Background Statement for SEMI Draft Document 5838
Revision to SEMI G52-90 (Reapproved 1104), Standard Test Method
for Measurement of Ionic Contamination on Semiconductor
Leadframes (Proposed)
with title change to: Test Method for Measurement of Ionic
Contamination on Semiconductor Leadframes
Notice: This background statement is not part of the balloted item. It is provided solely to assist the recipient in
reaching an informed decision based on the rationale of the activity that preceded the creation of this Document.
Notice: Recipients of this Document are invited to submit, with their comments, notification of any relevant
patented technology or copyrighted items of which they are aware and to provide supporting documentation. In this
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latter case, only publicly available information on the contents of the patent application is to be provided.
Notice: Additions are indicated by underline and deletions are indicated by strikethrough.
Background
SEMI G52-90 (Reapproved 1104) is due for 5-year review.
The Japan TC Chapter of Assembly & Packaging Global Technical Committee approved the letter ballot distribution
for the revision of SEMI G52-90 (Reapproved 1104) at the meeting held on January 20, 2015. This technical ballot
is intended for the revision of SEMI G52-90 (Reapproved 1104). The following chapters are the whole document of
revision of SEMI G52-90 (Reapproved 1104).
Review and Adjudication Information
Group:
Task Force Review
Packaging 5 Year Review Task Force
Date:
Time & Timezone:
Location:
City, State/Country:
Leader(s)/Author(s):
TBD
TBD
SEMI Japan, Ichigaya Office
Tokyo, Japan
Masahiro Tsuriya (iNEMI)
m.tsuriya@inemi.org
Standards Staff:
Chie Yanagisawa (SEMI Japan)
81.3.3222.5863
cyanagisawa@semi.org
Committee Adjudication
Japan TC Chapter of Assembly & Packaging
Global Technical Committee
May 11, 2015
15:00-17:00 [JST]
SEMI Japan, Ichigaya Office
Tokyo, Japan
Kazunori Kato (AiT)
Masahiro Tsuriya (iNEMI)
Yutaka Koma (Consultant)
Chie Yanagisawa (SEMI Japan)
81.3.3222.5863
cyanagisawa@semi.org
Task Force Review meeting’s details are to be decided. If you need the details, please contact the task force leader
or Standards staff for confirmation.
Telephone and web information will be distributed to interested parties as the meeting date approaches. If you will
not be able to attend these meetings in person but would like to participate by telephone/web, please contact
Standards staff.
Chie Yanagisawa
SEMI Standards, SEMI Japan
Tel: 81.3.3222.5863
Email: cyanagisawa@semi.org
Semiconductor Equipment and Materials International
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Background Statement for SEMI Draft Document 5838
Revision to SEMI G52-90 (Reapproved 1104),
Standard Test Method for Measurement of Ionic Contamination on
Semiconductor Leadframes (Proposed)
with title change to: Standard Test Method for Measurement of Ionic
Contamination on Semiconductor Leadframes (Proposed)
1 Scope
1.1 This standard describes the procedure to determine ionic contamination on leadframes using a water extraction
method. The method is sensitive to Na+, NH4+, K+, Cl−, NO3-, Br−, SO42−, PO43−.
NOTICE: SEMI Standards and Safety Guidelines do not purport to address all safety issues associated with their
use. It is the responsibility of the users of the Documents to establish appropriate safety and health practices, and
determine the applicability of regulatory or other limitations prior to use.
2 Referenced Standards
2.1 ASTM Specifications1
D 1193 — Specification for Reagent Water
D 4327 — Anions in Water by Ion Chromatography
NOTICE: Unless otherwise indicated, all documents cited shall be the latest published versions.
3 Summary of Method
3.1 Ionic contamination is extracted in water at > 95°C for 30 ± 2 minutes. The contamination is quantitatively
analyzed by ion type using Ion Chromatography and the result is presented as nanograms/unit area.
4 Significance
4.1 Contamination on leadframes can contribute to semiconductor device reliability problems. This method may be
used by lead frame manufacturers at outgoing inspection and by users at incoming inspection. Correlation of device
reliability with contamination levels may lead to improved leadframe cleaning processes.
5 Terminology
5.1 Definitions
5.1.1 eluent — the solvent used to carry the extracted ions through the ion exchange chromatograph.
5.1.2 regenerant — a chemical solution containing the ions originally present in the chromatograph column prior to
a test run and used to prepare the column for a new test.
5.1.3 retention time — the time required for a particular ion type to pass from the injection port to the detector.
Retention time is characteristically different for each ion type.
5.1.4 standard solution — a solution containing a known concentration of the ion to be measured and used to
calibrate the chromatograph.
