Supplemental Material for Electro-Mechanical Response of Top-Gated LaAlO3/SrTiO3 Feng Bi,1 Mengchen Huang,1 Chung Wung Bark,2 Sangwoo Ryu,2 Sanghan Lee, 2 ChangBeom Eom,2 Patrick Irvin1 and Jeremy Levy1,* 1 Dept. of Physics & Astronomy, University of Pittsburgh, Pittsburgh, Pennsylvania, 15260, USA 2 Dept. of Materials Science, University of Wisconsin-Madison, Madison, Wisconsin, 53706, USA Quantitative analysis of PFM measurement: Piezoresponse Force Microscopy is based on the detection of electrical bias-induced surface deformation. The excitation voltage: V t Vdc VPFM cos(2 FPFM t ) is applied to the LAO/STO interface with the top electrode held at virtual ground. The surface deformation will be: Vdc z zdc Az ( FPFM ,VPFM ,Vdc ) cos(2 FPFM t 0 ) d33eff (Vdc ) dV 0 d (Vdc ) VPFM cos(2 FPFM t ) (2). eff 33 Here Az ( FPFM ,VPFM ,Vdc ) is surface deformation amplitude under bias modulation, d 33eff is the effective strain tensor component that directly couples into the vertical motion of the cantilever and 0 0 or , depending on the sign of d 33eff (Vdc ) . The surface deformation couples to the cantilever displacement, which results in a change of deflection that is monitored with a lock-in 1 amplifier. Due to the contact resonant enhancement, the surface deformation will be amplified by Q times, the quality factor of the tip-surface contact resonant system. If the lock-in X-output is denoted by X (0 ,Vdc ) and as the sensitivity of AFM, then d33eff (Vdc )VPFM Q X (0 ,Vdc ) (3). . The sensitivity 67.75 nm/V can be obtained from the AFM force curve (Fig. S1). The tensor component d 33eff (VDC ) is calculated as follows: d33eff (Vdc ) X (0 , Vdc ) QVPFM (4). The surface displacement at the location of the AFM tip can be obtained by integrating with respect to the applied voltage Vdc zdc (Vdc ) zdc (0 V) d33eff (Vdc )dV (5). 0V The surface displacement is calculated under different VDC based on the high frequency PFM measurement on device A. PFM spectral measurements (from 285 kHz to 305 kHz) are performed under different VDC modulated from 0V-10V10V0V with step size 0.2V (Fig. 5(a)). During the measurement, the ac excitation voltage is given by VPFM=20 mV. Each spectrum is then fitted to a simple harmonic oscillator (SHO) model: A Amax02 ( 2 02 ) 2 (0 / Q) 2 2 (6). where 0 is the resonant frequency, Amax is the amplitude and Q is the quality factor. With 0 and Q at each dc bias, one obtains: X (Vdc ) X 0 ,Vdc Q (7). Equation (4) and (5) can be simplified to X (Vdc ) 67.75nm/V VPFM d33eff (Vdc ) zdc (Vdc ) VDC 0 X (Vdc ) 67.75 nm/V dV VPFM (8). (9). Eq. (8) and Eq. (9) give the result of d 33eff (Vdc ) and surface displacement zdc (Vdc ) , which are plotted in Fig. 5(c) and Fig. 6(a) separately. Fig. 6(a) shows the quantitative distortion within LAO/STO during the interface MIT. 3 Fig. S1 AFM deflection versus Z piezo extension as tip engage to and retrace from the sample surface (known as AFM force curve). By linear fit the tip/sample engaged part, the AFM sensitivity can be obtained. 4