Helios 600 SEM Imaging – General Operation Instructions
Please contact in an emergency: Dr. Miller 4727, Ms. Wisner 4393
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Never use force to open the chamber. Wait until chamber is fully vented.
Never leave the chamber open for more than 5 minutes when you change samples.
Load samples:
1. Open main valve of nitrogen cylinder, by the wall.
2. Press the “vent” button in “Beam Control” page to vent the chamber, first tab on the right side of the
screen.
3. Load your samples on SEM stubs.
4. When chamber is vented, gently slide out chamber door.
5. Close main valve of nitrogen cylinder.
6. Check up or adjust all coordinate (X, Y, Z, T, and R) values back to 0 in “Navigation/Stage” page, second
tab on the right side of the screen.
7. Load mounting stage with samples.
8. Tighten side screws and/or clamp bars if needed.
9. Gently slide in the chamber door.
10. Press the “pump” button in “Beam Control” page.
11. Wait 5 minutes or till orange chamber icon changes to green color.
Find optimal Z value – working distance:
12. Make up-left E-beam quadrant active, bottom of the image will be blue, click the “Pause” icon at the
top menu bar.
13. Make sure the lower right quadrant is also active, no “Pause Symbol” in the image screen.
14. Choose 5 kV voltage, 43 pA beam current, and minimum magnification.
15. Click “Beam On” button in “Beam Control” page.
16. In “Navigation/Stage” page, click “Coordinates” sub-menu.
17. Double click the saved “P1@0” position which corresponds to the SEM stub center.
18. Zoom in and focus, might need to use “Auto Brightness”.
19. Click “Link Z to FWD” shortcut icon.
20. You will get a Z value in “Coordinates” sub-menu under “Navigation/Stage” page.
21. Hold down the center wheel on the mouse and move in a direction, a yellow dot and arrow will appear
on the image and the image will move in the direction of the arrow.
22. Double clicking on an area in the image will move that point to the center of the image screen.
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23. Input a new X, Y, or Z value directly into “Coordinates” sub-menu under “Navigation/Stage” page.
24. Click “Go To” button in the top-right corner in “Coordinates” sub-menu, leave cursor at the “Go To” for
emergency stop, it changes to a “Stop”.
Take images in Mode 1 or Mode 2:
25. Correct X and Y stigmation, focus, and click “F2” key to take an image.
26. If you would like to take high resolution SEM imaging, follow steps below. Usually better resolution in
mode 2.
27. Zoom in to above 1000x magnification.
28. Click “Switch to SEM Mode 2” shortcut icon.
29. Correct X and Y stigmation, focus, and click “F2” key to take an image.
Leaving procedure:
30. When you finished with your project, click “Pause” button to stop the E-beam scanning.
31. Return to mode 1.
32. Switch the E-beam off in “Beam Control” page.
33. Choose “Center Position” under Stage main menu to move the stage to the Center Position.
34. Open main valve of nitrogen cylinder.
35. Press the Vent button to vent the chamber.
36. Wait about 5 minutes, gently slide out chamber door.
37. Close main valve of nitrogen cylinder.
38. Take out your samples.
39. Close the chamber and press the “Pump” button to evacuate the chamber.
40. Wait for the chamber to pump down (vacuum status is green).
41. Only if you are the last user of the day, you should put the system to Sleep.
42. Clean up any mess you made in the room.
43. F1 opens up the Systems user’s Guide
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