Background Statement for SEMI Draft Document #5425 Revision to SEMI D46-0706: Terminology for FPD Polarizing Films Notice: This background statement is not part of the balloted item. It is provided solely to assist the recipient in reaching an informed decision based on the rationale of the activity that preceded the creation of this Document. Notice: Recipients of this Document are invited to submit, with their comments, notification of any relevant patented technology or copyrighted items of which they are aware and to provide supporting documentation. In this context, “patented technology” is defined as technology for which a patent has issued or has been applied for. In the latter case, only publicly available information on the contents of the patent application is to be provided. Background Statement This document is a revision of SEMI D46-0706 – Terminology for FPD Polarizing Films. The first edition was publication in June, 2006. Due to the five years review, this revised version was prepared by the Polarizing Film Task Force under the FPD Materials and Components Committee. This revised version was approved as the draft for yellow ballot on April 27, 2012 in the FPD Materials and Components Committee Meeting. The revised sub-clauses and parts are as follows: 4. Referenced Standards and Documents Table 1. Types of Polarizer Table 2. Films and Layers Composing Polarizing Films Table 3. Type of Polarizing Film Table 4. Characteristic Table 5. Inspection/Defect Table 6. Optical Factor Figure 2. Schematic of Polarizing Film for OLED No 2. Absorbing Polarizer No 2. Retardation film No 6. Anti-Glare No 8. Anti-Reflection No 9. Adhesive No 14. Retardation film (Delete) No 1. Transmission-type Polarizing Film No 1. Polarization Efficiency No 2. Single Transmittance No 3. Cross Transmittance No 4. Parallel Transmittance No 6. Hue a*, b* No 9. Hardness No 11. Reflectance No 13. Adhesion (peeling strength) No 14. Adhesion (contact strength) No 15. Scratch Resistance No 19. Chemical Resistance No 3. Crossed Nicol Inspection No 4. Foreign Material No 5. Babble No 6. Scratch No 8. Mura No 9. Peeling No 10. Crack No 6. Polarizing Axis Responses to this letter ballot will be reviewed by the Polarizing Film Task Force and adjudicated by the Japan FPD Materials and Components Committee Meeting on Friday, November 2, 2012 at SEMI Japan office, Tokyo, Japan. Notice: Additions are indicated by underline and deletions are indicated by strikethrough. If you have any questions, please contact the Polarizing Film Task co-leaders: Youzou Akada (Nitto Denkou Corporation), yuuzou_akada@gg.nitto.co.jp or Yoshi Shibahara (Fujifilm Corporation), yoshihiko_shibahara@fujifilm.co.jp or Naoko Tejima, SEMI Japan Staff, ntejima@semi.org. Semiconductor Equipment and Materials International 3081 Zanker Road San Jose, CA 95134-2127 Phone: 408.943.6900, Fax: 408.943.7943 SEMI Draft Document #5425 Revision to SEMI D46-0706: Terminology for FPD Polarizing Films 1 Purpose 1.1 In this standard, definition and interpretation of each term provides material characteristics used for Flat Panel Display (FPD) manufacturing. This standard benefits unification of terminologies generally used for Polarizing Films of FPD manufacturing. 2 Scope 2.1 This standard is applicable for Polarizing Films of FPD manufacturing. It covers terminologies related to Polarizing Films of FPD manufacturing, used in the area of material, inspection, and measurement. NOTICE: SEMI Standards and Safety Guidelines do not purport to address all safety issues associated with their use. It is the responsibility of the users of the Documents to establish appropriate safety and health practices, and determine the applicability of regulatory or other limitations prior to use. 3 Limitations 3.1 The intention of this standard is providing terminologies for Polarizing Films of FPD manufacturing only. Hence, it does not cover any specific terminology used in a peculiar area (e.g., specialized terms based on personal subjectivity) or minor materials and details of those materials either for special and general purpose. 