Background Statement for SEMI Draft Doc. #4008B
New Standard: Safety Guideline for Hydrogen Peroxide Storage and
Handling Systems
Notice: Recipients of this document are invited to submit, with their comments, notification of any
relevant patented technology or copyrighted information of which they are aware, and to provide
supporting documentation.
Note: This background statement is not part of the ballot. It is provided to assist prospective voters in
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Background Statement:
Hydrogen Peroxide (H2O2) is one of the most commonly used chemicals in the semiconductor and FPD industries
yet its benign environmental profile can often lead to its hazardous nature being overlooked. Hydrogen Peroxide
exhibits a combination of hazardous properties not comparable with any other chemical used in the semiconductor
and FPD industries. Whilst existing SEMI guidelines such as SEMI S2 and SEMI F31 are applicable it is possible
to fully comply with these guidelines and still design or operate Hydrogen Peroxide systems in a dangerous manner
with the possible consequences being damage to plant and equipment, serious injury or even fatalities.
If you have questions, please contact the H2O2 Safety Task Force leader:
Steve Dobson at steve.dobson@solvay.com
Semiconductor Equipment and Materials International
3081 Zanker Road
San Jose, CA 95134-2127
Phone:408.943.6900 Fax: 408.943.7943
SEMI Draft Doc. #4008B
New Standard: SAFETY GUIDELINE FOR HYDROGEN PEROXIDE
STORAGE & HANDLING SYSTEMS
This safety guideline will be technically approved by the Environmental, Health, & Safety Committee and is
the direct responsibility of the European Environmental, Health, & Safety Committee. Current edition
approved by the European Regional Standards Committee on XXXX.
NOTICE: Paragraphs entitled “NOTE:” are not an official part of this document and are not intended to modify or
supersede the official guideline.
1 Purpose
1.1 The purpose of this guideline is to set out the minimum safety and health criteria to be applied to equipment
and systems for storage and handling of hydrogen peroxide in the semiconductor and flat panel display industries.
2 Scope
2.1 This Safety Guideline addresses concentrations of hydrogen peroxide (H2O2) commonly used in the
semiconductor and FPD industries, i.e., concentrations below 40% w/w .
NOTE 1:Whilst the guidance given is applicable to higher concentrations of hydrogen peroxide there are particular hazards
associated with concentrations above 44%. These hazards are discussed only briefly, in Section 7.4.
2.2 This Safety Guideline is focused on the storage, handling, transfer, and distribution of hydrogen peroxide within
the semiconductor or flat panel display facility.
NOTE 2:Whilst this Safety Guideline is not intended to address the internal distribution of hydrogen peroxide within
semiconductor manufacturing equipment tools the General Principles outlined in Section 7 can also be useful for semiconductor
manufacturing equipment tool designers.
2.3 This Safety Guideline includes the following sections:
 Purpose (Section 1)
 Scope (Section 2)
 Limitations (Section 3)
 Referenced Standards (Section 4)
 Terminology (Section 5)
 Safety Philosophy (Section 6)
 General Principals (Section 7)
 Education and Training (Section 8)
 Emergency Response (Section 9)
 Materials, Components and Construction (Section 10)
 Storage (Section 11)
 Operations (Section 12)
 Distribution Systems and Modules / Auxiliary Equipment. (Section 13)
NOTICE: This Safety Guideline does not purport to address all of the safety issues associated with its use. It is the
responsibility of the users of this Safety Guideline to establish appropriate safety and health practices and determine
the applicability of regulatory or other limitations prior to use.
3 Limitations
3.1 This document is not intended to impart requirements on any party.
3.2 This Safety Guideline does not address issues of transportation of hydrogen peroxide. These issues are
generally well covered by the various national and international transport regulations.
3.3 This Safety Guideline does not directly address process applications involving hydrogen peroxide (e.g. use of
hydrogen peroxide in formulation of chemical mechanical polishing slurries), as these are often proprietary.
This is a draft document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted standard. Permission is granted to
reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other
reproduction and/or distribution without the prior written consent of SEMI is prohibited.
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NOTE 3:The general principals of this Safety Guideline can be used by end users to carry out a risk assessment of their own
particular process applications.
4 Referenced Standards
4.1 SEMI Safety Guidelines
NOTE 4:Unless otherwise indicated, all documents cited should be the latest published versions.
SEMI S2 — Environmental, Health and Safety Guideline for Semiconductor Manufacturing Equipment
SEMI S10 — Safety Guideline for Risk Assessment
4.2 CEFIC Guidelines
CEFIC Guidelines for bulk storage of H2O2 (European Chemical Industry Council, Avenue E. van Nieuwenhuyse 4
- 1160 Brussels, Belgium deh@cefic.be www.cefic.org)
5 Terminology
5.1 Abbreviations and Acronyms
5.1.1 ECTFE — Ethylene-chlorotrifluoroethylene copolymer
5.1.2 ETFE — Ethylene tetrafluoroethylene
5.1.3 HDPE — High Density PolyEthylene
5.1.4 ISO — International Organization for Standardization
5.1.5 MOP — Maximum Operating Pressure
5.1.6 PFA — PerFluoroAlkoxy
5.1.7 ppb — Parts per billion
5.1.8 ppt — Parts per trillion
5.1.9 PTFE — PolyTetraFluoroEthylene
5.1.10 PVDF — Polyvinylidene Fluoride
5.1.11 SOP — Standard Operating Procedure (an established procedure to be followed in carrying out a given
operation or in a given situation).
5.1.12 SS — Stainless Steel
5.1.13 VLSI —Very large scale integration (refers to microchips containing in the hundreds of thousands of
transistors).
5.1.14 w/w — Weight for weight when referring to concentration of hydrogen peroxide
5.2 Definitions
5.2.1 colloid — a substance comprised of a dispersed phase and a continuous phase. It differs from a solution in
that the dispersed phase is comprised of particles larger than molecules. Each phase can be a gas, liquid, or solid;
except that gas in gas colloids do not form because neither component remains aggregated..
5.2.2 exothermic reaction — a chemical process in which heat is released.
5.2.3 ISO container — a container for storing chemicals, usually large in size, able to be transported directly, and
designed in compliance with criteria from the International Standards Organization.
5.2.4 photochemical decomposition — chemical reaction caused by light in which the material is decomposed into
other materials
5.2.5 stabilizers — chemicals used to help maintain physical and chemical properties of a material during
processing and service life.
5.2.6 spontaneous combustion — the ignition of material brought about by a heat producing (exothermic) chemical
reaction within the material itself without exposure to an external source of ignition
6 Safety Philosophy
6.1 The order of precedence for resolving identified hazards should be as follows:
6.1.1 Design to Eliminate Hazards — From the initial concept phase, the designer should design to eliminate
hazards, if the hazards present unacceptable risk and the elimination of the hazards is consistent with the
performance of the intended function.
This is a draft document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted standard. Permission is granted to
reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other
reproduction and/or distribution without the prior written consent of SEMI is prohibited.
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NOTE 5:It is recommended that designers continue to work to reduce risk in installation, testing, commissioning, operation,
maintenance, service and decommissioning.
6.1.2 Incorporate Safety Devices — If hazards in the design present unacceptable, then that risk should be reduced
to an acceptable level by the incorporation of fixed or automatic features of the design. These are commonly called
“engineering controls”.
NOTE 6:It is recommended that provisions be made for periodic functional checks of safety devices, when applicable. Safety
devices should be compatible with cleanliness requirements, otherwise other methods of protection should be chosen
6.1.3 Provide Warning Devices — If design or safety devices do not effectively eliminate identified hazards or
adequately reduce associated risk, a means should be used to detect the condition of increased risk and to produce a
warning signal to alert personnel of the condition. It should be ensured that such warning devices are capable of
reducing risk to an acceptable level.
