ME 381R
Micro-Nano Scale Thermal-Fluid Science and Technology
Fall 2003
Unique Number:
17175
Meets:
TTh 11-12:30, ETC 7.111
Prerequisite: Two of the following three courses or equivalent: (i) Solid State Physics/Devices/Materials;
(ii) Heat Transfer; (iii) Fluid Mechanics
Text:
Required: Tien, Majumdar, Gerner, eds., 1998, Microscale Energy Transport, Taylor&Francis.
References: Kittel, 1996, Introduction to Solid-State Physics, 7th ed., John Wiley
Kovacs, 1998, Micromachined Transducer Source Books, McGraw Hill
Pierret, 1996, Semiconductor Device Fundamentals, Addison-Wesley
Rowe, 1998, CRC Handbook of Thermoelectrics, CRC Press, Boca Raton
Karniadakis and Beskok, 2002, Micro flows: fundamentals and simulation, Springer
Koch, 2000, Microfluidic Technologies and Applications, Research Studies Press
Instructor:
Prof. Li Shi, ETC 7.136, lishi@mail.utexas.edu, (512) 471 3109
Class Website: http://www.me.utexas.edu/~lishi/ME381R_MTF.html
Office Hours:
Tuesday 4:00-5:00 & Thursday 3:00-4:00
Course Outline:
This course introduces the fundamentals and applications of micro-nano scale thermal-fluid sciences.
The three main focuses are (i) thermal transport in nanoelectronics and nanostructures, (ii) low
dimensional thermoelectric materials and devices, and (iii) thermal and fluid transport in micro/nano
electromechanical systems (MEMS/NEMS). After completing this course, the student will be able to
solve thermal transport problems in nanoelectronics and nanostructures, to engineer thermoelectric
materials and devices, and to analyze thermal-fluid transport in MEMS devices. These skills are essential
for advanced research in microscale heat transfer, microfluidics, MEMS, and nanoscience, and can be
applied for existing or emerging industrial applications including thermal management of
microelectronics, biomedical diagnostics, and nanotechnology.
Student Evaluation:
Final grades will be based on five homework sets (20%), a midterm exam (25%), a final project
(20%), and a comprehensive final exam (35%). In the final project, a research team of up to two students
will work on a project related to micro-nano scale science and technology, submit and present a final
paper that is expected to have the quality equivalent or better than a conference paper. Students are
encouraged to cooperate (but not to copy others’ work) for the homework. The midterm and final exams
will be open-books & notes.
Academic Honesty:
The academic honesty policy of the University of Texas at Austin will be strictly enforced.
Collaboration of any form on the midterm and final exams is not allowed.
Miscellaneous:
The last add/drop date for this course without special approval from the chair or the Dean of Students
is September 2, 2003. The University of Texas at Austin provides upon request appropriate academic
adjustments for students with disabilities. Any student with a documented physical or cognitive disability
who requires special academic accommodations should contact the Office of the Dean of Students (4716259, 471-4241 TDD) or the College of Engineering Director of Students with Disabilities at 471-4321 as
soon as possible to request an official letter outlining authorized accommodations.
ME 381R
Micro-Nano Scale Thermal-Fluid Science and Technology
Fall 2003
Outline
Date
28-Aug
2-Sep
4-Sep
9-Sep
11-Sep
16-Sep
18-Sep
23-Sep
25-Sep
30-Sep
2-Oct
7-Oct
9-Oct
14-Oct
16-Oct
21-Oct
23-Oct
28-Oct
30-Oct
4-Nov
6-Nov
11-Nov
13-Nov
18-Nov
20-Nov
25-Nov
27-Nov
2-Dec
4-Dec
13-Dec
Day
Th
T
Th
T
Th
T
Th
T
Th
T
Th
T
Th
T
Th
T
Th
T
Th
T
Th
T
Th
T
Th
T
Th
T
Th
Sat
Topic
Nanotechnology and the Breakdown of Continuum Transport Theories
Kinetic Theory of Particle Transport
Microstructure of Solids
Crystal Vibration, Phonons
Phonon Specific Heat
Phonon Scattering and Thermal Conductivity
Free Electron Models for Metals
Electronic Specific Heat and Thermal Conductivity
Boltzmann Transport Equation (BTE)
Thermal Property Prediction using BTE
Thermal Measurement Techniques for Thin Films and Nanostructures
Bandstructure of Semiconductors
Introduction to Semiconductor Devices
Thermal Phenomena in Semiconductor Devices
Midterm Exam
Introduction to Thermoelectric Devices
Thermoelectric Transport Theories
Thermoelectric Properties of Metals and Semiconductors
Nanowire and Superlattice Thermoelectric Coolers
Introduction to MEMS Fabrication
MEMS Thermal Sensors and Actuators
Introduction to Microfluidic Devices
Microfluidic Devices for Biomedical Applications
Fluid Flow in Microchannels
Simulation of Micro Flows*
Experimental Techniques for Micro Flows
Thanksgiving Holiday
Final Project Presentation
Final Project Presentation
Final Exam (2-5 pm)
*Time/instructor subject to change