4 Referenced Standards and Documents 4.1 None. SEMI Standards SEMI D34 — Test Method for FPD Polarizing Films SEMI D50 — Test Method for Surface Hardness of FPD Polarizing Film SEMI D60 — Test Method of Surface Scratch Resistance for FPD Polarizing Film and Its Materials SEMI D67 — Test Methods for Antifouling Property and Chemical Resistance of FPD Polarizing Films and its Materials 4.2 ISO Standards 1 ISO 11664-1 (CIE S 014-1/E) — Colorimetry – Part 1: CIE Standard Colorimetric Observers ISO 11664-4 (CIE S 014-4/E) — Colorimetry – Part 4: CIE 1976 L*a*b* Colour Space 4.3 JIS Standard 2 JIS K5600 — Testing methods for paints JIS K7105 — Testing methods for optical properties of plastics JIS Z0237 — Testing methods of pressure-sensitive adhesive tapes and sheets NOTICE: Unless otherwise indicated, all documents cited shall be the latest published versions. 5 Terminology 5.1 Definitions and Interpretations 5.1.1 Types of polarizer (1–5) (see Table 1) 5.1.2 Films and layers composing polarizing films (1–14 13) (see Table 2) 5.1.3 Type of polarizing (1–3) (see Table 3) 5.1.4 Characteristic (1–18 19) (see Table 4) 1 International Organization for Standardization, ISO Central Secretariat, 1 rue de Varembé, Case postale 56, CH-1211 Geneva 20, Switzerland; Telephone: 41.22.749.01.11, Fax: 41.22.733.34.30, http://www.iso.ch 2 Japanese Industrial Standards; Available through the Japanese Standards Association, 1-24, Akasaka 4-Chome, Minato-ku, Tokyo 107-8440, Japan, Telephone: 81.3.3583.8005; Fax: 81.3.3586.2014, Website: www.jsa.or.jp This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline. Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited. Page 3 Doc. 5425 SEMI LETTER (YELLOW) BALLOT DRAFT Document Number: 5425 Date: 2/9/2016 Semiconductor Equipment and Materials International 3081 Zanker Road San Jose, CA 95134-2127 Phone: 408.943.6900, Fax: 408.943.7943 5.1.5 Inspection / Defect (1–8 10) (see Table 5) 5.1.6 Optical Factor (1–10) (see Table 6) Types of Polarizer No Term Definition Interpretation 1 Polarizer Generic term of optical devices which are PVA (Poly Vinyl Alcohol) is generally capable to generate polarized light from used for base films. natural light. 2 Absorbing Polarizer Polarizer which generate polarized light using polarized two-color absorption. It mainly functions as linear polarizer. Depending on the type of dicronic absorber, they include iodine type, dye type, etc. Polarizers made of PVA (Poly Vinyl Alcohol film) with iodine or dyes impregnated are generally used. 3 Iodine type Polarizer Polarizer using iodic complex as twocolor absorber. They are highly balanced in transmissivity, polarization degree, and achromatic property, and are currently mainstream of polarizers used for FPDs. 4 Dye type Polarizer Polarizer using dye as two-color absorber. As the dye itself has high durability, they are suitable for applications requiring higher durability such as in-car products. 5 Reflecting Polarizer Polarizer which generates polarized light using selective reflection. There are two types: linear polarization selectivity and circular polarization selectivity. They include polarizers using circular dichronism of cholesteric liquid crystal and polarizers using mismatching between birefringence and refraction factors of layers. They also include polarizers using selective reflection of linear polarization on inclined incident multi-layer thin films, which are broadly used with absorbing polarizers for improving light utilization efficiency. Especially, the latter ones are aboundingly used for projectors, etc. Films and Layers Composing Polarizing Films No Term Definition Interpretation 1 Retarder Optical device which gives phase shift to They are generally called /4 films or /2 polarized light depending on its optical films, and are the generic name of optical axis. devices which change polarizing conditions. 2 Retardation Film Birefringent film. Optical-anisotropic film As one with the polarizing film, makes that possesses either single or double possible black/white display and expands optical axis. the viewing angle of the LCD panel. 3 Compensation Film Name of the optical film used to improve Depending on the LCD panel design, the display characteristics of the LCD compensation film is selected and panel. combined with the polarizing film. 4 Wide Viewing Angle Film Film that widens LCD panel viewing angle. Generally acts as a visual angle compensating layer in the film that forms the polarizing film. 5 Protective Layer#1 Film used to protect the polarizer. TAC (Tri Acetyl Cellulose) is used the most as a base film. This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline. Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited. Page 4 Doc. 5425 SEMI LETTER (YELLOW) BALLOT DRAFT Document Number: 5425 Date: 2/9/2016 Semiconductor Equipment and Materials International 3081 Zanker Road San Jose, CA 95134-2127 Phone: 408.943.6900, Fax: 408.943.7943 Term Definition Interpretation 6 Anti-Glare Layer which reduce glare by forming Generally, particles such as silica are scattering layer on the surface of mixed in the UV hardening resin, forming protection layer. Treatment performed on unevenness on the surface. a film surface to reduce glare by forming micro-structure on its top surface layer to induce scattering. 7 Hard Coat Resin coated on the surface of protection Generally, there is AG (Anti-Glare layer in order to prevent damage to the abbreviation) hard coat and clear hard surface of the polarizing film. coat, and particles such as silica are mixed into AG hard coat. 8 Anti-Reflection Layer which reduces the light reflection In contrast to antiglare, which disperses by processing multilayer thin films on the light, anti-reflection has the function of surface of protection layer. Treatment decreasing reflected light. performed on a film surface to eliminate reflected light, for example, by coating of film having different refractive indexes. 9 Adhesive#1 Acts as an adhesion layer to attach the polarizing film to the LCD panel. Chemical compound which acts as an adhesion layer to attach the polarizing film to the FPD panel. An adhesive that can be peeled off afterwards. 10 Separator De-molded film adhered on adhesive layer of polarizing film, which is also called “Release Liner.” Generally, silicon-processed polyester film is used. 11 Reflector Optical device which symmetrically reflects light on the normal line. For the devices with high reflectivity, metal reflection or multi-layer reflection with dielectric materials is used. 12 Transflective Reflector Optical device which transmits one part of Layer which transmits light from the rear light and reflects the other part. side and reflects light from the front side. Effective for power saving by utilizing external light. 13 Polarization Conversion Film Film that utilizes polarized light, Makes it possible to increase the separation functionality to increase light, brightness of the LCD as seen from utilization efficiency. directly in front and diagonally. 14 Retardation Film Birefringent film. As one with the polarizing film, makes possible black/white display and expands the viewing angle of the LCD panel. #1 Basic Structure of Polarizer Protective Film Protective Layer Polarizer Protective Layer Adhesive Separator Type of Polarizing Film No Term Definition Interpretation 1 Transmission-type Polarizing Film Polarizer that uses transmitted light. Used for LCD panels which display using a backlight (see Figure 1). Used also for OLED panels. 2 Reflection-type Polarizing Film Used on the bottom of a eflection-type LCD panels that has a reflector adhered to the polarizing film. Polarizer that uses reflected light. This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline. Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited. Page 5 Doc. 5425 SEMI LETTER (YELLOW) BALLOT No DRAFT Document Number: 5425 Date: 2/9/2016 Semiconductor Equipment and Materials International 3081 Zanker Road San Jose, CA 95134-2127 Phone: 408.943.6900, Fax: 408.943.7943 Reflector is used on the bottom surface of transmission-type polarizing film to reflect incident light (see Figure 1). 3 Transflection-type Polarizing Film Polarizer with both transmission-type and Polarizer with an attached transflector, it reflection-type functions. is used as a bottom-side polarizer on a transflection-type LCD panel. Transflector is used on the bottom surface of transmission-type polarizing film to utilize backlight and reflected incident light (see Figure 1). Characteristic No Term Definition Interpretation (1) Value (Py) calculated from the following formula using Parallel Transmittance (T//) and Cross Transmittance (T┴). 1 Polarization Efficiency Refer to SEMI D34. 1) Measurement Method Measurement Equipment: Spectrophotometer Measurement Wavelength: 400~700nm T// T Py x 100 (%) (10 nm) T// T Light Source: standard illuminant C, 2° (2) Value calculated from the following range of view formula using transmittance TA (visibility 2) Ty, T┴, and T// can be calculated from corrected) on the absorption axis and the following formulas using the transmittance TB (visibility corrected) on polarizer’s transmittance TA (visibility the transmittance axis. corrected) on the absorption axis and transmittance TB (visibility corrected) on T TA the transmittance axis. Py B x 100 (%) TB TA Ty = (TA + TB)/2 T┴ = TA × TB Value (Ty) of Transmittance of 1 polarizing film, visibility corrected (JIS T// = (TA2 + TB2)/2 Z8701) (ISO 11664-1). 