Tousimis® Autosamdri®-815B, Series C
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Title
Tousimis® Model: Autosamdri®-815B, Series C critical-point drying system
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Purpose
This document has specific information about the capabilities, configuration, and proper
operation of the Model: Autosamdri®-815B, Series C critical-point drying system
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About CPD:
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Manufacturer: Tousimis®
Model: Autosamdri®-815B, Series C - Supercritical 4" Wafer MEMS Release Tool
No. of Tool: 1
Year of Manufacture: 2009
Place of Manufacture: Rockville, MD –USA
Local Representative: Pune
Tool Installed: 2010, NNFC-CeNSE, IISc-Bangalore
Other Place of Installation: SITAR (DRDO), Bangalore
Scope
Autosamdri®-815B, Series C is a fully automatic CO2 critical point drying apparatus. Its front
panel consists of a pressure gauge, a temperature gauge, a purge timer knob, and six process
push buttons (COOL, FILL, PURGE, HEAT, BLEED, and VENT) with green LEDs.
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Only COOL and FILL buttons need to be pushed for a complete process
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On the flat panel of the unit, there are three handle screws that control the FILL, BLEED and
PURGE/VENT flow. They are factory set. DO NOT ADJUST THE VALVES.
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Purge Timer Knob is set to 15 minutes
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Configuration
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Process up to 5 x 4" wafers per process run
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Chamber size: 4.50" I.D. x 1.25" Depth
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Chamber Volume: 326 ml
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Process Chamber temperature range: 10°C to 45°C
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Process Chamber pressure range: Atmospheric pressure to 1300 psi
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Temperature gauge range: -30°C to 60°C
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Pressure gauge range: 0 to 2000 psi
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Loading Medium in the chamber i.e., Tool Intermediate Fluid: Isopropyl Alcohol (IPA)
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Tool Transitional Fluid: Liquid Carbon dioxide (LCO2)
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LCO2 flow is controlled through Micro Metering Valves with Vernier handles for easily control
flow rates.
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With additional HF Compatible Wafer Holders to process 5 x 3", 5 x 2" diameter wafers or 5 x
10mm square die
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Materials not allowed inside the chamber: Organics, Photo resists, Acetone, traces of
corrosive acids, Infectious Bio samples, floating samples <0.5 microns
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Operating - Tousimis® Autosamdri®-815B, Series C
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Before starting to use CPD, the user should check the no. of runs of liquid CO2 cylinder. If the
no. of runs is 5 then report BMS operator to change the cylinder with the new one. This will
give the staff adequate time to change the tank. Typically, each run consumes approximately
1 lb and a full tank provides 30 lbs of CO2 according to the vendor. Therefore, the cylinder has
to be changed before 30 lbs has been used up.
Clean samples carefully. Photo resist residue may re-deposit on the dried samples or the
chamber walls.
Make sure your samples are sufficiently rinsed after a wet process that involves HF and/or
other acid treatments, before entering the CPD chamber.
Turn ON LCO2 Cylinder Valve, Main Power Supply, Chiller, Condenser and Chamber Switches.
VENT LED will turn ON
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Press VENT push button and the LED start blinking
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Transfer the sample prepared which is immersed in IPA for supercritical point drying inside
the chamber which is filled with IPA. Never expose the sample to atmosphere is to avoid
stiction and from collapse of the device structure
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Press COOL.
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Press FILL after COOL shut off so that you may visualize the incoming LCO2 from the left hand
side of the chamber. The LCO2 will look like a steady stream entering the chamber. As the
chamber level fills with LCO2; the stream will disappear.
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After the 2 minute FILL mode; the process will advance into the PURGE mode.
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Let the tool process complete its course automatically
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Unload the sample
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Turn OFF Chamber, Condenser, Chiller Switches, Main Power Supply and LCO2 Cylinder Valve.
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Methods of Testing & Characterization
Examine in Scanning Electron Microscope (SEM) – Image of suspension and released device
Laser Doppler Vibrometer (LDV) – to make non-contact vibration measurements
Optical Profilometer – to measure a surface's profile, in order to quantify its roughness.
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