6 Equipment
6.1 Ion Chromatograph for Anion and Cation Analysis — This equipment is to consist of a concentration pump,
guard column, separator column, and a detector module consisting of a suppressor device to reduce the background
1
American Society for Testing and Materials, 100 Barr Harbor Drive, West Conshohocken, Pennsylvania 19428-2959, USA. Telephone:
610.832.9585, Fax: 610.832.9555, Website: www.astm.org
This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline.
Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document
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eluent conductivity to a low level and a conductivity cell. The minimum sensitivity of the chromatograph for each
ion type is defined in Table 1.
Table 1 Sensitivity of Ion Chromatograph
Cation
Anion
Ion
Sensitivity (ng/ml)
Na+
NH4+
K+
Cl−
PO43−
BrNO3SO42-
0.2
0.5
1.0
0.3
2.0
1.0
1.0
1.0
6.2 Chart Recorder
6.3 Ion Extraction Vessels — Polypropylene or teflon containers with sealing caps, or polypropylene/ polyethylene
double layered bags.
NOTE 1: The contamination level of these vessels must be less than one-fifth (1/5) of the expected contamination level on the
leadframes when measured in a control test.
6.4 Hot Bar Bag Sealer
6.5 Water Bath — 300 mmL × 300 mmW × 200 mmH, filled with DI water, and capable of holding 95°C.
6.6 Volumetric Dispenser (e.g., Pipettes) — 10 ml and 100 ml capacity.
6.7 Quartz Flasks and Pipettes for Cation Standard Solutions — 100, 250, 500, and 1000 ml capacity (flasks); 1, 10,
and 25 ml capacity (pipettes).
6.8 Borosilicate Glass flasks and Pipettes for Anion Standard Solutions — 100, 250, 500, and 100 ml capacity
(flasks); 1, 10, and 25 ml capacity (pipettes).
6.9 Chemical Balance, Weighing Chemicals
6.10 Scissors, Tweezers, Spatula
7 Reagents and Materials
7.1 Deionized water, resistivity ≥ 15 megohm centimeters at 25°C per ASTM D 1193.
7.2 Eluents and regenerants for specific chromatograph columns prepared per chromatograph equipment
manufacturer’s recommendations so that the water peak can be separated from the ionic peaks.
7.3 Compounds for Cation Standard Solutions — NaCl, NH4Cl, KC1.
7.3.1 Compounds for Anion Standard Solutions — NaCl, Na2HPO4, 12H2O, NaBr, NaNO3, K2SO4.
NOTE 2: All compounds are to be reagent grade.
8 Sampling
8.1 The leadframes must not be touched, except with previously cleaned tweezers or double-layered cotton gloves
with polyethylene outer gloves in order to avoid additional contamination.
8.2 The sample size (i.e., the number of frames to be tested in this destructive test) may be determined by
agreement between the customer and the vendor. The recommended sample sizes are 10–50 cm2 for testing pads and
200–500 cm for the test of overall leadframes.
NOTE 3: The surface area of the frame is calculated from the leadframe drawing, and includes the top, bottom and side surfaces.
It is important that user and supplier agree on the surface area calculation for any given leadframe configuration.
This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline.
Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document
development) activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.
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9 Preparation of Standard — Solutions and Chromatograph Calibration
9.1 Standard Solutions
9.1.1 The single-ingredient standard solutions of each ion (Na +, NH4+, K+; C1−, No3-, Br-, SO42−, PO43−) are made by
dissolving 1.000 g of each ion into 1.000 liter of D.I. water, respectively. The stored multi-ingredient standard
solutions shown in Table 2 are then made form these single-ingredient standard solutions by the dilution method.
9.1.2 Cation and anion standard solutions for calibration are made by diluting the stored multi-ingredient standard
solutions as shown in Table 2.
Table 2 Concentration of Standard Solution for Calibration
Mixed Standard Solution (ug/ml)
Cation
Anion
Ion
Na+
NH4+
K+
Cl−
PO43−
Br−
NO3−
SO42−
Standard Solution for Calibration(ng/ml)
I
5
5
5
10
25
10
10
10
10
10
10
4
10
4
4
4
II
10
10
10
20
50
20
20
20
III
20
20
20
40
100
40
40
40
9.1.3 Store the multi-ingredient standard solution and the calibration solutions in the correct flasks and label with
the ion type and concentration.
NOTE 4: New standard solutions for calibration are required every 24 hours. Ensure that the flasks are cleaned with water before
refilling with a new solution.
9.2 Calibration
9.2.1 Set up the chromatograph and regenerate the columns according to the manufacturer’s instructions (ASTM D
4327 provides further details).
9.2.2 Run the eluent through the chromatograph until a stable baseline chromatograph is obtained.
9.2.3 Select the infection volume recommended by the manufacturer for each ion type and inject in to the
chromatograph. Record the chromatograph for each ion type (see Figure 1), and make the calibration curve for each
ion (ion concentration versus peak height or area).
NOTE 5: Peak height or area under the ion’s characteristic curve is proportional to the concentration.