6.1.4 Provide Hazard Warning Labels — Where it is impractical to eliminate hazards through design selection or
adequately reduce the associated risk with safety or warning devices, hazard warning labels should be provided. It
should be ensured that such labels are capable of reducing risk to an acceptable level.
6.1.5 Develop Administrative Procedures and Training — Where hazards are not eliminated through design
selection or adequately controlled with safety or warning devices or warning labels, procedures and training should
be used. It should be ensured that such procedures and training are capable of reducing risk to an acceptable level.
6.1.6 Procedures may include the use of personal protective equipment.
6.1.7 A combination of these approaches may be needed.
7 General Principles
7.1 Hazards associated with Hydrogen Peroxide
7.1.1 Decomposition (leading to vapor release and possible over-pressure)
Hydrogen peroxide decomposes to water and oxygen represented as:
2H2O2  2 H2O + O2 + 98 KJ per gram mole H2O2
Decomposition can occur under various conditions which are identified in 7.1.3 and 7.1.4.
7.1.2 Because semiconductor grade hydrogen peroxide has to meet the most demanding specifications in terms of
metal ion levels of all wet process chemicals much of the hydrogen peroxide used in microelectronics manufacturing
is unstabilized. In this case, the stability of the product comes from its purity level, because if no impurity is present
which can catalyze decomposition, the product is stable for transport and storage. However, unstabilized peroxide is,
more sensitive to potential contamination and therefore not normally used for industrial applications other than
microelectronics manufacturing.
7.1.3 Homogeneous Decomposition
7.1.3.1 The decomposition rate of hydrogen peroxide to water and oxygen is normally very low. However, if the
hydrogen peroxide becomes contaminated, for example with salts of metals such as iron, copper, chromium,
vanadium, tungsten, molybdenum, silver or metals from the platinum group, then fast decomposition to water and
oxygen may follow. The increased rate of decomposition in this case is described as homogeneous decomposition.
Fast decomposition can be caused by relatively low levels of contaminants. This decomposition is a catalytic
reaction in which the metallic ions are successively oxidized and reduced. This explains why it is possible for small
amounts of catalyst to cause extensive decomposition of hydrogen peroxide. In addition, the effect of pH on the rate
of decomposition of contaminated hydrogen peroxide is considerable; any increase in pH values resulting in an
increased rate of decomposition.
7.1.4 Heterogeneous decomposition
7.1.4.1 Decomposition may also occur if the hydrogen peroxide is brought into contact with insoluble solids. This is
known as heterogeneous decomposition. Hydrogen peroxide will decompose to some extent on any surface even at
ambient temperature, although the rate varies enormously with the nature and condition of the surface. For example
the rate of decomposition on a silver surface is more than 100 times faster than, for example, on polyethylene. Some
of the solids which catalyze the decomposition of hydrogen peroxide include heavy metals and noble metals as well
as their hydroxides and oxides.
7.1.4.2 Heterogeneous decomposition catalysts are most active when their specific surface is large as with, for
example, colloids and powdered metals. In addition even “compatible” materials of construction can cause
accelerated decomposition if the surface is of inadequate quality or has not been properly prepared. As an example,
This is a draft document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted standard. Permission is granted to
reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other
reproduction and/or distribution without the prior written consent of SEMI is prohibited.
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stabilized hydrogen peroxide can be stored in stainless steel tanks but the metal should first undergo a special
treatment of pickling and passivation.
7.1.5 Effect of pH
7.1.5.1 Hydrogen peroxide is slightly acidic in nature. In alkaline solution, the rate of decomposition increases
rapidly as the pH is increased.
7.1.6 Effect of light
7.1.6.1 Light can cause photochemical decomposition of hydrogen peroxide and the absorption of radiation by
hydrogen peroxide solutions occurs over a wide continuous spectrum. Hydrogen peroxide solutions should not be
exposed for long periods to light, especially direct unfiltered sunlight or UV radiation.
7.1.7 Effect of heat
7.1.7.1 The decomposition of hydrogen peroxide is exothermic. In addition to self-heating as a result of
decomposition, the effect of temperature rises caused by outside sources of heat should be considered. For purely
physical-chemical reasons, the rate of the decomposition reaction in solution (homogeneous) will increase 2 to 3
times for every 10°C increase in temperature, and the rate of the surface decomposition (heterogeneous) will
increase 1 to 2 times per 10°C. The effect of increased contamination from dissolution of the surface will make the
situation worse.
7.1.8 Effects of decomposition
7.1.8.1 Pressure build up
7.1.8.1.1 Even at low concentrations, hydrogen peroxide will decompose slowly but continuously into water and
oxygen. This rate is very low when hydrogen peroxide is stored in suitable materials and is kept free from
contaminants.
7.1.8.1.2 If oxygen pressure is not relieved, then very a high pressure may build up (31% hydrogen peroxide, if
fully decomposed, will release approximately one hundred times its’ own volume of steam and oxygen). For this
reason hydrogen peroxide pipe-work should be designed so that pressure can not be accumulated leading possibly to
a pipe failure (from hydrogen peroxide trapped between two valves, for example). For ball valves or plug valves, a
release bore is needed to ensure no peroxide can be trapped behind the ball or plug sealing.
7.1.8.1.3 Special care is also strongly recommended when filtering hydrogen peroxide (See Section 13.). The
decomposition of peroxide may be accelerated by particulate matter accumulated on the filter membrane
(heterogeneous decomposition catalysis), therefore any filter housings should also have an appropriate pressure
relief. Preventive replacement of the filter element is advised if the continuous formation of oxygen bubbles is
observed from a filter even if the filtration is still working well.
7.1.8.2 Heat release and self-heating
7.1.8.2.1 The decomposition of hydrogen peroxide is exothermic and the rate of decomposition increases with
increasing temperature. If the heat of decomposition is not removed with at least the same rate at which it is
developed (by spontaneous heat loss to the surroundings or by deliberate cooling), then the temperature will rise and
the rate of decomposition will increase. This can lead to a self-accelerating decomposition which, in the case of
badly contaminated solutions (e.g., from a major in-liner failure of lined metal storage or transport tanks), may
culminate in a rapid decomposition or “boil off”.
7.1.9 Spontaneous combustion of organic substances
7.1.9.1 Hydrogen peroxide can cause spontaneous combustion of many organic materials including cloth, paper,
and wood.
7.1.10 Loss of containment (leading to possible fire, environmental and health hazards)
7.1.10.1 Hydrogen peroxide should be handled with care so that no product is spilled during unloading or transfer.
If spillage does occur, it should be diluted with water and cleaned up thoroughly, ensuring that all cleaning
equipment is well rinsed after use.
7.1.10.2 Hydrogen peroxide should be kept in its original container. Handling and transferring should be done only
with approved dedicated equipment made of compatible material (See Section 10.). Once hydrogen peroxide has
been drawn from a storage container, it should not be returned since it may have become contaminated and could
cause the decomposition of the contents of the entire container. Recirculation of the hydrogen peroxide in a loop
system designed for that purpose is acceptable provided that there is no metal contamination within the system (for
instance from metal parts in contact with the solution in the loop.)
This is a draft document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted standard. Permission is granted to
reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other
reproduction and/or distribution without the prior written consent of SEMI is prohibited.
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7.1.11 Hydrogen peroxide should be kept away from heat sources because, as with most chemical reactions, the
decomposition rate increases with temperature.
7.1.12 Hydrogen peroxide should not be contaminated during storage and handling, and contact with incompatible
surfaces should be avoided. Although strict contamination control is mandatory in microelectronics manufacturing,
scrupulous cleanliness is also vital with hydrogen peroxide for safety reasons.
