Title: Electric field breakdown at single molecule junctions Abstract: Scanning-tunneling microscope-based break-junction (STM-BJ) technique1 is a method with which we can study electron transport behaviors through a single molecule connected to two metal electrodes. In this technique an STM tip is moved in and out of contact with a substrate in order to repeatedly form and break a metal point-contact in a solution of molecules. These molecules can bridge the gap between the broken metal contacts to form a metal-molecule-metal junction. The conductance of this junction is determined by measuring the current through the junction while applying a voltage. In this way, STM-BJ technique provides an easy route to creating a single molecule device thousands of times and generating statistically significant conductance data. Additionally, as we record conductance while withdrawing the tip from the substrate, we map out the dynamics of conductance change caused by elongating the molecular junction. This ability of subangstrom control allows us to study changes in the electronic properties of molecular junctions corresponding to junction conformations. Therefore the STM-BJ technique serves as an ideal experimental approach to study electronic properties of molecular silicon. I show measurements that illustrate voltage-induced breakdown characteristics of chemical bonds commonly found in semiconductor materials3 in the context of single molecule junction with STM-BJ.4 One challenge in the semiconductor industry is to lower the dielectric constant (κ) of the dielectric material without diminishing its ability to withstand breakdown in strong electric fields. Low-κ materials can improve device speed as well as power efficiency, but are less robust than traditional dielectric materials and degrade through a mechanism referred to as time dependent dielectric breakdown.5 We study the breakdown phenomenon at the single molecule/single bond level by simplifying networks of three-dimensional silicon-based materials into one-dimensional nanowires containing Si—Si, Si—O, Si—C, Ge—Ge or C—C bonds. We see completely different bond rupture behaviors in different molecules, and use results from a statistically large number of measurements to determine which bond is breaking. We find Si—Si and Ge—Ge bonds rupture at above 1V applied voltage; we also observe Si—C bond is more robust at above 1V than Si—O or Si—Si bond. References: (1) (a) Xu, B.; Tao, N. J. Science 2003, 301, 1221; (b) Venkataraman, L.; Klare, J. E.; Tam, I. W.; Nuckolls, C.; Hybertsen, M. S.; Steigerwald, M. L. Nano Letters 2006, 6, 458. (2) Su, T. A.; Li, H.; Steigerwald, M. L.; Venkataraman, L.; Nuckolls, C. Nat Chem 2015, 7, 215. (3) Volksen, W.; Miller, R. D.; Dubois, G. Chemical reviews 2009, 110, 56. (4) Li, H.; Su, T. A.; Zhang, V.; Steigerwald, M. L.; Nuckolls, C.; Venkataraman, L. Journal of the American Chemical Society 2015. (5) (a) Chen, F.; Bravo, O.; Harmon, D.; Shinosky, M.; Aitken, J. Microelectronics Reliability 2008, 48, 1375; (b) Chen, F.; Shinosky, M. IEEE Transactions on Electron Devices 2009, 56, 2.