10 Procedure — Bag Extraction Method
10.1 Preparation of Extraction Bags
10.1.1 Add 100 ml of DI water to the polypropylene/polyethylene double layered bag and seal them with the hot bar
bag sealer. The amount of air in the bags should be reduced as much as possible before sealing.
NOTE 6: Two bags are required for each test and must come from the same manufacturing lot.
10.1.2 Place the bags in the water bath at T > 95°C for 2 hours ± 5 minutes.
10.1.3 Allow the bags to reach room temperature but leave sealed until ready for use at which time open the bags
(use clean scissors for the bags) and rinse out five (5) times with DI water.
10.2 Extraction Process
10.2.1 Place the samples in the bags. Cover the frames with a known volume of water (e.g., 100 ml and then seal
the bags). Also, place a similar amount of water in an empty bag and seal.
This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline.
Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document
development) activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.
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NOTE 7: The amount of air in the bags should be reduced as much as possible before sealing. The bags that only contain water
provide the background contamination of the bag. Do not select the frames or remove them from their shipping container until
ready to test the surface contamination. The recommended volume of water is 10–30 ml for the testing die pads only and 100 ml
for testing complete leadframes. Lead frames should be bent after sealing so that the water is in contact with all surfaces.
10.2.2 Place the bags in the water bath at T > 95°C for 30 ± 2 minutes.
10.2.3 Remove the bags from the bath and allow to reach room temperature.
10.2.4 The lead frames, which are inside the sealed bags, are moved to one side of the bags without opening the
bags. Then the solution is separated from leadframes by sealing the mean portion of the bags without opening.
11 Procedure — Container Extraction Method
NOTE 8: The size of the containers to be used depends on the expected volume of water and the leadframes. The container must
be at least three-quarters filled with the water and leadframes.
11.1 Preparation of Extraction Vessels
11.1.1 Fill the containers with DI water and attach the caps. In order to reduce the amount of air in the vessel, fill
vessels to the amount of three-quarter.
NOTE 9: Two containers are required for each test and must come from the same manufacturing batch.
11.1.2 Place the containers in the water bath at T > 95°C for 2 hours ± 5 minutes.
11.1.3 Remove the containers from the bath and rinse out five (5) times with DI water.
11.2 Process
11.2.1 Place the samples in one of the containers cleaned per Section 11.1.1.
NOTE 10: Leadframes may be cut or rolled in order to ease loading to the container. Die pads may be tested separately, if desired,
by cutting from the leadframes.
11.2.1.1 Add the required volume of DI water and cap the container. Place a similar amount of water into the other
cleaned container and attach the cap.
NOTE 11: Do not select the frames or remove them from their shipping container until ready to test for the surface contamination.
Recommended volumes of water are 10–30 ml for testing die pads only and 100 ml for the entire leadframe — samples must be
covered by water.
11.2.2 Place the containers in the water bath at T > 95°C for 30 ± 2 minutes.
11.2.3 Remove the containers from the bath and allow to reach room temperature.
11.2.4 Remove the leadframes from the container and cap it again.
12 Measurements
12.1 Prepare the chromatograph for operation by regenerating the columns according to the manufacturer’s
recommendations.
12.2 Run the eluent through the chromatograph until a stable baseline calibration is established.
12.3 Inject the recommended sample size of test solution into the chromatograph and record the ion chromatogram.
12.4 Repeat for all the samples and also run the background sample.
NOTE 12: The time from extraction to insertion of sample is to be within eight hours.
12.5 Sample concentrations are determined from the calibration curves for each ion type.
12.6 The surface concentration of ionic contaminants for each ion type (SCIC) is given by the following equation:
SCIC (ng/cm2) =
(Sample conc. – Background conc.) Extraction Volume (mL)
Leadframe Surface Area (cm2)  No. of Leadframes
NOTE 13: Allowable concentration levels are to be agreed between the user and supplier.
This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline.
Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document
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Table 1 Sensitivity of Ion Chromatograph
Cation
Ion
Sensitivity (ng/ml)
Na+
0.2
0.5
1.0
0.3
2.0
1.0
1.0
1.0
NH4+
K+
Cl−
PO43−
BrNO3SO42-
Anion
Table 2 Concentration of Standard Solution for Calibration
Cation
Anion
Mixed Standard
Solution (ug/ml)
Standard Solution for
Calibration(ng/ml)
Ion
Na+
NH4+
K+
Cl−
PO43−
Br−
NO3−
SO42−
I
5
5
5
10
25
10
10
10
10
10
10
4
10
4
4
4
II
10
10
10
20
50
20
20
20
III
20
20
20
40
100
40
40
40
This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline.
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Cation
+
0
5
10
Retention Time (Min.)
Anion
2–
0
10
5
Retention Time (Min.)
Figure 1
Schematic of Ion Chromatograph
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