Supplementary Material
Ultra-high sensitivity graphene photosensors
Ya-Ping Hsieh,*1 Chih-Han Yen,1 Po-Shin Lin,1 Shao-Wei Ma,1 Chu-Chi
Ting,1 Chih-I Wu2 and Mario Hofmann3
1
Graduate of Institute of Opto-Mechatronics, National Chung Cheng University, Chia-yi,
62102, Taiwan
2
Department of Electrical Engineering, National Taiwan University, Taipei, 10601, Taiwan
3
Department of Material Science and Engineering, National Cheng Kung University, Tainan,
70101, Taiwan
Author to whom correspondence should be addressed. Electronic mail: yphsieh@ccu.edu.tw .
1
Growth process
Supplementary Figure S1 Schematic of device fabrication (a)preparation of copper substrate
by electropolishing (b)Thermal evaporation of aluminum through shadowmask and oxidation (c)
graphene growth on the copper/Alumina substrate (d)Transfer of graphene to Silicon substrate.
2
Sample image
Supplementary Figure S2 photograph of graphene/Alumina device (barrier can be
identified by white strip in the middle of the device
3