2 Single Transmittance 3 Cross Transmittance Value (T┴) of Transmittance of 2 polarizing films placed crossed Nicol, visually corrected (JIS Z8701) (ISO 11664-1). 4 Parallel Transmittance Value (T//) of Transmittance of 2 polarizing films placed parallel Nicol, visibility corrected (JIS Z8701) (ISO 11664-1). 5 Transmittance at 380 nm Value of transmittance of 1 polarizing film measured at 380 nm. Expresses Polarizer UV Cut Performance Measurement Equipment: Spectrophotometer Measurement Wavelength: 380 nm light Source: standard illuminant C, 2° range of view 6 Hue a*, b* Hue value measured in accordance with JIS Z 8729 ISO 11664-4. a*: (+side) Red, (-side) Green b*: (+side) Yellow, (-side) Blue In accordance with JISZ8701, a* and b* can also be Hue value is also expressed with a and b. This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline. Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited. Page 6 Doc. 5425 SEMI LETTER (YELLOW) BALLOT DRAFT Document Number: 5425 Date: 2/9/2016 Semiconductor Equipment and Materials International 3081 Zanker Road San Jose, CA 95134-2127 Phone: 408.943.6900, Fax: 408.943.7943 Term Definition Interpretation 7 Haze Value (H) expressed in the ratio below, using scattered transmittance (Td) and total transmittance (Tt) measured in accordance with JISK7105. H = Td/Tt × 100 (%) Expresses film’s degree of light scattering. The smaller the value, the weaker the scattering. 8 Specular Reflectance Ratio of the reflected rays that remains parallel to total reflected light rays for parallel incident rays. The smoother the surface, the larger the value of specular reflectance. 9 Hardness Film surface hardness measured in accordance with JIS K5400 SEMI D50, expressed in pencil hardness. The larger the value, the harder the surface. 10 Retardation Value When nx designates the refractive index of an optically anisotropic substance in the direction where refractive index is largest (the slow axis), ny is the refractive index in the direction where it is smallest (the fast axis), and d is thickness, Retardation value (R) is defined with the following formula. R = (nx - ny) × d (nm) Retardation value of thickness direction is expressed with Rth or Rt, which is defined with the following formulas. Rth = [(( nx + ny)/2)-nz] × d (nm) Rt = (nx - nz) × d (nm) 11 Reflectance Ratio of the regularly reflected part of the Usually expressed in visibility corrected (whole) reflected flux, to the incident reflectance. Standard illumination of C or flux. D65 is used. In a substance where refractive index differs (n1/n2), light is reflected at the boundary. The below formula defines the index which shows the degree of reflection. R = (n1 - n2)2 / (n1 + n2)2 × 100 (%) 12 Glossiness In accordance with JIS K7105, the ratio, expressed in percent, of 60° parallel incident rays, that reflect (mirror reflection light) in a −60° direction (normal reflection direction). 13 Adhesion (JIS Z0237 peeling strength) In accordance with JIS Z0237, the Exfoliating power at fixed width and at measured adhesive strength when peeling fixed speed, in 180° or 90° direction. the material from the substrate. 14 Adhesion (JIS K5600 contact strength) Value measured in accordance with JIS K5600-5-6 (cross-cut test). 15 Scratch Resistance Expresses how difficult it is to scratch the With steel wool, cloth, etc., graze the base object’s surface in accordance with SEMI plate surface at a fixed frequency with D60. constant weight and constant speed, and evaluate the scratch condition of the surface. 16 Heat Resistance Stability of the material’s optical characteristics and adhesive characteristics in regards to heat (e.g., 80°C × 500 hrs) 17 Humidity Resistance Stability of the material’s optical characteristics and adhesive characteristics in regards to humidity (e.g., 60°C / 90% RH × 500 hrs) 18 Image Definition The degree of clarity of the transmitted or The larger the value, the higher the reflected image. Stipulated in JIS K7105. definition. Numerical value that expresses the extent of the surface’s gloss. Extent of adhesion between material and coating film, or between coating films. Change in optical quality is shown in transmittance change, change in polarization, and change in hue, etc. Change of adhesion quality is displayed in the presence of peeling, foaming, wrinkles and cracks. If there are no changes, or the change is small, then the material is superior. This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline. Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited. Page 7 Doc. 5425 SEMI LETTER (YELLOW) BALLOT No DRAFT Document Number: 5425 Date: 2/9/2016 Semiconductor Equipment and Materials International 3081 Zanker Road San Jose, CA 95134-2127 Phone: 408.943.6900, Fax: 408.943.7943 19 Term Chemical Resistance Definition Resistance to chemical reagents determined in accordance with SEMI D67. Interpretation Chemical reagents may include acids, alkalis, solvents, alcohols, lubricants, cleaning agents, marker pens, foods, cosmetics or any material that may come in contact with the test material in potential end use environments and manufacturing processes. Inspection/Defect No Term Definition Interpretation 1 Reflection Inspection Polarizer appearance inspection method that utilizes reflected light. Method that uses fluorescent light on a blackboard to detect defects such as unevenness, scratches, etc. 2 Transmission Inspection Polarizer appearance inspection method that utilizes transmitted light. Method performed on a backlight to detect foreign material defects on the polarizer. 3 Cross Inspection Polarizer appearance inspection method using polarizeding light principles films place crossed Nicol. Method where by placing one reference polarizer on a backlight in perpendicular direction, luminescent defects can be detected. 4 Foreign Material Name for a polarizer defect that appears as foreign material or defect caused with foreign material. Allowable foreign material size is determined by LCD panel pixel size. Foreign material size is expressed; φ = (Long side + short side)/2. 5 Bubble Name for polarizer defect that appears as Allowable bubble size is determined by a bubble. Bubble-shape defect consisting LCD FPD panel pixel size. Bubble size is of a cavity in paste of a protective film or expressed; φ = (Long side + short side)/2. a polarizer. 6 Scratch Name for polarizer defect that appears as Because scars which occur on a polarizer a scratch. Scratch defects are caused by surface above the LCD FPD panel can scratching polarizer surface. easily become defects, hard-coated polarizer is often used. 7 Stain Name for polarizer defect that appears as As seen in polarizers that have been a stain. antiglare processed and acid-resist processed, but can have different names depending upon color and shape. 8 Uniformity Mura 9 Peeling 10 Crack Name for defect that appears as a spot has Optical unevenness that occurs when a an area larger than a pixel and unclear LCD FPD panel with a polarizer stuck to boundaries. it is illuminated. There is a tendency for unevenness to exist as LCD FPD panel brightness improves. Name of defect that appears as a Peeling often breaks out from the edge of detachment of adhesive layers of polarizing film. polarizer, polarizing film, protective layer or retardation film. Name of defect that appears as a thin line Crack often breaks out from the edge of on the surface of polarizer, polarizing the polarizing film. The acceptable range film, protective layer or retardation film. is determined with the length and with possible growth with time. This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline. Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited. Page 8 Doc. 5425 SEMI LETTER (YELLOW) BALLOT No DRAFT Document Number: 5425 Date: 2/9/2016 Semiconductor Equipment and Materials International 3081 Zanker Road San Jose, CA 95134-2127 Phone: 408.943.6900, Fax: 408.943.7943 Optical Factor No Term Definition Interpretation 1 Natural Light Light without deflection of oscillation directions. Generally, light immediately emitted from a light source. 2 Polarized Light Light with deflection of oscillation directions. Generally, light with deflection of oscillation directions by being passed through a polarizer. 3 Circular Polarized Light From the viewpoint of an observer who is Can be produced by combining a aligned with the traveling direction of polarizing film and quarter-wave light, the tip of the light wave (electric retardation film plate at a 45° angle. vector) travels in a circle. 4 Linear Polarized Light Light that is in the same plane as the light Can be produced by linear polarizing wave’s (electric vector) amplitude. film. 5 Elliptical Polarized Light From the viewpoint of an observer Can be produced by combining the who is aligned with the traveling direction polarizing film and the retardation plate. of light, the tip of the light wave (electric vector) travels in an ellipse. 