7.2 Access control
7.2.1 Hydrogen peroxide should be handled by only trained personnel who are well aware of its hazards and the
necessary safety precautions. Thus it is important to limit the access to hydrogen peroxide installations.
7.3 Alarm systems
7.3.1 Features of bulk hydrogen peroxide storage should include level indicator and temperature indicator alarms. A
standard set-up uses alarm settings for temperature level as well as for rate of temperature change. Alarm switches
and thermometers should be suitable for use with hydrogen peroxide (see section 13).
7.3.2 Storage tanks may also be fitted with a dilution connection and an optional mixing device. In the event of a
decomposition situation it is best practice to use clean water to dilute the peroxide to a very low concentration which
eliminates any further hazard. Please note, the use of deionized water with low metal and organic content is
recommended for unstabilized hydrogen peroxide emergency dilution because a less pure water quality might
introduce further contamination, accelerating further the decomposition of the product.
7.4 Scenarios not addressed in this Safety Guideline
7.4.1 Explosive characteristics
7.4.1.1 Hydrogen peroxide solutions less than 70 % w/w are not, in themselves, explosive. Hydrogen peroxide
solutions used in microelectronics manufacturing are mostly limited to 30 - 35% w/w concentrations so this
guideline does not provide more detailed information about this subject.
7.4.1.2 However, explosions may occur under certain conditions when hydrogen peroxide – especially of more than
44 % w/w content - is mixed with organic compounds to form a single phase, emulsion or suspension. The most
important factors which govern whether or not an explosion occurs are:
 the concentration of hydrogen peroxide, water and organic material present,
 the nature of the organic material,
 the presence of an initiation source, and
 the temperature of the mixture.
7.4.1.3 This hazard exists when using hydrogen peroxide even at less than 44 % initial concentration, if there is a
potential for the concentration to subsequently increase, e.g. by water evaporation. In addition, hydrogen peroxide
reacts with certain organic compounds to form organic peroxides which may, themselves, have explosive properties.
Explosions may also occur if hydrogen peroxide is brought into contact with certain incompatible inorganic
materials such as powerful reducing or oxidizing agents.
7.4.1.4 Decomposition of hydrogen peroxide can also lead to oxygen enrichment of the atmosphere above it. Under
certain conditions, e.g., in the presence of flammable liquids or flammable gases, this can lead to a high risk of fires
or even vapor phase explosions.
7.4.2 External fire
7.4.2.1 Hydrogen peroxide is not combustible and so this scenario is not part of this standard. However, it should be
remembered that oxygen generated by decomposition of hydrogen peroxide may accelerate the burning of
combustible materials. Also, heating of containers of hydrogen peroxide by their exposure to external fire is likely
to result in accelerated decomposition.
8 Education and Training
8.1 All operators handling hydrogen peroxide should be informed of the hazards and risks involved. These can
result from skin contact, eye contact, inhalation or ingestion as follows:
 Skin contact: may result in severe irritation and in some cases burns to the skin.
 Eye contact: may result in burns and possibly irreversible damage to the eye.
 Inhalation: may cause damage to throat and lung tissue.
 Ingestion: may cause serious damage to both the throat and digestive system.
This is a draft document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted standard. Permission is granted to
reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other
reproduction and/or distribution without the prior written consent of SEMI is prohibited.
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8.2 The following emergency actions are recommended in the event of exposure to hydrogen peroxide less than
40% w/w for the possible events listed in 8.1.
 Skin contact: rinse the affected area with running water until patient is transferred to medical personnel.
Contaminated clothing should be removed as soon as is practical after showering has commenced, taking care
not to transfer chemical to previously uncontaminated areas of the body.
 Eye contact: rinse the affected area with water until patient is transferred to medical personnel.
 Inhalation: remove the person from the incident area to an area of fresh air and seek immediate medical
attention.
 Ingestion: give the person water to drink and seek immediate medical attention.
NOTE 7:More detailed first aid measures are available on the Material Safety Data Sheet.
8.3 When handling hydrogen peroxide a Material Safety Data Sheet should be available for reference. Also any risk
assessments or assessments mandated by regulations or should be available for all the tasks to be performed in the
handling of the hydrogen peroxide.
8.3.1 All safety equipment identified in the risk assessment and any mandatory regulatory assessment should be
well maintained and used as specified when handling hydrogen peroxide.
8.3.2 When handling hydrogen peroxide a deluge safety shower and eye wash equipment should be available in the
work area.
Operators handling hydrogen peroxide should be informed of the following facts:
8.3.3 When hydrogen peroxide decomposes, heat is generated and oxygen gas is produced. This will strongly
support combustion of any combustible material.
8.3.4 Hydrogen peroxide solution when allowed to dry on a combustible material such as a wipe used to mop a spill
can cause it to catch fire. All combustible materials used for mopping up hydrogen peroxide spillages should be
washed with water prior to safe disposal.
8.3.5 Hydrogen peroxide should never be stored on wooden shelving because of the potential of a chemical reaction
resulting from a spillage igniting it.
8.3.6 Hydrogen peroxide is incompatible with a range of materials.
NOTE 8:Section 10 identifies the recommended materials of construction. The chemical supplier may have more stringent
requirements.
8.3.7 All containers of hydrogen peroxide should be fitted with a vented cap so as not to allow a build up of
pressure from decomposition products.
8.3.8 All containers of hydrogen peroxide should be stored in accordance with the manufacturer’s recommendations.
8.4 Bulk storage vessels have specific requirements for safe handling of hydrogen peroxide and, where necessary,
advice should be sought from a competent body or safety advisor.
9 Emergency Response
9.1 Responses to emergencies involving hydrogen peroxide should take into account the combustion risk from an
oxygen enriched environment due to decomposition of the chemical in addition to chemical burns from contact with
the chemical itself.
9.2 Spillage incidents are recommended to be classified into the following categories:
A. Less than 10 Liters (approx. 2.5 US gallons) of up to 40% w/w hydrogen peroxide.
B. More than 10 Liters, but less 200 Liters (approx. 55 US gallons) of up to 40% w/w hydrogen peroxide
C. More than 200 Liters, but less 1000 Liters (approx. 275 gallons) of up to 40% w/w hydrogen peroxide.
D. Greater than 1000 Liters of up to 40% w/w hydrogen peroxide.
9.2.1 The spillage incidents may be dealt with in the following ways.
9.2.2 Category A — The spillage may be diluted with water and cleaned up by local personnel who have been
suitably trained and are wearing the appropriate personal protective equipment.
9.2.3 Category B — The spillage may be diluted with water and cleaned up by an Emergency Response team who
have been suitably trained and equipped.
This is a draft document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted standard. Permission is granted to
reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other
reproduction and/or distribution without the prior written consent of SEMI is prohibited.
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9.2.4 Category C & D — The spillage may be dealt with as in Category B but in addition, depending on local
regulations, it may be necessary to inform the Fire and Rescue services.
9.2.5 In addition to the above it is recommended that a series of general actions be followed in the event of a
chemical spillage.
 Evacuate the immediate area
 Consult a current Material Safety Data Sheet.
 All personnel to wear the prescribed protective equipment at all times.
 Eliminate all potential sources of ignition.
 Ventilate the area.
 Do not allow the chemical to enter the drainage system before sufficient dilution.
 Absorb all spills that are not to be sent to drain into an inert absorbent material such as sand or vermiculite.
 Do not place used absorbent material in a metal salvage drum. Either leave the absorbent material in open piles
(if the piles can be protected from weather and do no pose a significant risk of releasing material) awaiting the
licensed disposal company, or place the absorbent material in polymeric drums. If the absorbent is placed in
drums, they should be not be sealed, so that pressure does not accumulate from the ongoing decomposition of
the absorbed hydrogen peroxide.
