TC(00105209) A - TS_L1_vacuum chamber and optomechanics for beam transport BT3 CMP->OPA
periscope tower
Technical specifications
1.
Task summary and background
The Contracting authority is undertaking the ELI project with the objective of building a facility using
cutting-edge laser technologies and to implement research and application projects in the field of
laser-matter interaction using ultra-short laser pulses at high repetition rates and/or with high
energy. Part of the project realization is realization of vacuum components and optomechanics for
515 nm laser beam transport between vacuum chambers of picosecond laser pulse compressor and
chamber of broadband amplifier (OPCPA) which form part of L1 laser beamline.
The purpose of this public contract is manufacture of assembly of vacuum chamber with internal
precision optomechanics (including preparation of detailed manufacturing drawings). The assembly is
shown in Drawing 00102949 and consists of the following sub-assemblies (SA):
SA 1) Round vacuum chamber complete with flanges as shown on Drawing 00102974 (pos.2)
SA 2) Connecting tubing of DN200 and DN320 as shown on Drawings 00103261 and 00103259
respectively.
SA 3) Vacuum chamber support from extruded aluminium profiles 90x90 mm2 as shown on
Drawing 00093844 (pos.3)
SA 4) Internal optomechanics (pos.1) as shown on Drawing 00104448 consisting of support
structure and mirrors mounts – see Poz. 1-15 and drawings referenced therein.
The conceptual design will be supplied after contract signature in detail as 3D CAD format .stp in
files:



2.
00103229_00_Vacuum_chamber.zip
00093844_00_Chamber_Chassis.zip
00104448_00_Periscpope_Tower_Optomechanics
Technical requirements
[RQ1] General requirements
Requirement
[RQ1.1] Scope of delivery
The supplier shall manufacture and deliver the assembly
shown in Drawing 00102949 consisting of sub-assemblies
SA1-SA4 with dimensions and parameters defined in this
document and in associated drawings and 3D models.
The contract shall cover the supply of all materials,
preparation of manufacturing drawings, manufacture,
inspection, cleaning, testing, assembly, packing and
subsequent delivery to Contracting authority’s laboratory
Verification method
Inspection on delivery
TC(00105209) A - TS_L1_vacuum chamber and optomechanics for beam transport BT3 CMP->OPA
periscope tower
located in Dolní Břežany.
[RQ1.2] The supplier shall prepare and supply manufacturing drawings
and 3D model in .stp format.
The manufacturing drawings shall be based on conceptual
design given in 3D CAD .stp files (see above)
Any dimensional or design modifications that may arise as
part of detailed manufacturing design must be consulted with
and approved by the Contracting authority.
Manufacturing drawings
approved by the
Contracting authority
The final manufacturing drawings must be approved by the
contracting authority.
If at any stage of the design or manufacturing it is clear to the
Supplier that an advantage could be gained by a modification
of the original design then the Supplier is encouraged to bring
it to the attention of the Contracting Authority.
[RQ1.3] Packaging for transport
The finished and cleaned assembly (or subassemblies) shall be
packaged for transport in a way that prevents any
contamination (including water contamination). Where
practical, components should be entirely enclosed in
polyethylene which is heat sealed. Clean Aluminum foil is
recommended for the covering of optomechanics and any
other vacuum components not installed in the vacuum
chamber before sealing the components or subassemblies in
the polyethylene covering.
Inspection on delivery
The vacuum chamber should be delivered with all blank
flanges installed and vacuum chamber purged with a dry gas.
[RQ1.4] The assembly must be designed and manufactured for
operation at vacuum level better than 10-6 mbar (except SA3support).
Inspection on delivery
[RQ1.5] All vacuum components and internal must be high vacuum
compatible to comply with [RQ1.4], and manufactured using
materials and procedures that will guarantee low outgassing rate
(including seal and weld integrity) as might be reasonably expected
for such vacuum components.
Inspection on delivery and
supplied
documentation[RQ4.1]
[RQ1.6] Assembly of vacuum parts and optomechanical components
must take place under controlled conditions in a cleanroom
environment of at least class 100 000 (equivalent to ISO Class 8).
Assembly in class 10 000 (ISO Class 7) is desirable.
Statement of the supplier
or inspection of
manufacturer’s
cleanroom
[RQ1.7] Precautions shall be taken in design and assembly of vacuum
and optomechanical components to avoid trapped volumes in
vacuum spaces which could result in virtual leaks and these spaces
shall be suitably vented.
Review of manufacturing
drawings
[RQ1.8] Cleaning
Review of cleaning
TC(00105209) A - TS_L1_vacuum chamber and optomechanics for beam transport BT3 CMP->OPA
periscope tower
Cleaning procedure shall remove contaminants that adhere to
the surface such as oils, greases, dirt, swarf, corrosion
products, or finger prints.
procedure submitted by
the Supplier during
contract execution.
Any assemblies shall be made up from pre-cleaned
components where possible.
Cleanliness shall be taken into account at all stages from
detailed design to installation.
The cleaning procedure must include at minimum the
following steps:

