Development of epitaxial functional oxide nanomaterials on silicon
based on chemical strategies
Adrian Carretero-Genevrier
Institut des Nanotechnologies de Lyon (INL) CNRS- Ecole Centrale de Lyon, 36 avenue Guy
de Collongue, 69134 Ecully, France
Mail : Adrien.carretero-genevrier@ec-lyon.fr
Abstract:
The technological impact of combining substrates technologies with the properties of
functional advanced oxides is colossal given its relevant role in the development of novel and
more efficient devices. However the precise control of interfaces and crystallization
mechanisms at the nanoscale of dissimilar materials need to be further developed. As an
example, the integration of high quality epitaxial oxide films and nanostructures on silicon as
hybrid structures rest extremely challenging because these materials are structurally and
thermally different.
In this light, this work describes promising strategies used to accommodate advanced oxide
nanostructures on silicon substrate via chemical solution deposition approach. Divers
examples will be presented separated in two different approaches i.e: (i) oxide materials
entirely performed by soft chemistry, such as nanostructured piezoelectric quartz thin films on
silicon [1] or 1D complex oxide nanostructures epitaxially grown on silicon [2], and (ii)
complex oxide materials performed by combining soft chemistry and physical techniques,
such as epitaxial perovskite oxide thin films on silicon using the combination of soft
chemistry and MBE [3].
As a conclusion, this presentation will cover cutting-edge strategies based on the potential of
combining epitaxial growth and chemical solution deposition to develop functional oxide
nanomaterials on silicon with novel structures and improved physical properties.
[1] Soft chemistry based routes to epitaxial A-quartz thin films with tunables textures
A.Carretero-Genevrier, M.Gich, L.Picas, J.Gazquez, , D.Grosso, C.Boissiere, J.Rodriguez-Carvajal,
and Clement Sanchez. Science. Vol 340. Pp 827-831 (2013)
[2] Direct Monolithic Integration of Vertical Single Crystalline Octahedral Molecular Sieve
Nanowires on Silicon.
A. Carretero-Genevrier, J. Oro-Sole, J. Gazquez, C. Magn, L. Miranda, T. Puig, X. Obradors, E.
Ferain, C. Sanchez, J. Rodriguez-Carvajal, N. Mestres. Chemistry of Materials 26 1019 (2014)
[3] Integration of functional complex oxide nanomaterials on silicon
J. Vila-Fungueirio, R. Bachelet, G. Saint-Girons, M. Gendry, M. Gich, J. Gazquez, E. Ferain, F.
Rivadulla, J. Rodriguez-Carvajal, N. Mestres, A. Carretero-Genevrier Frontiers in Physics 3, 38
(2015)