INSTITUTE OF
MICRO-ELECTRO-MECHANICAL-SYSTEM (MEMS)
ENGINEERING
TEL: 886-6-275-7575 EXT.31390
FAX: 886-6-274-5885
E-MAIL:em31390@email.ncku.edu.tw
Head of the Institute: Hsiao, Fei-Bin
COURSE OUTLINE
1. Introduction to MEMS
(3 credits)
Bulk Micro-machining, surface micro-machining, LIGA and LIGA-like
Micromachining, MEMS devices ( sensors and actuators) and their applications,
MEMS-related technical issues.
2. MEMS Design
(3 credits)
Applying fundamental knowledge of MEMS to real MEMS devices’ design,
including sensors and actuators. Emphasis is on hand-on experience in design,
fabrication, and testing of a novel MEMS device. MCNC and MOSIS processes
are also introduced.
3. Solid Mechanics and Structure Design in MEMS
(3 credits)
Mechanical properties and testings on MEMS materials; Structure mechanics
(strength of materials, elasticity, plate and shell, thin film dynamics, structural
dynamics, finite element analysis); MEMS structure design(safety design,
reliability, structure dynamic design, optimization); Examples and case studies.
4. System Dynamic Analysis and Control in MEMS and Smart System
(3
credits)
System Dynamic Analysis; Signal Analysis; Transfer Function Method; Bond
Graph Method; Lagrangian Method; Equivalent Circuit Method; Coupled
Dynamic System, System Control (Classical Control, Optimized Control, Robust
Control); Examples and Cases Studies
5. Micromechanics
(3 credits)
Mechanics for micrometer and sub-micrometer system, Boltzmann transport
theory, micro-scaled heat transfer, mciro-structure phenomena, engineering
simulation
3-171
6. Micro Sensor Design
(3 credits)
Basic principles for sensors (piezo-resist, piezoelectric, capacitive, thermal,
harmonic); classification and application of sensors (mechanical, electro-optical,
chemical, and biomedical); examples for micro-fluidic sensors; design and
fabrication of mask.
7. Materials for MEMS
(3 credits)
A overall introduction to MEMS-related materials, including piezoelectric,
piezo-resistive, semi-conductor, and magnetic materials, as well as shape memory
alloys (SMA). Fabrication processes and properties testing methods are also
included.
8. Excimer laser Micromachining
(3 credits)
An introduction to the fundamentals and applications of excimer laser
micro-machining techniques, with emphasis on LIGA-Like related fabrication
process for microstructures of high aspect ratio.
9. Bio-MEMS
(3 credits)
An introduction to MEMS’s applications on biomedical system and
bioengineering. Topics include bio-sensor and bio-sensing, DNA detector, PCR,
Micro-CE chip, gene chip, protein chip, DNA probe, micro-total-analysis-system
( -TAS), drug delivery system, micro-fluidics, etc.
10. Microscopic Transport Phenomena
(3 credits)
An investigation on mass, momentum, energy transfer phenomena and
characteristics in micro-scaled system. Based on statistics, scattering properties,
migration, and Boltzmann transport equations to explain the phenomena and their
differences from classical theories.
11. Molecular Dynamics
(3 credits)
An introduction to the theory and calculation of molecular dynamics in small
scales, with applications to micro-fluidics, micro-thermal and hear transfer, and
micro-solid-mechanics.
12. Micro Tribology
(3 credits)
An investigation in tribology phenomena in micro-scaled diemension. Started
from the basic tribology theory, and then into the micro-scaled tribology
phenomena, surface contact modeling and analysis, interface temperature effect,
friction force analysis, wear mechanics and measurement methods.
13. Micro Device Fabrication: Experiment
(3 credits)
3-172
This course offers basic lab trainings in MEMS fabrication, in hope to combine
theories and experiments. Experimental topics include balk micro-machining,
surface micro-machining, thin film deposition, etching, lithography, wafer
bonding. Projects include designing and fabricating micro-devices such as
micro-cantilever beam, micro-channel, diaphragm etc.
14. MEMS Technology
(3 credits)
An introduction to basic MEMS technology, including bulk micro-machining,
surface micro-machining, LIGA and LIGA-like processes, as well other related
issues in MEMS practices.
15. Microfluidics
(3 credits)
An overall study on the basic theories, phenomena, and applications of
micro-fluidics. Topics include design and fabrication of micro-channel,
micro-fluid mixer, micro-valves, micro-pumps, micro-fluid sensor, micro-fluidic
chip.
16. MEMS Packaging
(3 credits)
An overview in the MEMS packaging. Started from an introduction to current
IC packaging technology, and then cut into the packaging techniques for MEMS
devices or systems, finally an evaluation on different methods.
17. Introduction to Nanotechnology
(3 credits)
An introduction to advanced nano-technologies and their applications,
including carbon nano-tube, nano-materials, DNA structures, and molecular
computer.
3-173