MIDEM 2013 CONFERENCE ABSTRACT SUBMISSION for Invited paper SIGNAL PROCESSING IMPLEMENTATION FOR INTEGRATED, HIGH PERFORMANCE, LOW NOISE, CHEMICAL/BIOLOGICAL SENSOR INTERFACE Drago Strle University of Ljubljana, EE Department, Tržaška 25, Ljubljna e-mail: drago.strle@fe.uni-lj.si ABSTRACT: Detecting vapour traces of different materials with low vapour pressure is a potentially powerful method to reveal the presence of target molecules in the air with applications in security, medicine, environmental control. The detection method is based on the fact that most materials constantly emit rather small, but detectable number of different molecules that constitute the material. In this work, we describe a design procedure of the sensor measurement system and signal processing implementation for integrated, high performance, low-noise sensor interface capable of measuring extremely small capacitive changes (smaller than 1aF) caused by adsorption of target molecules to the functionalized surfaces of the sensor. To provide appropriate sensitivity, the extremely low noise integrated analogue and mixed-signal processing electronics is needed together with area and power efficient digital signal processing hardware. Common limitations of existing detection systems are rather large size, high power consumption and unreliable detection with false alarms, insufficient sensitivity, poor chemical selectivity, and hyper-sensitivity to environmental influences like temperature, acceleration, etc. In addition, such systems are extremely expensive. We wanted to build a sensor measurement system, which can be very cheap for high volume production, has a very small physical dimension, is powered by a small battery and in addition, is extremely sensitive and selective. The central part of the detection measurement system is an array of surfacemodified differential capacitive sensors together with integrated electronics. Each differential sensor is composed of two unreleased MEMS COMB capacitors covered with a thin layer of SiO2; one is chemically modified [1]. Because both capacitors in a pair are very close to each other, an equal number of target molecules are on the average present in the space between the plates. The target molecules adsorb preferentially for a short time to the surface of the modified capacitor changing its relative dielectric constant and the distance between the plates [2]. Using appropriate excitation signals, extremely low noise input transducer electronics [3] and appropriate lownoise digital signal processing blocks, one can efficiently measure the difference of the two capacitances in each pair; therefore, a detection of a small number of adsorbed target molecules in the air is possible. All elements described above are integrated and packed together with differently modified sensors as a SiP (System in Package), which is capable to detect less than 3ppt of TNT in the atmosphere (3 TNT molecules in 10 +12 molecules of air) at 25oC in 1Hz bandwidth using only a few mm3 and approximately 10mA current at 3.3V supply voltage [4]. The focus of the contribution is the description of the design steps for the whole measurement system including: system definition and high level simulations, circuit design issues of low noise analogue input amplifiers and other low-noise components like: analogue filters, mixers, mixed-signal modules for A/D and D/A conversion, and design steps to achieve low-noise digital signal processing electronics using 0.25um BCD technology. A demanding characteristic of the system is possible to achieve in a short design time frame using appropriate design flow, which is also shortly described. At the end, an example sensor measurement system for vapour trace detection of explosives is presented together with some exciting measured results [4]. REFERENCES [1] J.Chen, P. Xu and X.Li, “Self-assembling siloxane bilayer directly on SiO2 surface of micro-cantilevers for long-term highly repeatable sensing to trace explosives,” IOP Science Nanotechnology, vol. 21, Jun. 2010. [2] Z. Peiji, W. Dwight, “Electrostatic characteristics of tether atoms in connecting organic molecules to the surface of silicon,” Applied Physical Letters, vol. 91, No. 6, Aug. 2007. [3] D. Šiprak, M. Tiebout, N. Yanolla, P. Baumgartner, C. Fienga, “Noise reduction in CMOS circuits through switched gate and forward substrate bias,” IEEE JSSC, vol. 44, No. 7, July 2009. [2] STRLE, Drago, ŠTEFANE, Bogdan, NAHTIGAL, Uroš, ZUPANIČ, Erik, POŽGAN, Franc, KVASIĆ, Ivan, MAČEK, Marijan, TRONTELJ, Janez, MUŠEVIČ, Igor. Surface-functionalized COMB capacitive sensors and CMOS electronics for vapor trace detection of explosives. IEEE sens. j.. [Print ed.], May 2012, vol. 12, no. 5, str. 1048-1057.