 Do dispose of used material via a licensed disposal company in compliance with local regulations.
9.3 Accelerated decomposition incidents may be detected by the temperature monitors and alarms referred to in
Paragraph 11.3.7.4. The following responses to those alarms are recommended:
9.3.1 A temperature increase of less than 15° Celsius above normal operating temperature indicates an incipient
decomposition and a certain availability of time until a more serious decomposition develops. Emergency actions to
be considered include local dilution with deionized water or emptying of the tank or spray cooling and ongoing
monitoring of the temperature.
9.3.2 A temperature increase above 15° Celsius above normal operating temperatures or a rate of temperature
increase greater than 1 Kelvin per 10 minutes indicates an accelerated decomposition which is escalating in severity
and probably cannot be stopped. The recommended action is immediate evacuation of the area followed, if possible,
by remote actuated dousing or emptying of the tank.
10 Materials, Components and Construction
10.1 Overview
This section is intended to give an overview of the materials of construction necessary to produce, store and handle
ultra pure hydrogen peroxide (which can be defined as SEMI VLSI and Grade 1 to Grade 5 specifications).
10.2 Stationary Storage Tanks
10.2.1 Stationary storage tanks are a critical part of keeping hydrogen peroxide safe and clean before transport to
end user. Tanks are typically manufactured of polyethylene (PE) or fluorpolymer lined stainless steel. The tank
material or inner lining material needs to be clean from a surface contamination and embedded trace metal
standpoint; the contamination, when measured by typical analytical procedures, should be no more than low ppb or
ppt levels. All tanks need to be cleaned appropriately before being put into use to reduce the risk of contamination of
the hydrogen peroxide and subsequent rapid decomposition and pressure build up.
10.2.2 Storage tanks should be equipped with pressure relief and normal venting devices. Precautions need to be
taken when equipping these containers to make sure that any wetted materials are compatible with the product and
will not cause any fires or explosions.
10.3 Facility Piping Materials
10.3.1 Typical piping at facilities includes rigid composite piping, rigid fluoropolymer piping or flexible
fluoropolymer tubing with the inside wetted materials being constructed out of PTFE, PFA, PVDF, ETFE or ECTFE.
Natural PE and PP are also used.
10.3.2 Selection of the proper material is critical and depends on the environment and temperature that the to which
the piping will be exposed . Each of these materials has its unique properties that affect cost, purity or life
expectancy and these should be taken into account when selecting the wetted material choice.
This is a draft document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted standard. Permission is granted to
reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other
reproduction and/or distribution without the prior written consent of SEMI is prohibited.
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10.3.3 The wetted material needs to be virgin (non recycled) so as to minimize the risk of contamination.
Precautions need to be taken during the processing of these materials to minimize the potential of surface
contamination.
10.3.4 The outer material of a rigid composite construction should be SS to provide adequate strength and
protection in the case of an inner wall breach.
10.3.5 Specifics on the other control and piping items are described in Section 13.
10.4 Materials used for Transportation of Hydrogen Peroxide.
10.4.1 The type of transportation is based on the amount of transport and is divided into:
 Sample quantities
 200 liter drums
 Intermediate Bulk Containers
 ISO Containers and Truck Trailers
 Rail Cars
10.4.2 Sample quantities
10.4.2.1 Small sample bottles for hydrogen peroxide can be made of several materials: relatively stabilizer and
antioxidant free PE, FEP or PFA. The material used to make the sample bottles needs to be without metallic
contamination in the ppt range. Caution should be taken during the processing and packaging of the bottles to not
contaminate the inner surface. In most cases the bottles will need to be cleaned before being put into service. This
could include passivation depending on the purity level.
10.4.3 Production Quantities – 200-liter Drums (1H1 packages)
10.4.3.1 HDPE 200-liter drums are used for transportation of this material all over the world and typically
manufactured out of ultra clean HDPE materials. The base resin used on the wetted layer of the drum package needs
to be tested for metallic impurities and should be in the low ppb range.
10.4.3.2 Drums should be equipped such that oxygen is allowed to vent during transportation. The vent plug is
typically made of polyethylene material with a membrane of PTFE.
10.4.3.3 HDPE Drums should not be used for extended periods. Over time, hydrogen peroxide can oxidize the
HDPE material, reducing the drum strength and ultimately leading to an unsafe condition. Typical usage periods of a
HDPE drum (1H1 type) are 1 to 3 years, depending on environment and storage conditions.
10.4.3.4 Drums should be stored out of the heat and sunlight as much as possible, as both will increase the
oxidation rate and shorten the service life of the drum.
10.4.3.5 Drums should be rinsed (to clean them from surface contamination) before being put into service.
10.4.4 Production Quantities - Intermediate Bulk Containers (IBCs)
10.4.4.1 IBCs are typically made of composite PE construction or a wire mesh cage with a PE inner bottle. In either
case, the wetted surface is made of clean PE material (typically HDPE) with minimal process and UV stabilizers.
10.4.4.2 The container needs to be equipped with a venting device and, in most cases a pressure relief device to
allow for quick venting in the case of some abnormal exothermic reaction. Thepressure relief device is mandated by
some regulatory agencies. Shippers need to look into this specifically for their application.
10.4.4.3 The containers should be rinsed or passivated before being put in to service.
10.4.5 Production Quantities – ISO Containers and Truck Trailers
NOTE 9: These are sometimes used as “on-site” storage vessels, so their inclusion here does not contradict the scope outlined in
Section 2.2.
10.4.5.1 ISO Containers (20’ and 40’ cargo tanks) and truck trailers are used to transport large volumes of hydrogen
peroxide material.
10.4.5.2 These containers are manufactured out of stainless steel material, typically lined with a PTFE sheet
material.
10.4.5.3 The container also requires a vent and a pressure relief device.
10.4.5.4 It is critical that the inner wetted material used to line these products be as contaminant free as possible.
This is a draft document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted standard. Permission is granted to
reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other
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10.4.5.5 The lining process should be controlled to reduce the risk of added contamination to the inner wetted
surface.
10.4.5.6 The containers should be passivated with the hydrogen peroxide to ensure that they are clean and do not
present an unacceptable risk of reaction during use.
10.4.6 Production Quantities – Rail Cars
10.4.6.1 These cars should be built to all appropriate regulations (region specific) dealing with pressure and
transportation. The outer portion (body) of the rail car is fabricated of either carbon steel or stainless steel. The liner
of the tank is typically fluorpolymer.
10.4.6.2 Precaution should be taken when lining the tank to ensure that the lining remains free of contamination
(surface and embedded) to ensure clean and safe service.
10.4.6.3 The tank needs to have appropriate venting and pressure relief. All relief devices should be lined with
PTFE, PFA or similar material to ensure compatibility and long service life.
10.4.6.4 The container should be completely rinsed out and passivated before being put in to service. Refer to the
container supplier for details.
11 Storage
11.1 Introduction
11.1.1 This standard for the storage of hydrogen peroxide covers the following applications:
 fixed storage tanks of up to 100m3 capacity
 intermediate bulk containers (0.5 to 1m3 capacity)
 small containers (up to 200 liters capacity)
11.2 General design principles
11.2.1 The hazards associated with the storage of hydrogen peroxide are primarily its potential for fast
decomposition under certain conditions which can lead to loss of containment, including by explosion. Therefore,
the design of the storage facility should avoid conditions that can lead to this fast decomposition .
11.2.2 The following should be ensured in the design and specification of a storage system for hydrogen peroxide:
 Materials should be compatible with hydrogen peroxide.
