conference
on, 26-28 May. 2008, pp. 60-64.
[28] Wenchao Zhou, Ting Yu, and Fengqi Yu;“A 1-D lumped theoretical model
for CMUT”,IEEE/ASME International Conference on Advanced Intelligent
Mechatronics, AIM 2008, 2-5 July, 2008, pp.318-322.
[29] Wenchao Zhou, Ting Yu, and Fengqi Yu; “A 1-D Theoretical Receiving
Model for CMUT”, International Conference on Intelligent Computation
Technology and Automation (ICICTA), Oct.2008, Vol.1, no. 20-22,
pp.529-534.
[30] Wenchao Zhou, Ting Yu, and Fengqi Yu; “Calculation of equivalent
parameters in CMUT 1-D theoretical model”, Ultrasonics Symposium, IUS
2008, 2-5 Nov. 2008, pp.491-495.
[31] Benxian Peng, Ting Yu, and Fengqi Yu; “A Novel Process of
Silicon-on-Nothing
MOSFETs
with
Double
Implantation”,
IEEE
International Conference on Integration Technology, ICIT '07, 20-24 March.
2007, pp. 237-240.
[32] Benxian Peng, Ting Yu, and Fengqi Yu; “Low-voltage vibration sensor in
standard CMOS process”, IEEE International Conference on Robotics and
Biomimetics, ROBIO 2007, 15-18 Dec. 2007, pp.1512-1516.
[33] W. Zhu, T. Yu, C. H. Chen, and R. G. Krishnan, “Preparation and
characterizations of high-k (Ca,Sr)ZrO3 gate dielectric thin films by sol-gel
technology”, The 10th European Meeting on Ferroelectricity, Cambridge,
UK, August 2003.