6 Polarizing Axis The axis which lets through light waves of a certain direction alone, out of light waves coming vertically to polarizer. Synonymous with Transmission axis. Vertical to the direction the polarizer is stretched. Synonymous with Transmission axis. 7 Transmission Axis The axis which lets through light waves of a certain direction alone, out of light waves coming vertically to polarizer. Vertical to the direction the polarizer is stretched. Synonymous with Polarizing axis. 8 Absorption Axis The axis which blocks out light waves of Parallel to the direction in which the a certain direction alone, out of light polarizer is stretched. waves coming vertically to polarizer. 9 Anisotropy of Refractive Index Differs depending upon the direction where refractive index of light is measured. 10 Dichroic Ratio The ratio of absorption along two axes for Generally, substances with big dichroic a substance in which anisotropy is shown ratios display better polarizing polarizer to absorption of light. performance. One of the physical properties of retardation film. 6 Related Documents 6.1 JIS Standard3 JIS K5600 — Testing methods for paints JIS K7105 — Testing methods for optical properties of plastics JIS Z0237 — Testing methods of pressure-sensitive adhesive tapes and sheets JIS Z8701 — Color specification -- The CIE 1931 standard colorimetric system and the CIE 1964 supplementary standard colorimetric system JIS Z8729 — Color specification -- CIELAB and CIELUV color spaces 3 Japanese Industrial Standards; Available through the Japanese Standards Association, 1-24, Akasaka 4-Chome, Minato-ku, Tokyo 107-8440, Japan, Telephone: 81.3.3583.8005; Fax: 81.3.3586.2014, Website: www.jsa.or.jp This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline. Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited. Page 9 Doc. 5425 SEMI LETTER (YELLOW) BALLOT DRAFT Document Number: 5425 Date: 2/9/2016 Semiconductor Equipment and Materials International 3081 Zanker Road San Jose, CA 95134-2127 Phone: 408.943.6900, Fax: 408.943.7943 DRAFT Document Number: 5425 Date: 2/9/2016 LETTER (YELLOW) BALLOT Trance mission type LCD Anti-Glare and Anti-reflection layer Polarization film Retardation film LC CELL Retardation firm Polarization film Polarization enhancement film Reflector type LCD [Old Type] Polarization film LC CELL Polarization film Reflector [New Type] Polarization film Retardation film LC Cell Internal reflector layer Trance-reflective type LCD [Old Type] Polarization film LC CELL Polarization film Trance-reflector [New Type] Polarization film Retardation film LC Cell Retardation film Polarization film Polarization enhancement film Figure 1 Schematic of Polarizing Film This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline. Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited. Page 10 Doc. 5425 SEMI Semiconductor Equipment and Materials International 3081 Zanker Road San Jose, CA 95134-2127 Phone: 408.943.6900, Fax: 408.943.7943 Polarization film Retardation film OLED Figure 2 Schematic of Polarizing Film for OLED NOTICE: Semiconductor Equipment and Materials International (SEMI) makes no warranties or representations as to the suitability of the Standards and Safety Guidelines set forth herein for any particular application. The determination of the suitability of the Standard or Safety Guideline is solely the responsibility of the user. Users are cautioned to refer to manufacturer’s instructions, product labels, product data sheets, and other relevant literature, respecting any materials or equipment mentioned herein. Standards and Safety Guidelines are subject to change without notice. By publication of this Standard or Safety Guideline, SEMI takes no position respecting the validity of any patent rights or copyrights asserted in connection with any items mentioned in this Standard or Safety Guideline. Users of this Standard or Safety Guideline are expressly advised that determination of any such patent rights or copyrights, and the risk of infringement of such rights are entirely their own responsibility. This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline. Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited. Page 11 Doc. 5425 SEMI LETTER (YELLOW) BALLOT DRAFT Document Number: 5425 Date: 2/9/2016