 Prevent contamination coming into contact with the hydrogen peroxide.
 Prevent heat coming into contact with the hydrogen peroxide.
 Prevent light coming into contact with the hydrogen peroxide.
11.2.3 Fabrication of the storage tank from materials compatible with hydrogen peroxide is addressed in Section 10.
11.2.4 Prevention of external contamination coming into contact with the hydrogen peroxide is achieved by correct
design of the supply system, which is addressed in section 13, and good operation and maintenance which are
addressed in section 12.
11.2.5 Prevention of heat and light coming into contact with the storage tank is achieved by correct location of the
tank, which is addressed in section 11.3.2.
11.3 Bulk Storage in Fixed Tanks (up to 100m3)
11.3.1 General design guidelines
11.3.1.1 Hydrogen peroxide should be stored at atmospheric pressure.
11.3.1.2 Storage tanks can either be vertical or horizontal.
11.3.1.3 All storage tanks should be vented, as even in a correctly designed storage system the hydrogen peroxide
will still decompose generating oxygen, albeit at a very low rate.
11.3.1.4 Each storage tank should be fitted with an emergency relief device, in addition to the vent, to operate in the
event of a failure leading to the fast decomposition of the hydrogen peroxide.
11.3.1.5 The following should be installed on a bulk hydrogen peroxide storage tank:
 Vent
 Emergency Pressure Relief Device or Emergency Vent
This is a draft document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted standard. Permission is granted to
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 Level Measurement and alarm
 Filling connection (with dip tube extending to the bottom of the tank)
 Bottom outlet
11.3.1.6 The following fittings would also be expected to be fitted to a bulk tank although for the storage of
semiconductor grade hydrogen peroxide they are not normally fitted due to their potential to allow contamination to
enter the system:
 Manhole
 Overflow pipe
11.3.1.7 For the storage of high purity hydrogen peroxide, it is typical to find the head space of the tank blanketed
with nitrogen. This creates a slight positive pressure in the head space and prevents ingress of contamination. The
nitrogen pressure has to be carefully controlled to ensure this slight positive pressure is retained during the fill and
unloading of the tank. A pressure control valve is needed to achieve this.
11.3.1.8 It is recommended that the following be installed on a bulk hydrogen peroxide storage tank:
 Temperature measurement and alarm
 Emergency drain valve
 Water for flooding (in event of fast decomposition)
11.3.2 Tank Location
11.3.2.1 Hydrogen peroxide is classified as an oxidizing agent and a corrosive and should therefore be stored with
similar chemicals and separate from flammable or combustible materials.
11.3.2.2 Storage tanks should be located away from heat sources and preferably sited outdoors, unless the location
is one in which it is possible for the bulk liquid in the tank to reach temperatures as low as minus 25° Celsius.
11.3.2.3 Storage tanks should shielded from direct sunlight.
11.3.2.4 Indoors tanks or tanks on elevated floors are not recommended due to the increased risk of spilled or
leaking hydrogen peroxide falling onto operators from above. Where indoor tanks are required, the volume of
hydrogen peroxide should be kept to a minimum, preferably no more than is required for 1 day of operation.
11.3.2.5 The tank and its accessories should be located preferably in a secured zone, accessible to only authorized
personnel.
11.3.2.6 All tanks should be provided with a retention dyke or bund, sized to contain at least 110% of the capacity
of the largest tank (if several tanks are located in the same dyke or bund).
11.3.2.7 A safety shower and eye bath should be located within close proximity of each hydrogen peroxide storage
area.
11.3.3 Materials of Construction
11.3.3.1 The tank and its fittings should be fabricated from materials compatible with hydrogen peroxide as listed in
Section 10.
11.3.3.2 All installed instrumentation that could come into contact with hydrogen peroxide should be constructed of
materials compatible for contact with hydrogen peroxide, as listed in Section 10.
11.3.3.3 The internal finish of the storage tank should be in accordance with Section 10 for the selected material of
construction.
11.3.3.4 Following the internal finishing of the storage tank it should be cleaned and then sealed prior to delivery.
This is to reduce the risk of contamination being present in the tank when delivered.
11.3.4 Maximum Tank Operating & Design Pressure
11.3.4.1 The maximum operating pressure (MOP) of the storage tank can be controlled by the size of the tank
emergency relief device and the maximum pressure arising from the flow of fluids that could arise in the tank during
a credible failure situation.
11.3.4.2 To determine the MOP for a hydrogen peroxide storage tank, the designer should identify the different
credible failure situations that could lead to over-pressurization of the storage tank. These failure scenarios include:
 Contamination entering the tank resulting in the fast decomposition of the hydrogen peroxide.
 Over-filling of the tank from an external supply.
This is a draft document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted standard. Permission is granted to
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 Failure of the pressure regulator or control valve on the nitrogen supply to blanket the head space (typically
installed on high purity storage tanks).
11.3.4.3 Having identified the credible failure situations, the maximum pressure arising from each should be
determined. , For the 3 cases above, the foreseen pressure sources are:
 Oxygen (and possibly steam depending upon the temperature considered for the failure case) from the
decomposition of the hydrogen peroxide
 Liquid hydrogen peroxide
 Nitrogen
11.3.4.4 It is most likely that the worst credible failure case will be the fast decomposition of the hydrogen peroxide,
but the consequences of other failures should not be overlooked.
11.3.4.5 When material is released through the emergency relief device and discharge line, the pressure in tank will
be equal to the pressure required to drive the maximum pressurizing flow rate from the tank through the relief device
and discharge line. In effect it is equal to the pressure drop of the pressurizing fluid flowing through the inlet line to
the relief device plus the relief device plus the discharge line (running to a safe location).
11.3.4.6 The design pressure for the storage tank should be at least 10% greater than the MOP.
11.3.5 Tank Vent
11.3.5.1 The storage tank should be fitted with a vent.
11.3.5.2 To prevent ingress of contamination via the vent when storing high purity hydrogen peroxide, the vent can
be fitted with a sub-micron hydrophobic filter.
11.3.5.3 As an alternative to use of a vent filter in the storage of high purity hydrogen peroxide, the head space of
the tank can be permanently purged with nitrogen maintaining a slightly positive pressure in the tank.
11.3.5.4 The vent (and filter, if fitted) should be sized to prevent over-pressurization (a pressure greater than the
MOP) of the storage tank for the following conditions:
 Normal decomposition of the hydrogen peroxide at the maximum storage temperature expected.
 Maximum rate of addition of hydrogen peroxide from an external source (this failure condition need not be
considered where a correctly sized overflow can be fitted to a tank).
 As above plus the maximum nitrogen purge rate (if used)
11.3.5.5 The vent (and filter, if fitted) should sized to prevent a pressure less than the minimum operating pressure
of the tank for the maximum rate of withdrawal of hydrogen peroxide from the tank (subtracting the nitrogen purge
rate if required).
11.3.5.6 The discharge from the vent will be oxygen rich (where nitrogen purge is not used) and should be routed to
a safe location. In case of nitrogen purge being used the vent may be oxygen rich or oxygen deficient and should be
routed where it can not present an unacceptable fire risk or an asphyxiation hazard to personnel.
11.3.5.7 The size and length of the vent discharge line should be accounted for in the vent sizing.
11.3.6 Emergency Pressure Relief
11.3.6.1 Emergency pressure relief should be fitted to each storage tank. The need for emergency relief and how it
should be sized is explained in section 11.3.4.
11.3.6.2 For the storage of standard purity hydrogen peroxide, the emergency relief can be provided by a weight
loaded relief valve that also serves as a manhole.