General pre-clean, removal of gross contamination, fluxes
etc. by wiping/scraping

Degrease with solvent by rinsing, swabbing or immersion

Wash with domestic water and detergent

Vapor degrease or soak cleaning
 Degrease with solvent. Small and complex items shall be
immersed and ultrasonically agitated
 Wash with domestic water
 Wash with demineralised water
 Drying (dry air)
 Immediate packaging
Clean components shall be handled wearing clean, dry, lintfree gloves
Some of the cleaning steps can be omitted for components,
such as motors , that can be damaged by the cleaning
procedure, but alternative cleaning procedure must be used.
[RQ2] Requirements on vacuum components
Requirement
[RQ2.1] Vacuum sealing welds made externally must have full
penetration leaving a smooth surface on the vacuum side.
The parts to be welded shall be thoroughly cleaned and
degreased.
Verification method
Visual inspection
Inspection of
manufacturer’s welding
procedures
Shielding gases shall be used to minimise oxidation.
[RQ2.2] The completed assembly must be supplied with a full set of Visual inspection on
blanking flanges and vacuum electrical feedthroughs [RQ3.5].
delivery
TC(00105209) A - TS_L1_vacuum chamber and optomechanics for beam transport BT3 CMP->OPA
periscope tower
[RQ2.3] Vacuum tests
The Supplier will be responsible for the supply of all vacuum
test equipment and the connections to the leak detector.
The supplier shall test the full assembly including the fully
installed optomechanics SA4.
For the full assembly to be acceptable, the measured single
leak rate using He detector shall be less than 1.0E-9 mbar
l/sec.
Measurement with He
leak detector and integral
leak test on evacuated
chamber measuring the
combined outgassing and
leakage rate.
For the full assembly to be acceptable, the total leakage rate
shall be below 1.0E-4mbar l/sec.
[RQ2.4] Flange sealing
The flanges shall be compatible with “ISO 1609:1986 Vacuum technology - Flange dimension” and “ISO 2861:2013
- Vacuum technology - Dimensions of clamped - type quickrelease couplings”
The surface finish of seal faces shall be compatible with the
requirements of the ISO-K resp. ISO-F seals used.
Sealing surfaces must be in particular free of radial scratches
or dents.
Component specifications
supplied by Supplier and
inspection upon delivery
Seal faces shall be suitably protected immediately after final
machining to minimise the risk of damage. This protection
should only be removed for the purposes of cleaning and
inspection, prior to final assembly.
Sealing shall be made of fluoroelastomer polymer (Viton)
material.
Hardness of o-rings shall be 60 or 70 HRC.
[RQ2.5] Vacuum chamber and tubing (SA1 and SA2)
Material used shall be according to drawings and Error!
Reference source not found..
Inner surface roughness shall be better than Ra 0,8.
Component specifications
supplied by Supplier and
inspection upon delivery
Outer surface finish shall be uniform Ballotini (blasting with
glass beads). Other finish technologies are possible if agreed
with the Contracting Authority.
[RQ2.6] Clamps for ISO-K
The clamps shall be of suitable design and use material that
prevents permanent clamp deformation after multiple use.
The clamps shall be of suitable design and use material that
Component specifications
supplied by Supplier and
inspection upon delivery
TC(00105209) A - TS_L1_vacuum chamber and optomechanics for beam transport BT3 CMP->OPA
periscope tower
prevents damaging of the clamp slots on flanges.
[RQ2.7] Machining
Tools used during manufacture shall not contaminate the
vacuum surface.
All cutting fluids, greases etc. used during manufacture shall
be capable of being removed entirely by subsequent cleaning
operations.
Manufacturers statement
of used machining
procedures relevant for
satisfying this
requirement (e.g. list of
cutting fluids used).
[RQ3] Requirements on optomechanical components (SA4)
Requirement
Verification method
[RQ3.1] Material used shall be as specified on drawings. Where
