The Higher Canadian Institute for Business
and Engineering Technology
Quality Assurance Unit
Course Specification
Course Name: VLSI Technology
Course Code: ELE 431
I. Basic Course Information
Program(s) on which the course is given: Communicational Engineering
Department offering the course: Electrical Engineering
Academic level: 4th level
Semester in which course is offered: Varies
Course pre-requisite(s): ELE 321Credit Hours: 3hrs.
Contact Hours Through:
Lecture
2.0
Tutorial*
2.0
Practical*
0.0
Total
4.0
Approval date of course specification: September 2014
II. Overall Aims of Course
Introduction to VLSI technology, future trends in VLSI technology, technology
limitations. Basic technology modules include: crystal growth and wafer preparation;
mask generation techniques; lithography; diffusion process; ion implantation;
oxidation; etching techniques - wet etching and plasma etching; thin film deposition epitaxial growth, chemical vapour deposition techniques, metallization; clean room
technology; Advanced process integration for CMOS, BiCMOS and Bipolar
fabrication; Failure analysis techniques. Advanced packaging techniques.
III. Program ILOs covered by course
Program Intended Learning Outcomes (By Code)
Knowledge &
Intellectual Skills
Professional Skills
Understanding
K1,K8, K14, K16,
K17
I2, I3, I4, I15, I16
P2, P5, P12
General
Skills
G7
1
The Higher Canadian Institute for Business
and Engineering Technology
Quality Assurance Unit
Course Specification
IV. Intended Learning Outcomes of Course (ILOs)
a. Knowledge and Understanding
On completing the course, students should be able to:
k. 1 Identify methods of fabrication of Integrated circuits
k. 2 Identify and demonstrate competence in university level mathematics, natural
sciences, engineering fundamentals, and specialized engineering knowledge
appropriate to the program.
k. 3 Recognize principles and methods of design used in electrical and electronic
engineering
b. Intellectual/Cognitive Skills
On completing the course, students should be able to:
i.1 Use appropriate knowledge and skills to identify, formulate, analyze, and solve
complex engineering problems in order to reach substantiated conclusions.
i.2 Use brainstorming and innovation techniques to deal with problems and to
develop new ideas.
i.3 Demonstrate and organize tasks into a structured form.
c. Practical/Professional Skills
On completing the course, students should be able to:
p.1 Formulate and use the appropriate mathematical methods for modelling and
analyzing problems in electrical, electronic and communications engineering.
d. General and Transferable Skills
On completing the course, students should be able to:
g.1 Manipulate, sort and present the information in a variety of ways
g.2 Use the scientific evidence based methods in the solution of problems
V. Course Matrix Contents
Main Topics / Chapters
Introduction to VLSI
technology
Future trends in VLSI
2technology
3- Technology limitations
Basic technology modules
4with examples
Net Teaching Weeks
1-
Duration
(Weeks)
Course ILOs Covered by Topic
(By ILO Code)
K&U
I.S.
P.S.
G.S.
1
All
All
All
All
1
All
All
All
All
1
All
All
All
All
10
All
All
All
All
13
VI. Course Weekly Detailed Topics / hours / ILOs
Week
No.
1
2
3
Sub-Topics
Introduction to VLSI technology
Future trends in VLSI technology
Technology limitations
Total
Hours
2
4
4
Contact Hours
Theoretical
Practical
Hours
Hours*
2
2
2
2
2
2
The Higher Canadian Institute for Business
and Engineering Technology
Quality Assurance Unit
Course Specification
4
5
6
7
8
9
10
11
12
13
14
15
Crystal growth
Mask generation techniques
Lithography
4
4
4
Midterm Exam
Diffusion process
4
Ion implantation & oxidation
4
Wet and plasma etching techniques
4
Chemical vapor deposition and thin film
4
deposition techniques
Metallization and clean room technology
4
Failure analysis techniques
4
Advanced packaging techniques
4
Final Exam
Total Teaching Hours
50
2
2
2
2
2
2
2
2
2
2
2
2
2
2
2
2
2
2
2
2
26
24
VII. Teaching and Learning Methods
Teaching/Learning
Method
Lectures & Seminars
Tutorials
Computer lab Sessions
Practical lab Work
Reading Materials
Web-site Searches
Research & Reporting
Problem Solving /
Problem-based Learning
Projects
Independent Work
Group Work
Case Studies
Presentations
Simulation Analysis
Course ILOs Covered by Method (By ILO Code)
All
k1, k2, k3
Intellectual
Skills
All
i1, i2, i3
k3
i3
K&U
k3
Professional
Skills
All
All
General
Skills
g1
All
g2
i3
Others (Specify):
VIII. Assessment Methods, Schedule and Grade Distribution
Course ILOs Covered by Method
(By ILO Code)
Assessment
Method
K&U
I.S.
P.S.
G.S.
Midterm Exam
Final Exam
k1, k2,
k3
All
i1, i2, i3
Assessment
Weight /
Percentage
Week
No.
20%
i1, i2, i3
3
The Higher Canadian Institute for Business
and Engineering Technology
Quality Assurance Unit
Course Specification
Quizzes
Course Work
Report Writing
Case Study
Analysis
Oral
Presentations
Practical
Group Project
Individual Project
k1, k3
i1, i2, i3
All
All
g1
i2, i3
10%
5%
5%
10%
Others (Specify):
IX. List of References
J. Plummer, M. Deal, P. Griffin, Silicon VLSI Technology:
Fundamentals, Practice and
Modeling, Prentice Hall, 2004.
Course notes
 Lecture Handouts
Recommended books Microelectronics, Adel Sedra
Periodicals, Web sites, 
etc …
Essential Text Books
X. Facilities required for teaching and learning
List the facilities required
Big sized lecture rooms.
Computers (Personal & Notebook).
 Data show
Course coordinator: Associate Professor/ Tamer Abdel Rahman
Head of Department: Associate Professor/ Tamer Abdel Rahman
Date: September 2014
4