11.3.6.3 For the storage of high purity hydrogen peroxide, a bursting disc is the most appropriate relief device.
11.3.6.4 It is recommended that where bursting discs are used, a sensor be installed on the disc and used to generate
an alarm if the disc ruptures.
11.3.7 Temperature Monitoring
11.3.7.1 As decomposition of the hydrogen peroxide is exothermic, monitoring the hydrogen peroxide temperature
in the tank is the best parameter for the detection of decomposition taking place.
11.3.7.2 It is therefore recommended that the temperature of the hydrogen peroxide in the storage tank be
continuously monitored and alarmed.
This is a draft document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted standard. Permission is granted to
reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other
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11.3.7.3 For large storage tanks, monitoring the surface temperature is recommended as the surface of the liquid
should have the highest temperature. This is typically done with a non-contact type instrument, such as an infrared
thermometer.
11.3.7.4 The alarm should be set as low as possible, in accordance with the local conditions. The first alarm can be
set 5°C above the maximum normal liquid storage temperature; the second alarm a further 10°C higher. In addition
a continuous temperature increase of more than one degree Kelvin per hour is an indication that an accelerated
decomposition is taking place. (See Section 9.3 for recommended emergency response measures.)
11.3.8 Emergency Water Addition (optional)
11.3.8.1 A water source can be provided for cooling and flooding the tank in case of the onset of fast decomposition
of the hydrogen peroxide, as detected by temperature monitoring. The water flow-rate will be dependent on the size
of the tank and on the other protection devices (i.e., the overflow and emergency relief devices).
11.3.8.2 With the potential for dilute hydrogen peroxide to be discharged from the overflow, vent or emergency
relief device in this flooding situation, the location for the discharge points should take this into account.
11.3.8.3 De-ionized water with low metals and organic content or potable water are preferred. Industrial water is
not recommended.
11.3.8.4 The water should be fed at the top of the tank (to reduce risk of backsiphonage) and through a dip pipe (for
mixing).
11.3.8.5 In normal operation, the feed pipe should be disconnected from the water feeding network (to prevent
contamination), and operation should be from a safe location.
11.3.9 Emergency Drain Valve (optional)
11.3.9.1 One approach in the strategy of protection of the tank against overpressure consists of emptying the tank
into the retention bund.
11.3.9.2 This emergency discharge should be sized to prevent a bursting of the tank from a negative pressure (in
relation to the size of the relief vent) and should be operable from a safe place.
11.3.10 Installation & Commissioning
11.3.10.1 During installation of the tank and associated pipe work, the time the tank is open to the environment
should be kept to a minimum to avoid contaminants entering the vessel. The first fill of the tank should be with deionized water to the maximum level possible.
11.4 Storage in Small Containers and IBCs
11.4.1 General design criteria
11.4.1.1 Small containers and IBCs should be supplied by the hydrogen peroxide manufacturer/distributor with a
breather cap incorporating a permeable membrane.
11.4.1.2 Where users connect the IBC to a supply system, the design of the facility should follow that of fixed bulk
storage tanks.
11.4.1.3 Small containers should not be connected to a supply system.
11.4.2 Location and Handling
11.4.2.1 Small containers and IBCs should be stored unopened, in an upright position and taking account of good
warehousing practice with respect to stacking height.
11.4.2.2 The breather vents should not be blocked. Storage should be such that faulty containers can be easily
detected and removed.
11.4.2.3 They should never be rolled or laid on their side. They may be stored in a building with a concrete floor
slightly inclined and designed in the form of a shallow sump about 10 cm deep and with a small drive-on ramp to
the threshold.
11.4.2.4 The storage area should normally be unheated and adequate ventilation ensured. Although heat sources are
usually to be avoided, in certain circumstances such as extreme climatic conditions, heating may be required, but
hydrogen peroxide containers should not be placed unduly close to sources of heat.
11.4.2.5 Containers may be stored outside, preferably protected from direct sunlight. A canopy may be required in
hot, sunny climates.
This is a draft document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted standard. Permission is granted to
reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other
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11.4.2.6 The storage area should be kept clean and free from combustible materials and other incompatible
chemicals. A water hose should be available for flushing away spillages and leaks to a safe place. A safety shower
and an eye bath should be provided for treatment of personnel who come into bodily contact with hydrogen peroxide.
11.4.3 Pipelines carrying flammable or corrosive chemicals, should not pass through the hydrogen peroxide storage
area or, if unavoidable, these pipelines should be double contained and adequate ventilation should be provided to
preclude oxygen enrichment of the space through which the pipes pass
11.4.4 Returnable empty containers should be kept closed and clean and returned to the storage area as soon as
possible. They should normally not be washed out but if washing out is necessary this should be with ultra pure
water.
11.4.5 Safety Systems
11.4.5.1 When lined stainless steel IBCs (or totes) are connected to a fixed supply system they should be designed
and operated to the standards given in Section 11.3 (Bulk Storage in Fixed Tanks).
11.4.5.2 The reduced volume of the hydrogen storage stored in an IBC in comparison to a bulk tank should be taken
into account in the risk assessment of the storage system.
12 Operations
12.1 General
12.1.1 Hydrogen peroxide should be handled by only trained personnel who are well aware of its hazards and what
safety precautions are required. The personnel should understand hydrogen peroxide’s potential for fast
decomposition under certain conditions and what to do in this event.
12.1.2 Hydrogen peroxide should be handled with care so that no product is spilled during unloading or transfer. If
spillage does occur, it should be diluted with water and cleaned up thoroughly, ensuring that all cleaning equipment
is thoroughly rinsed after use.
12.1.3 Hydrogen peroxide should be kept in its original container. Handling and transferring should be done only
with approved dedicated equipment fabricated from compatible material (see section 10).
12.1.3.1 Once hydrogen peroxide has been drawn from a storage container, it should not be returned since it may
have become contaminated and could cause the decomposition of the contents of the entire container. Recirculation
of the hydrogen peroxide in a loop system designed for that purpose is acceptable provided that there are no metal
contact parts in the loop. Recirculation of peroxide to an ISO container however should be avoided and if this
practice is unavoidable, eg during commissioning, careful monitoring of the quality of the recycled hydrogen
peroxide should be employed to minimize the risk of contamination and decomposition.
12.1.4 Hydrogen peroxide should be kept away from heat sources and away from direct sunlight.
12.1.5 Apart from dilute products sold generally in small packs, commercial solutions of hydrogen peroxide present
little or no risk of freezing in temperate climates and thus no special protection against frost needs to be taken,
except in extreme climates.
12.2 Bulk Unloading
12.2.1 The unloading of bulk hydrogen peroxide to a fixed storage tank should be organized so that the following
situations are specifically avoided:
 Delivery of hydrogen peroxide to any destination other than its intended dedicated tank or via any route other
than its dedicated pipe work and associated equipment.
 Delivery of any other process chemical to the hydrogen peroxide tank or via the hydrogen peroxide pipe work
and associated equipment.
 Contamination of the hydrogen peroxide during the unloading procedure.
 Overfilling of the hydrogen peroxide storage tank.
 Leakage or spillage of the hydrogen peroxide and resulting contact with people or environment.
 Overpressure of the storage tank (the sizing of the tank vent will have been based on a maximum fill rate – this
rate should be known and ensured that it is not exceeded during the unloading)
12.2.2 In order to achieve these objectives, the following should normally be required:
 Validation of the product before unloading (to check that the chemical to be transferred is hydrogen peroxide).
This is a draft document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted standard. Permission is granted to
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 Unloading by means of a suitable dedicated pump (either on the vehicle or the User’s installation). Alternatively,
air or nitrogen can be used provided that they are clean, dry, filtered, oil free and that the storage tank vent line
sizing has taken into account the maximum air or nitrogen flow rate.
