Scanning Electron Microscope at RTU ICGE. UseScience
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 SEM: ID866500; Serial Nr. MI0060680LV
 EDX: ID869815; Serial Nr. 37410-5350-289-51
A Variable Pressure High Resolution Schottky Field Emission
Scanning Electron Microscope with an Energy Dispersive X-Ray
Spectrometer
 SEM model: MIRA\LMU (Large Chamber; Motorized
Compucentric Stage; Uni-vacuum mode allowing variable
pressure modes with extended facility for low vacuum
operation); manufacturer TESCAN (Czech Republic)
 EDX model: 7378; manufacturer OXFORD (United
Kingdom)
A variable pressure FE SEM that supplements all the advantages
of the high vacuum model with extended facilities for low vacuum
operations, allowing investigation of nonconductive specimens in
their natural uncoated state.
The electrons interact with atoms in the sample, producing
various signals (secondary electrons, backscattered electrons, Xrays), that can be detected and that contain information about the
sample's surface topography and composition.
MIRA\LMU:
Resolution
In high vacuum mode (SE) 2.0 nm at 30 kV; 3.0 nm at 3 kV
In low vacuum mode (SE) 2.5 nm at 30 kV (LVSTD); 3.5 nm at 3
kV (LVSTD)
Working vacuum
Chamber – High vacuum mode < 1 x 10 -3 Pa
Chamber – Low vacuum mode 7–150 Pa
Gun vacuum 4 x 10-8 Pa
Detectors
SE detector (to observe the topography of the conductive
specimen surface)
Retractable BSE detector (to detect contrast between areas with
different chemical compositions of the specimen surface)
LVSTD detector (to observe the topography of the nonconductive
specimen surface)
TE detector (to observe the internal structure of the specimen)
Spectrometer
EDX spectrometer (to identify the qualitative and quantitative
composition of the specimen surface):
 Si(Li) LN2 detector
 10mm2 INCA SATW window
 Detection from Be to Pu
 Detector resolution guaranteed at 2,500cps provides
reliable and accurate results over entire spectral range at
typical microscope operating conditions: at C Kα 66eV or
better, at F Kα 70eV or better, at Mn Kα 133eV or better
 Stability guaranteed from 1,000 to 100,000 cps – peak
shift and resolution change <1 eV
 Reliable AutoID for element Identification
 Interaction area ≥1mkm
 Sensitivity of 1 Wt% for light elements and 0.1 Wt % for
heavier elements
Electron optics working modes
High vacuum mode: Resolution, Depth, Field, Wide Field, Rocking
Beam
Low vacuum mode: Resolution, Depth
Magnification
4x to 1,000,000x in Continual Wide Field / Resolution Mode
Accelerating voltage
500 V to 30 kV
Electron gun
High brightness Schottky emitter
Probe current
2 pA to 20 nA
Scanning speed
From 200 ns to 10 ms per pixel adjustable in steps or
continuously
Scanning features
Dynamic Focus, Point & Line Scan, 3D Beam
Image size
Up to 8,192 x 8,192 pixels, adjustable separately for live and store
images; Selectable square and rectangular formats (1:1, 3:4, and
1:2)
CHAMBER:
Internal diameter
230 mm
Door width
148 mm
Number of ports
11
Chamber suspension
Pneumatic (N2); active vibration isolation
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location
SPECIMENT STAGE:
Type
compucentric
Movements
Fully motorized: X = 80 mm, Y = 60 mm, Z = 47 mm
Rotation: 360˚ continuous
Tilt: -75˚ to +-50˚
Specimen height
maximum 60 mm
Riga Technical university, Institute of General Chemical
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Engineering, Azenes str. 14/24-342, Riga, LV-1048, Latvia
Jānis Ločs
SEM; FE SEM; VP FE SEM; SEM/EDS; SEM/EDX
The sample must be fixed, dehydrated, coated (nonconductive)
before it can be observed in SEM