Near-field Optical Metrology and Nanocharacterization L. Novotny, University of Rochester Progress in science and technology was often triggered by the invention of new instrumentation. Due to the availability of new kinds of microscopes and spectroscopic techniques we have developed a thorough understanding of physical phenomena, ranging from the atomic structure to the structure of biological cells. In the words of Nobel Laureate Rosalyn Yalow "New Truths become evident when new tools become available." Also the rapid advance of nanoscience is largely due to our new instrumentation that allow us to manipulate and measure structures on the nanometer scale. In nanoscience one often first attempts to understand the nanoscale building blocks in isolated form before assembling them into a functional device (bottom-up approach). However, the properties of the building blocks can change once they are embedded into a macroscopic structure. This change is due to interactions between the building blocks and also interactions with the environment. In fact, one of the most interesting aspects of nanoscale systems involves properties dominated by collective phenomena. In some cases, collective phenomena can bring about a large response to a small stimulus. In order to study nanoscale systems in a complex environment it is necessary to develop spectroscopic techniques with high spatial resolution. Important instruments for the characterization of nanoscale materials are electron microscopy and scanning probe microscopy. However, without any prior knowledge about the specimen it is often difficult and challenging to identify the constituent parts of the specimen and thus to learn about its functionality and the underlying physics. This is mainly because electron microscopy and most scanning probe techniques render high resolution topographical images with poor molecular (chemical) specificity. Figure 1: Chemical specificity versus spatial resolution for di®erent microscopic techniques. Near-field scanning optical microscopy (NSOM) achieves an excellent product of the two factors. Courtesy of S. Stranick (NIST, Gaithersburg). On the other hand, optical spectroscopy provides a wealth of information on structural and dynamical properties of materials. This is due to the fact that the energy of light quanta (photons) are in the energy range of electronic and vibrational transitions in matter. Combining optical spectroscopy with microscopy is especially desirable because the spectral features can be spatially resolved. Unfortunately, the diffraction limit has been preventing researchers from resolving features smaller than half a wavelength of the applied radiation. However, in recent years a novel technique, called near-field optical microscopy, has extended the range of optical measurements beyond the diffraction limit and stimulated interests in many disciplines. With near-field optical microscopy, resolutions of 100nm are nowadays routinely achieved. Pushing the resolution of optical microscopy down to 10nm would benefit both biological and materials science since an instrument with 10nm would allow us to directly image and characterize individual biological proteins in their native membranes and it would enable us to image quantum wave functions (orbitals) in semiconductor nanostructures. It is also important to realize that future nanoscale devices need to be protected from interactions with the environment. For example, capping layers are routinely applied to semiconductor nanocrystals to prevent the escape of electron-hole pairs. Therefore, instrumentation is required that is capable of subsurface imaging and characterization. Optical radiation can penetrate through matter and is therefore well suited for subsurface characterization. In short, optical spectroscopic methods with high spatial resolution are essential for the understanding of the physical and chemical properties of nanoscale materials including biological proteins, semiconductor quantum structures, and nanocomposite materials. In my presentation, I will review the ideas behind near-field optical microscopy and spectroscopy. I will present results from our own research and I will discuss challenges and prospects. Figure 2: (a) Confocal and (b) near-field Raman scattering images of the same area of a carbon nanotube sample acquired at º = 2615cm¡1 (G0-band). Near-field Raman imaging increases spatial resolution by a factor 10-20. (c) Raman scattering spectrum recorded on an individual single-walled carbon nanotube. This spectrum uniquely identifies the chemical nature of the sample.