 The unloading procedure includes provision for confirmed identification of unloading point, pre-start-up check
for correct valve alignment and absence of defects, dedicated capped hoses, personal protective equipment for
people involved (in accordance with the supplier’s Materials Safety Data Sheet), check of adequate free volume
in receiving tank, and continued supervision during unloading.
 The responsibility for the unloading operation should rest with the installation management throughout.
Unloading operations should be performed by trained personnel.
12.3 Handling
12.3.1 Handling operations should be carried out in a dedicated, ventilated and clean area, free of combustible
materials and heat sources.
12.3.2 In accordance with normal industrial hygiene, activities such as smoking, eating and drinking should be
prohibited.
12.3.3 Handling operations should be allied to approved methods and procedures, improvisation being forbidden.
12.3.4 The following key principles should be embodied in operations:
 The need for care, especially in prevention of spills and contamination of the hydrogen peroxide
 Scrupulous cleanliness
 Good housekeeping
 Avoidance of all contact with incompatible materials
 Equipment being kept closed to keep out contamination, while still permitting decomposition gases to escape
 Equipment being restricted to what is specifically suitable, clean, passivated (where appropriate), and labeled as
for hydrogen peroxide only
 Avoidance of any trapping of hydrogen peroxide during a long period, even if the section in question is
equipped with an overpressure protection. Avoidance of use of inappropriate equipment by imposition of a rule
to the effect that, whatever is not specifically approved, is forbidden
 After use, portable equipment to be rinsed thoroughly with good quality water, preferably de-ionized, and
drained
 Decontamination by immediate drenching of anything which is contacted by hydrogen peroxide
 As a minimum, the requirement is for goggles and gloves for any operation. Increased levels of protective
equipment where required for splashing or vapor exposure (refer to the Supplier’s Material Safety Data Sheets)
 No leather gloves
 Avoid leather shoes where there is a risk of contact with hydrogen peroxide.
 Proximity of and awareness of safety showers/adequate water supplies/eyewash bottle
12.4 Maintenance
12.4.1 All maintenance work on a hydrogen peroxide installation should be controlled by a permit procedure which
assesses the tasks to be undertaken and the current working conditions and specifies appropriate safety precautions.
12.4.2 Because of the special engineering features required for materials of construction and fabrication techniques
necessary for hydrogen peroxide systems, great care has to be exercised in repair, modification, cleaning or other
maintenance operation. In particular, the person(s) undertaking the work should have the necessary knowledge to
ensure that only suitable materials, correctly pre-treated and fitted, are used.
12.4.3 For the replacement of fittings gaskets or other accessories, it should be ensured that only like for like
replacement occurs. Experience shows that even minor, apparently inconsequential, differences (e.g,. minor grade
changes in gasket materials, or subcomponent change in a measurement probe) can result in serious safety
problems.,.
12.4.4 Storage installations should be routinely inspected for signs of leakage, damage, disrepair and proper
functioning of components. In addition, safety equipment should be regularly proof tested as appropriate to each
device.
This is a draft document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted standard. Permission is granted to
reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other
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12.5 Disposal
12.5.1 All disposal operations should be carried out in compliance with all applicable local and national regulations.
12.5.2 Hydrogen peroxide can be destroyed in a waste water treatment plant. To avoid adversely affecting
biological treatment, the hydrogen peroxide concentration at the entry point of a biological treatment plant should be
below 100ppm. If onsite treatment is not available, then hydrogen peroxide can be flushed to sewer as long as it is
diluted sufficiently to not present a hazard in the drains. The concentration of the diluted product should stay below
5% for safety purpose.
12.5.3 The hydrogen peroxide can be prevented from entering the environment and can be disposed of as a
dangerous waste. This may be done by absorption on a non combustible material , such assand or vermiculite. In
these cases, particular care has to be taken with respect to the safety aspects of handling hydrogen peroxide.
13 Distribution Systems and Modules/Auxiliary Equipment
13.1 General Guidelines
13.1.1 Only suitable materials of construction, as detailed in Section 10, should be used.
13.1.2 Clearly label all process lines and equipment, and dedicate them exclusively to hydrogen peroxide service.
13.1.3 Ensure a high standard of isolation from other fluids.
13.1.4 Ensure that piping and equipment are protected, where necessary, from overpressure caused by the
decomposition of hydrogen peroxide.
13.1.5 Any metallic materials in contact with hydrogen peroxide should be properly passivated. The fabricator or
contractor should be asked to provide a procedure for such passivation.
13.1.6 In general, typical contamination control design practices can have positive safety effects when applied to
hydrogen peroxide piping systems.
13.1.7 All piping should be easily drainable, and stagnant lines or dead ends should be avoided.
13.1.8 A key safety element of any hydrogen peroxide piping design is to eliminate the possibility of trapping any
section containing the chemical. Even non-contaminated hydrogen peroxide has a very slow rate of decomposition
that can lead to a pressure burst if not vented properly. Valves should be installed only where absolutely required,
so as to minimize this possibility. When valves are necessary, an effective method to address the trapping points
they create is to implement a system of tagging or locking infrequently used valves in a safe position, (usually open)
and implementing a procedure to address their operation when needed. Such a system is sometimes referred to as
“car-sealing”.
13.1.9 Though not typical for semiconductor grade installations, if metallic piping is used (either stainless steel or
aluminum), then connections should be either butt welded or flanged to minimize any area in which impurities could
collect. The use of threaded connections should be limited to special situations, such as instrumentation or pressure
relief valve connections. All metal piping should be passivated.
13.1.10 When polymer lined metal piping is used, the substrate metal should also be compatible with hydrogen
peroxide (e.g., stainless steel) to reduce risk in the event of a liner breach. Weep holes should be placed in all
sections of the substrate piping to detect lining failure. Ductile iron or carbon steel lined piping is not recommended.
13.2 Valves
13.2.1 The criteria for the choice of valves should include:
 No possibility for trapping hydrogen peroxide in any position of the valve.
 Compatible materials (See section 10.). This includes all elements of the valve, such as the body, shaft, gaskets,
o-rings, seats, and shaft seals.
13.2.2 When polymer lined metallic valves are used, the metal substrate should also be compatible with hydrogen
peroxide to reduce risk in the event of a lining failure.
13.2.3 Ball valves — When ball valves are used, a de-gassing hole should be present in the ball such that, while in
the off position, the channel through the ball is vented to the upstream liquid side. Failure to do so may result in
destruction of the valve, or failure of the valve seats. In most floating ball valve designs, sealing will occur on the
downstream seat of the ball, so placement of the degassing hole on the upstream side of the ball is critical to
maintaining a seal.
This is a draft document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted standard. Permission is granted to
reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other
reproduction and/or distribution without the prior written consent of SEMI is prohibited.
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Document Number: 4008B
Date: 2/12/2016
Semiconductor Equipment and Materials International
3081 Zanker Road
San Jose, CA 95134-2127
Phone:408.943.6900 Fax: 408.943.7943
NOTE 10:Polymer lined metal ball valves are generally not a good selection, because the ball cannot be drilled without
compromising the lining. Solid non-metallic valves are therefore preferable when non-metallic materials are desired. In any case,
be aware of what interior materials may be exposed when a ball is drilled for venting.
13.2.4 Diaphragm valves: Diaphragm valves are a good choice for hydrogen peroxide service, as they do not
create any internal trapping of the fluid. Consideration should be given to the non-wetted portions of the valve, in
the event of a diaphragm failure.
13.2.5 Butterfly valves — Butterfly valves, typically polymer lined metallic, are also acceptable and do not
internally trap any liquid. Ensure that the disc substrate metal is compatible with hydrogen peroxide. It is preferable
that the valve body material also be of compatible material, but not absolutely necessary due to the layers of
elastomeric backing material behind the valve lining/seat found in most designs.