material is not specified it shall be EN AW-5083 or EN AW 6082.
Inspection on delivery
Material specification can be changed if approved by ELI during the
contract implementation.
[RQ3.2] The minimum range of movement and minimum angular
resolution of the motorized mounts PR.B1.M2, PR.B2.M2 and
PR.B3.M2 shall comply with specifications in Table 1.
Inspection of supplied
documentation [RQ4.1.6]
The optomechanical design must be such that the movement
- of any combination of axes within the specified minimum
range of movement – shall not cause a mechanical conflict.
[RQ3.3] Stepper motor actuators
The mounts specified in Table 1 shall use Newport NSA-12-V
stepper motor actuators that will be supplied by Contracting
Authority (total 6 off). In case that this type is shown to be
unsuitable for this application the contracting authority will
supply a suitable alternative.
The stepper motor controllers and power supplies shall also
not be part of this delivery. Two units necessary for testing of
operation will be supplied upon request within 15 days by the
Contracting Authority. Connection of these units to the
actuators is responsibility of the Supplier.
[RQ3.4] Limit switches
The mounts specified in Table 1 shall be equipped with wired
limit switches limiting the range of movement for each
motorized axis in both extremes.
The position of the wired limit switches shall be mechanically
adjustable within values that will be agreed during contract
execution.
Inspection on delivery and
inspection of supplied
documentation [RQ4.1.6]
TC(00105209) A - TS_L1_vacuum chamber and optomechanics for beam transport BT3 CMP->OPA
periscope tower
[RQ3.5] Integration, wiring and vacuum electrical feedthroughs
Inspection on delivery and
inspection of supplied
The supplier shall integrate the motorized mirror mounts into documentation
the full assembly including the internal vacuum compatible
wiring and connection of all pins to vacuum feedthroughs.
The feedthroughs and external air-side cable connectors
must be supplied with the full assembly.
The maximum number of individual air-side connectors in the
design shall be nine.
The design of internal wiring and feedthroughs must be
approved by the Contracting Authority.
[RQ4] Operational requirements
Parameter
[RQ4.1] Documentation - The supplier shall provide with the delivered
assembly a summary report containing at minimum the following
information:
The supplier shall provide preliminary manufacturing
drawings for Contracting Authority’s approval prior to
commencement of manufacturing.
The supplier shall provide with the delivered assembly the
updated manufacturing drawings in electronic form in at least
the 3D CAD format specified in [RQ1.2].
The supplier shall provide user manual for operation of the
motorized mounts in the assembly including pin connection
diagram on the chamber feed-through connector(s).
The supplier shall provide documentation showing that
material specifications required in [RQ2.4],[RQ2.5], and
[RQ2.6]have been used (e.g. material delivery notes or
catalogue part numbers).
The supplier shall provide report with results of vacuum tests
[RQ2.3].
The supplier shall provide a report listing the results of the
functionality test separately for each of the mounts
PR.B1.M2, PR.B2.M2 and PR.B3.M2.
Value
Inspection of
documentation on
delivery
TC(00105209) A - TS_L1_vacuum chamber and optomechanics for beam transport BT3 CMP->OPA
periscope tower
PBS code
Pos.
(prefix
RA1.L1.L1_1.PL.CMP.OUT.PR.*)
Min. angular step resolution Conceptual drawing
Actuator type
Min. travel range
X, Y axes
X,Y axes
X, Y axes
1
*.PR.B1.M2
2 off SM
-35 mRad to +35 mRad
<10 µRad
2
*.PR.B2.M2
2 off SM
-35 mRad to +35 mRad
<10 µRad
3
*.PR.B3.M2
2 off SM
-35 mRad to +35 mRad
<15 µRad
Abbreviation legend:
Short
SM
Description
Vacuum compatible stepper motor with
microstepping below 0.5 µm
Table 1: Specifications of motorized mirror mounts
Type
Baseline design type Newport NSA12-V
ID No.
00104484
00104486
00104485