13.2.6 Globe / Needle Valves — Sometimes required in special applications, these valves are acceptable provided
all materials are compatible.
13.3 Pressure Relief
13.3.1 Pressure relief measures should be incorporated in any section of fixed piping or auxiliary equipment that
has the potential to trap hydrogen peroxide under normal operation (including shut-downs). A risk assessment
should be made of potential trapping points and should consider likelihood and severity on an individual basis. The
relief measure should allow the release of any gas generated as a result of the normal decomposition of noncontaminated hydrogen peroxide.
13.3.2 Any discharge from such a relief system should be routed to a safe location, and preferably to a location in
which the discharge can be easily detected in the event of a release.
13.4 Flexible Hoses
13.4.1 Flexible hoses should be minimized in number and length (fixed piping is preferred), dedicated exclusively
to hydrogen peroxide, and properly connected. When practical, the fitting design on the hoses should be unique to
the hydrogen peroxide system to create a robust means of segregating chemicals, therefore preventing cross
contamination.
13.4.2 For safety and compatibility with hydrogen peroxide hoses it is recommended that PE hoses or fluorpolymer
lined hoses are used.
13.5 Pumps
13.5.1 Pump types used for hydrogen peroxide may include centrifugal, diaphragm, and gear pumps.
13.5.2 Centrifugal pumps
13.5.2.1 Ensure materials are compatible, and when polymer lined pumps are used, ensure that compatible metal
substrates are used whenever possible.
13.5.2.2 Magnetic drive impellers are preferred, but when shaft seals are used a single mechanical seal is preferred.
Acceptable seal materials include SiC, PTFE (glass filled), or alumina ceramic. Avoid double mechanical seals
unless the space between the seals is equipped with a suitable relief device and avoid packed glands (risk of
hydrogen peroxide decomposition, or incompatibility with lubricants).
13.5.2.3 Precautions should be taken to avoid prolonged operation with the discharged blocked in (often referred to
as a “dead head”), which may cause a rapid temperature rise.
13.5.3 Diaphragm Pumps and bellows pumps
13.5.3.1 These are perhaps the most commonly used pumps in high purity applications. All polymer designs are
preferred, in order to ensure that air-side materials are compatible in the event of a diaphragm or bellow failure.
13.5.3.2 These pumps often contain internal check valves, or check valves on the product discharge. As a result,
the installation of these pumps often creates hydrogen peroxide trap points in piping systems. Carefully consider
this when reviewing a final system design for proper venting.
13.5.4 Gear Pumps
13.5.5 Though not commonly used in high purity applications, gear pumps are acceptable provided all materials
are compatible.
13.6 Intermediate Tanks
This is a draft document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted standard. Permission is granted to
reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other
reproduction and/or distribution without the prior written consent of SEMI is prohibited.
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LETTER (YELLOW) BALLOT
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Document Number: 4008B
Date: 2/12/2016
Semiconductor Equipment and Materials International
3081 Zanker Road
San Jose, CA 95134-2127
Phone:408.943.6900 Fax: 408.943.7943
13.6.1 To prevent any back-flow, a physical break upstream of the contact with any other chemical should be
installed. An intermediate tank between the hydrogen peroxide bulk tank and the point of use is an effective way to
achieve this. The intermediate tank can also be used as a dosing tank.
13.6.2 An intermediate tank should be designed and constructed in accordance with principles to bulk tanks as
given in section 11.3.
13.7 Instrumentation
13.7.1 All wetted materials should be compatible with hydrogen peroxide. Where conveying fluids are used, such
as with pressure gauges, the fluid should be compatible in the event of a failure.
13.7.2 Avoid installing valves to isolate instruments from service, as this normally creates a trapping point for
hydrogen peroxide and may result in instrument damage or leaks. If isolation valves are installed, ensure that they
are “car-sealed” or locked in the open position.
13.7.3 Instrument air should be dry and oil-free.
13.8 Filtration
13.8.1.1 Filtration presents serious safety concerns for the hydrogen peroxide user, and should only be installed
when absolutely necessary. Unless special measures are taken when filtering hydrogen peroxide a serious risk of
overpressure or even explosion could result. Filter media represent a point where any contaminants are concentrated,
and therefore pose a significant risk of instability for hydrogen peroxide.
13.8.1.2 All filter media, support, hardware, and seals should be compatible with hydrogen peroxide. PE or PTFE
membranes are particularly suitable, as are polysulfones.
13.8.2 Pressure Relief
13.8.2.1 As filters represent a significant risk to hydrogen peroxide decomposition, pressure relief should be
installed on or very near the filter housings. Because decomposition in the presence of contaminants may be selfaccelerating, the typical sizing scenario will call for a device which is large and free-flowing (rupture discs are
preferable). A rupture disc as large in diameter as the process line connection to the filter is generally adequate.
The discharge should be routed to a safe and detectable location. It is recommended that an assessment be made to
determine the size of any rupture disc. The worst case scenario would be "instantaneous" decomposition of all the
hydrogen peroxide to oxygen and water (steam) which would result in approximately a one hundred fold increase in
volume.
13.8.2.2 Oxygen often accumulates in filter housings and this may, with certain filters, lead to a de-wetting of the
filter membrane (e.g. when made from PTFE). For this reason it is recommended that a de-gassing system for filter
housings be fitted, either automatically operated or, as a minimum requirement, manual operation according to a
defined SOP.
13.9 Operating Procedures
13.9.1 Filters should never be left exposed to hydrogen peroxide in a stagnant “no flow” condition, as this may lead
to self accelerating decomposition. If flow is stopped for more than 1 hour, then the filter should be secured using
the following steps:
 Isolate the filter from the process.
 Purge the filter with deionised water with low metal and organic content until the hydrogen peroxide inside the
filter has been diluted to 5% w/w (leaving low concentration hydrogen peroxide in the filter will prevent
bacteria growth).Alternatively, drain all hydrogen peroxide from the filter housing and fill the housing
completely with 5% w/w hydrogen peroxide.
 Leave the filter headspace vented to a safe location.
13.9.2 Safety Facilities
13.9.2.1 A safety shower and eyewash should be installed in the vicinity of any system handling hydrogen peroxide.
The shower and eyewash should be tested periodically.
13.9.2.2 A water source should be available for the dilution of spills or leaks. All water supplies should be easily
accessible, clearly labeled, and available at all times with protection against freezing.
NOTICE: SEMI makes no warranties or representations as to the suitability of the standards set forth herein for any
particular application. The determination of the suitability of the standard is solely the responsibility of the user.
This is a draft document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted standard. Permission is granted to
reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other
reproduction and/or distribution without the prior written consent of SEMI is prohibited.
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Document Number: 4008B
Date: 2/12/2016
Semiconductor Equipment and Materials International
3081 Zanker Road
San Jose, CA 95134-2127
Phone:408.943.6900 Fax: 408.943.7943
Users are cautioned to refer to manufacturer's instructions, product labels, product data sheets, and other relevant
literature, respecting any materials or equipment mentioned herein. These standards are subject to change without
notice.
By publication of this standard, Semiconductor Equipment and Materials International (SEMI) takes no position
respecting the validity of any patent rights or copyrights asserted in connection with any items mentioned in this
standard. Users of this standard are expressly advised that determination of any such patent rights or copyrights, and
the risk of infringement of such rights are entirely their own responsibility.
This is a draft document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted standard. Permission is granted to
reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other
reproduction and/or distribution without the prior written consent of SEMI is prohibited.
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Document Number: 4008B
Date: 2/12/2016